CN204594585U - The device of wavefront and face type is measured based on autocollimation Hartmann wave front sensor - Google Patents

The device of wavefront and face type is measured based on autocollimation Hartmann wave front sensor Download PDF

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Publication number
CN204594585U
CN204594585U CN201520144541.1U CN201520144541U CN204594585U CN 204594585 U CN204594585 U CN 204594585U CN 201520144541 U CN201520144541 U CN 201520144541U CN 204594585 U CN204594585 U CN 204594585U
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China
Prior art keywords
autocollimation
face type
wave front
spectroscope
wavefront
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Expired - Fee Related
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CN201520144541.1U
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Chinese (zh)
Inventor
熊召
陈海平
易聪之
邹霞
王国强
孔明新
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Chengdu Apextest Technology Co Ltd
Laser Fusion Research Center China Academy of Engineering Physics
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Chengdu Apextest Technology Co Ltd
Laser Fusion Research Center China Academy of Engineering Physics
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Priority to CN201520144541.1U priority Critical patent/CN204594585U/en
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Abstract

The utility model discloses the device measuring wavefront and face type based on autocollimation Hartmann wave front sensor, comprise light source and colimated light system, spectroscope in parallel is also provided with in the rear end of colimated light system, beam-expanding system and standard lens is also disposed with in spectroscopical rear end, spectroscopical side is also disposed with microlens array and light sensor, and tested level crossing or tested spherical mirror are arranged on the rear end of standard lens; The center of light source, colimated light system, spectroscope, beam-expanding system and standard lens is run through by same horizontal optical axis, the center of tested level crossing or tested spherical mirror is also run through by this horizontal optical axis, and spectroscope, microlens array and light sensor are all run through by a vertical optical axis vertical with horizontal optical axis.The utility model provides the device measuring wavefront and face type based on autocollimation Hartmann wave front sensor, solves the problem of above-mentioned prior art, make the structure of equipment more simple, operate with carry convenient.

Description

The device of wavefront and face type is measured based on autocollimation Hartmann wave front sensor
Technical field
The utility model relates to a kind of optical measuring device, is specifically related to a kind of device measuring wavefront and face type based on autocollimation Hartmann wave front sensor of use when carrying out optical measurement.
Background technology
In optical field, the measurement of wavefront and eyeglass face type is one of important content.Optical system all needs to detect the unilateral type of optical frames or optical system wavefront, to guarantee that it can reach designing requirement after processing, assembling or assembling.
At present, the typical method of wavefront measurement is Shack-Hartmann wavefront sensor method, its principle is that wavefront is divided into several wavefront by microlens array, the tilt quantity of each lenticule region wavefront can cause the translation of hot spot on focal plane, the facula position information response slope of tested wavefront, can rebuild tested wavefront shape by integration.The typical method of the measurement of eyeglass face type is interferometric method, and its principle is interfered with reference to corrugated on the corrugated with eyeglass face type information, extracted the face type information of tested eyeglass by the method for 4 step phase shifts from interference fringe.But there is following shortcoming in above method:
(1) Shack-Hartmann wavefront sensor is when measuring eyeglass face type, the erection of equipment, debugging more complicated;
(2), when interference technique measures eyeglass face type, must have with reference to corrugated, and external wavefront can not be measured;
(3) two kinds of method equipment needed therebies are heavier, testing complex.Installation and Debugging work is complicated, and testing efficiency is low, not portable.
Summary of the invention
The purpose of this utility model is to provide the device measuring wavefront and face type based on autocollimation Hartmann wave front sensor, solves the problem of above-mentioned prior art, make the structure of equipment more simple, operate with carry convenient.
To achieve these goals, the technical solution adopted in the utility model is as follows:
The device of wavefront and face type is measured based on autocollimation Hartmann wave front sensor, comprise light source and colimated light system, also spectroscope is provided with in the rear end of colimated light system, beam-expanding system and standard lens is also disposed with in spectroscopical rear end, also be disposed with microlens array and light sensor in spectroscopical side, tested level crossing or tested spherical mirror are arranged on the rear end of standard lens.
The center of described light source, colimated light system, spectroscope, beam-expanding system and standard lens is run through by same horizontal optical axis, the center of tested level crossing or tested spherical mirror is also run through by this horizontal optical axis, and spectroscope, microlens array and light sensor are all run through by a vertical optical axis vertical with horizontal optical axis.
Described light source is arranged on the focusing surface of colimated light system, and the sensitive area of light sensor is positioned on the focusing surface of microlens array.
Described light source is pointolite, this pointolite optimum be LASER Light Source.
Described beam-expanding system is Galileo beam-expanding system or Kepler's beam-expanding system.
Described light sensor is CCD or CMOS array type optical sensor.
Described spectroscope is beam-splitter or Amici prism, and splitting ratio is 1:1.
The entirety that described light source and colimated light system form can be exchanged with the position of the entirety that microlens array and light sensor form.
The utility model compared with prior art, has the following advantages and beneficial effect:
(1) the utility model both can measurement plane mirror, spherical mirror face type, also can measure other external wavefront, have more purposes, substantially increase the adaptive faculty of product, improve the use value of product, reduce further the cost of measurement;
(2) structure of the present utility model is simpler relative to existing measuring equipment, reduce the cost of manufacture and usage, the difficulty simultaneously also reducing operation improves the service efficiency of product, this product is in use assisted without the need to other equipment, improve the adaptive faculty to environment further, and simple structure make the volume of product and weight lower, further increase the difficulty of carrying of product;
(3) structure of the present utility model is simple, well as the external expansion equipment of other optical measuring devices, can also further increase the scope of application of product.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
Description of reference numerals: 1, light source; 2, colimated light system; 3, spectroscope; 4, beam-expanding system; 5, tested level crossing; 6, microlens array; 7, light sensor; 8, standard lens; 9, tested spherical mirror; 10, horizontal optical axis; 11, vertical optical axis.
Embodiment
Below in conjunction with drawings and Examples, the utility model is described in further detail, and embodiment of the present utility model includes but not limited to the following example.
Embodiment 1
As shown in Figure 1, the device of wavefront and face type is measured based on autocollimation Hartmann wave front sensor, comprise light source 1 and colimated light system 2, spectroscope 3 is also provided with in the rear end of colimated light system 2, beam-expanding system 4 and standard lens 8 is also disposed with in the rear end of spectroscope 3, also be disposed with microlens array 6 and light sensor 7 in the side of spectroscope 3, tested level crossing 5 or tested spherical mirror 9 are arranged on the rear end of standard lens 8.
The center of described light source 1, colimated light system 2, spectroscope 3, beam-expanding system 4 and standard lens 8 is run through by same horizontal optical axis 10, the center of tested level crossing 5 or tested spherical mirror 9 is also run through by this horizontal optical axis 10, and spectroscope 3, microlens array 6 and light sensor 7 are all run through by a vertical optical axis 11 vertical with horizontal optical axis 10.
Described light source 1 is arranged on the focusing surface of colimated light system 2, and the sensitive area of light sensor 7 is positioned on the focusing surface of microlens array.
Described light source is pointolite, this pointolite optimum be LASER Light Source.Described beam-expanding system 4 is Galileo beam-expanding system or Kepler's beam-expanding system, expands multiplying power and can reach 1 ~ 40 times, have the scope of application more widely.Described light sensor 7 is CCD or CMOS array type optical sensors.Described spectroscope 3 is beam-splitter or Amici prism, and splitting ratio is 1:1.The F number range of choice of standard lens is 1 ~ 10, further increases the adaptive faculty of product.
Light source is positioned on the focusing surface of colimated light system, the sensitive area of light sensor is positioned on the focusing surface of microlens array, light source becomes parallel beam through colimated light system, be radiated on tested level crossing after beam-expanding system, the former road of light beam with plane mirror type information returns, enter on microlens array and light sensor through spectroscope, thus resolve the face type information locating tested level crossing.The face type that standard lens then can measure spherical mirror is installed additional after beam-expanding system.And external wavefront directly enters on microlens array and light sensor through spectroscopical reflection after can directly entering beam-expanding system, thus the information that can calculate entrained by external wavefront completes the measurement to wavefront.
Embodiment 2
The difference of the present embodiment and embodiment 1 is, the position of the entirety that described light source 1 and colimated light system 2 form and the entirety that microlens array 6 forms with light sensor 7 exchanges.
According to above-described embodiment, just the utility model can be realized well.What deserves to be explained is; under prerequisite based on said structure design; for solving same technical matters; even if some making on the utility model are without substantial change or polishing; the essence of the technical scheme adopted is still the same with the utility model, therefore it also should in protection domain of the present utility model.

Claims (8)

1. the device of wavefront and face type is measured based on autocollimation Hartmann wave front sensor, it is characterized in that, comprise light source (1) and colimated light system (2), spectroscope (3) is also provided with in the rear end of colimated light system (2), beam-expanding system (4) and standard lens (8) is also disposed with in the rear end of spectroscope (3), also be disposed with microlens array (6) and light sensor (7) in the side of spectroscope (3), tested level crossing (5) or tested spherical mirror (9) are arranged on the rear end of standard lens (8).
2. the device measuring wavefront and face type based on autocollimation Hartmann wave front sensor according to claim 1, it is characterized in that, described light source (1), colimated light system (2), spectroscope (3), the center of beam-expanding system (4) and standard lens (8) is run through by same horizontal optical axis (10), the center of tested level crossing (5) or tested spherical mirror (9) is also run through by this horizontal optical axis (10), spectroscope (3), microlens array (6) and light sensor (7) are all run through by a vertical optical axis (11) vertical with horizontal optical axis (10).
3. the device measuring wavefront and face type based on autocollimation Hartmann wave front sensor according to claim 2, it is characterized in that, described light source (1) is arranged on the focusing surface of colimated light system (2), and the sensitive area of light sensor (7) is positioned on the focusing surface of microlens array.
4. the device measuring wavefront and face type based on autocollimation Hartmann wave front sensor according to claim 3, it is characterized in that, described light source (1) is pointolite.
5. the device measuring wavefront and face type based on autocollimation Hartmann wave front sensor according to claim 4, it is characterized in that, described beam-expanding system (4) is Galileo beam-expanding system or Kepler's beam-expanding system.
6. the device measuring wavefront and face type based on autocollimation Hartmann wave front sensor according to claim 5, it is characterized in that, described light sensor (7) is CCD or CMOS array type optical sensor.
7. the device measuring wavefront and face type based on autocollimation Hartmann wave front sensor according to claim 6, it is characterized in that, described spectroscope (3) is beam-splitter or Amici prism, and splitting ratio is 1:1.
8. the device measuring wavefront and face type based on autocollimation Hartmann wave front sensor according to claim 7, it is characterized in that, the position of the entirety that described light source (1) and colimated light system (2) form and the entirety that microlens array (6) forms with light sensor (7) can exchange.
CN201520144541.1U 2015-03-13 2015-03-13 The device of wavefront and face type is measured based on autocollimation Hartmann wave front sensor Expired - Fee Related CN204594585U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105865638A (en) * 2016-05-06 2016-08-17 中国科学院西安光学精密机械研究所 Calibration device and method for frequency response characteristic of Shack-Hartmann wave-front sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105865638A (en) * 2016-05-06 2016-08-17 中国科学院西安光学精密机械研究所 Calibration device and method for frequency response characteristic of Shack-Hartmann wave-front sensor
CN105865638B (en) * 2016-05-06 2019-03-08 中国科学院西安光学精密机械研究所 The caliberating device and scaling method of Shack-Hartmann wavefront sensor Frequency Response

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