CN104880814A - Object lens driving table - Google Patents
Object lens driving table Download PDFInfo
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- CN104880814A CN104880814A CN201510228930.7A CN201510228930A CN104880814A CN 104880814 A CN104880814 A CN 104880814A CN 201510228930 A CN201510228930 A CN 201510228930A CN 104880814 A CN104880814 A CN 104880814A
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- object lens
- moving part
- lens drive
- housing section
- drive table
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Abstract
The invention belongs to the field of micro driving application and relates to an object lens driving table and specifically to an object lens driving table using a hinge mechanism to magnify output displacement. The object lens driving table is used for fixing an object lens ring and comprises a hollow housing and an actuating member disposed on the housing. The hollow housing comprises a housing portion and a chamber passing through the housing portion. The hinge mechanism is arranged on the housing portion and comprises a moving portion and a moving platform connected with the moving portion. The actuating member is abutted against the moving portion. The object lens ring is arranged in the chamber and is fixed to the moving platform. According to the object lens driving table, the hollow housing is provided; the hinge mechanism is disposed on the housing; the object lens ring is disposed on the moving platform of the hinge mechanism; and the actuating member is abutted against the moving portion of the hinge mechanism. Thus, the hinge mechanism magnifies the motion transmitted by the micro displacement of the actuating member in a gapless and uncoupled manner so as to effectively increase a motion magnification factor and guarantee size compactness.
Description
Technical field
The invention belongs to micro-move device application, relate to a kind of object lens drive table, be particularly related to and utilize linkage output displacement to be carried out the object lens drive table of amplifying.
Background technology
At present, in biology, optical microscope always is that people explore the powerful of microworld, and people utilize it constantly to deepen cognition to microworld.The development of optical microscope plays key effect to human knowledge's biological phenomena.Along with the continuous progress of scientific and technological level, the application of optical microscope extends in expansion, is also constantly improving its image quality simultaneously.Along with the needs of social development, the demand that people observe micro-sample interior three-dimensional structure is increasing, and this just proposes high requirement to microscopical resolution.But, conventional optical microscope present the enlargement factor that sharpness depends on Liar completely, and the maximum amplification of current optical object lens can only reach 1600 times (sharpness of human eye resolution is about 1mm, is enlarged into example, minimum observation precision 0.625 micron with 1600 times).Obviously traditional optical microscope can not satisfy the demands at this.
But current existing objective lens device generally adopts motor to drive or hand adjustment, such device has that precision does not reach requirement, the response time is slow, volume is excessive and the shortcoming such as noise is large.
Summary of the invention
The object of this invention is to provide and a kind ofly improve motion amplification multiple and the object lens drive table of the compactedness of volume can be ensured.
To achieve these goals, the technical solution adopted in the present invention is as follows: a kind of object lens drive table, in order to fixing object glass collar, the actuated piece comprising hollow type housing and arrange on the housing, described hollow type housing comprises housing section and runs through the cavity of housing section formation from beginning to end, described housing section is provided with linkage, the motion platform that described linkage comprises moving part and is connected with described moving part, described actuated piece compresses described moving part, described object glass collar is positioned at described cavity, and is fixed on described motion platform.
Further, described linkage is be evenly distributed at least two in described housing section.
Further, described housing section comprises base portion, described linkage is fixed on described base portion by flexible hinge, and described linkage also comprises the servo-actuated portion be arranged in parallel with described moving part, and described motion platform connects described moving part and servo-actuated portion by flexible hinge.
Further, described servo-actuated portion, moving part, motion platform and base portion enclose formation parallelogram.
Further, described linkage is formed by the described housing section of cutting.
Further, described housing section staving ringwise.
Further, ball is provided with between described actuated piece and moving part.
Further, described moving part is provided with pretension jackscrew, described pretension jackscrew and actuated piece are oppositely arranged on the both sides of described ball.
Further, described actuated piece is provided with the wolfram steel sheet compressing described ball.
Further, described actuated piece is piezoelectric ceramics.
By such scheme, the present invention at least has the following advantages: object lens drive table of the present invention is by arranging hollow type housing, housing arranges linkage, and object glass collar is arranged on the motion platform of linkage, the actuated piece supported on the moving part of hinge arrangement is set, thus utilize linkage to carry out gapless, without being coupled the motion amplification of actuated piece micrometric displacement transmission, effectively to improve the compactedness of motion amplification multiple and guarantee volume.
Above-mentioned explanation is only the general introduction of technical solution of the present invention, in order to better understand technological means of the present invention, and can be implemented according to the content of instructions, coordinates accompanying drawing to be described in detail as follows below with preferred embodiment of the present invention.
Accompanying drawing explanation
Fig. 1 is the exploded view of object lens drive table of the present invention;
Fig. 2 is the side view of Fig. 1;
Fig. 3 is the right side view of Fig. 2;
Fig. 4 is the structural drawing of back shroud in Fig. 3;
Fig. 5 is the schematic diagram of hinge arrangement in Fig. 3.
Embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail.Following examples for illustration of the present invention, but are not used for limiting the scope of the invention.
See Fig. 1 to Fig. 4, a kind of object lens drive table described in a preferred embodiment of the present invention is in order to fixing microscopical object glass collar (not shown), and it comprises hollow type housing 1 and is arranged on piezoelectric ceramics 2 on described hollow type housing 1.Described hollow type housing 1 comprises housing section 11, head and the tail run through the cavity 12 that housing section 11 is formed and the hollow type end cap 13 be arranged in housing section 11, described housing section 11 comprise cutting this housing section 11 form base portion 14 and linkage 15, described linkage 15 comprises servo-actuated portion 151 and the moving part 152 of opposing parallel setting, and connect the motion platform 153 in moving part 152 and servo-actuated portion 151, one end and the base portion 14 in described servo-actuated portion 151 are connected through the hinge (non-label), the other end is attached via a hinge to one end of motion platform 153, one end of described moving part 152 is attached via a hinge to base portion 14, the other end is attached via a hinge to the other end of motion platform 153.In the present embodiment, described servo-actuated portion 151, moving part 152, motion platform 153 and base portion 14 enclose formation parallelogram, chain connection mode between described servo-actuated portion 151, moving part 152, motion platform 153 and base portion 14 is that flexible hinge connects, to make that this linkage 15 is compact, drive connection is clear and definite, without transmission idle running, and without friction.Really, in other embodiments, this linkage 15 can also be other four-bar linkages or other linkages 15 (as slide block mechanism etc.) after being out of shape by four-bar linkage, but the linkage 15 that the present embodiment adopts is optimum embodiment.Described hollow type housing 1 is in integral structure.In originally implementing, this linkage 15 is formed by cutting housing section 11, but in other embodiments, it can for being arranged on the parts in housing section 11, move steadily to make object glass collar, described linkage 15 is be evenly distributed at least two in described housing section 11, certainly, if it is also passable to arrange other quantity, it has sees actual demand, the object arranging two in the present embodiment is, on the basis reaching object glass collar stable movement, cost is minimum, manufacturing process is the easiest, in addition, also be planned according to housing section 11 structure, in originally implementing, described housing section 11 staving ringwise, large to realize rigidity, dynamic perfromance is good, in addition, bucket body structure is convenient to install, really, this housing section 11 also can become other shapes, as the equilateral triangle of symmetry, then now, hinge arrangement can be uniformly distributed into three, and for the ease of installing, the cavity 12 of its inside still can be arranged to circle.Described object glass collar is positioned at described cavity 12, and be fixed on described motion platform 153, it is positioned at the outside of moving part 152, object glass collar installation portion 16 is provided with in described housing section 11, described object glass collar installation portion 16 and motion platform 153 are connected to form one formula structure, and this object glass collar installation portion 16 and motion platform 153 are in inverted L shape structure.Described hollow type end cap 13 is arranged on housing section 11 away from moving part 152 and near the one end in servo-actuated portion 151.Described hollow type end cap 13 is in ring-like, and this hollow type end cap 13 is fixed in housing section 11 by securing member (not shown).
Described piezoelectric ceramics 2 is arranged in described housing section 11, and described piezoelectric ceramics 2 is pressed on described moving part 152, can realize object lens nanoscale location by linkage 153 by driving object glass collar 4 to move after piezoelectric ceramics 25 displacement equations.Except the present embodiment, other actuated pieces can also be adopted to replace piezoelectric ceramics 2, as push rod.But the present embodiment adopts the object of piezoelectric ceramics 2 to be: piezoelectric ceramics 2 utilizes the inverse piezoelectric effect of piezoelectric ceramics 2 to carry out work, only rely on the size of extra electric field just can realize driving, piezoelectric ceramics 2 overcomes mechanical type in the past, fluid pressure type, pneumatic type, the actuator inertia such as electromagnetic type are large, low-response, complex structure, the deficiencies such as poor reliability, there is volume little, compact conformation, mechanical rubs, gapless, resolution is high, response is fast, without heating, not by magnetic interference, can at low temperature, the advantage such as to use under vacuum environment, can be widely used in microposition technology, such as object lens precision positioning, large-stroke nanometer alignment system, the micro-nano impression of high precision, the field such as linear motor and microwave acoustics.
Described piezoelectric ceramics 2 is pressed on described ball 3, and described moving part 152 is provided with pretension jackscrew 4, and described pretension jackscrew 4 and piezoelectric ceramics 2 are oppositely arranged on the both sides of described ball 3.The two ends of described piezoelectric ceramics 2 are respectively arranged with wolfram steel sheet 5, this wolfram steel sheet 5 adopts Wear Characteristics of Epoxy Adhesive to be connected on piezoelectric ceramics 2, wherein the wolfram steel sheet 5 of one end is fixed on hollow type end cap 13 by clearance fit, thus piezoelectric ceramics 2 is accurately located in housing, in the present embodiment, hollow type end cap 13 offers the T-shaped draw-in groove 131 fixing described piezoelectric ceramics 2.On described piezoelectric ceramics 2, the wolfram steel sheet 5 of the other end compresses described ball 3; by wolfram steel sheet 5 being pressed on described ball 3; thus when making the end face out of plumb of moving part 152 and piezoelectric ceramics 2; also can ensure that piezoelectric ceramics 2 can not be subject to the power except vertical direction; protect piezoelectric ceramics 2 to a certain extent, decrease the loss of piezoelectric ceramics 2.Described piezoelectric ceramics 2 is connected with shielding line (not shown), described housing section 11 offers the perforate 111 of passing for described shielding line.In the present embodiment, described cavity 152 diameter being positioned at the housing section 11 of moving part 152 one end is less than cavity 12 diameter of the housing section 11 being positioned at one end, servo-actuated portion 151, in addition, the thickness of described moving part 152 is greater than the thickness in servo-actuated portion 151, the described piezoelectric ceramics 2 of storage is formed in described housing section 11, ball 3, the reception hole 112 of pretension jackscrew 4 and wolfram steel sheet 5, described reception hole 112 is through servo-actuated portion 151, not through moving part 152, in originally implementing, owing to being provided with two linkages 15, so, corresponding piezoelectric ceramics 2 also needs to arrange two, corresponding described reception hole 112 is also provided with two, the front end of these two reception holes 112 is connected by deep-slotted chip breaker 113, described deep-slotted chip breaker 113 is opened in the front end of described housing section 11.
The mounting means of above-mentioned piezoelectric ceramics 2 is as follows: ball 3 embeds pretension jackscrew 4 by interference fit; the piezoelectric ceramics 2 being stained with wolfram steel sheet 5 contacts by some face be connected (i.e. motion higher pair) with the pretension jackscrew 4 being embedded with ball 3; even if when its benefit is the end face out of plumb of moving part 152 and piezoelectric ceramics 2; also can ensure that piezoelectric ceramics 2 can not be subject to the power except vertical direction; the piezoelectric ceramics 2 protected to a certain extent, decreases the loss of piezoelectric ceramics 2.It should be noted that at this, after screw-in threaded hole, inherently there is certain thread pitch due to pretension jackscrew 4 and loosening causes piezoelectric ceramics 2 cannot pretension, in the present embodiment, the fine thread that have employed on the one hand M4*0.35 is to eliminate gap and to be reached the object of fine setting by pretension jackscrew 4; On the other hand use two pretension jackscrews 4, make the object that the Impact direction of two pretension jackscrews 4 reaches locking on the contrary, concrete when implementing by regulating the degree of tightness that presses closer 7 in advance to provide enough pretightning forces for described piezoelectric ceramics 2.After installing piezoelectric ceramics 2 and regulating pretightning force, hollow type end cap 13 is sticked in housing section 11, reach the object of protection piezoelectric ceramics 2.
Incorporated by reference to Fig. 5, the principle of work of above-mentioned object lens drive table is as follows: in Fig. 5, C, D point is respectively the pin joint in motion platform 153 and moving part 152 and servo-actuated portion 151, A, E are the pin joint of moving part 152, servo-actuated portion 151 and base portion 14, the power F that B point produces for piezoelectric ceramics 2 is to the thrust point (i.e. ball 3 position) of moving part 152, when piezoelectric ceramics 2 inputs a thin tail sheep Sx at X to (transverse direction), namely obtain a larger displacement output X at motion platform 153, its ratio is C=X/Sx (displacement exports ratio).By finding out this linkage 15 in Fig. 5 at output X to the coupling displacement that there is a Z-direction during displacement, known when displacement output is in hundreds of micron level by theory calculate, the coupling displacement of Z-direction be X to per mille, can disregard by crocodile.From lever principle, the theoretical times magnification numerical value of this type of linkage 15 is C=AC/AB, and namely by regulating the position of B point to make enlargement factor under most compact structure condition reach an optimal value, the optimum value of C is 7 to 14.But C value can be less than optimal value in actual use, be produce because flexible hinge has certain elastic reaction on the one hand, the output displacement of this linkage 15 is reduced accordingly; On the other hand flexible hinge is the displacement because the elastic deformation of material produces, so some energy is by material absorption itself in deformation process, piezoelectric ceramics 2 can be made to be subject to larger load, and the drive displacement making it provide also has reduction simultaneously.The present invention is owing to being set directly in housing section 11 by piezoelectric ceramics 2, piezoelectric ceramics 2 is except basic machine four perisporium shell, there is no unnecessary structural elements, its structure visible is closely, and when physical dimension is limited, when piezoelectric ceramics 2 is determined, this structure can obtain larger displacement and export ratio.Due to above-mentioned principle of work, when using object lens drive table, drive piezoelectric ceramics 2 actuating to realize the micro objective Precision Linear Moving be arranged on object glass collar by the mode applying voltage drive, realize the motion of micro objective micron order.
In the present embodiment, because linkage 15 adopts flexible hinge, small displacement is produced by the elastic deformation of material.Under normal circumstances, elastic modulus E and its yieldlimitσs of the elastic deformation of material and power output and material are directly proportional, in order to increase the range of movement of flexible hinge, to a certain extent, the elastic modulus E of selected flexible hinge material and yieldlimitσs are larger better, must meet following requirement simultaneously: 1. the restoring force during maximum distortion of flexible hinge is less than the maximum driving force of piezoelectric ceramics 2; 2. maximum stress during flexible hinge maximum distortion is less than the permissible stress of material.Comprehensive above factor, beryllium-bronze, titanium alloy, spring steel and ultralumin are relatively good in distortion, but titanium alloy is general all costly, little employing beryllium-bronze is toxic material, can bring a lot of inconvenience to use, the density of spring steel is too large, therefore in the present embodiment, material therefor is ultralumin.Other part material therefor is: piezoelectric ceramics 2 uses lead zirconate titanate (PZT), pretension jackscrew 4 and ornamental shutoff all use common iron Q235 and carry out blackening process.Wolfram steel sheet 5 adopts wolfram steel (wimet), has that hardness is high, wear-resisting, intensity and an a series of premium properties such as toughness is better, heat-resisting, corrosion-resistant.
In sum, above-mentioned object lens drive table is by arranging hollow type housing 1, hollow type housing 1 arranges linkage 15, and object glass collar is arranged on the motion platform 153 of linkage 15, arrange and support the actuated piece 2 on moving part 152, thus utilize linkage 15 to carry out gapless, without being coupled the motion amplification of actuated piece 2 micrometric displacement transmission, effectively to improve the compactedness of motion amplification multiple and guarantee volume.Realize nanoscale location, hinge structure, it can solve current objective lens device and generally adopt motor to drive or hand adjustment, and positioning precision does not reach requirement, the response time is slow, volume is excessive and the problem that noise is large.
In addition, adopt piezoelectric ceramics in conjunction with actuated piece 2 again, thus rely on the voltage drive of piezoelectric ceramics 2 driving power, realize the miniature displacement of motion platform 153, to realize the nanoscale location of micro objective.Above-mentioned hollow type housing 1 is in integral structure, namely form through processes such as numerical control mill, brill and Linear cut the entirety self be connected by block of metal, to make compact conformation, and when physical dimension is limited and piezoelectric ceramics 2 is determined, this structure can obtain larger displacement and export ratio, and the impact of the constraint such as the idle running avoided in transmission and friction on its precision.
The above is only the preferred embodiment of the present invention; be not limited to the present invention; should be understood that; for those skilled in the art; under the prerequisite not departing from the technology of the present invention principle; can also make some improvement and modification, these improve and modification also should be considered as protection scope of the present invention.
Claims (10)
1. an object lens drive table, in order to fixing object glass collar, it is characterized in that: the actuated piece comprising hollow type housing and arrange on the housing, described hollow type housing comprises housing section and runs through the cavity of housing section formation from beginning to end, described housing section is provided with linkage, the motion platform that described linkage comprises moving part and is connected with described moving part, described actuated piece compresses described moving part, described object glass collar is positioned at described cavity, and is fixed on described motion platform.
2. object lens drive table according to claim 1, is characterized in that: described linkage is be evenly distributed at least two in described housing section.
3. object lens drive table according to claim 1, it is characterized in that: described housing section comprises base portion, described linkage is fixed on described base portion by flexible hinge, described linkage also comprises the servo-actuated portion be arranged in parallel with described moving part, and described motion platform connects described moving part and servo-actuated portion by flexible hinge.
4. object lens drive table according to claim 3, is characterized in that: described servo-actuated portion, moving part, motion platform and base portion enclose formation parallelogram.
5. object lens drive table according to claim 3, is characterized in that: described linkage is formed by the described housing section of cutting.
6. object lens drive table according to claim 1, is characterized in that: described housing section staving ringwise.
7. the object lens drive table according to any one in claim 1 to 6, is characterized in that: be provided with ball between described actuated piece and moving part.
8. object lens drive table according to claim 7, is characterized in that: described moving part is provided with pretension jackscrew, described pretension jackscrew and actuated piece are oppositely arranged on the both sides of described ball.
9. object lens drive table according to claim 8, is characterized in that: described actuated piece is provided with the wolfram steel sheet compressing described ball.
10. object lens drive table according to claim 1, is characterized in that: described actuated piece is piezoelectric ceramics.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510228930.7A CN104880814A (en) | 2015-05-07 | 2015-05-07 | Object lens driving table |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510228930.7A CN104880814A (en) | 2015-05-07 | 2015-05-07 | Object lens driving table |
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| CN104880814A true CN104880814A (en) | 2015-09-02 |
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| CN201510228930.7A Pending CN104880814A (en) | 2015-05-07 | 2015-05-07 | Object lens driving table |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105537980A (en) * | 2015-12-16 | 2016-05-04 | 哈尔滨工业大学 | High-precision flexible redundant platform |
| CN108444915A (en) * | 2018-03-20 | 2018-08-24 | 山东大学苏州研究院 | A kind of the single-degree-of-freedom optical detecting platform and application method of Piezoelectric Driving |
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| EP1418455B1 (en) * | 2001-07-26 | 2007-10-03 | Japan Science and Technology Agency | Vertical fine movement mechanism of microscope |
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