CN102838119A - Heat recovery process and system in hydrogenated and reduced tail gas - Google Patents
Heat recovery process and system in hydrogenated and reduced tail gas Download PDFInfo
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- CN102838119A CN102838119A CN2012103486417A CN201210348641A CN102838119A CN 102838119 A CN102838119 A CN 102838119A CN 2012103486417 A CN2012103486417 A CN 2012103486417A CN 201210348641 A CN201210348641 A CN 201210348641A CN 102838119 A CN102838119 A CN 102838119A
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Abstract
The invention discloses a heat recovery process in hydrogenated and reduced tail gas. The heat recovery process comprises the following steps: a1, the tail gas at the temperature of 80-150 DEG C is cooled by a water cooler and heat exchange of circulating water, the temperature of the tail gas is reduced to 40-60 DEG C; a2, the tail gas at the temperature of 40-80 DEG C and analyzed hydrogen chloride liquid with the low temperature of minus 40 DEG C are subjected to heat-exchang by a vaporizer, and the hydrogen chloride liquid with the temperature of minus 40 DEG C is heated into hydrogen chloride gas with the temperature of 10-20 DEG C for synthesis use of trichlorosilane; and a3, the flow of the tail gas with the temperature of 40-60 DEG C entering into the vaporizer is adjusted by a bypass valve, and the vaporizing amount of the liquid hydrogen chloride with the temperature of minus 40 DEG C in the vaporizer and the outlet temperature of the hydrogen chloride of the vaporizer are controlled. The heat recovery process disclosed by the invention realizes comprehensive utilization of a great amount of heat energy carried by hydrogenated tail gas or reduced tail gas and a great amount of cold energy carried by the hydrogen chloride liquid with the temperature of minus 40 DEG C. The invention also discloses a heat recovery system in the hydrogenated and reduced tail gas.
Description
Technical field
The present invention relates to a kind of field of polysilicon production, be specifically related to improve Siemens Method and produce the hydrogenation tail gas of polysilicon, reduction tail gas recycle field.
Background technology
Produce hydrogenation tail gas, the reduction exhaust gas recovery system of polysilicon at the improvement Siemens Method; The low pressure condensing zone mainly is to adopt step by step the refrigerative mode to cool off; The employing electric heater of liquid hydrogenchloride is delivered to the synthetic use of trichlorosilane after heating vaporization in the exhaust gas recovery system simultaneously; The high-temperature barren liquor chlorosilane that hydrogenation tail gas, reduction exhaust gas recovery system high pressure are resolved the parsing Tata still discharge of distinguishing is carried with pump through after the interchanger water-cooled again.Synthesis tail gas recovery system mesohigh is resolved district's tower still reboiler and is used steam to heat, and idiographic flow is following:
Hydrogenation tail gas or reduction exhaust gas recovery system low pressure area: the compositions such as hydrogen, hydrogenchloride, dichloro-dihydro silicon, trichlorosilane and silicon tetrachloride in 80～150 ℃ of tail gas are through tail gas water cooler, tail gas gas-to-gas heat exchanger ,-20 ℃ of chilled brine interchanger and tail gas supercooler; Exhaust temperature is reduced to-30～-45 ℃; Utilize the boiling point of each component in the tail gas different, wherein dichloro-dihydro silicon, trichlorosilane and silicon tetrachloride are condensed and are stored in the chlorosilane surge tank.
At the Analytic Tower cat head ,-40 hydrogenchloride liquid are delivered to vaporizer and are carried out the electrically heated vaporization by extraction.
Tail gas carries a large amount of caloric requirement refrigerants and cools off the consumption cold gradually in said process, needs thermal source to heat consumption of calorie and-40 ℃ of hydrogenchloride liquid carry great amount of cold.Can find out that in this process the improvement Siemens Method produces the cold that tail gas carries in the hydrogenation tail gas of polysilicon, the reduction exhaust gas recovery system heat and-40 ℃ of hydrogenchloride liquid carry and effectively do not utilize, hydrogenation tail gas, reduction exhaust gas recovery system heat integration are unreasonable.
Summary of the invention
Technical problem to be solved by this invention is to hydrogenation tail gas, reduction exhaust gas recovery system heat energy utilization irrationality in the improvement Siemens Method of producing polysilicon; The method of a kind of hydrogenation tail gas, reduction exhaust gas recovery system heat integration is provided, reduces the energy consumption of hydrogenation tail gas, reduction exhaust gas recovery system.
The object of the invention comes concrete the realization through following technical scheme:
A kind of hydrogenation tail gas or reduction exhaust heat-energy reclaim technology, comprise step:
A1,80～150 ℃ tail gas are lowered the temperature through water cooler and recirculated water heat exchange after, exhaust temperature is reduced to 40～60 ℃;
A2,40～60 ℃ tail gas with parse, carry out heat exchange by low temperature-40 ℃ hydrogenchloride liquid through vaporizer, will-40 ℃ the hydrogenchloride liquid heat become 10～20 ℃ of hydrogen chloride gas to supply that trichlorosilanes are synthetic to be used;
A3, regulate the flow that 40～60 ℃ hydrogenation tail gas gets into vaporizer, the evaporating capacity of-40 ℃ of liquid hydrogenchloride and the hydrogenchloride temperature out of vaporizer in the control vaporizer through by-pass valve;
Among a4, the step a3,40～60 ℃ tail gas is cooled to 15～25 ℃, sends into next equipment and continues cooling;
A5,40～60 ℃ tail gas are being got into the chlorosilane surge tank by the chlorosilane of condensation in-40 ℃ of hydrogenchloride liquid temperature-fall periods through the control of vaporizer tube side tapping line showering guilding valve, carry out chlorosilane and recycle, and also can prevent that solution stopping is stifled simultaneously.
Said 80～150 ℃ tail gas is from hydrogenation tail gas or reduction exhaust gas recovery system, to derive.
Said-40 ℃ of hydrogenchloride liquid parse from the Analytic Tower cat head, are obtained by cryogenic condensation.
A kind of hydrogenation tail gas or reduction exhaust heat-energy recovery system; Comprise water cooler, vaporizer; The fluid intake that is cooled of said water cooler is communicated with 80～150 ℃ gas inlet, and the fluid outlet that is cooled of said water cooler is communicated with the fluid intake that is cooled of said vaporizer.
The fluid intake that is cooled of said vaporizer is provided with by-pass valve, makes the temperature of tail gas of the fluid outlet that is cooled of said vaporizer reduce to 15～25 ℃.
The fluid intake that is heated of said vaporizer is communicated with-40 ℃ of hydrogenchloride fluid supplies, and the fluid outlet that is heated of said vaporizer forms 10～20 ℃ of hydrogen chloride gas.
Said vaporizer is provided with the chlorosilane outlet, and the conduit that the outlet of said chlorosilane connects is communicated with the chlorosilane surge tank.
On said conduit, be provided with vaporizer tube side tapping line showering guilding valve.
The present invention has realized hydrogenation tail gas or reduction tail gas a large amount of heats and-40 ℃ of great amount of cold that hydrogenchloride liquid carries of carrying are fully utilized.
Compare with existing hydrogenation solvent recovery technology from vent gas and reduction solvent recovery technology from vent gas; The inventive method technical process is simple; Energy consumption is low; The extraction of Analytic Tower cat head obtain-40 ℃ of hydrogenchloride liquid can be directly as the heat-eliminating medium of tail gas in hydrogenation tail gas or the reduction exhaust gas recovery system, and the thermal source of tail gas directly conduct-40 ℃ hydrogenchloride vaporizing liquid.Promptly-40 ℃ hydrogenchloride liquid is heated into hydrogen chloride gas by tail gas, and tail gas is by-40 ℃ of hydrogenchloride liquid cooling coolings simultaneously.The present invention has reduced the consumption of hydrogenation tail gas, reduction exhaust gas recovery system low pressure condensing zone cold, makes the cold and hot amount of hydrogenation tail gas, reduction exhaust gas recovery system obtain rationally utilizing fully.
Description of drawings
According to accompanying drawing and embodiment the present invention is done further explain below.
Fig. 1 is the structure iron of said hydrogenation tail gas of the embodiment of the invention or reduction exhaust heat-energy recovery system.
Embodiment
Embodiment one
As shown in Figure 1; Described hydrogenation tail gas of the embodiment of the invention or reduction exhaust heat-energy recovery system; Comprise water cooler 1, vaporizer 2; The fluid intake that is cooled of said water cooler 1 is communicated with 80～100 ℃ gas inlet, and the fluid outlet that is cooled of said water cooler 1 is communicated with the fluid intake that is cooled of said vaporizer 2.
The fluid intake that is cooled of said vaporizer 2 is provided with by-pass valve 3, makes the temperature of tail gas of the fluid outlet that is cooled of said vaporizer 2 reduce to 15～25 ℃.
The fluid intake that is heated of said vaporizer 2 is communicated with-40 ℃ of hydrogenchloride fluid supplies, and the fluid outlet that is heated of said vaporizer 2 forms 10～20 ℃ of hydrogen chloride gas.
Said vaporizer 2 is provided with the chlorosilane outlet, and the conduit that the outlet of said chlorosilane connects is communicated with the chlorosilane surge tank.
On said conduit, be provided with vaporizer tube side tapping line showering guilding valve 4.
The present invention has realized that a large amount of heats and-40 ℃ of great amount of cold that hydrogenchloride liquid carries that tail gas is carried fully utilize.
Compare with existing hydrogenation solvent recovery technology from vent gas and reduction solvent recovery technology from vent gas; The inventive method technical process is simple; Energy consumption is low; The extraction of Analytic Tower cat head obtain-40 ℃ of hydrogenchloride liquid can be directly as the heat-eliminating medium of tail gas in hydrogenation tail gas or the reduction exhaust gas recovery system, and the thermal source of tail gas directly conduct-40 ℃ hydrogenchloride vaporizing liquid.Promptly-40 ℃ hydrogenchloride liquid is heated into hydrogen chloride gas by tail gas, and tail gas is by-40 ℃ of hydrogenchloride liquid cooling coolings simultaneously.The present invention has reduced the consumption of hydrogenation tail gas, reduction exhaust gas recovery system low pressure condensing zone cold, makes the cold and hot amount of hydrogenation tail gas, reduction exhaust gas recovery system obtain rationally utilizing fully.
Hydrogenation exhaust heat-energy according to the invention reclaims technology, comprises step:
A1,150 ℃ tail gas are lowered the temperature through water cooler and recirculated water heat exchange after, exhaust temperature is reduced to 60 ℃;
A2,40～60 ℃ tail gas with parse, carry out heat exchange by low temperature-40 ℃ hydrogenchloride liquid through vaporizer, will-40 ℃ the hydrogenchloride liquid heat become 20 ℃ of hydrogen chloride gas to supply that trichlorosilanes are synthetic to be used;
A3, regulate the flow that 60 ℃ tail gas gets into vaporizer, the evaporating capacity of-40 ℃ of liquid hydrogenchloride and the hydrogenchloride temperature out of vaporizer in the control vaporizer through by-pass valve;
Among a4, the step a3,40～60 ℃ tail gas is cooled to 25 ℃, sends into next equipment and continues cooling;
A5,60 ℃ tail gas are being got into the chlorosilane surge tank by the chlorosilane of condensation in-40 ℃ of hydrogenchloride liquid temperature-fall periods through the control of vaporizer tube side tapping line showering guilding valve, carry out chlorosilane and recycle, and also can prevent that solution stopping is stifled simultaneously.
Said 80～150 ℃ tail gas is from hydrogenation tail gas or reduction exhaust gas recovery system, to derive.
Said-40 ℃ of hydrogenchloride liquid parse from the Analytic Tower cat head, are obtained by cryogenic condensation.
Embodiment two
Be that with the difference of embodiment one hydrogenation exhaust heat-energy according to the invention reclaims technology, comprises step:
A1,120 ℃ tail gas are lowered the temperature through water cooler and recirculated water heat exchange after, exhaust temperature is reduced to 50 ℃;
A2, tail gas and-40 ℃ of hydrogenchloride liquid of 50 ℃ carry out heat exchange through vaporizer, will-40 ℃ the hydrogenchloride liquid heat become 15 ℃ of hydrogen chloride gas to supply that trichlorosilanes are synthetic to be used;
A3, regulate the flow that 50 ℃ tail gas gets into vaporizer, the evaporating capacity of-40 ℃ of liquid hydrogenchloride and the hydrogenchloride temperature out of vaporizer in the control vaporizer through by-pass valve;
Among a4, the step a3,50 ℃ tail gas is cooled to 20 ℃, sends into next equipment and continues cooling;
A5,50 ℃ tail gas are being got into the chlorosilane surge tank by the chlorosilane of condensation in-40 ℃ of hydrogenchloride liquid temperature-fall periods through the control of vaporizer tube side tapping line showering guilding valve, carry out chlorosilane and recycle, and also can prevent that solution stopping is stifled simultaneously.
Embodiment three
Be that with the difference of embodiment one hydrogenation exhaust heat-energy according to the invention reclaims technology, comprises step:
A1,80 ℃ tail gas are lowered the temperature through water cooler and recirculated water heat exchange after, exhaust temperature is reduced to 40 ℃;
A2, tail gas and-40 ℃ of hydrogenchloride liquid of 40 ℃ carry out heat exchange through vaporizer, will-40 ℃ the hydrogenchloride liquid heat become 10 ℃ of hydrogen chloride gas to supply that trichlorosilanes are synthetic to be used;
A3, regulate the flow that 40 ℃ tail gas gets into vaporizer, the evaporating capacity of-40 ℃ of liquid hydrogenchloride and the hydrogenchloride temperature out of vaporizer in the control vaporizer through by-pass valve;
Among a4, the step a3,40 ℃ tail gas is cooled to 15 ℃, sends into next equipment and continues cooling;
A5,40 ℃ tail gas are being got into the chlorosilane surge tank by the chlorosilane of condensation in-40 ℃ of hydrogenchloride liquid temperature-fall periods through the control of vaporizer tube side tapping line showering guilding valve, carry out chlorosilane and recycle, and also can prevent that solution stopping is stifled simultaneously.
Claims (10)
1. a hydrogenation tail gas, reduction exhaust heat-energy reclaim technology, comprise step:
A1,80～150 ℃ tail gas are lowered the temperature through water cooler and recirculated water heat exchange after, exhaust temperature is reduced to 40～60 ℃;
A2,40～60 ℃ tail gas with parse, carry out heat exchange by low temperature-40 ℃ hydrogenchloride liquid through vaporizer, become 10～20 ℃ of hydrogen chloride gas subsequent use-40 ℃ of hydrogenchloride liquid heat;
A3, regulate the flow that 40～60 ℃ tail gas gets into vaporizer, the evaporating capacity of-40 ℃ of liquid hydrogenchloride and the hydrogenchloride temperature out of vaporizer in the control vaporizer through by-pass valve.
2. hydrogenation tail gas as claimed in claim 1, reduction exhaust heat-energy reclaim technology, it is characterized in that, said 80～150 ℃ tail gas is from hydrogenation tail gas or reduction exhaust gas recovery system, to derive.
3. hydrogenation tail gas as claimed in claim 1, reduction exhaust heat-energy reclaim technology, it is characterized in that said-40 ℃ of hydrogenchloride liquid parse from the Analytic Tower cat head, are obtained by cryogenic condensation.
4. reclaim technology like each described hydrogenation tail gas, reduction exhaust heat-energy in the claim 1 to 3, it is characterized in that also comprise among step: a4, the step a3,40～60 ℃ tail gas is cooled to 15～25 ℃.
5. hydrogenation tail gas as claimed in claim 4, reduction exhaust heat-energy reclaim technology; It is characterized in that, comprise that also step: a5,40～60 ℃ tail gas are being got into the chlorosilane surge tank by the chlorosilane of condensation in-40 ℃ of hydrogenchloride liquid temperature-fall periods through the control of vaporizer tube side tapping line showering guilding valve.
6. a hydrogenation tail gas, reduction exhaust heat-energy recovery system; It is characterized in that; Comprise water cooler, vaporizer, the fluid intake that is cooled of said water cooler is communicated with 80～150 ℃ gas inlet, and the fluid outlet that is cooled of said water cooler is communicated with the fluid intake that is cooled of said vaporizer.
7. hydrogenation tail gas as claimed in claim 6, reduction exhaust heat-energy recovery system is characterized in that the fluid intake that is cooled of said vaporizer is provided with by-pass valve, make the temperature of tail gas of the fluid outlet that is cooled of said vaporizer reduce to 15～25 ℃.
8. hydrogenation tail gas as claimed in claim 6, reduction exhaust heat-energy recovery system; It is characterized in that; The fluid intake that is heated of said vaporizer is communicated with-40 ℃ of hydrogenchloride fluid supplies, and the fluid outlet that is heated of said vaporizer forms 10～20 ℃ of hydrogen chloride gas.
9. hydrogenation tail gas as claimed in claim 6, reduction exhaust heat-energy recovery system it is characterized in that said vaporizer is provided with the chlorosilane outlet, and the conduit that the outlet of said chlorosilane connects are communicated with the chlorosilane surge tank.
10. hydrogenation tail gas as claimed in claim 9, reduction exhaust heat-energy recovery system is characterized in that, on said conduit, are provided with vaporizer tube side tapping line showering guilding valve.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012103486417A CN102838119A (en) | 2012-09-19 | 2012-09-19 | Heat recovery process and system in hydrogenated and reduced tail gas |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2012103486417A CN102838119A (en) | 2012-09-19 | 2012-09-19 | Heat recovery process and system in hydrogenated and reduced tail gas |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102039082A (en) * | 2010-06-09 | 2011-05-04 | 特变电工新疆硅业有限公司 | Method and device for vaporizing hydrogen chloride in tail gas in polycrystalline silicon production |
| CN202070276U (en) * | 2011-05-20 | 2011-12-14 | 四川亚连科技有限责任公司 | Purification device for polycrystalline silicon tail gas circulating condensation and scrubbing |
| CN102431972A (en) * | 2011-09-01 | 2012-05-02 | 上海优华系统集成技术有限公司 | Desorption tower heat energy utilization system for recovering hydrogen chloride in polycrystalline silicon production |
| CN202400852U (en) * | 2011-12-24 | 2012-08-29 | 江苏双良锅炉有限公司 | Polycrystalline silicon hydrogenation furnace tail gas energy saving system |
| CN202880904U (en) * | 2012-09-19 | 2013-04-17 | 新特能源股份有限公司 | Hydrogenated tail gas and reduced tail gas heat energy recovery system |
-
2012
- 2012-09-19 CN CN2012103486417A patent/CN102838119A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102039082A (en) * | 2010-06-09 | 2011-05-04 | 特变电工新疆硅业有限公司 | Method and device for vaporizing hydrogen chloride in tail gas in polycrystalline silicon production |
| CN202070276U (en) * | 2011-05-20 | 2011-12-14 | 四川亚连科技有限责任公司 | Purification device for polycrystalline silicon tail gas circulating condensation and scrubbing |
| CN102431972A (en) * | 2011-09-01 | 2012-05-02 | 上海优华系统集成技术有限公司 | Desorption tower heat energy utilization system for recovering hydrogen chloride in polycrystalline silicon production |
| CN202400852U (en) * | 2011-12-24 | 2012-08-29 | 江苏双良锅炉有限公司 | Polycrystalline silicon hydrogenation furnace tail gas energy saving system |
| CN202880904U (en) * | 2012-09-19 | 2013-04-17 | 新特能源股份有限公司 | Hydrogenated tail gas and reduced tail gas heat energy recovery system |
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Address after: 830011, room 716, Mustang building, No. 158, Kunming Road, the Xinjiang Uygur Autonomous Region, Urumqi Applicant after: Xinte Energy Co.,Ltd. Address before: 830011, room 716, Mustang building, No. 158, Kunming Road, the Xinjiang Uygur Autonomous Region, Urumqi Applicant before: TBEA Xinjiang Silicon Industry Co., Ltd. |
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Free format text: CORRECT: APPLICANT; FROM: TBEA XINJIANG SILICON INDUSTRY CO., LTD. TO: XINTE ENERGY CO., LTD. |
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Application publication date: 20121226 |