CN204243016U - Tubular type PECVD graphite boat loading-unloading plate system silicon chip feed mechanism - Google Patents
Tubular type PECVD graphite boat loading-unloading plate system silicon chip feed mechanism Download PDFInfo
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- CN204243016U CN204243016U CN201420645153.7U CN201420645153U CN204243016U CN 204243016 U CN204243016 U CN 204243016U CN 201420645153 U CN201420645153 U CN 201420645153U CN 204243016 U CN204243016 U CN 204243016U
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- silicon chip
- loading
- feed mechanism
- graphite boat
- tubular type
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model relates to a kind of tubular type PECVD graphite boat loading-unloading plate system silicon chip feed mechanism, and described silicon chip feed mechanism includes material loading base plate (1), and described material loading base plate (1) is connected with material loading bearing (2) by line slideway horizontal sliding; Described material loading bearing (2) is connected with loading bracket (3) by line slideway vertical sliding motion, described loading bracket (3) is provided with three groups of dischargings location tooth plate (3.1) be parallel to each other, and loading bracket (3) top is provided with material table (4), this material table (4) is provided with for tooth plate (3.1) the work slot (4.1) of inserting, discharging location, described work slot (4.1) is 4.5mm for placing the pitch of the gaily decorated basket being mounted with silicon chip to be processed.A kind of tubular type PECVD graphite boat loading-unloading plate of the utility model system silicon chip feed mechanism, has the advantage of enhancing productivity.
Description
Technical field
The utility model relates to a kind of silicon chip feed mechanism, especially relates to a kind ofly in tubular type PECVD, carrying out the silicon chip feed mechanism in automatic high-efficiency handling sheet system to graphite boat, and belonging to too can photovoltaic production equipment technical field.
Background technology
At present, in crystal silicon solar energy battery production process, need at silicon chip surface by PECVD(Plasma EnhancedChemical Vapor Deposition) equipment prepares one deck silicon nitride anti-reflecting film, existing tubular type PECVD is after long membrane process completes, manually need pull out graphite boat, from graphite boat, take out silicon chip load (i.e. silicon chip discharge process) in the empty gaily decorated basket; Before empty graphite boat enters PECVD body of heater again subsequently, again need mount the non reflecting film silicon chip (i.e. silicon chip feeding process) completing secondary cleaning; Because graphite boat is heavy, graphite boat electrode slice crack is narrow, so a dead lift graphite boat of routine and artificial handling sheet labour intensity are greatly, production efficiency is not carried, and fragment rate is higher simultaneously, makes production cost high;
For this reason, " China Electronics Science and Technology Group Co., Ltd. No.48 Research Institute " proposes on November 22nd, 2013 " a kind of graphite boat automatic loading and unloading sheet system for tubular type PECVD " that number of patent application is 201310592633.1, it utilizes mechanical system to carry out discharging and material loading, but its silicon chip captures transfer mechanism adopts six shaft mechanical people to carry out, due to six shaft mechanical people complex structures, and domestic cannot autonomous production six shaft mechanical people, therefore it is with high costs; And six shaft mechanical people use for a long time and easily produce error in space orientation afterwards, make to cause damage to silicon chip in crawl process; And be limited by the Grasp Modes of six shaft mechanical people, it once only can capture 20 silicon chips, and therefore its efficiency still cannot meet the demand of large-scale production; And gaily decorated basket pitch used in above-mentioned conventional system is the standard pitch of 4.76mm, and the spacing of graphite boat boat sheet is 13.5mm, therefore needs to adopt special rewinder to arrange its pitch, thus have impact on the efficiency of production further.
Summary of the invention
The purpose of this utility model is to overcome above-mentioned deficiency, provides a kind of registration and the high tubular type PECVD graphite boat loading-unloading plate system silicon chip feed mechanism of production efficiency.
The purpose of this utility model is achieved in that a kind of tubular type PECVD graphite boat loading-unloading plate system silicon chip feed mechanism, and described silicon chip feed mechanism includes material loading base plate, and described material loading base plate is connected with material loading bearing by line slideway horizontal sliding; Described material loading bearing is connected with loading bracket by line slideway vertical sliding motion, described loading bracket is provided with the three groups of discharging location tooth plates be parallel to each other, and be provided with material table above loading bracket, this material table is provided with the work slot of inserting for discharging location tooth plate.
Described work slot is 4.5mm for placing the pitch of the gaily decorated basket being mounted with silicon chip to be processed to a kind of tubular type PECVD graphite boat loading-unloading plate of the utility model system silicon chip feed mechanism.
A kind of tubular type PECVD graphite boat loading-unloading plate of the utility model system silicon chip feed mechanism, before and after described work slot, side is provided with card-bit part and clamping cylinder.
A kind of tubular type PECVD graphite boat loading-unloading plate of the utility model system silicon chip feed mechanism, the left and right sides of described work slot is all provided with arrangement cylinder by backing plate, and the piston rod of arrangement cylinder is connected with the arrangement bar paralleled with gaily decorated basket length direction.
A kind of tubular type PECVD graphite boat loading-unloading plate of the utility model system silicon chip feed mechanism, described arrangement bar is provided with the comb structure matched with silicon chip spacing.
Compared with prior art, the beneficial effects of the utility model are:
The utility model adopts line slideway to move the all-directional rotation that fit system substitutes the six axis robot of transmission, and mobile accuracy rate is higher, captures accurately higher; Meanwhile, the efficiency that moves linearly is also higher; And the gaily decorated basket adopts the pitch of 4.5mm to replace original standard pitch, therefore in the face of the graphite boat of 13.5mm, carries out pitch adjustment without the need to carrying out rewinder, such that whole system structure is more simple, the more succinct smoothness of technique; And adopt 3 groups to amount to 3*20=60 sheet silicon chip material loading simultaneously during material loading, compared to 20 material loadings of routine, even if under equal conditions, efficiency also improves three times, and the improvement be engaged on pitch and move mode, efficiency raising far surpasses three times, greatly improves the production efficiency of producer, improves the market competitiveness of its enterprise.
Accompanying drawing explanation
Fig. 1 is the structural representation of the utility model tubular type PECVD graphite boat loading-unloading plate system silicon chip feed mechanism.
Fig. 2 is the end view of the utility model tubular type PECVD graphite boat loading-unloading plate system silicon chip feed mechanism.
Wherein:
Material loading base 1, material loading bearing 2, loading bracket 3, material table 4, arrangement cylinder 5, arrangement bar 6;
Discharging location tooth plate 3.1;
Work slot 4.1, backing plate 4.2.
Embodiment
See Fig. 1 and Fig. 2, a kind of tubular type PECVD graphite boat loading-unloading plate system silicon chip feed mechanism that the utility model relates to, described silicon chip feed mechanism includes material loading base plate 1, described material loading base plate 1 is connected with material loading bearing 2 by line slideway horizontal sliding, and graphite boat moving direction on graphite boat transfer mechanism in the moving direction of material loading bearing 2 and preorder technique is perpendicular, described material loading bearing 2 is connected with loading bracket 3 by line slideway vertical sliding motion, described loading bracket 3 is provided with the three groups of discharging location tooth plates 3.1 be parallel to each other, and be provided with material table 4 above loading bracket 3, this material table 4 is provided with the work slot 4.1 of inserting for discharging location tooth plate 3.1, on work slot 4.1, for placing the gaily decorated basket being mounted with silicon chip to be processed, (described gaily decorated basket pitch is 4.5mm, now get every three the pitch that a slice can realize 13.5mm, eliminate rewinding device and this procedure, thus greatly provide production efficiency), and side is provided with card-bit part and clamping cylinder before and after work slot 4.1, for positioning the gaily decorated basket and clamping, the left and right sides of this work slot 4.1 is all provided with by backing plate 4.2 and arranges cylinder 5, the piston rod of arrangement cylinder 5 is connected with the arrangement bar 6 paralleled with gaily decorated basket length direction, described arrangement bar 6 is provided with the comb structure matched with silicon chip spacing,
Concretely, above-mentioned material loading base plate 1 is connected with the horizontal sliding of material loading bearing 2, and material loading bearing 2 is connected with the vertical sliding motion of loading bracket 3, all by providing power by the screw mandrel type of drive of driven by motor;
In addition: it should be noted that above-mentioned embodiment is only a prioritization scheme of this patent, any change that those skilled in the art does according to above-mentioned design or improvement, all within the protection range of this patent.
Claims (5)
1. a tubular type PECVD graphite boat loading-unloading plate system silicon chip feed mechanism, is characterized in that: described silicon chip feed mechanism includes material loading base plate (1), and described material loading base plate (1) is connected with material loading bearing (2) by line slideway horizontal sliding; Described material loading bearing (2) is connected with loading bracket (3) by line slideway vertical sliding motion, described loading bracket (3) is provided with three groups of dischargings location tooth plate (3.1) be parallel to each other, and loading bracket (3) top is provided with material table (4), this material table (4) is provided with the work slot (4.1) of inserting for discharging location tooth plate (3.1).
2. a kind of tubular type PECVD graphite boat loading-unloading plate system silicon chip feed mechanism as claimed in claim 1, is characterized in that: described work slot (4.1) is 4.5mm for placing the pitch of the gaily decorated basket being mounted with silicon chip to be processed.
3. a kind of tubular type PECVD graphite boat loading-unloading plate system silicon chip feed mechanism as claimed in claim 1 or 2, is characterized in that: before and after described work slot (4.1), side is provided with card-bit part and clamping cylinder.
4. a kind of tubular type PECVD graphite boat loading-unloading plate system silicon chip feed mechanism as claimed in claim 1 or 2, it is characterized in that: the left and right sides of described work slot (4.1) is all provided with by backing plate (4.2) and arranges cylinder (5), and the piston rod of arrangement cylinder (5) is connected with the arrangement bar (6) paralleled with gaily decorated basket length direction.
5. a kind of tubular type PECVD graphite boat loading-unloading plate system silicon chip feed mechanism as claimed in claim 4, is characterized in that: described arrangement bar (6) is provided with the comb structure matched with silicon chip spacing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420645153.7U CN204243016U (en) | 2014-11-03 | 2014-11-03 | Tubular type PECVD graphite boat loading-unloading plate system silicon chip feed mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420645153.7U CN204243016U (en) | 2014-11-03 | 2014-11-03 | Tubular type PECVD graphite boat loading-unloading plate system silicon chip feed mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204243016U true CN204243016U (en) | 2015-04-01 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420645153.7U Expired - Fee Related CN204243016U (en) | 2014-11-03 | 2014-11-03 | Tubular type PECVD graphite boat loading-unloading plate system silicon chip feed mechanism |
Country Status (1)
| Country | Link |
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| CN (1) | CN204243016U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107039324A (en) * | 2017-04-14 | 2017-08-11 | 东莞市启天自动化设备股份有限公司 | A kind of Full-automatic tube-type PECVD charging ＆ discharging machines and method |
| CN108807247A (en) * | 2018-06-01 | 2018-11-13 | 深圳市捷佳伟创新能源装备股份有限公司 | A kind of graphite boat is plugged into caching method |
| CN109065491A (en) * | 2018-08-20 | 2018-12-21 | 无锡先导智能装备股份有限公司 | The method and device thereof of quartz boat handling silicon wafer |
-
2014
- 2014-11-03 CN CN201420645153.7U patent/CN204243016U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107039324A (en) * | 2017-04-14 | 2017-08-11 | 东莞市启天自动化设备股份有限公司 | A kind of Full-automatic tube-type PECVD charging ＆ discharging machines and method |
| CN107039324B (en) * | 2017-04-14 | 2019-11-22 | 东莞市启天自动化设备股份有限公司 | A kind of Full-automatic tube-type PECVD charging & discharging machine and method |
| CN108807247A (en) * | 2018-06-01 | 2018-11-13 | 深圳市捷佳伟创新能源装备股份有限公司 | A kind of graphite boat is plugged into caching method |
| CN109065491A (en) * | 2018-08-20 | 2018-12-21 | 无锡先导智能装备股份有限公司 | The method and device thereof of quartz boat handling silicon wafer |
| CN109065491B (en) * | 2018-08-20 | 2022-07-22 | 无锡先导智能装备股份有限公司 | Method and device for loading and unloading silicon wafers by quartz boat |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150401 Termination date: 20161103 |