CN204302527U - 基于bcb键合工艺的耦合器结构 - Google Patents
基于bcb键合工艺的耦合器结构 Download PDFInfo
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105785508A (zh) * | 2014-12-25 | 2016-07-20 | 江苏尚飞光电科技有限公司 | 基于bcb键合工艺的耦合器结构及其制作方法 |
CN108603982A (zh) * | 2016-02-12 | 2018-09-28 | 华为技术有限公司 | 用于光耦合的波导结构 |
CN111624708A (zh) * | 2020-07-10 | 2020-09-04 | 北京爱杰光电科技有限公司 | 一种cmos工艺兼容的纵向光学耦合系统及其方法 |
CN113161433A (zh) * | 2021-02-08 | 2021-07-23 | 成都多极子科技有限公司 | 100GHz行波垂直方向耦合光波导探测器 |
CN113848609A (zh) * | 2021-09-28 | 2021-12-28 | 南京航空航天大学 | 光子集成耦合结构、光子集成器件 |
CN114815046A (zh) * | 2021-01-19 | 2022-07-29 | 格芯(美国)集成电路科技有限公司 | 光子芯片的后段工艺堆叠中的边缘耦合器 |
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Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105785508A (zh) * | 2014-12-25 | 2016-07-20 | 江苏尚飞光电科技有限公司 | 基于bcb键合工艺的耦合器结构及其制作方法 |
CN105785508B (zh) * | 2014-12-25 | 2022-06-14 | 南通新微研究院 | 基于bcb键合工艺的耦合器结构及其制作方法 |
CN108603982A (zh) * | 2016-02-12 | 2018-09-28 | 华为技术有限公司 | 用于光耦合的波导结构 |
CN108603982B (zh) * | 2016-02-12 | 2020-12-25 | 华为技术有限公司 | 用于光耦合的波导结构 |
CN111624708A (zh) * | 2020-07-10 | 2020-09-04 | 北京爱杰光电科技有限公司 | 一种cmos工艺兼容的纵向光学耦合系统及其方法 |
CN111624708B (zh) * | 2020-07-10 | 2024-03-19 | 北京爱杰光电科技有限公司 | 一种cmos工艺兼容的纵向光学耦合系统及其方法 |
CN114815046A (zh) * | 2021-01-19 | 2022-07-29 | 格芯(美国)集成电路科技有限公司 | 光子芯片的后段工艺堆叠中的边缘耦合器 |
CN113161433A (zh) * | 2021-02-08 | 2021-07-23 | 成都多极子科技有限公司 | 100GHz行波垂直方向耦合光波导探测器 |
CN113161433B (zh) * | 2021-02-08 | 2022-08-26 | 成都多极子科技有限公司 | 100GHz行波垂直方向耦合光波导探测器 |
CN113848609A (zh) * | 2021-09-28 | 2021-12-28 | 南京航空航天大学 | 光子集成耦合结构、光子集成器件 |
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Effective date of registration: 20170621 Address after: 226017 Jiangsu city of Nantong province science and Technology Industrial Park of Su Tong Jiang Cheng Road No. 1088 Jiang Bei Lou Park Development Research Co-patentee after: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES Patentee after: NANTONG OPTO-ELECTRONICS ENGINEERING CENTER, CHINESE ACADEMY OF SCIENCES Address before: 226009, No. 14, No. 30, Nantong Science and Technology Industrial Park, Nantong, Jiangsu, Nantong Co-patentee before: NANTONG OPTO-ELECTRONICS ENGINEERING CENTER, CHINESE ACADEMY OF SCIENCES Patentee before: JIANGSU SUNFY OPTOELECTRONICS TECHNOLOGY CO.,LTD. Co-patentee before: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES |
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Address after: 226017 R & D Park, Jiangcheng road 1088, Sutong science and Technology Industrial Park, Nantong, Jiangsu Patentee after: Nantong Xinwei Research Institute Patentee after: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES Address before: 226017 R & D Park, Jiangcheng road 1088, Sutong science and Technology Industrial Park, Nantong, Jiangsu Patentee before: Shanghai Institute of Microsystems, Chinese Academy of Sciences, Nantong new Micro Research Institute Patentee before: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES Address after: 226017 R & D Park, Jiangcheng road 1088, Sutong science and Technology Industrial Park, Nantong, Jiangsu Patentee after: Shanghai Institute of Microsystems, Chinese Academy of Sciences, Nantong new Micro Research Institute Patentee after: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES Address before: 226017 R & D Park, Jiangcheng road 1088, Sutong science and Technology Industrial Park, Nantong, Jiangsu Patentee before: NANTONG OPTO-ELECTRONICS ENGINEERING CENTER, CHINESE ACADEMY OF SCIENCES Patentee before: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES |