CN110244452A - A kind of liquid medium super lens of anaberration - Google Patents
A kind of liquid medium super lens of anaberration Download PDFInfo
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- CN110244452A CN110244452A CN201910450412.8A CN201910450412A CN110244452A CN 110244452 A CN110244452 A CN 110244452A CN 201910450412 A CN201910450412 A CN 201910450412A CN 110244452 A CN110244452 A CN 110244452A
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 23
- 229920000642 polymer Polymers 0.000 claims abstract description 22
- 239000000758 substrate Substances 0.000 claims abstract description 22
- 239000010410 layer Substances 0.000 claims description 97
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
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- 229910021389 graphene Inorganic materials 0.000 claims description 2
- 150000004767 nitrides Chemical class 0.000 claims description 2
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- VIKNJXKGJWUCNN-XGXHKTLJSA-N norethisterone Chemical group O=C1CC[C@@H]2[C@H]3CC[C@](C)([C@](CC4)(O)C#C)[C@@H]4[C@@H]3CCC2=C1 VIKNJXKGJWUCNN-XGXHKTLJSA-N 0.000 claims 1
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- 230000003287 optical effect Effects 0.000 abstract description 8
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/002—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
- G02B26/005—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid based on electrowetting
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/12—Fluid-filled or evacuated lenses
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- Optics & Photonics (AREA)
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Abstract
The invention discloses a kind of liquid medium super lens of anaberration, belong to micronano optical imaging field.The super lens include: that the super surface array in upper layer set gradually from top to bottom, lower surface are coated with the upper layer super lens quartz substrate of ITO conductive layer, high polymer layer, upper surface are coated with lower layer's super lens quartz substrate of ITO conductive layer, the super surface array of lower layer；It is attached with low-k liquid medium on high polymer layer, and is full of high dielectric constant liquid medium between high polymer layer and upper layer super lens quartz substrate.Before the super surface array in upper layer of the present invention adjusts incident light wave, by filling the gap of two kinds of liquid mediums, the spherical wave needed for focusing is formed, then the transmitted light that surface array eliminates the influence of interference wave and output can focus is surpassed by lower layer.By the Wave-front phase of the final control transmitted wave of the change of applied voltage, the original deficiency in super surface is made up, achievees the effect that anaberration, constructs the super lens optical system with wide application prospect and value.
Description
Technical field
The invention belongs to micronano optical imaging fields, are related specifically to the technical side of super lens combination liquid medium anaberration
Method.
Background technique
Due to super lens have it is frivolous, be easy to many advantages, such as regulating and controlling, indices will be optimized when being used to be imaged significantly,
Such as the quality of optical system mitigates, focus adjustment range expands, the repeatability of lens design improves, and planarization with it is light
Magnitude degree increase etc..Again because it has the characteristics that be easy to based on the unusual of broad sense Snell catadioptric law to Wave-front phase
It is rationally controlled, is the following optics of lens lens design, manufacture and production it is hereby achieved that being better than the performance of existing lens
Popular selection.
Before an optical system puts into formal use, generally require to carry out carrying out all kinds of aberrations by optical focus
Assessment.Super lens can carry out the rational design of array element symmetrical structure in specific design process for directional light on axis,
Phase is spherical surface before construction outgoing light wave, but can not similarly overcome coma (generation of axis outer light source), astigmatism (caused by big visual field
Meridian and the sagitta of arc deviation of directivity), distortion (imbalance of image scaled caused by big visual field) etc. higher order aberratons bring difficult in imaging.
It is unable to real-time control Wave-front phase and makes up to focusing requirement, or because array structure symmetrization causes to generate larger higher order aberratons,
It is the technical bottleneck that puzzlement planarizes that single super lens reach more perfect imaging effect.
It is focused in conjunction with the small focal length required in the practical demand of certain high-precision imaging fields, such as biological profile analysis,
And big visual field or high-resolution requirement that the industrial circles such as chemical substance analysis require, if super lens are wanted to obtain bigger use
Value, must just change the single plane system structure of existing super lens, carry out the redesign and transformation of related system.
Summary of the invention
The present invention is directed to the practical application of super lens, proposes a kind of liquid medium super lens of anaberration.
In the design of previous super lens planar cell arrays, often according to practical application scene, symmetrical imaging is first preset
Situation, by combining the parameter request of final spherical wave wavefront, to calculate the corresponding phase of corresponding radial coordinate in super lens plane
Potential gradient, binding medium equivalent refraction rate theory choose media units and are placed on corresponding position, reach focusing effect.In other words,
The generation of higher order aberratons and the amplification in focusing, are as caused by preset symmetric case in technical solution.
In order to eliminate aberration from technological layer, it is necessary to design asymmetric or even adaptive optical system.The present invention is logical
The Wave-front phase for crossing the final control transmitted wave of change of applied voltage reaches anaberration to make up the original deficiency in super surface
Effect, and then construct the super lens optical system with broader applications prospect and value.
The present invention the following technical solution is employed realize: a kind of liquid medium super lens of anaberration, comprising: from top to bottom
The super surface array in the upper layer set gradually, upper layer super lens quartz substrate, high polymer layer, lower layer's super lens quartz base
Bottom, the super surface array of lower layer.
The super surface array in upper layer is the core cell of traditional super lens, by incident light before regulating and controlling incident light wave
Wavefront as desired focal length value carry out phase regulation, form the class spherical wave of zonal aberration.
The upper layer super lens quartz substrate depends on module for surpass surface array as upper layer；The upper layer is super
Mirror quartz substrate lower surface is coated with the first ITO conductive layer (indium tin oxide, indium tin oxide layer), for conducting charge
Form the potential difference between liquid medium.
Lower layer's super lens quartz substrate upper surface is coated with the second ITO conductive layer, is provided with height on the second ITO conductive layer
Molecular polymer layer.
The high polymer layer upper surface is attached with low-k liquid medium, so as to more stable regulation phase
Position, low-k liquid medium and high polymer layer upper surface corner cut are θ, regulate and control corresponding sky by changing θ size
Between position Wave-front phase；It is situated between high polymer layer and upper layer super lens quartz substrate full of high dielectric constant liquid
Matter, high dielectric constant liquid medium and low-k liquid medium are immiscible.
The super surface array of lower layer is set to lower layer's super lens quartz substrate lower surface, asks for the filling of modifying factor liquid
The imbalance for inscribing (such as bubble) and the generation of incident optical signal noise problem, the Wave-front phase of transmitted light is modified.
On-load voltage between first, second ITO conductive layer, is used to form high dielectric constant liquid medium and low dielectric
Potential difference between constant liquid medium.
Further, the media units that the super surface array in upper layer uses are silicon nitride, set working focal distance as 30 μm, array
It is h (r)=1.4 μm that media units, which unify setting height, sets equivalent refractive index of the media units at the r of spatial position as neff
(r,λ).Achromatic function is realized using EFFECTIVE MEDIUM THEORY, receives a length of λ of incident light wave.
Further, the super surface array of upper and lower level is respectively positioned on the outside of encapsulation liquid medium, avoids fine array element
It suffers erosion.
Further, the super superficial layer up and down takes up space is sealed using thin polymer (such as grade plastic foil)
Dress.Such design guarantees that liquid 1 and liquid 2 have stable change in shape environment.
Further, FPGA encoding array circuit is added in the super surface array rear class of lower layer.The super surface array of lower layer can make
With but be not limited to using varactor construction " 0 " " 1 " digital array or graphene construction fermi level regulate and control array.
Such design can allow the influence of extraneous wave signal to be preferably minimized.
A kind of liquid medium super lens of anaberration, before the super surface array unit in upper layer adjusts incident light wave, by filling
The gap of the liquid medium of two kinds of dielectric constants forms the spherical wave needed for focusing, then surpasses surface array by lower layer and eliminate interference
The transmitted light that the influence and output of wave can focus.When work, the circuit on-load voltage for generating potential is opened, transparent is passed through
Plated film conducts charge, changes the electric field of different spatial in gap, acts on two kinds of liquid mediums of differing dielectric constant,
The spatial gradient of electric field will cause the change of low-k liquid medium shape, thus, low-k liquid medium with
At the different contact position of high polymer layer, the different angles of contingence is formed.It, can be with for the aberration generated under different situations
The droplet profile for changing low-k liquid medium by dynamic regulation institute's making alive reaches and arbitrarily moulds Wave-front phase
Effect, to eliminate aberration.
Preferably, the super surface array of the lower layer can be, but not limited to, the number being made of light emitting diode
Array, connection and coding by FPGA single-chip microcontroller, dynamic adjusts the phase delay of different spatial, excellent in concrete condition
Change the Wave-front phase of transmitted light, eliminates incident light entrainment noise signal or clearance layer liquid distribution and the discrepant shadow of theoretical value
It rings.The super surface array of lower layer is arranged to make up by several PIN diodes in the program, and lateral PIN diode quantity is M, equidistantly
Arrangement spacing is dx, it is longitudinal be it is N number of, equidistant arrangement spacing is dy。
Contact angle of contingence θ of the low-k liquid medium with high polymer layer, at the same it is viscous with liquid
There is association in coefficient, by that can choose the low dielectric of the different coefficients of viscosity compared with high dielectric constant liquid medium property
Constant liquid medium optimizes the technical indicator of final anaberration.
Compared with the prior art, the invention has the following advantages and beneficial effects:
1. this invention removes existing super lens to face the helpless technical bottleneck of higher order aberratons, to different empty in gap
Between position Wave-front phase dynamic regulation, reached eliminate higher order aberratons engine request.
2. the model of liquid mediums coupling is used, in the premise that the manufacturing technology of original super lens is not popularized
Under, solve the development problem of super lens while having saved manufacturing cost.
3. the basic concept on the super surface of space-time is combined to be moved using the coding techniques of FPGA to rear class phase gradient
State regulates and controls, and will not be subject to noise light signal interference in engineering use process, while having evaded two kinds of liquid mediums in gap
The problem of abnormal space that may be present is arranged.
Detailed description of the invention
Fig. 1 is a kind of Optical System Design schematic diagram of the liquid medium super lens of anaberration of the present invention.
Fig. 2 is the distribution of two kinds of differing dielectric constant liquid and boundary condition in core gap of the present invention, and related ginseng
Number figure.
Fig. 3 is the schematic diagram of lower layer of the present invention super surface array and rear class processing unit.
Drawing reference numeral explanation: the super surface array in 1. upper layers；2. upper layer super lens quartz substrate；3. the first ITO conductive layer；4.
Generate potential circuit；5. high polymer layer；6. the super surface array of lower layer；7. high dielectric constant liquid (liquid 1)；8. low Jie
Electric constant liquid (liquid 2)；9.FPGA encodes single-chip microcontroller；10. the second ITO conductive layer；11 lower layer's super lens quartz substrates.
Specific embodiment
Further explanation is made to the present invention in the following with reference to the drawings and specific embodiments.Symmetrically surpassed with eliminating traditional single layer
For the aberration that lens generate, a kind of liquid medium super lens of anaberration, embodiment is as follows.
As shown in Figure 1, a kind of liquid medium super lens of anaberration, the super surface in upper layer including setting gradually from top to bottom
Array, upper layer super lens quartz substrate, high polymer layer, lower layer's super lens quartz substrate, the super surface array of lower layer.
The super surface array of upper and lower level is located at the two sides of core clearance layer, and depends on upper and lower level super lens quartz base
Bottom.Upper and lower level super lens quartz substrate is coated with one layer of ITO conductive membrane layer (indium close to the one side of core clearance layer respectively
Tin oxide, indium tin oxide layer), two layers of ITO conductive membrane layer is connected with potential circuit is generated, the super surface array of lower layer
It is connected with FPGA coding circuit, intermediate core clearance layer is by two kinds of differing dielectric constants and immiscible liquid medium (liquid
Body 1, liquid 2) constitute be full of, liquid 2 be low-k liquid medium, relying on high polymer layer will not suspend
Or the situations high polymer layer plated film such as disengaging, above the second ITO conductive layer, to guarantee that potential difference applies effect, the two is tight
It pastes very close to each other.Wherein: the first, second ITO conductive layer is used to conduct the potential difference that charge is formed between liquid medium；
The distance between the upper layer super lens quartz substrate and high molecular polymer are d；High dielectric constant liquid medium
Dielectric constant be ε1, refractive index n1；The dielectric constant of low-k liquid medium is ε2, refractive index n2, drop is along vertical
Directly the maximum gauge in super superficial layer direction is dp, volume Vd, it is θ with high polymer layer upper surface corner cut；The high score
Sub- polymeric layer dielectric constant is εp；Potential difference between high dielectric constant liquid medium and low-k liquid medium is V.
In the present embodiment, the media units that the super surface array in upper layer uses are silicon nitride, are realized using EFFECTIVE MEDIUM THEORY
Achromatic function.As shown in figure 3, the super surface array rear class of lower layer joined FPGA encoding array circuit, the super surface battle array of lower layer
It is classified as " 0 ", " 1 " digital array for having used PIN diode to construct.Realize the process of the liquid medium super lens of anaberration such as
Under:
1. forming electric field E at 2 spatial position t of liquid using potential circuit is generatedt:
2. (1) formula field distribution is utilized, according to Kelvin theoretical (Kelvin theory) in the boundary of liquid 1 and liquid 2
Locate exciting media active force:
Wherein parameter ε0For dielectric constant in vacuum, parameter E is the distribution function of (1) formula electric field.
3. the space vector field that the electric field force is formed makes liquid 2 and polyphosphazene polymer to the droplet profile of liquid 2 again plasticity
Close function of the angle of contingence formation of nitride layer contact point about spatial position.Appoint and take radial coordinate r, corresponds to the contour curve of drop
The angle of contingence be θ, corresponding Wave-front phase focuses on:
Wherein parameter f is equivalent focal length.
4. can be obtained by Huygen's principle, and in conjunction with (3) formula, before surpassing the modulated incident light wave of surface array by upper layer
Additional anaberration phase is obtained after the clearance space that phase fills undercoating liquid 1 and liquid 2Voltage is adjusted to use
It penetrates light Wave-front phase and meets spherical wave ideal relationship:
In this example, the super surface array in upper layer gives initial phase gradient are as follows:
Wherein parameter r is the radial position coordinate of the super surface array in upper layer, and λ is to receive lambda1-wavelength, and n is any whole
Number, neff(r, λ) is equivalent refractive index of the super surface dielectric unit in upper layer at the r of spatial position, and h (r)=1.4 μm are array Jie
Matter unit unifies setting height, and C (λ) is that only achromatism related with lambda1-wavelength compensates constant value phase, k0For vacuum wave vector.
5. noise signal, clearance space liquid 1 and the possible unconventional distribution of liquid 2 are carried secretly to eliminate incident light, and
Voltage adjusts the discontinuous equal possible interference of details of operation, surpasses surface array FPGA coding space-time phase using lower layer, thoroughly
Penetrating scattered far field pattern of the light after lower layer surpasses surface array modulation at m subfrequency will be write as:
Wherein parameterFor corresponding phase at the point of space, M is lateral PIN diode quantity, dxFor lateral equidistant arrangement
Spacing, N are longitudinal P IN number of diodes, dyFor longitudinal equidistant arrangement spacing.ΓpqIt is a to surpass surface array (p, q) for lower layer
The corresponding time-modulation transmission coefficient of PIN diode, apqFor corresponding ΓpqFourier transformation,It is corresponding for m order harmonics
apq。
It is equally related with spatial position will to obtain another again for the Wave-front phase of modulation light after digital coding regulates and controls
Additional components
6. adjusting applied voltage and FPGA encoding phase simultaneously, make original phase additive phaseWithAfterwards,
It provides that desired phase is equal with (4) formula, that is, can reach a kind of target effect of the liquid medium super lens of anaberration.
The above embodiment is a preferred embodiment of the present invention, but embodiments of the present invention are not by above-described embodiment
Limitation, other any changes, modifications, substitutions, combinations, simplifications made without departing from the spirit and principles of the present invention,
It should be equivalent substitute mode, be included within the scope of the present invention.
Claims (6)
1. a kind of liquid medium super lens of anaberration, comprising: the super surface array in the upper layer set gradually from top to bottom, upper layer are super
Lens quartz substrate, high polymer layer, lower layer's super lens quartz substrate, the super surface array of lower layer；
The super surface array in upper layer, before regulating and controlling incident light wave, by the wavefront of incident light, focal length value carries out phase as desired
Position regulation, forms the class spherical wave of zonal aberration；
The upper layer super lens quartz substrate depends on module for surpass surface array as upper layer；The upper layer super lens stone
English substrate lower surface is coated with the first ITO conductive layer；
Lower layer's super lens quartz substrate upper surface is coated with the second ITO conductive layer, is provided with macromolecule on the second ITO conductive layer
Polymeric layer；
The high polymer layer upper surface is attached with low-k liquid medium, low-k liquid medium and high score
Sub- polymeric layer upper surface corner cut is θ, regulates and controls the Wave-front phase of additional space position by changing θ size；High molecular polymerization
High dielectric constant liquid medium, high dielectric constant liquid medium and low dielectric are full of between nitride layer and upper layer super lens quartz substrate
Constant liquid medium is immiscible；
The super surface array of lower layer is set to lower layer's super lens quartz substrate lower surface, and the Wave-front phase of transmitted light is repaired
Just；
On-load voltage between first, second ITO conductive layer, is used to form high dielectric constant liquid medium and low-k
Potential difference between liquid medium.
2. a kind of liquid medium super lens of anaberration as described in claim 1, it is characterised in that: the super surface battle array in upper layer
Arranging the media units used is silicon nitride.
3. a kind of liquid medium super lens of anaberration as described in claim 1, it is characterised in that: the super surface of upper and lower level
Array is respectively positioned on the outside of encapsulation liquid medium.
4. a kind of liquid medium super lens of anaberration as described in claim 1, it is characterised in that: the super superficial layer up and down
It takes up space and is packaged using thin polymer.
5. a kind of liquid medium super lens of anaberration as described in claim 1, it is characterised in that: the super surface battle array of lower layer
FPGA encoding array circuit is added in column rear class；The super surface array of lower layer is " 0 " " 1 " Digital Arrays constructed using varactor
The fermi level of column or graphene construction regulates and controls array.
6. a kind of liquid medium super lens of anaberration as claimed in claim 4, it is characterised in that: the thin polymer is milli
Meter level plastic foil.
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| CN112099114B (en) * | 2020-09-29 | 2021-12-21 | 烟台睿创微纳技术股份有限公司 | Composite lens, manufacturing method thereof and infrared detector |
| WO2022068031A1 (en) * | 2020-09-29 | 2022-04-07 | 烟台睿创微纳技术股份有限公司 | Composite lens and manufacturing method therefor, and infrared detector |
| CN113885106A (en) * | 2021-11-09 | 2022-01-04 | 深圳迈塔兰斯科技有限公司 | Design method and device of super-lens antireflection film and electronic equipment |
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