CN204315618U - A kind of solar battery sheet preparation system - Google Patents
A kind of solar battery sheet preparation system Download PDFInfo
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- CN204315618U CN204315618U CN201520004215.0U CN201520004215U CN204315618U CN 204315618 U CN204315618 U CN 204315618U CN 201520004215 U CN201520004215 U CN 201520004215U CN 204315618 U CN204315618 U CN 204315618U
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- wool
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model discloses a kind of solar battery sheet preparation system, connected to form successively by battery slice etching burnishing device, cleaning device, oxidation unit, disperser, etching device, PECVD device, metallization apparatus; Described battery slice etching burnishing device comprises the preliminary texturing slot, the first tank, nitration mixture rinse bath, the second tank, polishing trough, the 3rd tank, texturing slot and the 4th tank that connect successively, and is located at the bottom roller for delivery silicon chip above each groove.The solar battery sheet preparation system that the utility model provides, the polished silicon slice back side obtains smooth surface, then only prepare black silicon suede structure in front, while reducing front side of silicon wafer reflectivity, improve backside reflection rate, reduce compound area, thus the voltage of lifting battery, electric current and efficiency, the black silion cell electrical property of effective lifting, and reduce the consumption of chemicals.
Description
Technical field
The utility model relates to technical field of solar, the solar battery sheet preparation system of the particularly black silicon making herbs into wool in a kind of front, reverse side polishing.
Background technology
The two-sided making herbs into wool of black silicon tradition is the little matte of continued growth on the basis of the conventional cleaning and texturing of polysilicon chip, and surface can form multilayer matte and deep pit structure.After the two-sided etching of tradition black silicon wet method, large to cell backside negative effect, the back side is caused to be formed very deeply and the nanostructure of multilayer, this uneven structure not only can cause the combination of aluminium back surface field and silicon not good, larger specific area more can increase surface carrier complex centre quantity greatly, and by reflection reuse ratio after causing decreasing light to the back side, bring certain negative effect therefore to passivating back effect and electric current collection, the extreme influence conversion efficiency of battery.
utility model summary of the invention
Goal of the invention: for problems of the prior art, the utility model provides a kind of and prepares black silicon suede structure, solar battery sheet preparation system to silicon chip back side polishing to front side of silicon wafer.
Technical scheme: a kind of solar battery sheet preparation system, is connected to form successively by battery slice etching burnishing device, cleaning device, oxidation unit, disperser, etching device, PECVD device, metallization apparatus; Described battery slice etching burnishing device comprises the preliminary texturing slot, the first tank, nitration mixture rinse bath, the second tank, polishing trough, the 3rd tank, texturing slot and the 4th tank that connect successively, and is located at the bottom roller for delivery silicon chip above each groove;
Described preliminary texturing slot is used for holding preliminary making herbs into wool solution, is provided with the upper roller for pressing down silicon chip above it, and under the effect of upper roller and bottom roller, silicon chip passes and carries out preliminary making herbs into wool from described preliminary making herbs into wool solution, removes damage layer;
Described nitration mixture rinse bath is used for holding cleaning solution, is provided with the upper roller for pressing down silicon chip above it, and under the effect of upper roller and bottom roller, silicon chip passes and removes foreign ion from described cleaning solution;
Described polishing trough is used for holding polishing solution, is provided with the water cutter be connected with this polishing trough above it, and described polishing solution is sprayed at silicon chip upper surface by water cutter and carries out polishing, and silicon chip lower surface does not contact polishing solution;
Described texturing slot is used for holding making herbs into wool solution, and silicon chip carries out lower surface making herbs into wool on described making herbs into wool liquid level of solution, and silicon chip upper surface does not contact making herbs into wool solution.
The preliminary making herbs into wool solution that described preliminary texturing slot holds is HF and HNO
3mixed solution.
The cleaning solution that described nitration mixture rinse bath holds is the mixed solution of HF and HCL.
The polishing solution that described polishing trough holds is KOH solution or HF and HNO
3molten mixed liquor.
The making herbs into wool solution that described texturing slot holds is AgNO
3, H
2o
2with the mixed solution of HF.
Be provided with the water cutter being connected to this tank above described tank, be convenient to following of pure water in tank and badly use.
Concentration detection apparatus is equipped with, for detecting the concentration value of each component in solution in described preliminary texturing slot, nitration mixture rinse bath, polishing trough, texturing slot.
Described solar battery sheet preparation system is also provided with chemical liquid and adds box, for supplementing required solution in solution tank;
Described chemical liquid adds box and comprises preliminary making herbs into wool solution interpolation box, cleaning solution interpolation box, polishing solution interpolation box, black silicon making herbs into wool solution interpolation box.
Beneficial effect: the solar battery sheet preparation system that the utility model provides, the polished silicon slice back side obtains smooth surface, then only prepare black silicon suede structure in front, while reducing front side of silicon wafer reflectivity, improve backside reflection rate, reduce compound area, thus the voltage of lifting battery, electric current and efficiency, the black silion cell electrical property of effective lifting, and reduce the consumption of chemicals.
Accompanying drawing explanation
Fig. 1 is the structural representation of solar battery sheet preparation system of the present utility model.
Embodiment
Below in conjunction with specific embodiment, illustrate the utility model further, these embodiments should be understood and be only not used in restriction scope of the present utility model for illustration of the utility model, after having read the utility model, the amendment of those skilled in the art to the various equivalent form of value of the present utility model has all fallen within the application's claims limited range.
Solar battery sheet preparation system as shown in Figure 1, by equipment material loading section 1, preliminary texturing slot 2, first tank 3, nitration mixture rinse bath 4, second tank 5, polishing trough 6, 3rd tank 7, texturing slot 8, 4th tank 9, cleaning device 17, oxidation unit 18, disperser 19, etching device 20, PECVD device 21, metallization apparatus 22 connects and composes successively, wherein equipment material loading section 1, preliminary texturing slot 2, first tank 3, nitration mixture rinse bath 4, second tank 5, polishing trough 6, 3rd tank 7, texturing slot 8, 4th tank 9 forms battery slice etching burnishing device, the bottom roller 10 for delivery silicon chip is provided with above described battery slice etching burnishing device, a large amount of bubble is produced because reaction in preliminary texturing slot 2 and nitration mixture rinse bath 4 is violent, silicon chip is waved everywhere in groove, therefore above preliminary texturing slot 2 and nitration mixture rinse bath 4, be also provided with the upper roller 11 for pressing down silicon chip, described upper roller 11 is positioned at the top of bottom roller 10, silicon chip under the effect of upper roller and bottom roller through solution, the water cutter 12 being connected to this groove is equipped with above described polishing trough 6 and each tank.
The preliminary making herbs into wool solution of the routine that preliminary texturing slot 2 holds is HF and HNO
3mixed solution; The conventional cleaning solution that nitration mixture rinse bath 4 holds is the mixed solution of HF and HCL; The conventional polishing solution that polishing trough 6 holds is KOH solution or HF and HNO
3molten mixed liquor; The conventional making herbs into wool solution that texturing slot 8 holds is AgNO
3, H
2o
2with the mixed solution of HF; The solution that first tank 3, second tank 5, the 3rd tank and the 4th tank 9 hold is pure water.Wherein polishing trough 6 is spray groove, and only have water cutter to silicon chip upper surface spray polishing solution, silicon chip lower surface does not contact polishing solution; Other all tanks are also spray groove, carry out Wafer Cleaning by upper surface water cutter spray in conjunction with in lower surface immersion water; Preliminary texturing slot 2 and nitration mixture rinse bath 4 are immersion groove, and silicon chip is immersed in chemical liquid completely; Texturing slot is the Overwater-floating pattern slot only having silicon chip lower surface to contact making herbs into wool solution.
The solar battery sheet preparation system that the present embodiment provides is provided with chemical liquid and adds box, comprises preliminary making herbs into wool solution and adds box 13, cleaning solution interpolation box 14, polishing solution interpolation box 15, making herbs into wool solution interpolation box 16; Described solar battery sheet preparation system adds pure water by pure water pipeline directly to the first tank 3, second tank 5, the 3rd tank 7 and the 4th tank 9; Add box 13, cleaning solution interpolation box 14 by preliminary making herbs into wool solution, polishing solution adds box 15, making herbs into wool solution interpolation box 16 supplements required solution respectively to preliminary texturing slot 2, nitration mixture rinse bath 4, polishing trough 6, texturing slot 8.Also concentration detection apparatus is provided with, for detecting the concentration value of each component in solution in described preliminary texturing slot 2, nitration mixture rinse bath 4, polishing trough 6 and texturing slot 8.
Original silicon chip is from feeding mouth access arrangement material loading section 1, enter 2 immersion reactions, after carrying out preliminary making herbs into wool removal silicon chip damage layer, enter the first tank 3 to clean, enter nitration mixture rinse bath 4 again and soak reaction, after removing silicon chip foreign ion, enter the second tank 5 to clean, silicon chip lower surface does not contact polishing solution, upper surface sprays after polishing solution carries out upper surface polishing through the water cutter 12 above polishing trough 6, enter the 3rd tank 7 to clean, enter texturing slot 8 again, silicon chip upper surface does not contact making herbs into wool solution, after lower surface carries out black silicon making herbs into wool on making herbs into wool liquid level of solution, enter the 4th tank 9 to clean, then slice, thin piece is put into cleaning device 20 to clean, enter oxidation unit 21 to be again oxidized, enter disperser 22 to spread, enter etching device 23 to etch, enter PECVD device 24 and carry out plated film, finally enter metallization apparatus 25 to metallize, namely can be made into cell piece.
Claims (9)
1. a solar battery sheet preparation system, connected to form successively by battery slice etching burnishing device, cleaning device, oxidation unit, disperser, etching device, PECVD device, metallization apparatus, it is characterized in that: described battery slice etching burnishing device comprises the preliminary texturing slot, the first tank, nitration mixture rinse bath, the second tank, polishing trough, the 3rd tank, texturing slot and the 4th tank that connect successively, and is located at the bottom roller for delivery silicon chip above each groove;
Described preliminary texturing slot is used for holding preliminary making herbs into wool solution, is provided with the upper roller for pressing down silicon chip above it, and under the effect of upper roller and bottom roller, silicon chip passes and carries out preliminary making herbs into wool from described preliminary making herbs into wool solution, removes damage layer;
Described nitration mixture rinse bath is used for holding cleaning solution, is provided with the upper roller for pressing down silicon chip above it, and under the effect of upper roller and bottom roller, silicon chip passes and removes foreign ion from described cleaning solution;
Described polishing trough is used for holding polishing solution, is provided with the water cutter be connected with this polishing trough above it, and described polishing solution is sprayed at silicon chip upper surface by water cutter and carries out polishing, and silicon chip lower surface does not contact polishing solution;
Described texturing slot is used for holding making herbs into wool solution, and silicon chip carries out lower surface making herbs into wool on described making herbs into wool liquid level of solution, and silicon chip upper surface does not contact making herbs into wool solution.
2. solar battery sheet preparation system as claimed in claim 1, is characterized in that: the preliminary making herbs into wool solution that described preliminary texturing slot holds is HF and HNO
3mixed solution.
3. solar battery sheet preparation system as claimed in claim 1, is characterized in that: the cleaning solution that described nitration mixture rinse bath holds is the mixed solution of HF and HCL.
4. solar battery sheet preparation system as claimed in claim 1, is characterized in that: the polishing solution that described polishing trough holds is KOH solution or HF and HNO
3molten mixed liquor.
5. solar battery sheet preparation system as claimed in claim 1, is characterized in that: the making herbs into wool solution that described texturing slot holds is AgNO
3, H
2o
2with the mixed solution of HF.
6. solar battery sheet preparation system as claimed in claim 1, is characterized in that: be provided with the water cutter being connected to this tank above described tank.
7. solar battery sheet preparation system as claimed in claim 1, is characterized in that: be equipped with concentration detection apparatus in described preliminary texturing slot, nitration mixture rinse bath, polishing trough, texturing slot.
8. solar battery sheet preparation system as claimed in claim 1, is characterized in that: described solar battery sheet preparation system also comprises chemical liquid and adds box.
9. solar battery sheet preparation system as claimed in claim 8, is characterized in that: described chemical liquid interpolation box comprises preliminary making herbs into wool solution interpolation box, cleaning solution adds box, polishing solution adds box, black silicon making herbs into wool solution adds box.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520004215.0U CN204315618U (en) | 2015-01-05 | 2015-01-05 | A kind of solar battery sheet preparation system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520004215.0U CN204315618U (en) | 2015-01-05 | 2015-01-05 | A kind of solar battery sheet preparation system |
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| CN204315618U true CN204315618U (en) | 2015-05-06 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104505438A (en) * | 2015-01-05 | 2015-04-08 | 无锡德鑫太阳能电力有限公司 | Solar battery cell preparation system |
-
2015
- 2015-01-05 CN CN201520004215.0U patent/CN204315618U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104505438A (en) * | 2015-01-05 | 2015-04-08 | 无锡德鑫太阳能电力有限公司 | Solar battery cell preparation system |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: No. 12 Xinhua Road, Xinhua District, Wuxi City, Jiangsu Province, 214028 Patentee after: Wuxi Ritong Photovoltaic Technology Co., Ltd. Address before: No. 12 Xinhua Road, Wuxi National High-tech Industrial Development Zone, Wuxi City, Jiangsu Province, 214028 Patentee before: WUXI DEXIN SOLAR POWER CO., LTD. |
|
| CP03 | Change of name, title or address |