CN202400852U - Polycrystalline silicon hydrogenation furnace tail gas energy saving system - Google Patents
Polycrystalline silicon hydrogenation furnace tail gas energy saving system Download PDFInfo
- Publication number
- CN202400852U CN202400852U CN2011205476181U CN201120547618U CN202400852U CN 202400852 U CN202400852 U CN 202400852U CN 2011205476181 U CN2011205476181 U CN 2011205476181U CN 201120547618 U CN201120547618 U CN 201120547618U CN 202400852 U CN202400852 U CN 202400852U
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- gas
- tail gas
- hydrogenation furnace
- heat exchanger
- vaporizer
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
- Y02P20/129—Energy recovery, e.g. by cogeneration, H2recovery or pressure recovery turbines
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Abstract
The utility model relates to a polycrystalline silicon hydrogenation furnace tail gas energy saving system which is used for cooling the tail gas of a hydrogenation furnace and vaporizing and heating a material fed into the hydrogenation furnace. The system comprises a vaporizer (1), a hydrogenation furnace (2), a gas-gas heat exchanger (3) and a cooler (4), wherein the tail gas outlet of the hydrogenation furnace (2) is connected with the tail gas inlet of the cooler (4), the tail gas outlet of the cooler (4) is connected with the tail gas inlet of the gas-gas heat exchanger (3), the tail gas outlet of the gas-gas heat exchanger (3) is connected with the vaporizer (1), and the tail gas outlet of the vaporizer (1) is connected with CDI; and a mixed gas of TCS and H2 enters the vaporizer (1), the mixed gas of TCS and H2 coming out of the vaporizer (1) enters the gas-gas heat exchanger (3), and the mixed gas of TCS and H2 coming out of the gas-gas heat exchanger (3) enters the hydrogenation furnace (2). With the system, the temperature of the mixed gas of TCS and H2 entering the hydrogenation furnace (2) can be increased by effectively utilizing the waste heat of the tail gas, so that the effects of saving energy resources and reducing cost are achieved.
Description
Technical field
The utility model relates to polysilicon hydrogenation furnace tail gas energy conserving system.This system is used for cooling of hydrogenation furnace tail gas and hydrogenation furnace charging vaporization, heats.Belong to hydrogenation heat recovery technology.
Background technology
Under the energy situation and ecotope pressure of sternness, under the brute force of technical progress and rules policy promoted, world's photovoltaic industry got into fast-developing period.Along with the fast development of photovoltaic industry, promoted polysilicon investment and production upsurge.Hydrogenation furnace is the nucleus equipment in the production of polysilicon.Gasiform STC (silicon tetrachloride) and H
2In the hot environment of hydrogenation furnace, react, generate reduction furnace desired raw material TCS (trichlorosilane), get back to react in the hydrogenation furnace generating TCS after the STC that the reduction furnace reaction produces reclaims once more, so cyclic production reduces cost energy-saving and emission-reduction to reach.
Present most polysilicon factory all adopts the improvement Siemens Method, and STC vaporization back and hydrogen are got into the hydrogenation furnace reaction simultaneously, changes CDI (tail gas recycle operation) over to after reacted high-temperature tail gas progressively cools off with water cooler and separates various compositions then step by step.Most producers adopt STC to 90 ℃ of steam heating vaporization, and the hydrogen that the STC of vaporization and cleaning section are come is formed gas mixture and got into the hydrogenation furnace reaction, and high-temperature tail gas is cooled to 120 ℃ step by step through water coolant and gets into CDI.The STC of vaporization gets into hydrogenation furnace fully, can cause the hydrogenation furnace heating element to break, and causes blowing out, need guarantee to get into hydrogenation furnace after STC vaporizes fully.90 ℃ of mixed gas entering hydrogenation furnaces need be heated to about 1200 ℃ and react a large amount of electric energy of hydrogenation furnace reaction needed consumption.
Summary of the invention
The purpose of the utility model is to overcome above-mentioned deficiency, provides a kind of using waste heat from tail gas that can effectively utilize to improve STC and the H that gets into hydrogenation furnace
2The polysilicon hydrogenation furnace tail gas energy conserving system of mixed gas temperature.
The purpose of the utility model is achieved in that a kind of polysilicon hydrogenation furnace tail gas energy conserving system; Said system comprises vaporizer, hydrogenation furnace, gas-gas heat exchanger and water cooler; The tail gas outlet of said hydrogenation furnace is connected with the tail gas import of water cooler; The tail gas outlet of water cooler is connected with the tail gas import of gas-gas heat exchanger, and the tail gas outlet of gas-gas heat exchanger links to each other with the tail gas import of vaporizer, and the tail gas outlet of vaporizer inserts CDI; TCS and H
2Mixed gas inserts vaporizer, goes out the TCS and the H of vaporizer
2Mixed gas inserts gas-gas heat exchanger, goes out the TCS and the H of gas-gas heat exchanger
2Mixed gas inserts hydrogenation furnace.
The beneficial effect of the utility model is:
1, tail gas is cooled to 120 ℃, utilizes its heat mixed gas (STC+ H
2), make mixed gas ideal gas state get into hydrogenation furnace.
2, adopt native system can save the required steam of vaporization STC, save the energy, reduce cost.
3, system has improved gas mixture (STC+ H
2) get into hydrogenation furnace temperature, reduce the hydrogenation furnace energy consumption, and what guarantee to get into hydrogenation furnace all is gas, avoid liquid to get into causing that important heating unit damages in the hydrogenation furnace.
4, the native system water cooler satisfies the tail gas chilling, guarantees the transformation efficiency of hydrogenation, guarantees that the exhaust temperature that gets into subordinate equipment is lower than 500 ℃, guarantees subordinate equipment selection economy.
5, native system can satisfy 120 ℃ of exhaust temperatures that get into CDI.
6, native system is recycled tail gas heat quantity, realizes the energy cycle utilization.
To sum up, native system efficiently utilizes 700 ℃ of using waste heat from tail gas to improve mixed gas (STC+ H
2) get into the hydrogenation furnace temperature, reduce hydrogenation furnace current consumption, and then reach energy-conservation effect, save energy reduces cost.Tail gas is cooled to 120 ℃ and gets into CDI simultaneously, simplifies flow process and equipment, reduces cost.
Description of drawings
Fig. 1 is the overall structure synoptic diagram of the utility model polysilicon hydrogenation furnace tail gas energy conserving system.
Reference numeral among the figure:
Vaporizer 1
Hydrogenation furnace 2
Gas-gas heat exchanger 3
Water cooler 4.
Embodiment
Referring to Fig. 1, Fig. 1 is the overall structure synoptic diagram of the utility model polysilicon hydrogenation furnace tail gas energy conserving system.Can find out by Fig. 1; The utility model polysilicon hydrogenation furnace tail gas energy conserving system; Comprise vaporizer 1, hydrogenation furnace 2, gas-gas heat exchanger 3 and water cooler 4, the tail gas outlet of said hydrogenation furnace 2 is connected with the tail gas import of water cooler 4, and the tail gas outlet of water cooler 4 is connected with the tail gas import of gas-gas heat exchanger 3; The tail gas outlet of gas-gas heat exchanger 3 inserts vaporizer 1, and the tail gas outlet of vaporizer 1 inserts CDI; TCS and H
2Mixed gas inserts vaporizer 1, goes out the TCS and the H of vaporizer 1
2Mixed gas inserts gas-gas heat exchanger 3, goes out the TCS and the H of gas-gas heat exchanger 3
2Mixed gas inserts hydrogenation furnace 2.
Said gas-gas heat exchanger 3 is a U type tube heat-exchanger.
The charging flow process:
STC and clean H
2In vaporizer 1, with the vaporization of the waste heat of tail gas and be superheated to certain temperature, go out vaporizer 1 back and get into gas-gas heat exchanger 3.Tail gas and mixed gas (STC+ H in gas-gas heat exchanger 3
2) the completion heat transfer process, mixed gas (STC+ H
2) temperature further improves, exhaust temperature progressively descends, and reaches mixed gas (the STC+ H of certain temperature
2) go out gas-gas heat exchanger 3 back and get into hydrogenation furnaces 2.
Exhaust gas flow path:
The tail gas that goes out hydrogenation furnace 2 inserts water cooler 4; After being chilled to suitable temperature with the water coolant heat exchange; The outlet of water cooler 4 tail gas inserts gas-gas heat exchanger 3; Tail gas provides heat as heating medium in gas-gas heat exchanger 3, the tail gas that goes out from gas-gas heat exchanger 3 inserts vaporizer 1, and tail gas is cooled to 120 ℃ and gets into CDI in vaporizer 1.
Claims (2)
1. polysilicon hydrogenation furnace tail gas energy conserving system; It is characterized in that: said system comprises vaporizer (1), hydrogenation furnace (2), gas-gas heat exchanger (3) and water cooler (4); The tail gas outlet of said hydrogenation furnace (2) is connected with the tail gas import of water cooler (4); The tail gas outlet of water cooler (4) is connected with the tail gas import of gas-gas heat exchanger (3), and the tail gas outlet of gas-gas heat exchanger (3) inserts vaporizer (1), and the tail gas outlet of vaporizer (1) inserts the tail gas recycle operation; TCS and H
2Mixed gas inserts vaporizer (1), goes out the TCS and the H of vaporizer (1)
2Mixed gas inserts gas-gas heat exchanger (3), goes out the TCS and the H of gas-gas heat exchanger (3)
2Mixed gas inserts hydrogenation furnace (2).
2. a kind of polysilicon hydrogenation furnace tail gas energy conserving system according to claim 1 is characterized in that: said gas-gas heat exchanger (3) is a U type tube heat-exchanger.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205476181U CN202400852U (en) | 2011-12-24 | 2011-12-24 | Polycrystalline silicon hydrogenation furnace tail gas energy saving system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205476181U CN202400852U (en) | 2011-12-24 | 2011-12-24 | Polycrystalline silicon hydrogenation furnace tail gas energy saving system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202400852U true CN202400852U (en) | 2012-08-29 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011205476181U Expired - Fee Related CN202400852U (en) | 2011-12-24 | 2011-12-24 | Polycrystalline silicon hydrogenation furnace tail gas energy saving system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202400852U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102838119A (en) * | 2012-09-19 | 2012-12-26 | 特变电工新疆硅业有限公司 | Heat recovery process and system in hydrogenated and reduced tail gas |
| CN102838118A (en) * | 2012-09-19 | 2012-12-26 | 特变电工新疆硅业有限公司 | Heat recovery process and system in polycrystalline-silicon tail gas drying-method recovery system |
| CN107512719A (en) * | 2016-06-15 | 2017-12-26 | 新特能源股份有限公司 | Polycrystalline silicon reduction exhaust residual-heat utilization method and system |
-
2011
- 2011-12-24 CN CN2011205476181U patent/CN202400852U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102838119A (en) * | 2012-09-19 | 2012-12-26 | 特变电工新疆硅业有限公司 | Heat recovery process and system in hydrogenated and reduced tail gas |
| CN102838118A (en) * | 2012-09-19 | 2012-12-26 | 特变电工新疆硅业有限公司 | Heat recovery process and system in polycrystalline-silicon tail gas drying-method recovery system |
| CN107512719A (en) * | 2016-06-15 | 2017-12-26 | 新特能源股份有限公司 | Polycrystalline silicon reduction exhaust residual-heat utilization method and system |
| CN107512719B (en) * | 2016-06-15 | 2019-11-12 | 新特能源股份有限公司 | Polycrystalline silicon reduction exhaust residual-heat utilization method and system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: JIANGSU SHUANGLIANG NEW ENERGY EQUIPMENT CO., LTD. Free format text: FORMER OWNER: SHUANGLIANG BOILER CO., LTD. JIANGSU Effective date: 20121107 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20121107 Address after: 214444 Jiangsu city of Wuxi province Jiangyin City Li Town Road No. 115 West Patentee after: Shuangliang New Energy Equipment Co., Ltd. Address before: 214444 Jiangsu city of Wuxi province Jiangyin City Li Town Road No. 1 West Patentee before: Shuangliang Boiler Co., Ltd. Jiangsu |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120829 Termination date: 20191224 |