CN204240945U - A kind of twin shaft polarization adjustable digital formula photoelectric auto-collimator - Google Patents
A kind of twin shaft polarization adjustable digital formula photoelectric auto-collimator Download PDFInfo
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- CN204240945U CN204240945U CN201420775022.0U CN201420775022U CN204240945U CN 204240945 U CN204240945 U CN 204240945U CN 201420775022 U CN201420775022 U CN 201420775022U CN 204240945 U CN204240945 U CN 204240945U
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Abstract
The utility model relates to field of optical measurements, particularly relate to a kind of autocollimator, a kind of twin shaft polarization of concrete finger adjustable digital formula photoelectric auto-collimator, comprise the first light source, secondary light source, the first graticule, the second graticule, the first adjustable plus lens group, the second adjustable plus lens group, the first Amici prism, quarter wave plate, the second Amici prism, primary mirror of looking in the distance, look in the distance secondary mirror and PSD detector, adopt quarter wave plate and polarization splitting prism, add the utilization factor of system luminous energy; Adopt twin shaft " word " graticule, " cross " projected light signal detected, be through the light signal overlap of two cover arbitrary source systems of twin shaft and produce, improve resolution and the reaction capacity of system, measuring accuracy is higher, have employed the longitudinally height that plus lens group shortens collimator, structure is compacter, can be widely used in the alignment measurement of daily life, commercial production, Aero-Space, boats and ships and military industry field.
Description
Technical field
The utility model relates to photodetection field, especially relates to autocollimatic instrument field.
Background technology
Autocollimator utilizes optical autocollimating principle, realizes the fine measuring instrument of small angle measurement.Because it is easy to use and have higher accuracy of detection, be widely used in the industry that the precision such as Aero-Space, boats and ships, military project are high, the test of such as, in the quality assurance (flatness, flatness, verticality, the depth of parallelism etc.) of Mechanical Processing Industry, measurement verification industry angle measurement standard, prism angle location and monitoring, optical element and installation accuracy control etc., its range of application is wide.Autocollimator experienced by visual type, photoelectricity nulling formula and digital display type three developing stage.
Raising resolving power and stability of display are the developing direction of universal digital display autocollimator.
High resolution is guarantee and the prerequisite of pin-point accuracy, and high stability is again guarantee and the prerequisite of high resolution.Rising space amount is feature and the difficult point of static digital display autocollimator.Kinetic measurement is sampled at every turn and is only had a numerical value to export, and can not react beating of indicating value, its difficult point is dynamic responding speed and dynamic accuracy, but all purpose instrument will read the stable reading value of each position, rising space just can only be estimated greatly and reads, and affects the accuracy of indicating value, also affects resolving power.
The appearance of digital display type autocollimator makes the performance of autocollimator have qualitative leap, and digital display type is instrument accuracy grade by 1 " level is increased to 0.1 " level, and minimum displayed value is by 0.1 " level is increased to 0.01 " level.The accuracy of digital display type autocollimator is high, easy to use, simple to operate, can realize automatically measuring.
The photoelectric auto-collimator produced both at home and abroad is at present mainly by human eye reading, and for static test, response frequency is not high, cannot meet the needs measured at a high speed.
And the measuring accuracy of single shaft autocollimator is poor, well can not realize the measurement of two dimension angular, and longitudinal excessive height of autocollimator also affects the installation of autocollimatic instrument and carries at present, in addition when current autocollimator is general repeatedly through the semi-transparent semi-reflecting effect of Amici prism, finally can project the luminous energy of pick-up unit, loss is very large, can up to 80%, light energy losses large like this, proposes requirements at the higher level to the luminous sensitivity of pick-up unit.
Utility model content
In view of the foregoing, the utility model provides a kind of twin shaft polarization adjustable digital formula photoelectric auto-collimator, polaroid is added on existing photoelectric collimator basis, adds the utilization factor of system luminous energy, improve sensitivity and the reliability of measurement.
In order to realize above-mentioned target, the utility model takes following technical scheme: a kind of twin shaft polarization adjustable digital formula photoelectric auto-collimator, comprises the first light source, secondary light source, the first graticule, the second graticule, the first adjustable plus lens group, the second adjustable plus lens group, the first Amici prism, the second Amici prism, quarter wave plate, primary mirror of looking in the distance, look in the distance secondary mirror and PSD detector;
Wherein, described first graticule and the second graticule are " word " type differentiation plate, and " word " the shape groove on the first and second graticules is vertically put mutually; After the first light source, secondary light source are opened, the light sent illuminates the first graticule and the second differentiation plate respectively, described first graticule and second breaks up orthogonal " word " shape groove on plate, project to respectively, first light source plus lens and the second adjustable plus lens group, after the convergence effect of described first adjustable plus lens group and the second adjustable plus lens group, project in the first Amici prism and the second Amici prism respectively; Inciding after the first Amici prism, quarter wave plate and the second Amici prism looks in the distance in primary mirror, collimating effect through primary mirror of looking in the distance projects in target reflecting surface, above-mentioned light reflection is returned by target reflecting surface, successively through after described first Amici prism, quarter wave plate and the second Amici prism through described secondary mirror of looking in the distance, described in secondary mirror of looking in the distance will project after above-mentioned light collection in described PSD detector.
Further, described second Amici prism is polarization splitting prism, and through the P component waves of polarization splitting prism by whole transmission, and S component waves can all be reflected with 45° angle.
Concrete, after the first light source is opened, the light sent illuminates the first graticule, light through described first graticule is irradiated on the reflective surface of the first Amici prism after the first adjustable plus lens group converges, after the reflex of the first Amici prism, after entering primary mirror of looking in the distance, project on target reflecting surface; Target reflecting surface by light reflect after return after after the convergence again of primary mirror of looking in the distance, successively through after the first Amici prism, quarter wave plate and the second Amici prism and secondary mirror of looking in the distance, finally incide in described PSD detector;
After secondary light source is opened, the light sent illuminates the second graticule, light through described second graticule is irradiated on the reflective surface of the second Amici prism after the second adjustable plus lens group converges, after the second Amici prism, and the light that described secondary light source sends, S wave component is all reflected away, after quarter wave plate, phase delay 90 °, and through after the first Amici prism, enter primary mirror of looking in the distance, then project on target reflecting surface; After above-mentioned light signal reflects by target reflecting surface, after the convergence of primary mirror of looking in the distance, successively through the first Amici prism and quarter wave plate, after the phase delay again 90 ° of quarter wave plate, become P ripple, above-mentioned P ripple all through polarization splitting prism, finally through inciding after secondary mirror of looking in the distance in described PSD detector.
The utility model adopts biaxial system, wherein the first graticule and the second graticule are: " word " shape groove, two divisions of the graticule are vertically put mutually, respectively through projecting in target reflecting surface after the reflex of the first Amici prism and the second Amici prism, if reflecting surface is vertical with autocollimator, when there is no deflection angle, in theory, light should become cross one another " cross " shape when each optical surface of collimator finally projects in PSD detector, and overlap with the center set by PSD, when target reflecting surface and the axial journey certain angle of autocollimator offset, " word " shape groove on two graticules just can not form the projection of " cross " shape on the test surface of PSD detector.Graticule image received by the test surface of PSD detector just can better judge that target reflecting surface obtains deviation angle and direction.Compared to the autocollimator of single shaft, " cross " generally used or the graticule of other shapes, the utility model adopts twin shaft " word " graticule, " cross " projected light signal that last PSD detector detects, be through the light signal overlap of two cover arbitrary source systems of twin shaft and produce, this is equivalent to the function achieving twice detection on an autocollimator, improves resolution characteristic and the reaction capacity of system.
This Novel digital type photoelectric auto-collimator, adopts adjustable plus lens group in source ends, and adopt first to collect lens combination in the first source ends, wherein the first plus lens group comprises, the first plus lens and the second plus lens; Described first plus lens is near first graticule one end, and described second plus lens is near described first Amici prism one end.Adopt second to collect lens combination at secondary light source end, wherein the second plus lens group comprises, the 3rd plus lens and the 4th plus lens; Described 3rd plus lens is near second graticule one end, and described 4th plus lens is near described second Amici prism one end.
After pattern on bright first graticule of the illumination that first light source sends, above-mentioned pattern projection is to the first plus lens, project on the light splitting surface of the first Amici prism after twice convergence of the first and second plus lens, the light path principle of secondary light source one axle is identical with said process, repeats no more.The benefit done like this is, when light source is diverging light, pattern can converge to more among a small circle by the convergence effect of twice in shorter distance, better concentrate light signal, be convenient to observation thereafter or detection, shorten the transmission range between light signal that light source sends to Amici prism, direct benefit is the longitudinally highly reduction making autocollimatic instrument, structure is compacter, is more convenient to carrying of installation.
Preferred as one, " word " groove on described first graticule is positioned at directly over the axis of autocollimator, is parallel to the axis of autocollimator; " word " groove on described second graticule, horizontal pendulum is put in directly over the axis of autocollimator, perpendicular to the axis of autocollimator.
Preferred as one, " word " groove on described second graticule is positioned at directly over the axis of autocollimator, is parallel to the axis of autocollimator; " word " groove on described first graticule, horizontal pendulum is put in directly over the axis of autocollimator, perpendicular to the axis of autocollimator.
This twin shaft polarization adjustable digital formula photoelectric auto-collimator adopts PSD detector, and the position quantity information of the light signal detected is analog output, faster system response, and resolution is high, and cost is low, therefore has the value of widespread use.Can modulate echo signal simultaneously, thus the antijamming capability of system can be significantly improved, can be used for realizing high speed, high precision, position detecting system that antijamming capability is strong, compared to ccd detector, the utility model adopts the detection sensitivity of PSD detector higher, the high measurement realizing high more precision.Price is also more cheap simultaneously.
Further, described secondary light source adopts LED light source, compared to conventional light source, LED has, and cost is low, high-level efficiency, low energy consumption, high brightness, environmental protection, a series of remarkable advantage such as extra long life, simultaneously due to LED light source send light there is very high polarizability, can be reduced to minimum by the system light energy losses of LED light source.This kind of twin shaft polarization adjustable digital formula photoelectric auto-collimator adopts LED to be light source, reduces production cost, and light source luminescent intensity is also guaranteed simultaneously.
Further, described in primary mirror of looking in the distance be balsaming lens group, compared to ordinary lens, balsaming lens group has better spotlight effect.
the utility model has following beneficial effect:this twin shaft polarization adjustable digital formula photoelectric auto-collimator adopts polarization splitting prism to coordinate quarter wave plate, improves the utilization factor of luminous energy, improves the detection sensitivity of system; Adopt the detection sensitivity of PSD detector higher, the high measurement realizing high more precision, price is also more cheap simultaneously; The utility model adopts twin shaft " word " graticule, " cross " projected light signal that last PSD detector detects, be through the light signal overlap of two cover arbitrary source systems of twin shaft and produce, this is equivalent to the function achieving twice detection on an autocollimator, improve resolution characteristic and the reaction capacity of system, structure is simple, production cost is low, measuring accuracy is higher, in addition this Novel digital type photoelectric auto-collimator additionally uses the longitudinally height that plus lens group shortens collimator, structure is compacter, is more convenient to carrying of installation.The utility model can be widely used in the alignment measurement of daily life, commercial production, Aero-Space, boats and ships and military industry field.
Accompanying drawing explanation
Fig. 1 is the principle assumption diagram of this twin shaft polarization adjustable digital formula photoelectric auto-collimator.
Fig. 2 is the light path principle schematic diagram of this twin shaft polarization adjustable digital formula photoelectric auto-collimator optimal way 1.
Fig. 3 is the light path principle schematic diagram of this twin shaft polarization adjustable digital formula photoelectric auto-collimator optimal way 2.
Embodiment
The utility model is described in detail below in conjunction with the drawings and specific embodiments.
The utility model provides a kind of twin shaft polarization adjustable digital formula photoelectric auto-collimator, automatically can identify target, compared to traditional photoelectric auto instrument, there is higher resolution, and measured by twin shaft, the skew detecting measured target two dimension angular that can be sensitiveer.
A kind of twin shaft polarization adjustable digital formula photoelectric auto-collimator, as shown in Figure 1, the first light source 1, adjustable plus lens group 6, first Amici prism 7 of secondary light source 2, first graticule 3, second graticule the 4, first adjustable plus lens group 5, second, quarter wave plate 13, second Amici prism 8, primary mirror 9 of looking in the distance, target reflecting surface 10, look in the distance secondary mirror 11 and PSD detector 12 is comprised;
Further, described second Amici prism 8 is polarization splitting prism, and through the P component waves of polarization splitting prism by whole transmission, and S component waves can all be reflected with 45° angle.
Wherein, described first graticule 3 and the second graticule 4 are " word " type differentiation plate, and " word " the shape groove on the first and second graticules is vertically put mutually, when the first light source 1, after secondary light source 2 is opened, the light sent illuminates the first graticule 3 and the second differentiation plate 4 respectively, described first graticule 1 and second breaks up orthogonal " word " shape groove on plate 2, project to the first light source plus lens 5 and the second adjustable plus lens group 6 respectively, after the convergence effect of described first light source plus lens 5 and the second adjustable plus lens group 6, project in the first Amici prism 7 and the second Amici prism 8 respectively, through the first Amici prism 7, inciding after quarter wave plate 13 and the second Amici prism 8 looks in the distance in primary mirror 9, collimating effect through primary mirror 9 of looking in the distance projects in target reflecting surface 10, above-mentioned light reflection is returned by target reflecting surface 10, successively through described first Amici prism 7, through described secondary mirror 11 of looking in the distance after quarter wave plate 13 and the second Amici prism 8, described secondary mirror of looking in the distance will project (principle of work as shown in Figure 2) in described PSD detector 12 after above-mentioned light collection.
Concrete, after secondary light source 2 is opened, the light sent illuminates the second graticule 4, and the light through described second graticule 4 is irradiated on the reflective surface of the second Amici prism 8 after the second adjustable plus lens group 6 converges, after the second Amici prism 8, the light that described secondary light source sends, S wave component is all reflected away, after quarter wave plate 13, phase delay 90 °, and through after the first Amici prism 7, enter primary mirror 9 of looking in the distance, then project on target reflecting surface 10; After above-mentioned light signal reflects by target reflecting surface 10, after the convergence of primary mirror 9 of looking in the distance, successively through the first Amici prism and quarter wave plate 13, after the phase delay again 90 ° of quarter wave plate 13, become P ripple, above-mentioned P ripple, all through polarization splitting prism, incides in described PSD detector 12 finally through after secondary mirror 11 of looking in the distance.
The utility model adopts biaxial system, wherein the first graticule 3 and the second graticule 4 are: " word " shape groove, two divisions of the graticule are vertically put mutually, respectively through projecting in target reflecting surface 10 after the reflex of the first Amici prism 5 and the second Amici prism 6, if target reflecting surface 10 is vertical with autocollimator, when there is no deflection angle, in theory, light should become cross one another " cross " shape when each optical surface of collimator finally projects in PSD detector 12, and overlap with the center set by PSD detector, when the axial journey certain angle of target reflecting surface 10 and autocollimator offsets, " word " shape groove on two graticules just can not form the projection of " cross " shape on the test surface of PSD detector.Graticule image received by the test surface of PSD detector 12 just can better judge that target reflecting surface obtains deviation angle and direction.Compared to the autocollimator of single shaft, " cross " generally used or the graticule of other shapes, the utility model adopts twin shaft " word " graticule, " cross " projected light signal that last PSD detector detects, be through the light signal overlap of two cover arbitrary source systems of twin shaft and produce, this is equivalent to the function achieving twice detection on an autocollimator, improves resolution characteristic and the reaction capacity of system.
This Novel digital type photoelectric auto-collimator, as shown in Figure 1, adopts adjustable plus lens group in source ends, and adopt first to collect lens combination 5 at the first light source 1 end, wherein the first plus lens group 5 comprises, the first plus lens 5-1 and the second plus lens 5-2; Described first plus lens 5-1 is near first graticule 1 one end, and described second plus lens 5-2 is near described first Amici prism 7 one end.Adopt second to collect lens combination 6 at secondary light source 2 end, wherein the second plus lens group 6 comprises the 3rd plus lens 6-1 and the 4th plus lens 6-2; Described 3rd plus lens 6-1 is near second graticule 4 one end, and described 4th plus lens 6-2 is near described second Amici prism 8 one end.
After pattern on bright first graticule 2 of the illumination that first light source 1 sends, above-mentioned pattern projection is to the first plus lens 5-1, project on the light splitting surface of the first Amici prism 7 after twice convergence of the first and second plus lens 5-2, the light path principle of secondary light source 2 one axle is identical with said process, repeats no more.The benefit done like this is, when light source is diverging light, pattern can converge to more among a small circle by the convergence effect of twice in shorter distance, better concentrate light signal, be convenient to observation thereafter or detection, shorten the transmission range between light signal that light source sends to Amici prism, direct benefit is the longitudinally highly reduction making autocollimatic instrument, structure is compacter, is more convenient to carrying of installation.
Preferred as one, as shown in Figure 2, " word " groove on described first graticule is positioned at directly over the axis of autocollimator, is parallel to the axis of autocollimator; " word " groove on described second graticule, horizontal pendulum is put in directly over the axis of autocollimator, perpendicular to the axis of autocollimator.
Preferred as one, as shown in Figure 3, " word " groove on described second graticule is positioned at directly over the axis of autocollimator, is parallel to the axis of autocollimator; " word " groove on described first graticule, horizontal pendulum is put in directly over the axis of autocollimator, perpendicular to the axis of autocollimator.
This twin shaft polarization adjustable digital formula photoelectric auto-collimator adopts PSD detector, and the position quantity information of the light signal detected is analog output, faster system response, and resolution is high, and cost is low, therefore has the value of widespread use.Can modulate echo signal simultaneously, thus the antijamming capability of system can be significantly improved, can be used for realizing high speed, high precision, position detecting system that antijamming capability is strong, compared to ccd detector, the utility model adopts the detection sensitivity of PSD detector higher, the high measurement realizing high more precision.Price is also more cheap simultaneously.
Further, described light source adopts LED light source, and compared to conventional light source, LED has, cost is low, high-level efficiency, low energy consumption, high brightness, environmental protection, a series of remarkable advantage such as extra long life, this a kind of twin shaft polarization adjustable digital formula photoelectric auto-collimator adopts LED to be light source, reduces production cost, and light source luminescent intensity is also guaranteed simultaneously.
Further, described in primary mirror of looking in the distance be balsaming lens group, compared to ordinary lens, balsaming lens group has better spotlight effect.
This twin shaft polarization adjustable digital formula photoelectric auto-collimator adopts polarization splitting prism to coordinate quarter wave plate, improves the utilization factor of luminous energy, improves the detection sensitivity of system; Adopt the detection sensitivity of PSD detector higher, the high measurement realizing high more precision, price is also more cheap simultaneously; The utility model adopts twin shaft " word " graticule, " cross " projected light signal that last PSD detector detects, be through the light signal overlap of two cover arbitrary source systems of twin shaft and produce, this is equivalent to the function achieving twice detection on an autocollimator, improve resolution characteristic and the reaction capacity of system, structure is simple, production cost is low, measuring accuracy is higher, in addition this Novel digital type photoelectric auto-collimator additionally uses the longitudinally height that plus lens group shortens collimator, structure is compacter, is more convenient to carrying of installation.The utility model can be widely used in the alignment measurement of daily life, commercial production, Aero-Space, boats and ships and military industry field.
The foregoing is only preferred embodiment of the present utility model; not in order to limit the utility model; all do within spirit of the present utility model and principle any amendment, equivalent to replace and improvement etc., all should be included within protection domain of the present utility model.
Claims (7)
1. a twin shaft polarization adjustable digital formula photoelectric auto-collimator, it is characterized in that, comprise the first light source, secondary light source, the first graticule, the second graticule, the first adjustable plus lens group, the second adjustable plus lens group, the first Amici prism, quarter wave plate, the second Amici prism, primary mirror of looking in the distance, look in the distance secondary mirror and PSD detector;
Described second Amici prism is polarization splitting prism;
Described first graticule and the second graticule are " word " type differentiation plate; " word " shape groove on first and second graticules is vertically put mutually;
After the first light source is opened, the light sent illuminates the first graticule, light through described first graticule is irradiated on the reflective surface of the first Amici prism after the first adjustable plus lens group converges, after the reflex of the first Amici prism, after entering primary mirror of looking in the distance, project on target reflecting surface; Target reflecting surface by light reflect after return after after the convergence again of primary mirror of looking in the distance, successively through after the first Amici prism, quarter wave plate, the second Amici prism and secondary mirror of looking in the distance, finally incide in described PSD detector;
After secondary light source is opened, the light sent illuminates the second graticule, light through described second graticule is irradiated on the reflective surface of the second Amici prism after the second adjustable plus lens group converges, after the reflex of the second Amici prism, S wave component wherein is all reflected with 45° angle, thereafter after quarter wave plate, phase delay 90 °, through the first Amici prism, after entering primary mirror of looking in the distance, project on target reflecting surface; Target reflecting surface by light reflect after return after after the convergence of primary mirror of looking in the distance, successively through after the first Amici prism, quarter wave plate, phase place postpones 90 degree again, becomes P ripple after the whole transmission of the second Amici prism, and through looking in the distance, secondary mirror also finally incides in described PSD detector.
2. a kind of twin shaft polarization adjustable digital formula photoelectric auto-collimator as claimed in claim 1, it is characterized in that, described first adjustable plus lens group comprises the first plus lens and the second plus lens; Described first plus lens is near first graticule one end, and described second plus lens is near described first Amici prism one end.
3. a kind of twin shaft polarization adjustable digital formula photoelectric auto-collimator as claimed in claim 2, it is characterized in that, the second plus lens group comprises, the 3rd plus lens and the 4th plus lens; Described 3rd plus lens is near second graticule one end, and described 4th plus lens is near described second Amici prism one end.
4. a kind of twin shaft polarization adjustable digital formula photoelectric auto-collimator as claimed in claim 3, it is characterized in that, " word " groove on described first graticule is positioned at directly over the axis of autocollimator, is parallel to the axis of autocollimator.
5. a kind of twin shaft polarization adjustable digital formula photoelectric auto-collimator as claimed in claim 3, it is characterized in that, " word " groove on described second graticule, horizontal pendulum is put in directly over the axis of autocollimator, perpendicular to the axis of autocollimator.
6. a kind of twin shaft polarization adjustable digital formula photoelectric auto-collimator as described in one of claim 1 to 5, is characterized in that, described secondary light source adopts LED light source.
7. a kind of twin shaft polarization adjustable digital formula photoelectric auto-collimator as claimed in claim 1, it is characterized in that, primary mirror of looking in the distance is balsaming lens group.
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| CN201420775022.0U CN204240945U (en) | 2014-12-11 | 2014-12-11 | A kind of twin shaft polarization adjustable digital formula photoelectric auto-collimator |
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| CN201420775022.0U CN204240945U (en) | 2014-12-11 | 2014-12-11 | A kind of twin shaft polarization adjustable digital formula photoelectric auto-collimator |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109100019A (en) * | 2018-08-06 | 2018-12-28 | 中国科学院西安光学精密机械研究所 | A kind of system and method for realizing that Sagnac physical intervention instrument high-precision is glued |
| CN114295078A (en) * | 2021-12-28 | 2022-04-08 | 歌尔股份有限公司 | Prism calibration device and parallelism calibration method |
-
2014
- 2014-12-11 CN CN201420775022.0U patent/CN204240945U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109100019A (en) * | 2018-08-06 | 2018-12-28 | 中国科学院西安光学精密机械研究所 | A kind of system and method for realizing that Sagnac physical intervention instrument high-precision is glued |
| CN109100019B (en) * | 2018-08-06 | 2023-09-01 | 中国科学院西安光学精密机械研究所 | System and method for realizing high-precision gluing of Sagnac physical interferometer |
| CN114295078A (en) * | 2021-12-28 | 2022-04-08 | 歌尔股份有限公司 | Prism calibration device and parallelism calibration method |
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