CN205942056U - Become camber reflecting mirror device - Google Patents
Become camber reflecting mirror device Download PDFInfo
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- CN205942056U CN205942056U CN201620801855.9U CN201620801855U CN205942056U CN 205942056 U CN205942056 U CN 205942056U CN 201620801855 U CN201620801855 U CN 201620801855U CN 205942056 U CN205942056 U CN 205942056U
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- speculum
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- curvature
- compressed air
- mirror
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Abstract
The utility model relates to a become camber reflecting mirror device, including reflector component and pneumatic drive assembly, reflector component includes the speculum body and supports the chassis, be provided with the air cavity between speculum body and the support chassis, be provided with compressed air inlet port, exhaust hole and pressure sensor thieff hatch on the support chassis, pneumatic drive assembly includes air compressor, pressure sensor, proportional valve, ooff valve and industrial computer, air compressor is used for providing compressed air for reflector component's air cavity, pressure sensor is used for monitoring the air pressure in the air cavity, the industrial computer is used for the drive atmospheric pressure of pilot -gas intracavity, the ooff valve is used for controlling opening or closing of compressed air inlet port, the proportional valve is used for controlling compressed air's air input. The utility model discloses the shape of face that also can obtain the high accuracy when realizing the curvature change keeps the effect, makes change camber speculum technique use and zooms the formation of image to the higher visible light wave band of shape of face precision hold request.
Description
Technical field
The utility model is related to a kind of curvature mirrors device.
Background technology
As a kind of powered optical element, the blank of curvature mirrors can be traced back to Jerusalem in 1973 earliest and be wished
The print that Bai Lai university develops.Henceforth, the former Soviet Union, Germany, the U.S., the scientific research personnel of the every country such as French and Chinese
All substantial amounts of research and the development work of prototype plant are carried out around curvature mirrors technology.
Since concept and initial antetype device propose, curvature mirrors are mainly used in lifting high-energy solid laser
The output beam quality of device.High power during High Energy Solid-state Lasers work can produce high temperature in resonator, thus
Make resonator window glass occur thermal deformation to introduce spherical aberration and out of focus, and then deteriorate the quality of output beam.Variable curvature reflects
Mirror the spherical aberration that thermal lensing effect is caused and out of focus can carry out effective compensation, thus reaching by the change radius of curvature of itself
The purpose of improving laser device beam quality.Research in recent years shows, it is a kind of new that curvature mirrors can also be used to realization
Varifocal imaging technology movement-less part zoom.Traditional zoom technology, either mechanical compensation formula or optical compensation formula
It is dependent on the relative motion between eyeglass or microscope group, limit it to a certain extent to space, power consumption and stability etc.
Aspect requires the application in harsh field.The change of curvature mirrors radius of curvature is corresponding to the change of focal power, and office
The minor variations of portion's component power then can be enlarged into system focal significantly by optical lever effect optical design
Change, thus realizing varifocal imaging on the premise of being independent of macroscopic motion part.
Where no matter it is applied to, big center deformation keeps being that curvature mirrors are proposed with the surface figure accuracy in deformation
2 points of basic demands.For High Energy Solid-state Lasers, because its operation wavelength is longer, so to the face shape essence after deformation
The requirement of degree is relatively low.However, for the application of movement-less part varifocal imaging especially visible light wave range, to reflection
The requirement of the surface figure accuracy after mirror deformation greatly improves, and the structure of speculum and type of drive have together decided on center deformation
Surface figure accuracy after size and deformation keeps situation.
Theoretical according to thin plate elastic, the speculum of uniform thickness will realize the change of radius of curvature, and simplest mode is exactly single
Point directly acts on (this region equivalent radius is much smaller than speculum radius) on the region of the limited size of mirror center.But this
Plant type of drive and can neither produce spherical deformation within the scope of completely reflecting mirror bore, also cannot produce parabolic facial disfigurement, and drive
Power is bigger, changes with the preferable face shape required by Curvature varying and differs more remote, is therefore rarely employed in practice.In fact,
Theoretical also according to thin plate elastic, using thrust ring support ring two ring structure to the curvature applying purely moment of torsion in mirror edge
Variation model carries out equivalent, will greatly eliminate the drawbacks of drive a Curvature varying model to exist.Although the area outside thrust ring
Domain because the impact of shear stress can be superimposed other faces shape pattern thus deviateing standard sphere or parabola, but thrust ring it
Curvature varying purely can be realized in interior region.
Sandia National Laboratory of the U.S., as the leader of this area research current, exactly utilizes this annular linear load
Drive mechanism realizes the Curvature varying of speculum.Including the seminar that the utility model applicant is located, Chinese is multiple
Scientific research institution's development of prototype plant of all having imitated similar mechanism to carry out, studies have shown that：Uniform thickness speculum is in toroid
Enable the change of curvature under the driving of load, but the surface figure accuracy but being difficult to realize during large deformation keeps, and this feelings
Condition highlights all the more in the case that aperture of a mirror and radius-thickness ratio are larger.Trace it to its cause have following some：
(1) annular linear load drives and still belongs to the driving of direct contact type power, necessarily causes stress on the surface of speculum
Accumulation, and the distribution of the compressive stress that zones of different produces is uneven.Root is it was found that the region of stress more concentration is located at and pushes away
The minute surface effective coverage that purely Curvature varying can be produced of power ring cover, now because the thickness distribution of speculum is invariable
Differential response cannot be made to stress distribution heterogeneous, thus moving back rapidly of surface figure accuracy can be led to when deformation is larger
Change.When aperture of a mirror and radius-thickness ratio are larger or when driving force increases to obtain bigger center deformation, speculum table
The accumulation of face stress will form serious obstruction to the holding of surface figure accuracy.
(2) edge of annular linear load Curvature varying model needs speculum is in simply-supported state, and simplest realization
The method of freely-supported be exactly make separate between speculum and supporting construction, thus allowing speculum radially from by stretching.So
And, this mode requires the central shaft of speculum, driver element and lens barrel highly conllinear, otherwise when mirror curvature changes,
Gap will be produced, the planar side that collinearly can not make speculum edge and central axis between three axles between speculum and lens barrel
To slip, thus introducing asymmetrical driving, and then destroy the surface figure accuracy of speculum.Additionally, in the event of lateral sliding, just
Mean that speculum also suffers from the extruding from lens barrel structure at some positions, can more deteriorate the face shape essence of speculum
Degree.
Content of the invention
The reflecting mirror surface shape realizing the presence of mirror curvature variation model is driven to protect in order to solve existing annular linear load
Hold the technical problem of low precision, the utility model provides a kind of curvature mirrors device of pneumatic actuation gradient thickness.
Technical solution of the present utility model is：A kind of curvature mirrors device, it is characterized in that：Including anti-
Penetrate mirror assembly and pneumatic drive component；
Described mirror assembly includes speculum body and support chassis；Set between described speculum body and support chassis
It is equipped with air cavity；Compressed air air admission hole, steam vent and pressure sensor thieff hatch are provided with described support chassis；
Described pneumatic actuation assembly includes air compressor, pressure sensor, proportioning valve, switch valve and industrial computer；Air
The air cavity that compressor is used for as mirror assembly provides compressed air；Pressure sensor is used for monitoring the air pressure in air cavity；
Industrial computer is used for controlling the driving air pressure in air cavity；Switch valve is used for controlling being turned on and off of compressed air air admission hole；Ratio
Valve is used for controlling the air inflow of compressed air.
Above-mentioned speculum body includes the thin progressive thickness speculum of center thick rim.
The thickness distribution equation of above-mentioned progressive thickness speculum is y=t0·[1-k·(2r/D)m]n；Wherein, t0It is reflection
The center thickness of mirror, r is the polar coordinates radius of speculum sphere, and D is aperture of a mirror, and k, m and n are for controlling speculum
The constant of thickness distribution form.
Above-mentioned speculum body also includes annular support wall and annular hollow pedestal；Described annular support wall is in gradual change
Thin wall cylinder-shaped structure between thickness speculum and annular hollow pedestal；Described annular hollow base bottom and described support bottom
Disk bonding.
Above-mentioned pneumatic actuation assembly also includes the air purifier between air compressor and mirror assembly.
The pressure control accuracy of above-mentioned pneumatic actuation assembly is 0.001MPa.
Above-mentioned speculum body is processed by integrated molding by metal material and is obtained.
The working surface of above-mentioned speculum body is optical mirror plane, and remaining exposed face of speculum body is ground to sub-micron
Precision；The inner surface of described air cavity reaches fine grinding quasi- polishing level.
The beneficial effects of the utility model are：
(1) the utility model be for annular linear load drive realize mirror curvature variation model presence problem and carry
The corrective measure going out, realizes also being obtained in that while Curvature varying that high-precision face shape keeps effect, makes curvature mirrors
Technology not only can be preferably applied for the compensation of out of focus that High Energy Solid-state Lasers cause and spherical aberration because of thermal lensing effect, and
And may apply to surface figure accuracy is kept requiring higher visible light wave range varifocal imaging.
(2) edge of the speculum in the utility model is very thin, thus good elasticity meet required near during deformation
Like no restrained condition.When speculum thickness is gradually reduced to edge and according to specific from conventional uniform thickness distribution Bian Weiyou center
After the form of function distribution, now uniformly air pressure drives brought concentration compression region to transfer to from minute surface effective coverage
Ultra-thin endless metal support wall in speculum body, thus reduce speculum working surface surface figure accuracy degenerate and center
The correlation of deformation.Therefore, the utility model passes through to solve annular linear load driving Curvature varying model basis of problems
On, it is truly realized and takes into account the purpose that big center deformation is kept with high-precision face shape, have and be applied to visible light wave range in fact
The possibility of existing movement-less part varifocal imaging.
(3), in the mirror assembly that the utility model is used, three parts constituting speculum body are by mirror base
Integrated molding processing and formed an entirety, so speculum can keep the steady of its locus during Curvature varying
Fixed, thus eliminating the possibility of lateral sliding.
(4) pneumatic actuation provided by the utility model is connecing with reference to the Curvature varying model of progressive thickness mirror design
Curvature varying purely can be realized in closely unified scope.
Brief description
Fig. 1 loads for annular line contact and drives Curvature varying mechanism schematic diagram；
The structural framing schematic diagram of the curvature mirrors device that Fig. 2 is given for the utility model；
Fig. 3 for the utility model be given mirror assembly structural representation；
Fig. 4 is the speculum thickness distribution curve under special parameter；
Fig. 5 for the utility model be given mirror assembly stress distribution situation schematic diagram；
Fig. 6 corresponding stress distribution situation schematic diagram when driving through annular linear load for uniform thickness speculum.
Specific embodiment
U.S.'s paper " Appl.Phys.B 82,275 281 (2006) ", Chinese patent CN201010108376.6 and China
Paper " optical precision engineering, 18 (8)：1781-1787,2010 " the curvature mirrors device disclosed in is all using as schemed
The two ring structure driving models including thrust ring 1 and support ring 2 composition based on annular linear load drive mechanism shown in 1.
The utility model is that speculum is within unified scope by driving the annular linear load of replacement to drive using pneumatic uniform pressure
The Curvature varying purely of large scale not only can be realized, and can remain that surface figure accuracy is in higher level.
Referring to Fig. 2, the curvature mirrors device that the utility model is given is by mirror assembly 3 and pneumatic actuation group
4 two part compositions of part.Wherein, pneumatic actuation assembly 4 includes air compressor 41, pressure sensor 42, proportioning valve 43, opens
Close valve 44 and 45 5 parts of industrial computer.Air compressor 41 is used for producing the compressed air driving speculum deformation；Switch
The effect of valve 44 is the air cavity controlling compressed air whether to be allowed to enter mirror assembly；Proportioning valve 43 is used for realizing high accuracy
Compressed air air inflow control；The air pressure of pressure sensor 42 real-time monitoring mirror assembly air cavity；Industrial computer 45 connects
Receive the signal of switch valve 44 and proportioning valve 43, in order to set required driving air pressure.By pressure sensor 42, pneumatic actuation assembly
Form a closed loop feedback, the stable gas pressure making mirror assembly air cavity is in setting value.In addition, air compressor 41 and speculum
Air purifier 46 can also be set between assembly 3.
Referring to Fig. 3, the mirror assembly 3 of the utility model preferred embodiment is by the speculum body with supporting construction
With the support meanss composition processing through loss of weight, two parts adopt identical metal material, by technique for sticking formation one
Carry pneumatic entirety.Mirror assembly 3 is kept flat, then speculum body just can be divided into three regions from top to bottom,
I.e. ultra-thin mirror 31, thin-wall metal support ring 32 and annular hollow pedestal 33.The integration of mirror base is passed through in these three regions
Processing and forming forms an entirety.Wherein, one end of metal supporting rings 32 is connected with speculum 31 edge, other end with annular
Hollow base 33 is connected, and annular hollow pedestal 33 is bonding with support chassis 34；The internal diameter of metal supporting rings 32 and annular hollow
Pedestal 33 internal diameter is identical, and external diameter is then identical with speculum 31 bore；The wall thickness of annular hollow pedestal 33 is much larger than metal and supports
The wall thickness of ring 32, so rigidity is the strongest.The external diameter of support chassis 34 is identical with the external diameter of annular hollow pedestal 33, and in surrounding
In 90 ° of function holes that three diameter 6mms are distributed with, respectively compressed air air admission hole, safing steam vent and pressure
Thieff hatch needed for force snesor.The all of part of mirror assembly all using same metal material, except speculum work
Surface reaches outside optical mirror plane requirement, and remaining exposed surface reaches sub-micrometer precision by grinding, and the inner surface of air cavity is then
Need to reach close to fine grinding quasi- polishing level to ensure pneumatic uniformity.
The curvature mirrors device that the utility model is proposed drives curvature mirrors with common annular linear load
The difference that device compares maximum is at 2 points：
First, the distribution that the thickness distribution of speculum is gradually reduced to edge from uniform thickness constant distribution Bian Weiyou center,
To have variable rigidity corresponding to speculum it is meant that mirror center region has higher resistance to compression compared with fringe region
Deformability, is conducive to keeping surface figure accuracy.Fig. 4 gives the contrast feelings of speculum thickness distribution curve under several groups of canonical parameters
Condition, wherein center thickness are 8mm, and aperture of a mirror is 135mm, and curve a corresponding (k, m, n) is (0.8,2,0.33), bent
Line b corresponding (k, m, n) is (0.85,2.2,0.35), and curve c corresponding (k, m, n) is (0.78,1.8,0.3).Aobvious and easy
See no matter selected what kind of parameter, the thickness change of speculum all follows such a rule, and Ji You center is to edge thickness
Reduction speed is gradually increased.Although the edge thickness of speculum can be set as that zero makes it meet preferable freely-supported bar in theory
Part, but due to not having realizability physically, so mirror edge during practical application still has can pass through
The very little thickness value that existing process obtains.Additionally, being analyzed by Holistic modeling and optimization design, can manually change anti-
Penetrate the thickness change speed of mirror central area and fringe region, thus realizing the control of anti-pressure ability.
Second, compared with pneumatic actuation is driven with annular linear load, pressure uniformly puts on the back of whole speculum, right
The impact of speculum is smaller, and makes the compression that minute surface effective coverage produces relatively low, so being also beneficial to the guarantor of surface figure accuracy
Hold.Fig. 5 and Fig. 6 gives the thickening mirror structure of pneumatic actuation and drives uniform thickness mirror structure compression feelings with annular linear load
The finite element analysis of condition.Can see, although being both capable of the change of curvature, pneumatic actuation combines thickening speculum
Design has transferred to high stress concentrations region on super thin metal supporting walls, and heavily stressed point in annular linear load driving model
Cloth region just at effective working region of minute surface, it is indicated above that pneumatic actuation have with reference to thickening mirror design and
Turn round and look at the potentiality that big center deformation and high-precision surface shape keep, have and be applied to visible light wave range and realize movement-less part zoom
The possibility of picture.
Claims (8)
1. a kind of curvature mirrors device it is characterised in that：Including mirror assembly and pneumatic drive component；
Described mirror assembly includes speculum body and support chassis；It is provided between described speculum body and support chassis
Air cavity；Compressed air air admission hole, steam vent and pressure sensor thieff hatch are provided with described support chassis；
Described pneumatic actuation assembly includes air compressor, pressure sensor, proportioning valve, switch valve and industrial computer；Air compresses
The air cavity that machine is used for as mirror assembly provides compressed air；Pressure sensor is used for monitoring the air pressure in air cavity；Industry control
Machine is used for controlling the driving air pressure in air cavity；Switch valve is used for controlling being turned on and off of compressed air air admission hole；Proportioning valve is used
In the air inflow controlling compressed air.
2. curvature mirrors device according to claim 1 it is characterised in that：It is thick that described speculum body includes center
The progressive thickness speculum of thin edge.
3. curvature mirrors device according to claim 2 it is characterised in that：The thickness of described progressive thickness speculum
Distribution equation is y=t0·[1-k·(2r/D)m]n；Wherein, t0It is the center thickness of speculum, r is that the pole of speculum sphere is sat
Mark radius, D is aperture of a mirror, and k, m and n are the constants for controlling speculum thickness distribution form.
4. the curvature mirrors device according to Claims 2 or 3 it is characterised in that：Described speculum body also includes
Annular support wall and annular hollow pedestal；Described annular support wall is between progressive thickness speculum and annular hollow pedestal
Thin wall cylinder-shaped structure；Described annular hollow base bottom is bonding with described support chassis.
5. curvature mirrors device according to claim 2 it is characterised in that：Described pneumatic actuation assembly also includes position
Air purifier between air compressor and mirror assembly.
6. curvature mirrors device according to claim 5 it is characterised in that：The pressure control of described pneumatic actuation assembly
Precision processed is 0.001MPa.
7. curvature mirrors device according to claim 4 it is characterised in that：Described speculum body is by metal material
Processed by integrated molding and obtain.
8. curvature mirrors device according to claim 7 it is characterised in that：The working surface of described speculum body
For optical mirror plane, remaining exposed face of speculum body is ground to sub-micrometer precision；It is accurate that the inner surface of described air cavity reaches fine grinding
Polishing level.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620801855.9U CN205942056U (en) | 2016-07-27 | 2016-07-27 | Become camber reflecting mirror device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620801855.9U CN205942056U (en) | 2016-07-27 | 2016-07-27 | Become camber reflecting mirror device |
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| Publication Number | Publication Date |
|---|---|
| CN205942056U true CN205942056U (en) | 2017-02-08 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620801855.9U Withdrawn - After Issue CN205942056U (en) | 2016-07-27 | 2016-07-27 | Become camber reflecting mirror device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106094161A (en) * | 2016-07-27 | 2016-11-09 | 中国科学院西安光学精密机械研究所 | A kind of curvature mirrors device |
-
2016
- 2016-07-27 CN CN201620801855.9U patent/CN205942056U/en not_active Withdrawn - After Issue
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106094161A (en) * | 2016-07-27 | 2016-11-09 | 中国科学院西安光学精密机械研究所 | A kind of curvature mirrors device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20170208 Effective date of abandoning: 20190806 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20170208 Effective date of abandoning: 20190806 |