CN204514995U - For the high-accuracy voltage metering circuit that chip ATE tests - Google Patents
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- CN204514995U CN204514995U CN201520124595.1U CN201520124595U CN204514995U CN 204514995 U CN204514995 U CN 204514995U CN 201520124595 U CN201520124595 U CN 201520124595U CN 204514995 U CN204514995 U CN 204514995U
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Abstract
The utility model relates to a kind of high-accuracy voltage metering circuit of testing for chip ATE, belongs to circuit structure technical field.Have employed the high-accuracy voltage metering circuit of testing for chip ATE of structure, it comprises reference voltage generation module and error amplifies processing module, the output voltage of chip to be measured is all connected with the output terminal of described reference voltage generation module the input end that described error amplifies processing module, and described error amplifies the output terminal connecting test machine of processing module.Thus reference voltage generation module and error can be utilized to amplify processing module, amplify the difference between the output voltage of chip to be measured and reference voltage, and then ATE can be utilized to realize high-precision voltage measurement, and high-accuracy voltage metering circuit of testing for chip ATE of the present utility model, its structure is simple, with low cost, range of application is also quite extensive.
Description
Technical field
The utility model relates to circuit structure technical field, particularly tension measuring circuit technical field, specifically refers to a kind of high-accuracy voltage metering circuit of testing for chip ATE.
Background technology
Semi-conductor chip ATE (Automatic Test Equipment, test machine) volume production test is test step conventional during a kind of semi-conductor chip is produced, can widely use in the batch production of On-Wafer Measurement (CP:chip probe) and finished product test (FT:final test).
In the wafer of routine and the volume production test of finished product, for ensureing chip quality, every chips all has to pass through strict test just can give terminal client use.Along with the develop rapidly of electron trade, also more and more higher to the performance requirement of integrated circuit, and the voltage measurement accuracy of ATE cannot meet high-precision testing requirement, the voltage measurement accuracy of current ATE is substantially at more than 1mV, and high performance chip needs to reach 100uV, voltage measurement accuracy even more accurately, therefore how making existing ATE meet day by day high-precision chip testing needs becomes chip testing field problem demanding prompt solution.
Utility model content
The purpose of this utility model overcomes above-mentioned shortcoming of the prior art, there is provided a kind of to be amplified by reference voltage and error, make it possible to utilize ATE to realize high-precision voltage measurement, and structure is simple, with low cost, the high-accuracy voltage metering circuit of testing for chip ATE had wide range of applications.
In order to realize above-mentioned object, the high-accuracy voltage metering circuit for chip ATE test of the present utility model has following formation:
This high-accuracy voltage metering circuit being used for chip ATE test comprises reference voltage generation module and error amplifies processing module, the output voltage of chip to be measured is all connected with the output terminal of described reference voltage generation module the input end that described error amplifies processing module, and described error amplifies the output terminal connecting test machine of processing module.
This is used in the high-accuracy voltage metering circuit of chip ATE test, described error is amplified processing module and is comprised operational amplifier, the output voltage of described chip to be measured connects the in-phase input end of this operational amplifier by the first input resistance, the output terminal of described reference voltage generation module connects the inverting input of this operational amplifier by the second input resistance, the output terminal of this operational amplifier sequentially pass through output resistance be connected with the first feedback resistance described in in-phase input end, node between described output resistance and the first feedback resistance is the output terminal that this error amplifies processing module.
This is used in the high-accuracy voltage metering circuit that chip ATE tests, and described reference voltage generation module comprises an adjustable linear stable, and the error described in the output terminal of this is adjustable linear stable connects amplifies the input end of processing module.
Have employed the high-accuracy voltage metering circuit of testing for chip ATE of this utility model, it comprises reference voltage generation module and error amplifies processing module, the output voltage of chip to be measured is all connected with the output terminal of described reference voltage generation module the input end that described error amplifies processing module, and described error amplifies the output terminal connecting test machine of processing module.Thus reference voltage generation module and error can be utilized to amplify processing module, amplify the difference between the output voltage of chip to be measured and reference voltage, and then ATE can be utilized to realize high-precision voltage measurement, and high-accuracy voltage metering circuit of testing for chip ATE of the present utility model, its structure is simple, with low cost, range of application is also quite extensive.
Accompanying drawing explanation
Fig. 1 is the structured flowchart of the high-accuracy voltage metering circuit for chip ATE test of the present utility model.
Fig. 2 is the circuit diagram of the high-accuracy voltage metering circuit for chip ATE test of the present utility model.
Embodiment
In order to more clearly understand technology contents of the present utility model, describe in detail especially exemplified by following examples.
Referring to shown in Fig. 1, is the structured flowchart of the high-accuracy voltage metering circuit for chip ATE test of the present utility model.
In one embodiment, this high-accuracy voltage metering circuit being used for chip ATE test comprises reference voltage generation module and error amplifies processing module, the output voltage of chip to be measured is all connected with the output terminal of described reference voltage generation module the input end that described error amplifies processing module, and described error amplifies the output terminal connecting test machine of processing module.
In more preferably embodiment, as shown in Figure 2, described error is amplified processing module and is comprised operational amplifier OP27, the output voltage of described chip to be measured connects the in-phase input end of this operational amplifier OP27 by the first input resistance Rb1, the output terminal of described reference voltage generation module connects the inverting input of this operational amplifier OP27 by the second input resistance Rb2, the OP27 output terminal of this operational amplifier sequentially pass through output resistance Rb5 be connected with the first feedback resistance Rb3 described in in-phase input end, node between described output resistance Rb5 and the first feedback resistance Rb3 is the output terminal that this error amplifies processing module.
In preferred embodiment, described reference voltage generation module comprises an adjustable linear stable LT3020-ADJ, and the error described in the output terminal of this is adjustable linear stable LT3020-ADJ connects amplifies the input end of processing module.
In actual applications, for realizing high-precision voltage measurement, as shown in Figure 1, the utility model is between ATE and tested voltage, increase a reference voltage module and error amplification module, high-accuracy voltage test circuit of the present utility model can directly be applied on the loadboard (chip testing pcb board, also claims DUT board) of chip testing, to realize high-precision voltage measurement.
The principle of work of this tension measuring circuit is, tested voltage V1 and known reference voltage V 2 are input in error amplification module simultaneously, error amplification module will amplify the difference of two voltages (as shown in Figure 2, amplify 100 times, i.e. (V1-V2) × 100), need to be amplified within the scope of voltage accuracy that ATE can meet, then the voltage measurement source of ATE is adopted, can directly measure the voltage signal after amplification, obtain magnitude of voltage V3, again according to formula V1=(V3/100)+V2, accurate tested magnitude of voltage V1 will be obtained.
Specifically, the reference voltage generation module be made up of a power supply chip LT3020-ADJ and peripheral components thereof for the high-accuracy voltage metering circuit structure of chip ATE test of the present utility model, and the error of an operational amplifier OP27 and peripheral components composition amplifies processing module formation.LT3020-ADJ is an adjustable linear stable, can produce a voltage very accurately as required, and as shown in Figure 2, LT3020-ADJ creates the reference voltage of a 1.0V.The effect of operational amplifier OP27 is the voltage difference that can amplify two input ends, as shown in Figure 2, by input resistance (Rb1=Rb2=1K) and feedback resistance (Rb3=Rb4=100K), is provided with the enlargement factor of 100 times.
Suppose the chip output voltage needing a test 1.0001V, this voltage is accurate to 100uV.If adopt the voltage measurement source of ATE directly to measure, because the precision of ATE only can reach 1mV, the magnitude of voltage so tested out can be as accurate as 1.001V at most, and cannot measure real 1.0001V, and therefore existing ATE cannot arrive this measuring accuracy.
And in application of the present utility model, as shown in Figure 2, reference voltage (1.0V) and tested voltage (1.0001V) are input to respectively two input ends of operational amplifier OP27, the difference of such reference voltage and tested voltage, namely 100uV will be amplified 100 times by OP27, just 10000uV is obtained, namely 10mV at the output terminal of OP27.The magnitude of voltage of this 10mV is then complete in the accuracy rating in the voltage measurement source of ATE, so just directly can adopt the voltage measurement source of ATE, removes the output end voltage measuring OP27, just can obtain tested voltage accurately finally by formula.This just solves the ATE of low measuring accuracy cleverly, measures a difficult problem for high-precision voltage.
Benefit of the present utility model is, by this circuit structure, even if adopt the ATE voltage measurement source of general precision, also can realize high-precision voltage measurement.In actual mechanical process, we can also improve the enlargement factor of error amplification module, realize more high-precision voltage measurement.
Have employed the high-accuracy voltage metering circuit of testing for chip ATE of this utility model, it comprises reference voltage generation module and error amplifies processing module, the output voltage of chip to be measured is all connected with the output terminal of described reference voltage generation module the input end that described error amplifies processing module, and described error amplifies the output terminal connecting test machine of processing module.Thus reference voltage generation module and error can be utilized to amplify processing module, amplify the difference between the output voltage of chip to be measured and reference voltage, and then ATE can be utilized to realize high-precision voltage measurement, and high-accuracy voltage metering circuit of testing for chip ATE of the present utility model, its structure is simple, with low cost, range of application is also quite extensive.
In this description, the utility model is described with reference to its specific embodiment.But, still can make various amendment and conversion obviously and not deviate from spirit and scope of the present utility model.Therefore, instructions and accompanying drawing are regarded in an illustrative, rather than a restrictive.
Claims (3)
1. a high-accuracy voltage metering circuit of testing for chip ATE, it is characterized in that, comprise reference voltage generation module and error amplification processing module, the output voltage of chip to be measured is all connected with the output terminal of described reference voltage generation module the input end that described error amplifies processing module, and described error amplifies the output terminal connecting test machine of processing module.
2. the high-accuracy voltage metering circuit of chip ATE test according to claim 1, it is characterized in that, described error is amplified processing module and is comprised operational amplifier, the output voltage of described chip to be measured connects the in-phase input end of this operational amplifier by the first input resistance, the output terminal of described reference voltage generation module connects the inverting input of this operational amplifier by the second input resistance, the output terminal of this operational amplifier sequentially pass through output resistance be connected with the first feedback resistance described in in-phase input end, node between described output resistance and the first feedback resistance is the output terminal that this error amplifies processing module.
3. the high-accuracy voltage metering circuit of chip ATE test according to claim 1 and 2, it is characterized in that, described reference voltage generation module comprises an adjustable linear stable, and the error described in the output terminal of this is adjustable linear stable connects amplifies the input end of processing module.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520124595.1U CN204514995U (en) | 2015-03-04 | 2015-03-04 | For the high-accuracy voltage metering circuit that chip ATE tests |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201520124595.1U CN204514995U (en) | 2015-03-04 | 2015-03-04 | For the high-accuracy voltage metering circuit that chip ATE tests |
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| CN201520124595.1U Expired - Fee Related CN204514995U (en) | 2015-03-04 | 2015-03-04 | For the high-accuracy voltage metering circuit that chip ATE tests |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106501577A (en) * | 2016-12-14 | 2017-03-15 | 绍兴芯谷科技有限公司 | A kind of test system of accurate test IC reference voltages and method of testing |
| CN107656235A (en) * | 2017-10-31 | 2018-02-02 | 国网冀北电力有限公司电力科学研究院 | A kind of measurement apparatus and method of computation chip reference voltage |
| CN110687432A (en) * | 2019-10-18 | 2020-01-14 | 中国电子科技集团公司第五十八研究所 | Signal processing circuit for ATE |
| CN112213544A (en) * | 2019-07-09 | 2021-01-12 | 深圳市文鼎创数据科技有限公司 | Voltage detection circuit and voltage detection method |
-
2015
- 2015-03-04 CN CN201520124595.1U patent/CN204514995U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106501577A (en) * | 2016-12-14 | 2017-03-15 | 绍兴芯谷科技有限公司 | A kind of test system of accurate test IC reference voltages and method of testing |
| CN107656235A (en) * | 2017-10-31 | 2018-02-02 | 国网冀北电力有限公司电力科学研究院 | A kind of measurement apparatus and method of computation chip reference voltage |
| CN112213544A (en) * | 2019-07-09 | 2021-01-12 | 深圳市文鼎创数据科技有限公司 | Voltage detection circuit and voltage detection method |
| CN110687432A (en) * | 2019-10-18 | 2020-01-14 | 中国电子科技集团公司第五十八研究所 | Signal processing circuit for ATE |
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150729 Termination date: 20180304 |