CN111474733A - Wide-range high-frequency-response double-objective-lens optical independent confocal measuring head - Google Patents
Wide-range high-frequency-response double-objective-lens optical independent confocal measuring head Download PDFInfo
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- CN111474733A CN111474733A CN202010283367.4A CN202010283367A CN111474733A CN 111474733 A CN111474733 A CN 111474733A CN 202010283367 A CN202010283367 A CN 202010283367A CN 111474733 A CN111474733 A CN 111474733A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
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Abstract
The invention discloses a wide-range high-frequency-response double-objective optical independent confocal measuring head, which comprises a laser, a collimation beam expander component, a polarization beam splitting prism component, a lambda/4 wave plate component, a first objective, a second objective, a non-polarization beam splitting prism component, a first imaging lens component, a first pinhole diaphragm component, a first photoelectric detector component, a second imaging lens component, a second pinhole diaphragm component, a second photoelectric detector component, a first adjusting mechanism and a second adjusting mechanism, wherein the first imaging lens component is arranged on the first objective; a first capacitance sensor and a second capacitance sensor are arranged between the lambda/4 wave plate assembly and the two objective lenses; the first objective lens and the second objective lens are provided with displacement amplifying components which can respectively drive the first objective lens and the second objective lens to axially move. The invention has simple and compact structure, easy adjustment of the positions of the pinhole diaphragm and the photodiode, large longitudinal measurement range and high frequency response, and can obtain the height information of two points on the measured surface at the same time.
Description
Technical Field
The invention belongs to the technical field of precision measurement, relates to a detection device in a precision measurement system, and particularly relates to a wide-range high-frequency-response double-objective-lens optical independent confocal measuring head.
Background
An optical confocal measuring head is a measuring device for obtaining the height information of a measured surface based on the optical confocal imaging principle. The device has higher longitudinal and transverse resolutions, can reach nanoscale and submicron level respectively, and can be combined with a precision positioning platform to realize precision measurement of the surface appearance of the microstructure. Compared with a mechanical contact pin type measuring head, the mechanical contact pin type measuring head cannot be worn due to contact, and cannot scratch the measured surface; compared with an optical interference type measuring head, the transverse resolution is high, and the longitudinal measuring range is large; compared with the structured light type measuring head, the longitudinal resolution, the transverse resolution and the measurement precision are high; compared with a scanning probe microscope, the device has a large longitudinal measurement range and can realize online measurement.
The current optical confocal measuring head has the following defects:
1) the structure is complex, and the optical components are distributed, so that the volume of the measuring head is large;
2) the positions of the pinhole diaphragm and the photodiode in the optical path are mostly guaranteed by the processing and assembling precision of structural members for fixing the pinhole diaphragm and the photodiode, the processing and assembling precision of the structural members is high, and the positions of the pinhole diaphragm and the photodiode in the optical path are difficult to adjust;
3) the longitudinal measurement range, namely the measuring range, is largely determined by the defocusing amount of the confocal light path, the defocusing amount of the confocal light path is very small and can only reach about +/-5 mu m, and the measurement cannot be carried out on the microstructure surface with large appearance change;
4) although a measuring head is also arranged on a precision positioning platform, and the measuring range is expanded through the precision movement of the platform, the platform is often large in mass and low in frequency response, so that the rapid measurement is difficult to realize;
5) at the same time, only the height information of a certain point on the measured surface can be obtained, which is not beneficial to quick measurement.
Disclosure of Invention
The technical problem to be solved by the present invention is to provide a wide-range high-frequency-response double-objective optical independent confocal measuring head with simple and compact structure, easy adjustment of the positions of the pinhole diaphragm and the photodiode, large longitudinal measuring range, high frequency response and capability of obtaining height information of two points on the measured surface at the same time.
The technical scheme adopted by the invention for solving the technical problems is as follows: a large-range high-frequency-response double-objective optical independent confocal measuring head comprises a laser, wherein a collimation beam expanding lens assembly, a polarization beam splitting prism assembly, a lambda/4 wave plate assembly, a first objective lens and a second objective lens which are arranged in parallel are sequentially arranged on the laser in the light ray direction, and the polarization beam splitting prism assembly is connected with a non-polarization beam splitting prism assembly in the reflection light path direction; the non-polarization beam splitting prism assembly is sequentially provided with a first imaging lens assembly, a first pinhole diaphragm assembly and a first photodetector assembly in the transmission light path direction, and a second imaging lens assembly, a second pinhole diaphragm assembly and a second photodetector assembly in the reflection light path; the first pinhole diaphragm assembly and the first photoelectric detector assembly are jointly arranged in the first adjusting mechanism, and the second pinhole diaphragm assembly and the second photoelectric detector assembly are jointly arranged in the second adjusting mechanism; a movable gap is arranged between the lambda/4 wave plate component and the first objective lens, and is provided with a first capacitance sensor, and a movable gap is arranged between the lambda/4 wave plate component and the second objective lens, and is provided with a second capacitance sensor; the first objective lens and the second objective lens are provided with displacement amplifying components which can respectively drive the first objective lens and the second objective lens to axially move.
The transmission light path and the reflection light path of the non-polarization beam splitting prism component are perpendicular to each other.
The splitting ratio of the non-polarization splitting prism component is 0.5: 0.5; the distance between the non-polarizing beam splitting prism assembly and the first imaging lens assembly is equal to the distance between the non-polarizing beam splitting prism assembly and the second imaging lens assembly; the first pinhole diaphragm assembly is arranged between the focus of the first imaging lens assembly and the first photodetector assembly; the second pinhole diaphragm assembly is arranged between the focus of the second imaging lens assembly and the second imaging lens assembly;
the distance between the first pinhole diaphragm assembly and the focal point of the first imaging lens assembly is equal to the distance between the second pinhole diaphragm assembly and the focal point of the second imaging lens assembly.
The collimation beam expander component comprises a concave lens and a convex lens which are arranged along the laser direction;
the polarization beam splitting prism assembly comprises a polarization beam splitting prism;
the lambda/4 wave plate assembly comprises a lambda/4 wave plate;
the non-polarization beam splitting prism assembly comprises a non-polarization beam splitting prism;
the first imaging lens assembly 7 comprises a first imaging lens arranged along the transmission light path direction of the non-polarizing beam splitting prism assembly, and the second imaging lens assembly comprises a second imaging lens arranged along the reflection light path direction of the non-polarizing beam splitting prism assembly;
the first pinhole diaphragm assembly comprises a first pinhole diaphragm which is opposite to the first imaging lens, and the second pinhole diaphragm assembly comprises a second pinhole diaphragm which is opposite to the second imaging lens;
the first photoelectric detector assembly comprises a first photoelectric detector arranged on the first circuit board, and the first photoelectric detector faces the first pinhole diaphragm;
the second photodetector assembly includes a second photodetector disposed on a second circuit board, the second photodetector facing the second pinhole diaphragm.
The collimating beam expander component also comprises a first supporting seat, wherein the first supporting seat is provided with a first counter bore and a second counter bore which are coaxially communicated, the concave lens is fixed in the first counter bore through a first threaded locking ring, and the convex lens is fixed in the second counter bore through a second threaded locking ring;
the polarization beam splitting prism is arranged in a first shell, and the first shell is provided with an optical conduction collimation beam expanding lens assembly, a lambda/4 wave plate assembly and a first light through hole of a non-polarization beam splitting prism assembly;
the lambda/4 wave plate is arranged on the eighth supporting seat;
the non-polarization beam splitter prism is arranged in the second shell, and the second shell is provided with a second light through hole for optically conducting the polarization beam splitter prism, the first imaging lens assembly and the second imaging lens assembly;
the first imaging lens is fixed on the second supporting seat; the second imaging lens is fixed on the third supporting seat;
the first photoelectric detector assembly further comprises a first fixing seat used for fixing the first circuit board, and the second photoelectric detector assembly further comprises a second fixing seat used for fixing the second circuit board.
The first pinhole diaphragm is arranged between the focus of the first imaging lens and the first photodetector; the second pinhole diaphragm is arranged between the focus of the second imaging lens and the second imaging lens;
the distance between the first pinhole diaphragm and the focus of the first imaging lens is equal to the distance between the second pinhole diaphragm and the focus of the second imaging lens.
The first adjusting mechanism comprises a fourth supporting seat sleeved on the periphery of the first fixing seat, a fifth supporting seat sleeved on the periphery of the first pinhole diaphragm, and a first annular seat sleeved on the periphery of the fourth supporting seat and the fifth supporting seat in a clearance manner, wherein a plurality of first adjusting screws and second adjusting screws are radially arranged on the first annular seat, and the first adjusting screws and the second adjusting screws are arranged on the fourth supporting seat and the fifth supporting seat in a ninety-degree manner;
the second adjusting mechanism comprises a sixth supporting seat sleeved on the periphery of the second fixing seat, a seventh supporting seat sleeved on the periphery of the second pinhole diaphragm, and a second annular seat sleeved on the periphery of the sixth supporting seat and the seventh supporting seat in a clearance manner, a plurality of third adjusting screws and fourth adjusting screws are radially arranged on the second annular seat, and the third adjusting screws and the fourth adjusting screws are arranged on the sixth supporting seat and the seventh supporting seat in a ninety-degree manner.
First spring pieces are respectively arranged between the fourth supporting seat and the first annular seat as well as between the fifth supporting seat and the first annular seat; second spring pieces are respectively arranged between the sixth supporting seat and the second annular seat and between the seventh supporting seat and the second annular seat.
The first annular seat and the second annular seat, the first shell, the second shell and the displacement amplification assembly are respectively fixed on the fixed frame.
The displacement amplification assembly comprises a first rigid part arranged on the fixed frame, a first displacement amplification mechanism connected with the first objective lens and a second displacement amplification mechanism connected with the second objective lens, wherein a first piezoelectric actuator is arranged in the first displacement amplification mechanism, and a second piezoelectric actuator is arranged in the second displacement amplification mechanism; the first piezoelectric actuator and the second piezoelectric actuator are respectively arranged on the first rigid part, the first displacement amplification mechanism and the second displacement amplification mechanism have the same structure, the first displacement amplification mechanism comprises a second rigid part which is parallel to the first rigid part and is fixed on the first objective lens, four connecting rods which are perpendicular to the first rigid part and surround the first piezoelectric actuator, and the connecting rods are connected with the first rigid part and the second rigid part through first flexible hinges; one end of the first piezoelectric actuator is provided with a pressing plate, the other end of the first piezoelectric actuator is provided with a third rigid part, and a second flexible hinge is arranged between the third rigid part and the two opposite connecting rods.
Compared with the prior art, the wide-range high-frequency-response double-objective optical independent confocal measuring head comprises a laser, wherein a collimation beam expanding lens component, a polarization splitting prism component, a lambda/4 wave plate component, a first objective lens and a second objective lens which are arranged in parallel are sequentially arranged on the laser in the light ray direction, and the polarization splitting prism component is connected with a non-polarization splitting prism component in the reflection light path direction; the non-polarization beam splitting prism assembly is sequentially provided with a first imaging lens assembly, a first pinhole diaphragm assembly and a first photodetector assembly in the transmission light path direction, and a second imaging lens assembly, a second pinhole diaphragm assembly and a second photodetector assembly in the reflection light path; the first pinhole diaphragm assembly and the first photoelectric detector assembly are jointly arranged in the first adjusting mechanism, and the second pinhole diaphragm assembly and the second photoelectric detector assembly are jointly arranged in the second adjusting mechanism; a movable gap is arranged between the lambda/4 wave plate component and the first objective lens, and is provided with a first capacitance sensor, and a movable gap is arranged between the lambda/4 wave plate component and the second objective lens, and is provided with a second capacitance sensor; the first objective lens and the second objective lens are provided with displacement amplifying components which can respectively drive the first objective lens and the second objective lens to axially move. Compared with the prior art, the invention has the advantages that:
1) the light source, the beam expander, the polarization beam splitter prism and the lambda/4 wave plate are sequentially connected through respective shells, the objective lens is connected to the piezoelectric flexible hinge amplifying mechanism, the imaging lens and the beam splitter prism are connected together through respective shells, the pinhole diaphragm and the photodiode are respectively fixed in an x-degree-of-freedom and y-degree-of-freedom adjusting mechanism, the two sub-adjusting mechanisms are integrated in a sleeve, two sleeves for realizing pre-focus adjustment and post-focus adjustment and the shell for placing the beam splitter prism are fixed on the same supporting plate, the supporting plate is integrated on the other supporting plate together with the supporting plate for supporting the polarization beam splitter prism shell and the piezoelectric flexible hinge amplifying mechanism, and the whole measuring head is small in size and simple and compact in structure;
2) the positions of the pinhole diaphragm and the photodiode in the optical path are respectively adjusted by an x-y two-degree-of-freedom adjusting mechanism, and the mode of obtaining the positions of the pinhole diaphragm and the photodiode in the optical path through adjustment is easier to realize than the mode of ensuring the positions of the pinhole diaphragm and the photodiode in the optical path by depending on the processing and assembling precision of structural parts;
3) the objective lens is fixed on the flexible hinge type amplification mechanism, and the flexible hinge type amplification mechanism can amplify the displacement of the piezoelectric actuator by more than 5 times, so that the displacement of the objective lens can reach more than 100 mu m, and the longitudinal measurement range of the measuring head is expanded;
4) when the measuring head is focused, the objective lens is driven to move only by the piezoelectric flexible hinge amplification mechanism, the quality of the piezoelectric flexible hinge amplification mechanism is far smaller than that of the precision positioning platform, the frequency response is high, the focusing time is short, and the rapid measurement is easy to realize;
5) at the same time, the height information of certain two points on the measured surface can be obtained, and the measuring speed can be further improved.
Drawings
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a schematic view of the full cross-sectional structure of FIG. 1;
FIG. 3 is an exploded schematic view of FIG. 1;
FIG. 4 is a schematic diagram of the working principle of the present invention;
FIG. 5 is a schematic cross-sectional view of the collimating beam expander lens assembly of FIG. 3;
FIG. 6 is an exploded schematic view of FIG. 2;
FIG. 7 is a schematic cross-sectional view of the polarization splitting prism assembly of FIG. 3;
FIG. 8 is a schematic diagram of the internal structure of the λ/4 plate assembly of FIG. 3;
FIG. 9 is a schematic cross-sectional view of the non-polarizing beam splitting prism assembly of FIG. 3;
FIG. 10 is a cross-sectional structural schematic view of the first imaging lens assembly of FIG. 3;
FIG. 11 is a cross-sectional structural schematic diagram of the second imaging lens assembly of FIG. 3;
FIG. 12 is a schematic diagram of the first pinhole diaphragm assembly of FIG. 3;
FIG. 13 is a schematic structural view of the second pinhole diaphragm assembly in FIG. 3;
FIG. 14 is a schematic cross-sectional view of the first photodetector assembly of FIG. 3;
FIG. 15 is a schematic cross-sectional view of the second photodetector assembly of FIG. 3;
FIG. 16 is a schematic structural view of the first adjustment mechanism of FIG. 3;
FIG. 17 is a cross-sectional structural schematic view of the first adjustment mechanism of FIG. 16;
FIG. 18 is an exploded schematic view of the first adjustment mechanism of FIG. 16;
FIG. 19 is a schematic structural view of the second adjustment mechanism of FIG. 3;
FIG. 20 is a cross-sectional structural view of the second adjustment mechanism of FIG. 19;
FIG. 21 is an exploded schematic view of the second adjustment mechanism of FIG. 19;
FIG. 22 is a schematic view of the displacement amplifying assembly of FIG. 3;
FIG. 23 is an exploded view of the displacement amplifying assembly of FIG. 22;
fig. 24 is a further exploded view of the bridge amplification mechanism of fig. 23.
Wherein the reference numerals are: the laser 1, the collimating beam expander lens assembly 2, the concave lens 21, the first counterbore 211, the convex lens 22, the second counterbore 221, the first support base 23, the first threaded locking ring 24, the second threaded locking ring 25, the polarizing beam splitting prism assembly 3, the polarizing beam splitting prism 31, the first light passing hole 32, the first shell 33, the lambda/4 wave plate assembly 4, the lambda/4 wave plate 41, the eighth support base 42, the first objective lens 51, the first displacement magnification mechanism 511, the second objective lens 52, the second displacement magnification mechanism 521, the non-polarizing beam splitting prism assembly 6, the non-polarizing beam splitting prism 61, the second light passing hole 62, the third shell 63, the first imaging lens assembly 7, the first imaging lens 71, the second support base 72, the third threaded locking ring 73, the first pinhole diaphragm assembly 8, the first pinhole diaphragm 81, the fifth support base 82, the fifth threaded locking ring 83, the first photodetector assembly 9, the second imaging lens 71, the second support base 72, the third threaded locking ring 73, the second pinhole diaphragm assembly 8, the first pinhole, A first photoelectric detector 91, a first circuit board 92, a first fixed seat 94, a fourth supporting seat 95, a first adjusting mechanism 10, a first annular seat 101, a first spring plate 102, a first adjusting screw 103, a second adjusting screw 104, a second imaging lens assembly 11, a second imaging lens 111, a third supporting seat 112, a fourth threaded locking ring 113, a second pinhole diaphragm assembly 12, a second pinhole diaphragm 121, a second photoelectric detector assembly 13, a second photoelectric detector 131, a second circuit board 132, a second fixed seat 134, a second adjusting mechanism 14, a second annular seat 141, a second spring plate 142, a third adjusting screw 143, a fourth adjusting screw 144, a displacement amplification assembly 15, a first rigid part 151, a second rigid part 152, a pressing plate 153, a third rigid part 154, a connecting rod 155, a second flexible hinge 156, a second piezoelectric actuator 157, a first flexible hinge 158, a first piezoelectric actuator 159, a second piezoelectric actuator 157, a second piezoelectric actuator, A first capacitive sensor 161, a second capacitive sensor 162, and a mount 17.
Detailed Description
Embodiments of the present invention are described in further detail below with reference to the accompanying drawings.
Fig. 1 to 22 are schematic structural diagrams of the present invention, and as shown in the drawings, the present invention provides a wide-range high-frequency-response double-objective optical independent confocal measurement head, which includes a laser 1, the laser 1 is sequentially provided with a collimation beam expanding lens assembly 2, a polarization splitting prism assembly 3, a λ/4 wave plate assembly 4, and a first objective 51 and a second objective 52 arranged in parallel in a light direction, the polarization splitting prism assembly 3 is connected with a non-polarization splitting prism assembly 6 in a reflection light path direction; the non-polarization beam splitting prism assembly 6 is sequentially provided with a first imaging lens assembly 7, a first pinhole diaphragm assembly 8 and a first photodetector assembly 9 in the transmission light path direction, and a second imaging lens assembly 11, a second pinhole diaphragm assembly 12 and a second photodetector assembly 13 in the reflection light path; the first pinhole diaphragm assembly 8 and the first photoelectric detector assembly 9 are jointly installed in a first adjusting mechanism 10, and the second pinhole diaphragm assembly 12 and the second photoelectric detector assembly 13 are jointly installed in a second adjusting mechanism 14; a movable gap is arranged between the lambda/4 wave plate component 4 and the first objective lens 51, and a first capacitance sensor 161 is assembled, and a movable gap is arranged between the lambda/4 wave plate component 4 and the second objective lens 52, and a second capacitance sensor 162 is assembled; the first objective lens 51 and the second objective lens 52 are equipped with displacement amplifying components 15 capable of driving the two to move axially respectively.
In the embodiment, the beam splitting ratio of the non-polarizing beam splitting prism assembly 6 is 0.5: 0.5; the distance between the non-polarization beam splitting prism assembly 6 and the first imaging lens assembly 7 is equal to the distance between the non-polarization beam splitting prism assembly and the second imaging lens assembly 11; a first pinhole aperture stop assembly 8 is arranged between the focal point of the first imaging lens assembly 7 and the first photodetector assembly 9; the second pinhole diaphragm assembly 12 is arranged between the focus of the second imaging lens assembly 11 and the second imaging lens assembly 11;
the distance between the first pinhole diaphragm assembly 8 and the focal point of the first imaging lens assembly 7 is equal to the distance between the second pinhole diaphragm assembly 12 and the focal point of the second imaging lens assembly 11.
In an embodiment, as shown in fig. 5 and 6, the collimating beam expander assembly 2 includes a concave lens 21 and a convex lens 22 arranged along the laser direction;
as shown in fig. 7, the polarization splitting prism assembly 3 includes a polarization splitting prism 31;
as shown in FIG. 8, the λ/4 plate assembly 4 includes a λ/4 plate 41;
as shown in fig. 9, the unpolarized beam splitting prism assembly 6 includes an unpolarized beam splitting prism 61;
as shown in fig. 10, the first imaging lens assembly 7 includes a first imaging lens 71 disposed along the transmitted optical path direction of the unpolarized beam splitting prism assembly 6, and as shown in fig. 11, the second imaging lens assembly 11 includes a second imaging lens 111 disposed along the reflected optical path direction of the unpolarized beam splitting prism assembly 6;
as shown in fig. 12, the first pinhole diaphragm assembly 8 includes a first pinhole diaphragm 81 facing the first imaging lens 71, and as shown in fig. 13, the second pinhole diaphragm assembly 12 includes a second pinhole diaphragm 121 facing the second imaging lens 111;
as shown in fig. 14, the first photodetector assembly 9 includes a first photodetector 91 provided on a first circuit board 92, the first photodetector 91 facing the first pinhole aperture 81;
as shown in fig. 15, the second photodetector assembly 13 includes a second photodetector 131 disposed on a second circuit board 132, the second photodetector 131 facing the second pinhole diaphragm 121.
The first pinhole diaphragm 81 is provided between the focal point of the first imaging lens 71 and the first photodetector 91; the second pinhole diaphragm 121 is arranged between the focal point of the second imaging lens 111 and the second imaging lens 111;
the distance between the first pinhole diaphragm 81 and the focal point of the first imaging lens 71 is equal to the distance between the second pinhole diaphragm 121 and the focal point of the second imaging lens 111.
In an embodiment, as shown in fig. 5 and 6, the collimating beam expander assembly 2 further comprises a first supporting base 23, the first supporting base 23 is provided with a first counterbore 211 and a second counterbore 221 which are coaxially communicated, the concave lens 21 is fixed in the first counterbore 211 by a first threaded locking ring 24, and the convex lens 22 is fixed in the second counterbore 221 by a second threaded locking ring 25;
as shown in fig. 7, the polarization beam splitter prism 31 is disposed in the first housing 33, and the first housing 33 is provided with a first light-passing hole 32 for optically conducting the collimating beam expander lens assembly 2, the λ/4 wave plate assembly 4 and the non-polarization beam splitter prism assembly 6;
as shown in fig. 8, the λ/4 plate 41 is disposed on the eighth support seat 42;
as shown in fig. 9, the non-polarization splitting prism 61 is disposed in the second housing 63, and the second housing 63 is provided with a second light passing hole 62 for optically communicating the polarization splitting prism 31, the first imaging lens assembly 7 and the second imaging lens assembly 11;
as shown in fig. 10, the first imaging lens 71 is fixed on the second support base 72; as shown in fig. 11, the second imaging lens 111 is fixed on the third support base 112;
as shown in fig. 14, the first photo-detector assembly 9 further includes a first fixing base 94 for fixing the first circuit board 92, and as shown in fig. 15, the second photo-detector assembly 13 further includes a second fixing base 134 for fixing the second circuit board 132.
In an embodiment, as shown in fig. 16, 17 and 18, the first adjusting mechanism 10 includes a fourth supporting seat 95 sleeved on the periphery of the first fixing seat 94, a fifth supporting seat 82 sleeved on the periphery of the first pinhole diaphragm 81, and a first annular seat 101 sleeved on the peripheries of the fourth supporting seat 95 and the fifth supporting seat 82 with a gap, wherein a plurality of first adjusting screws 103 and second adjusting screws 104 are radially arranged on the first annular seat 101, and the first adjusting screws 103 and the second adjusting screws 104 are arranged on the fourth supporting seat 95 and the fifth supporting seat 82 at ninety degrees from each other; the concentricity of the fourth support base 95, the fifth support base 82, and the first imaging lens 71 can be adjusted by rotationally adjusting the first adjustment screw 103 and the second adjustment screw 104.
As shown in fig. 19, 20 and 21, the second adjusting mechanism 14 includes a sixth supporting seat 135 sleeved on the periphery of the second fixing seat 134, a seventh supporting seat 122 sleeved on the periphery of the second pinhole diaphragm 121, and a second annular seat 141 sleeved on the peripheries of the sixth supporting seat 135 and the seventh supporting seat 122 with a gap, a plurality of third adjusting screws 143 and fourth adjusting screws 144 are radially disposed on the second annular seat 141, and the third adjusting screws 143 and the fourth adjusting screws 144 are disposed on the sixth supporting seat 135 and the seventh supporting seat 122 at ninety degrees from each other. The concentricity of the sixth support base 135, the seventh support base 122, and the second imaging lens 111 can be adjusted by rotationally adjusting the third adjustment screw 143 and the fourth adjustment screw 144.
In an embodiment, as shown in fig. 18, a first spring plate 102 is respectively disposed between the fourth supporting seat 95 and the first annular seat 101, and between the fifth supporting seat 82 and the first annular seat 101; as shown in fig. 21, second spring strips 142 are respectively disposed between the sixth supporting seat 135 and the second annular seat 141, and between the seventh supporting seat 122 and the second annular seat 141. First annular seat 101
In an embodiment, as shown in fig. 1, the first and second annular seats 101 and 141, the first and second housings 33 and 63, and the displacement amplifying assembly 15 are fixed to the fixed frame 17, respectively.
In the embodiment, as shown in fig. 22, the displacement magnification unit 15 includes a first rigid portion 151 provided on the mount 17, and a first displacement magnification mechanism 511 connected to the first objective lens 51 and a second displacement magnification mechanism 521 connected to the second objective lens 52, the first displacement magnification mechanism 511 being provided with a first piezoelectric actuator 159 therein, and the second displacement magnification mechanism being provided with a second piezoelectric actuator 157 therein; the first piezoelectric actuator 159 and the second piezoelectric actuator 157 are respectively arranged on the first rigid part 151, the first displacement amplification mechanism 511 and the second displacement amplification mechanism 521 have the same structure, the first displacement amplification mechanism 511 comprises a second rigid part 152 which is parallel to the first rigid part 151 and fixed on the first objective lens 51, four connecting rods 155 which are perpendicular to the first rigid part 151 and surround the first piezoelectric actuator 159, and the connecting rods 155 are connected with the first rigid part 151 and the second rigid part 152 through first flexible hinges 158; the first piezoelectric actuator 159 has a pressing plate 153 at one end thereof, a third rigid portion 154 at the other end thereof, and a second flexible hinge 156 between the third rigid portion 154 and two opposite links 155.
The working principle of the invention is as follows:
after passing through the collimating beam-expanding assembly 2, a light beam emitted by the laser 1 becomes a collimated light beam with a larger diameter and a smaller divergence angle, and then passes through the polarizing beam-splitting prism 31 to become a linearly polarized light (P light) vibrating only in one direction, after the linearly polarized light passes through the λ/4 wave plate 41 (the optical axis direction of the linearly polarized light and the polarization direction of the P light form an angle of 45 degrees), the polarization state of the linearly polarized light changes from a linear polarization state to a circular polarization state, the circularly polarized light passes through the first objective lens 51 and the second objective lens 52 and then is focused at respective focuses, and when a measured surface is just positioned at the respective focuses of the first objective lens 51 and the second objective lens 52, the circularly polarized light after being focused forms two minimum measuring light spots on the measured surface.
The two circularly polarized lights reflected from the measured surface pass through the λ/4 wave plate again, and then the polarization state thereof is changed into a linear polarization state, but the polarization direction is deflected by 90 degrees to become S light (the polarization direction thereof is perpendicular to the polarization direction of the P light in the incident light path, so that the incident light and the reflected light transmitted by the same light path are prevented from interfering, and the reflected light is prevented from returning to the laser, causing oscillation of the laser 1), the two S lights reach the polarization beam splitter 31 and are reflected to the non-polarization beam splitter 61, and both become transmission path light and reflection path light with a splitting ratio of 0.5:0.5, wherein the two transmission path light are received by the first photodetector 91 after being focused on the first pinhole diaphragm 81 by the first imaging lens 71, the two reflection path light are received by the second photodetector 131 after being focused on the second pinhole diaphragm 121 by the second imaging lens 111, the first pinhole diaphragm 81 is placed between the focus of the first imaging lens 71 and the first photodetector 91, the second pinhole diaphragm 121 is placed between the focal point of the second imaging lens 111 and the second imaging lens 111, and the distance between the first pinhole diaphragm 81 and the focal point of the first imaging lens 71 is the same as the distance between the second pinhole diaphragm 121 and the focal point of the second imaging lens 111.
When the energy of the optical signals reflected by the point a on the surface to be measured, which are received by the first photodetector 91 and the second photodetector 131, is the same, the difference between the electrical signals output by the unit a of the first photodetector 91 and the unit a of the second photodetector 131 is zero, and the focal planes of the first objective lens 51 are all right on the surface to be measured; similarly, when the energy of the optical signal reflected by the point B on the measured surface received by the first photodetector 91 and the second photodetector 131 is the same, the difference between the output electrical signals of the unit B of the first photodetector 91 and the output electrical signals of the unit B of the second photodetector 131 is zero, and the focal planes of the second objective lens 52 are both located exactly on the measured surface. Accordingly:
when the difference between the output electrical signal of the a unit of the second photodetector 131 and the output electrical signal of the a unit of the first photodetector 91 is positive, the focal plane of the first objective lens 51 is located below the a point on the measured surface, at this time, the first piezoelectric actuator 159 drives the first displacement amplification mechanism 511, the first displacement amplification mechanism 511 drives the first objective lens 51 to move upward until the difference between the output electrical signals of the a unit of the first photodetector 91 and the a unit of the second photodetector 131 is zero, and the displacement of the first objective lens 51 measured by the first capacitive sensor 161 is the increase of the height of the a point on the measured surface relative to the previous measurement point; when the difference between the output electrical signal of the a unit of the second photodetector 131 and the output electrical signal of the a unit of the first photodetector 91 is negative, the focal plane of the first objective lens 51 is located above the a point on the measured surface, at this time, the first piezoelectric actuator 159 drives the first displacement amplification mechanism 511, the first displacement amplification mechanism 511 drives the first objective lens 51 to move downward until the difference between the output electrical signals of the a unit of the first photodetector 91 and the a unit of the second photodetector 131 is zero, and the displacement of the first objective lens 51 measured by the first capacitive sensor 161 is the decrease of the height of the a point on the measured surface relative to the previous measurement point.
Similarly, when the difference between the output electrical signal of the B unit of the second photodetector 131 and the output electrical signal of the B unit of the first photodetector 91 is positive, the focal plane of the second objective lens 52 is located below the B point on the measured surface, at this time, the second piezoelectric actuator 157 drives the second displacement amplification mechanism 521, the second displacement amplification mechanism 521 drives the second objective lens 52 to move upward until the difference between the output electrical signals of the B unit of the first photodetector 91 and the B unit of the second photodetector 131 is zero, and the displacement of the second objective lens 52 measured by the second capacitive sensor 162 is the increase of the height of the B point on the measured surface relative to the previous measurement point; when the difference between the electrical signal output by the B unit of the second photodetector 131 and the electrical signal output by the B unit of the first photodetector 91 is negative, the focal plane of the second objective lens 52 is located above the upper B point of the measured surface, at this time, the second piezoelectric actuator 157 drives the second displacement amplification mechanism 521, the second displacement amplification mechanism 521 drives the second objective lens 52 to move downward until the difference between the electrical signals output by the B unit of the first photodetector 91 and the electrical signal output by the B unit of the second photodetector 131 is zero, and the displacement of the objective lens position 2 measured by the second capacitive sensor 162 is the decrease of the height of the B point on the measured surface relative to the upper measurement point.
While the preferred embodiments of the present invention have been illustrated, various changes and modifications may be made by one skilled in the art without departing from the scope of the invention.
Claims (9)
1. The utility model provides a wide range high frequency response double objective optics is confocal formula gauge head independently, includes laser instrument (1), characterized by: the laser (1) is sequentially provided with a collimation beam expanding lens assembly (2), a polarization splitting prism assembly (3), a lambda/4 wave plate assembly (4) and a first objective lens (51) and a second objective lens (52) which are arranged in parallel in the light ray direction, and the polarization splitting prism assembly (3) is connected with a non-polarization splitting prism assembly (6) in the reflection light path direction; the non-polarization beam splitting prism assembly (6) is sequentially provided with a first imaging lens assembly (7), a first pinhole diaphragm assembly (8) and a first photoelectric detector assembly (9) in the transmission light path direction, and a second imaging lens assembly (11), a second pinhole diaphragm assembly (12) and a second photoelectric detector assembly (13) in the reflection light path; the first pinhole diaphragm assembly (8) and the first photoelectric detector assembly (9) are jointly arranged in a first adjusting mechanism (10), and the second pinhole diaphragm assembly (12) and the second photoelectric detector assembly (13) are jointly arranged in a second adjusting mechanism (14); a movable gap is arranged between the lambda/4 wave plate component (4) and the first objective lens (51), and a first capacitance sensor (161) is assembled, a movable gap is arranged between the lambda/4 wave plate component (4) and the second objective lens (52), and a second capacitance sensor (162) is assembled; the first objective lens (51) and the second objective lens (52) are provided with displacement amplifying components (15) which can respectively drive the first objective lens and the second objective lens to axially move.
2. The wide-range high-frequency-response double-objective-lens optical independent confocal measuring head according to claim 1, wherein: the transmission light path and the reflection light path of the non-polarization beam splitting prism component (6) are vertical to each other.
3. The wide-range high-frequency-response double-objective-lens optical independent confocal measuring head according to claim 2, wherein: the splitting ratio of the non-polarization splitting prism assembly (6) is 0.5: 0.5; the distance between the non-polarization beam splitting prism assembly (6) and the first imaging lens assembly (7) is equal to the distance between the non-polarization beam splitting prism assembly and the second imaging lens assembly (11); the first pinhole diaphragm component (8) is arranged between the focus of the first imaging lens component (7) and the first photoelectric detector component (9); the second pinhole diaphragm assembly (12) is arranged between the focus of the second imaging lens assembly (11) and the second imaging lens assembly (11);
the distance between the focus of the first pinhole diaphragm assembly (8) and the first imaging lens assembly (7) is equal to the distance between the focus of the second pinhole diaphragm assembly (12) and the second imaging lens assembly (11).
4. A wide-range high-frequency-response dual-objective optical independent confocal measuring head as claimed in claim 3, wherein: the collimation beam expander assembly (2) comprises a concave lens (21) and a convex lens (22) which are arranged along the laser direction;
the polarization beam splitting prism assembly (3) comprises a polarization beam splitting prism (31);
the lambda/4 wave plate component (4) comprises a lambda/4 wave plate (41);
the non-polarization beam splitting prism assembly (6) comprises a non-polarization beam splitting prism (61);
the first imaging lens assembly 7 comprises a first imaging lens (71) arranged along the transmission light path direction of the non-polarizing beam splitting prism assembly (6), and the second imaging lens assembly (11) comprises a second imaging lens (111) arranged along the reflection light path direction of the non-polarizing beam splitting prism assembly (6);
the first pinhole diaphragm assembly (8) comprises a first pinhole diaphragm (81) opposite to the first imaging lens (71), and the second pinhole diaphragm assembly (12) comprises a second pinhole diaphragm (121) opposite to the second imaging lens (111);
the first photoelectric detector assembly (9) comprises a first photoelectric detector (91) arranged on a first circuit board (92), and the first photoelectric detector (91) is opposite to the first pinhole diaphragm (81);
the second photoelectric detector assembly (13) comprises a second photoelectric detector (131) arranged on a second circuit board (132), and the second photoelectric detector (131) is opposite to the second pinhole diaphragm (121);
the first pinhole diaphragm (81) is arranged between the focus of the first imaging lens (71) and the first photoelectric detector (91); the second pinhole diaphragm (121) is arranged between the focus of the second imaging lens (111) and the second imaging lens (111);
the distance from the first pinhole diaphragm (81) to the focal point of the first imaging lens (71) is equal to the distance from the second pinhole diaphragm (121) to the focal point of the second imaging lens (111).
5. The large-range high-frequency-response double-objective-lens optical independent confocal measuring head according to claim 4, wherein: the collimating beam expander assembly (2) further comprises a first supporting seat (23), the first supporting seat (23) is provided with a first counter bore (211) and a second counter bore (221) which are coaxially communicated, the concave lens (21) is fixed in the first counter bore (211) through a first threaded locking ring (24), and the convex lens (22) is fixed in the second counter bore (221) through a second threaded locking ring (25);
the polarization beam splitter prism (31) is arranged in a first shell (33), and the first shell (33) is provided with a first light through hole (32) for optically conducting the collimation beam expander assembly (2), the lambda/4 wave plate assembly (4) and the non-polarization beam splitter prism assembly (6);
the lambda/4 wave plate (41) is arranged on the eighth supporting seat (42);
the non-polarization beam splitter prism (61) is arranged in a second shell (63), and the second shell (63) is provided with a second light through hole (62) for optically conducting the polarization beam splitter prism (31), the first imaging lens assembly (7) and the second imaging lens assembly (11);
the first imaging lens (71) is fixed on the second supporting seat (72); the second imaging lens (111) is fixed on the third supporting seat (112);
the first photoelectric detector assembly (9) further comprises a first fixing seat (94) used for fixing the first circuit board (92), and the second photoelectric detector assembly (13) further comprises a second fixing seat (134) used for fixing the second circuit board (132).
6. The large-range high-frequency-response double-objective-lens optical independent confocal measuring head according to claim 5, wherein: the first adjusting mechanism (10) comprises a fourth supporting seat (95) sleeved on the periphery of the first fixing seat (94), a fifth supporting seat (82) sleeved on the periphery of the first pinhole diaphragm (81), and a first annular seat (101) sleeved on the peripheries of the fourth supporting seat (95) and the fifth supporting seat (82) in a clearance manner, wherein a plurality of first adjusting screws (103) and second adjusting screws (104) are radially arranged on the first annular seat (101), and the first adjusting screws (103) and the second adjusting screws (104) are arranged on the fourth supporting seat (95) and the fifth supporting seat (82) in a right-angle manner;
the second adjusting mechanism (14) comprises a sixth supporting seat (135) sleeved on the periphery of the second fixing seat (134), a seventh supporting seat (122) sleeved on the periphery of the second pinhole diaphragm (121), and a second annular seat (141) sleeved on the peripheries of the sixth supporting seat (135) and the seventh supporting seat (122) in a clearance manner, wherein a plurality of third adjusting screws (143) and fourth adjusting screws (144) are radially arranged on the second annular seat (141), and the third adjusting screws (143) and the fourth adjusting screws (144) are arranged on the sixth supporting seat (135) and the seventh supporting seat (122) in a ninety-degree manner.
7. The large-range high-frequency-response double-objective-lens optical independent confocal measuring head according to claim 6, wherein: a first spring piece (102) is respectively arranged between the fourth supporting seat (95) and the first annular seat (101), and between the fifth supporting seat (82) and the first annular seat (101); and second spring pieces (142) are respectively arranged between the sixth supporting seat (135) and the second annular seat (141) and between the seventh supporting seat (122) and the second annular seat (141).
8. The large-range high-frequency-response double-objective-lens optical independent confocal measuring head according to claim 7, wherein: the first annular seat (101), the second annular seat (141), the first shell (33), the second shell (63) and the displacement amplification assembly (15) are respectively fixed on the fixed frame (17).
9. A wide-range high-frequency-response dual-objective optical independent confocal measurement head according to any one of claims 1 to 8, wherein: the displacement amplification assembly (15) comprises a first rigid part (151) arranged on a fixed frame (17), a first displacement amplification mechanism (511) connected with a first objective lens (51) and a second displacement amplification mechanism (521) connected with a second objective lens (52), wherein a first piezoelectric actuator (159) is arranged in the first displacement amplification mechanism (511), and a second piezoelectric actuator (157) is arranged in the second displacement amplification mechanism; the first piezoelectric actuator (159) and the second piezoelectric actuator (157) are respectively arranged on the first rigid part (151), the first displacement amplifying mechanism (511) and the second displacement amplifying mechanism (521) have the same structure, the first displacement amplifying mechanism (511) comprises a second rigid part (152) which is parallel to the first rigid part (151) and fixed on the first objective lens (51), four connecting rods (155) which are perpendicular to the first rigid part (151) and surround the first piezoelectric actuator (159), and the connecting rods (155) are connected with the first rigid part (151) and the second rigid part (152) through first flexible hinges (158); one end of the first piezoelectric actuator (159) is provided with a pressing plate (153), the other end of the first piezoelectric actuator is provided with a third rigid part (154), and a second flexible hinge (156) is arranged between the third rigid part (154) and the two opposite connecting rods (155).
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Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0866993A1 (en) * | 1996-07-23 | 1998-09-30 | CARL ZEISS JENA GmbH | Confocal microscope with doublet system |
| CN1563882A (en) * | 2004-03-30 | 2005-01-12 | 清华大学 | Co-optical circuit double-frequency heterodyne confocal micromeasurer |
| CN101275822A (en) * | 2008-05-06 | 2008-10-01 | 哈尔滨工业大学 | Second confocal measuring method and apparatus based on movable phase interfere |
| CN101762240A (en) * | 2010-01-13 | 2010-06-30 | 北京理工大学 | Method and device for measuring axial gaps of differential confocal lens set |
| CN101788267A (en) * | 2010-01-26 | 2010-07-28 | 浙江大学 | Optical micrometric displacement sensor based on two sets of sub-wavelength gratings |
| CN101852594A (en) * | 2010-05-10 | 2010-10-06 | 北京理工大学 | Super-resolution laser polarization differential confocal imaging method and device |
| CN102054933A (en) * | 2010-10-22 | 2011-05-11 | 宁波大学 | Parallel piezoelectric micromotion platform |
| CN202472093U (en) * | 2012-01-09 | 2012-10-03 | 上海微电子装备有限公司 | Camera lens |
| CN204631349U (en) * | 2015-03-30 | 2015-09-09 | 苏州大学 | Piezoelectric type object lens drive table |
| CN107335911A (en) * | 2017-08-25 | 2017-11-10 | 青岛理工大学 | Binary channels object lens focus on light guide plate mesh point beam splitting laser processing unit (plant), system and method |
-
2020
- 2020-04-13 CN CN202010283367.4A patent/CN111474733B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0866993A1 (en) * | 1996-07-23 | 1998-09-30 | CARL ZEISS JENA GmbH | Confocal microscope with doublet system |
| CN1563882A (en) * | 2004-03-30 | 2005-01-12 | 清华大学 | Co-optical circuit double-frequency heterodyne confocal micromeasurer |
| CN101275822A (en) * | 2008-05-06 | 2008-10-01 | 哈尔滨工业大学 | Second confocal measuring method and apparatus based on movable phase interfere |
| CN101762240A (en) * | 2010-01-13 | 2010-06-30 | 北京理工大学 | Method and device for measuring axial gaps of differential confocal lens set |
| CN101788267A (en) * | 2010-01-26 | 2010-07-28 | 浙江大学 | Optical micrometric displacement sensor based on two sets of sub-wavelength gratings |
| CN101852594A (en) * | 2010-05-10 | 2010-10-06 | 北京理工大学 | Super-resolution laser polarization differential confocal imaging method and device |
| CN102054933A (en) * | 2010-10-22 | 2011-05-11 | 宁波大学 | Parallel piezoelectric micromotion platform |
| CN202472093U (en) * | 2012-01-09 | 2012-10-03 | 上海微电子装备有限公司 | Camera lens |
| CN204631349U (en) * | 2015-03-30 | 2015-09-09 | 苏州大学 | Piezoelectric type object lens drive table |
| CN107335911A (en) * | 2017-08-25 | 2017-11-10 | 青岛理工大学 | Binary channels object lens focus on light guide plate mesh point beam splitting laser processing unit (plant), system and method |
Non-Patent Citations (3)
| Title |
|---|
| 刘大礼: "差动共焦显微边缘轮廓检测与定位方法", 《中国激光》 * |
| 杜小平: "《调频连续波激光探测技术》", 30 April 2015, 国防工业出版社 * |
| 胡小唐: "《微纳检测技术》", 31 October 2009, 天津大学出版社 * |
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