CN204529328U - A kind of silicon tetrachloride vaporization device - Google Patents
A kind of silicon tetrachloride vaporization device Download PDFInfo
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- CN204529328U CN204529328U CN201520191892.8U CN201520191892U CN204529328U CN 204529328 U CN204529328 U CN 204529328U CN 201520191892 U CN201520191892 U CN 201520191892U CN 204529328 U CN204529328 U CN 204529328U
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- silicon tetrachloride
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Abstract
The utility model relates to a kind of silicon tetrachloride vaporization device, comprise vaporization tank body and heat transfer tube, heat transfer tube longitudinal arrangement is in vaporization tank body, the top of vaporization tank body is provided with synthesis gas import, vaporization tank base is provided with synthesis gas outlet, gasifying pot body side surface is provided with silicon tetrachloride liquid import and silicon tetrachloride pneumatic outlet, and synthesis gas import is connected with heat transfer tube with synthesis gas outlet, and silicon tetrachloride liquid import is communicated with vaporization tank body with silicon tetrachloride pneumatic outlet.The utility model makes full use of the heat vaporizing silicon tetrachloride in the hot synthesis gas of silicon tetrachloride after carrying out cold hydrogenation, greatly reduces the consumption of energy, does not re-use high temperature heat conductive oil simultaneously, greatly reduces silicon tetrachloride vaporization cost.
Description
Technical field
The utility model relates to a kind of recovery polysilicon by-product---equipment that silicon tetrachloride is used, and particularly relates to a kind of by the vaporizer of silicon tetrachloride vaporization.
Background technology
Current production of polysilicon mainstream technology route is improvement siemens, wherein often produce the silicon tetrachloride of one kilogram of polysilicon meeting by-product about 20 kilograms, recovery prior art for this by product is all adopt the cold hydrogenation technology of silicon chlorides to convert it into trichlorosilane (raw material of production of polysilicon), has so just fully recycled silicon tetrachloride; Cold hydrogenation condition is generally 1 ~ 4MPaG, 400 ~ 600 DEG C, and reaction equation is 3SiCL
4+ 2H
2+ Si=4SiHCL
3, react and carry out in gas-solid phase fluidized-bed, the hot-gas temperature leaving cold hydrogenation reactor is close with temperature of reaction, is 400 ~ 600 DEG C.In order to reach gas-solid reaction condition, react just the silicon tetrachloride liquid entering cold hydrogenation reactor can enter reactor after needing to be vaporizated into gas.
Authorization Notice No. is CN202400856U, authorized announcement date is that the Chinese utility model patent on August 29th, 2012 discloses a kind of silicon tetrachloride vaporization device, silicon tetrachloride vaporization device is provided with heat conductive oil inlet and thermal oil outlet, its region respectively by division plate segmentation is communicated with heat transfer tube, reaches the object of heat exchange.Silicon tetrachloride liquid enters vaporizer by pipe, by with the thermal oil heat exchange in heat transfer tube, reach thermal exchange, the object of vaporizing silicon tetrachloride.Silicon tetrachloride gas after vaporization derives vaporizer by silicon tetrachloride air outlet.Further, the various materials can also regularly removed the various impurity in gasifying liquid by blow-off pipe and not easily vaporize; Measured the amount injecting silicon tetrachloride by liquidometer, thus ensure that in vaporizer, silicon tetrachloride can high-efficient gasification.What this utility model vaporizing silicon tetrachloride adopted is exactly with the heat vaporized silicon tetrachloride of high temperature heat conductive oil, adopts the defect of this vaporization mode to be:
1, vaporization adopts high temperature heat conductive oil, and need to consume a large amount of high temperature heat conductive oils, vaporization cost is higher;
2, when vaporizing silicon tetrachloride, need ceaselessly to pass into high temperature heat conductive oil, thermal losses is larger;
3, due to the use of high temperature heat conductive oil, need strict seal, the poorly sealed leakage that will cause thermal oil, produces wayward;
4, silicon tetrachloride is after changing into trichlorosilane, the temperatures as high of the mixed gas of discharge about 500 DEG C, and this part high-temperature gas mixture body does not directly enter downstream wet scrubbing flow process through recycling, and causes the waste of heat.
Utility model content
In order to overcome the thermal waste that existing silicon tetrachloride vaporization device exists, the defect that high-temperature heat-conductive oilconsumption is large, vaporization cost is high, the utility model provides a kind of silicon tetrachloride vaporization device, this vaporizer makes full use of the heat vaporizing silicon tetrachloride in the hot synthesis gas of silicon tetrachloride after carrying out cold hydrogenation, greatly reduce the consumption of energy, do not re-use high temperature heat conductive oil simultaneously, greatly reduce vaporization cost.
In order to solve the problems of the technologies described above, the technical solution adopted in the utility model is:
A kind of silicon tetrachloride vaporization device, it is characterized in that: comprise vaporization tank body and heat transfer tube, heat transfer tube longitudinal arrangement is in vaporization tank body, the top of vaporization tank body is provided with synthesis gas import, vaporization tank base is provided with synthesis gas outlet, gasifying pot body side surface is provided with silicon tetrachloride liquid import and silicon tetrachloride pneumatic outlet, and synthesis gas import is connected with heat transfer tube with synthesis gas outlet, and silicon tetrachloride liquid import is communicated with vaporization tank body with silicon tetrachloride pneumatic outlet.
Also comprise traverse baffle, traverse baffle is vertically connected on heat transfer tube.
Described heat transfer tube has many, is parallel to each other and is arranged in vaporization tank body; Described traverse baffle has polylith, arranged in parallel, and heat transfer tube passes perpendicularly through traverse baffle.
The utility model has the following advantages:
The utility model comprises vaporization tank body, traverse baffle and heat transfer tube, heat transfer tube longitudinal arrangement is in vaporization tank body, traverse baffle is vertically connected on heat transfer tube, the top of vaporization tank body is provided with synthesis gas import, vaporization tank base is provided with synthesis gas outlet, gasifying pot body side surface is provided with silicon tetrachloride liquid import and silicon tetrachloride pneumatic outlet, synthesis gas import is connected with heat transfer tube with synthesis gas outlet, silicon tetrachloride liquid import is communicated with vaporization tank body with silicon tetrachloride pneumatic outlet, described heat transfer tube has many, be parallel to each other and be arranged in vaporization tank body, described traverse baffle has polylith, arranged in parallel, and heat transfer tube passes perpendicularly through traverse baffle.Synthesis gas import of the present utility model passes into the hot synthesis gas (about 500 DEG C) after silicon tetrachloride cold hydrogenation, this hot synthesis gas enters in heat transfer tube, the silicon tetrachloride (180 DEG C) of liquid passes into from silicon tetrachloride liquid import, silicon tetrachloride liquid becomes with heat transfer tube Contact Evaporating to export from silicon tetrachloride gas (180 DEG C) after gas discharges, complete the vaporization of silicon tetrachloride, the synthesis gas in heat transfer tube is discharged from synthesis gas (about 350 DEG C) outlet; Whole vaporescence does not use thermal oil to carry out vaporizing silicon tetrachloride, reduce vaporization cost, there is no the participation of thermal oil simultaneously, also the leakage of thermal oil would not be caused, and heat of the present utility model is from the hot synthesis gas after silicon tetrachloride cold hydrogenation, recycling is carried out to the heat in this gas, instead of directly entered downstream wet scrubbing flow process, greatly reduce the consumption of energy, and then reduce the vaporization cost of silicon tetrachloride.And the effect of traverse baffle in the utility model is the flow area increasing silicon tetrachloride liquid, improve vaporization efficiency.
Accompanying drawing explanation
Fig. 1 is the utility model one-piece construction schematic diagram;
Fig. 2 is the schematic diagram that vaporizer is connected in silicon tetrachloride cold hydrogenation system.
Mark 1, silicon tetrachloride vaporization device in figure, 10, vaporization tank body, 11, heat transfer tube, 12, synthesis gas import, 13, synthesis gas outlet, 14, silicon tetrachloride liquid import, 15, silicon tetrachloride pneumatic outlet, 16, traverse baffle, 2, electric heater, 3, cold hydrogenation reactor, 4, dedusting washing tower.
Embodiment
The utility model is that the power consumption of thermal oil vaporizing silicon tetrachloride existence is high, thermal oil usage quantity large, the improvement that the defect that the synthesis gas heat after silicon tetrachloride cold hydrogenation is not recycled is carried out for adopting at present.
Key point of the present utility model is that the synthesis gas after by silicon tetrachloride cold hydrogenation replaces thermal oil to carry out vaporizing silicon tetrachloride, thus overcomes above-mentioned defect.
The utility model is elaborated below in conjunction with specific embodiment:
Embodiment 1
As shown in Figure 1, the present embodiment comprises a vaporization tank body 10, arranges synthesis gas import 12 at the top of vaporization tank body 10, arranges synthesis gas outlet 13 in the bottom of vaporization tank body, in vaporization tank body, longitudinally arrange many heat transfer tubes 11, heat transfer tube 11 is arranged in parallel; Heat transfer tube 11 one end is connected with synthesis gas import 12, and the other end and synthesis gas export 13 and be connected; Synthesis gas enters from synthesis gas import 12, then enters in every root heat transfer tube 11, finally flows out from synthesis gas outlet 13; The synthesis gas temperature flow in heat transfer tube is approximately 500 DEG C, and the temperature flowed out after synthesis gas outlet 13 is approximately 350 DEG C; The side of vaporization tank body 10 is provided with silicon tetrachloride liquid import 14 and silicon tetrachloride gas outlet 15, silicon tetrachloride liquid import 14 is connected with vaporization tank body 10 with silicon tetrachloride gas outlet 15, silicon tetrachloride liquid flows in vaporization tank body 10 from silicon tetrachloride liquid import 14, contact with heat transfer tube 11, be vaporized into silicon tetrachloride gas to discharge from silicon tetrachloride pneumatic outlet 15, thus reach the object of vaporizing silicon tetrachloride.The temperature entering the silicon tetrachloride liquid in vaporization tank body 10 is about 180 DEG C, is about 180 DEG C from the temperature of the silicon tetrachloride gas of silicon tetrachloride gas outlet 15 discharge.The whole vaporescence of the present embodiment does not use thermal oil to carry out vaporizing silicon tetrachloride, reduce vaporization cost, there is no the participation of thermal oil simultaneously, also the leakage of thermal oil would not be caused, and the heat of this present embodiment is from the hot synthesis gas after silicon tetrachloride cold hydrogenation, recycling is carried out to the heat in this gas, instead of directly entered downstream wet scrubbing flow process, greatly reduce the consumption of energy, and then reduce the vaporization cost of silicon tetrachloride.
Embodiment 2
As shown in Figure 1, the present embodiment comprises a vaporization tank body 10, arranges synthesis gas import 12 at the top of vaporization tank body 10, arranges synthesis gas outlet 13 in the bottom of vaporization tank body, in vaporization tank body, longitudinally arrange many heat transfer tubes 11, heat transfer tube 11 is arranged in parallel; Heat transfer tube 11 one end is connected with synthesis gas import 12, and the other end and synthesis gas export 13 and be connected; Synthesis gas enters from synthesis gas import 12, then enters in every root heat transfer tube 11, finally flows out from synthesis gas outlet 13; The synthesis gas temperature flow in heat transfer tube is approximately 500 DEG C, and the temperature flowed out after synthesis gas outlet 13 is approximately 350 DEG C; The side of vaporization tank body 10 is provided with silicon tetrachloride liquid import 14 and silicon tetrachloride gas outlet 15, silicon tetrachloride liquid import 14 is connected with vaporization tank body 10 with silicon tetrachloride gas outlet 15, silicon tetrachloride liquid flows in vaporization tank body 10 from silicon tetrachloride liquid import 14, contact with heat transfer tube 11, be vaporized into silicon tetrachloride gas to discharge from silicon tetrachloride pneumatic outlet 15, thus reach the object of vaporizing silicon tetrachloride.The temperature entering the silicon tetrachloride liquid in vaporization tank body 10 is about 180 DEG C, is about 180 DEG C from the temperature of the silicon tetrachloride gas of silicon tetrachloride gas outlet 15 discharge.
The present embodiment also comprises traverse baffle 16, and traverse baffle 16 is vertically connected on heat transfer tube 11.Described heat transfer tube 11 has many, is parallel to each other and is arranged in vaporization tank body 10; Described traverse baffle 16 has polylith, arranged in parallel, and heat transfer tube 11 passes perpendicularly through traverse baffle 16.The whole vaporescence of the present embodiment does not use thermal oil to carry out vaporizing silicon tetrachloride, reduce vaporization cost, there is no the participation of thermal oil simultaneously, also the leakage of thermal oil would not be caused, and the heat of this present embodiment is from the hot synthesis gas after silicon tetrachloride cold hydrogenation, recycling is carried out to the heat in this gas, instead of directly entered downstream wet scrubbing flow process, greatly reduce the consumption of energy, and then reduce the vaporization cost of silicon tetrachloride.The effect of the traverse baffle arranged is the flow area increasing silicon tetrachloride liquid, improves vaporization efficiency.
Embodiment 3
As depicted in figs. 1 and 2, the silicon tetrachloride vaporization device 1 provided by the utility model is connected in silicon tetrachloride cold hydrogenation system, be passed in cold hydrogenation reactor 3 after silicon tetrachloride gas after vaporization and hydrogen electric heater 2 are heated to 550 DEG C and carry out cold hydrogenation with silicon, reacted synthesis gas is connected in the synthesis gas import 12 of silicon tetrachloride vaporization device 1 by pipeline, and synthesis gas outlet 13 is connected on dedusting washing tower 4 by pipeline.The heat of the synthesis gas after cold like this hydrogenation obtains further recycling, instead of directly dedusting washing, and heat re-uses, and energy consumption reduces.
Claims (3)
1. a silicon tetrachloride vaporization device, it is characterized in that: comprise vaporization tank body and heat transfer tube, heat transfer tube longitudinal arrangement is in vaporization tank body, the top of vaporization tank body is provided with synthesis gas import, vaporization tank base is provided with synthesis gas outlet, gasifying pot body side surface is provided with silicon tetrachloride liquid import and silicon tetrachloride pneumatic outlet, and synthesis gas import is connected with heat transfer tube with synthesis gas outlet, and silicon tetrachloride liquid import is communicated with vaporization tank body with silicon tetrachloride pneumatic outlet.
2. a kind of silicon tetrachloride vaporization device according to claim 1, it is characterized in that: also comprise traverse baffle, traverse baffle is vertically connected on heat transfer tube.
3. a kind of silicon tetrachloride vaporization device according to claim 2, is characterized in that: described heat transfer tube has many, is parallel to each other and is arranged in vaporization tank body; Described traverse baffle has polylith, arranged in parallel, and heat transfer tube passes perpendicularly through traverse baffle.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520191892.8U CN204529328U (en) | 2015-04-01 | 2015-04-01 | A kind of silicon tetrachloride vaporization device |
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| CN201520191892.8U CN204529328U (en) | 2015-04-01 | 2015-04-01 | A kind of silicon tetrachloride vaporization device |
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| CN204529328U true CN204529328U (en) | 2015-08-05 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106082235A (en) * | 2016-06-17 | 2016-11-09 | 宜昌南玻硅材料有限公司 | A kind of apparatus and method mixed for STC vaporization and hydrogen |
| CN117654065A (en) * | 2024-02-02 | 2024-03-08 | 浙江赛勒新能源材料有限公司 | Silicon tetrachloride vaporization system and vaporization process for polysilicon cold hydrogenation device |
-
2015
- 2015-04-01 CN CN201520191892.8U patent/CN204529328U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106082235A (en) * | 2016-06-17 | 2016-11-09 | 宜昌南玻硅材料有限公司 | A kind of apparatus and method mixed for STC vaporization and hydrogen |
| CN106082235B (en) * | 2016-06-17 | 2018-06-15 | 宜昌南玻硅材料有限公司 | A kind of device and method for STC vaporizations and hydrogen mixing |
| CN117654065A (en) * | 2024-02-02 | 2024-03-08 | 浙江赛勒新能源材料有限公司 | Silicon tetrachloride vaporization system and vaporization process for polysilicon cold hydrogenation device |
| CN117654065B (en) * | 2024-02-02 | 2024-04-26 | 浙江赛勒新能源材料有限公司 | Silicon tetrachloride vaporization system and vaporization process for polysilicon cold hydrogenation device |
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