CN204240960U - The two detecting polarization photoelectric auto-collimator of a kind of convergence twin shaft - Google Patents
The two detecting polarization photoelectric auto-collimator of a kind of convergence twin shaft Download PDFInfo
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- CN204240960U CN204240960U CN201420774863.XU CN201420774863U CN204240960U CN 204240960 U CN204240960 U CN 204240960U CN 201420774863 U CN201420774863 U CN 201420774863U CN 204240960 U CN204240960 U CN 204240960U
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Abstract
The utility model relates to field of optical measurements, concrete finger one converges the two detecting polarization photoelectric auto-collimator of twin shaft, comprises the first light source, secondary light source, the first graticule, the second graticule, the first light source collect lens, secondary light source plus lens, the first Amici prism, the second Amici prism, the 3rd Amici prism, quarter wave plate, collimation lens, a PSD detector and the 2nd PSD detector.Adopt plus lens and polaroid, decrease optical energy loss; Adopt PSD detector, resolution is high; Adopt the mode of the two detection of two light source, be equivalent on an autocollimator, achieve the function detected for 4 times, improve resolution characteristic and the reaction capacity of system, structure is simple, measuring accuracy is higher, can be widely used in the alignment measurement of daily life, commercial production, Aero-Space, boats and ships and military industry field.
Description
Technical field
The utility model relates to photodetection field, especially relates to autocollimatic instrument field.
Background technology
Autocollimator utilizes optical autocollimating principle, realizes the fine measuring instrument of small angle measurement.Because it is easy to use and have higher accuracy of detection, be widely used in the industry that the precision such as Aero-Space, boats and ships, military project are high, the test of such as, in the quality assurance (flatness, flatness, verticality, the depth of parallelism etc.) of Mechanical Processing Industry, measurement verification industry angle measurement standard, prism angle location and monitoring, optical element and installation accuracy control etc., its range of application is wide.Autocollimator experienced by visual type, photoelectricity nulling formula and digital display type three developing stage.
Raising resolving power and stability of display are the developing direction of universal digital display autocollimator.
High resolution is guarantee and the prerequisite of pin-point accuracy, and high stability is again guarantee and the prerequisite of high resolution.Rising space amount is feature and the difficult point of static digital display autocollimator.Kinetic measurement is sampled at every turn and is only had a numerical value to export, and can not react beating of indicating value, its difficult point is dynamic responding speed and dynamic accuracy, but all purpose instrument will read the stable reading value of each position, rising space just can only be estimated greatly and reads, and affects the accuracy of indicating value, also affects resolving power.
The appearance of digital display type autocollimator makes the performance of autocollimator have qualitative leap, and digital display type is instrument accuracy grade by 1 " level is increased to 0.1 " level, and minimum displayed value is by 0.1 " level is increased to 0.01 " level.The accuracy of digital display type autocollimator is high, easy to use, simple to operate, can realize automatically measuring.
The photoelectric auto-collimator produced both at home and abroad is at present mainly by human eye reading, and for static test, response frequency is not high, cannot meet the needs measured at a high speed; The measuring accuracy of single shaft autocollimator is poor, well can not realize the measurement of two dimension angular; In addition the diversity of light source, have impact on the utilization ratio of optical energy of system; And when current autocollimator is general repeatedly through the semi-transparent semi-reflecting effect of Amici prism, finally can project the luminous energy of pick-up unit, loss is very large, can up to 80%, light energy losses large like this, proposes requirements at the higher level to the luminous sensitivity of pick-up unit.
Utility model content
In view of the foregoing, the utility model provides the two detecting polarization photoelectric auto-collimator of a kind of convergence twin shaft, automatically can identify target, compared to traditional photoelectric auto instrument, there is higher resolution, and measured by twin shaft, the skew detecting measured target two dimension angular that can be sensitiveer; Adopt the mating reaction of polarization splitting prism and quarter wave plate simultaneously, improve the utilization ratio of optical energy of system; Adopt plus lens, improve the convergence degree of luminous energy.
In order to realize above-mentioned target, the utility model takes following technical scheme: a kind of converge the two detecting polarization photoelectric auto-collimator of twin shaft, comprises the first light source, secondary light source, the first graticule, the second graticule, the first light source collect lens, secondary light source plus lens, the first Amici prism, the second Amici prism, the 3rd Amici prism, quarter wave plate, collimation lens, a PSD detector and the 2nd PSD detector;
Wherein said second Amici prism is polarization splitting prism; Through the P component waves of polarization splitting prism by whole transmission, and S component waves can all be reflected with 45° angle.
Wherein, described first graticule and the second graticule are " word " type graticule, and " word " the shape groove on the first and second graticules is vertically put mutually, when the first light source, after secondary light source is opened, the light sent illuminates the first graticule and the second graticule respectively, orthogonal " word " shape groove on described first graticule and the second graticule, project to respectively, first light source plus lens and secondary light source plus lens are (when light source is diverging light, its luminous energy is easily disperseed and reduces system looks effect, originally the light signal dispersed can well converge on less significant surface by the application of plus lens, improve the utilization factor of luminous energy, improve the performance of system), after the convergence effect of described first light lens and secondary light source plus lens, project in the first Amici prism respectively, after the transmittance and reflectance effect of the first Amici prism, incide in the second Amici prism, after the second Amici prism, P component waves is wherein by whole transmission, and phase place postpones 90 ° respectively after quarter wave plate, project on target reflecting surface after the collimating effect of collimation lens, the light that the face of being reflected reflects is after the convergence effect of collimation lens, again through quarter wave plate, phase place postpones 90 ° more respectively, become S ripple, and all reflexed in the 3rd Amici prism by the second Amici prism, and after the 3rd Amici prism, incide in a PSD detector and the 2nd PSD detector.
Due to quarter wave plate twice phase delay in the utility model, original S ripple is made to become P ripple, completely through polarization splitting prism, light signal is made to reduce to 0 in the energy loss after Amici prism, the utilization factor of the energy of light source of great raising, the raising of the utilization factor of this luminous energy needs repeatedly to seem particularly important through Amici prism face at light signal, because natural light does not obtain light energy losses close to 50% through an Amici prism face in theory, if through n Amici prism, then residue luminous energy is original 1/2
n.The utilization ratio of optical energy utilizing polarization splitting prism and quarter wave plate that light source is sent in the utility model doubles.
Further, described first light source and secondary light source adopt LED light source, and compared to conventional light source, LED has, cost is low, high-level efficiency, low energy consumption, high brightness, environmental protection, a series of remarkable advantage such as extra long life, meanwhile, because LED light source has very strong polarizability, can be reduced to minimum by the system light energy losses of LED light source.
Further, the utility model adopts biaxial system, wherein the first graticule and the second graticule are: " word " shape groove, two divisions of the graticule are vertically put mutually, respectively through projecting in target reflecting surface after the reflex of the first Amici prism and the second Amici prism, if reflecting surface is vertical with autocollimator, when there is no deflection angle, in theory, light should become cross one another " cross " shape when each optical surface of collimator finally projects in PSD detector, and overlap with the center set by PSD, when target reflecting surface and the axial journey certain angle of autocollimator offset, " word " shape groove on two graticules just can not form the projection of " cross " shape on the test surface of PSD detector.Graticule image received by the test surface of PSD detector just can better judge that target reflecting surface obtains deviation angle and direction.Compared to the autocollimator of single shaft, " cross " generally used or the graticule of other shapes, the utility model adopts twin shaft " word " graticule, " cross " projected light signal that last PSD detector detects, be through the light signal overlap of two cover arbitrary source systems of twin shaft and produce, this is equivalent to the function achieving twice detection on an autocollimator, improves resolution characteristic and the reaction capacity of system.
Further, the end of probe of the two detecting polarization photoelectric auto-collimator of twin shaft, selects biaxial system equally, namely a PSD detection and the 2nd PSD detect, mutually vertically and independently detection mode, and the light signal detected is separate, have dual verification the verifying results, detection accuracy is higher.
Preferred as one, " word " groove on described first graticule is positioned at directly over the axis of autocollimator, is parallel to the axis of autocollimator; " word " groove on described second graticule, horizontal pendulum is put in directly over the axis of autocollimator, perpendicular to the axis of autocollimator.
Preferred as one, " word " groove on described second graticule is positioned at directly over the axis of autocollimator, is parallel to the axis of autocollimator; " word " groove on described first graticule, horizontal pendulum is put in directly over the axis of autocollimator, perpendicular to the axis of autocollimator.
The two detecting polarization photoelectric auto-collimator of this convergence twin shaft adopts PSD detector, and the position quantity information of the light signal detected is analog output, faster system response, and resolution is high, and cost is low, therefore has the value of widespread use.Can modulate echo signal simultaneously, thus the antijamming capability of system can be significantly improved, can be used for realizing high speed, high precision, position detecting system that antijamming capability is strong, compared to ccd detector, the utility model adopts the detection sensitivity of PSD detector higher, the high measurement realizing high more precision.Price is also more cheap simultaneously.
Further, described collimation lens is balsaming lens group, and compared to ordinary lens, balsaming lens group has better spotlight effect.
the utility model has following beneficial effect:the two detecting polarization photoelectric auto-collimator the utility model of this convergence twin shaft adopts polarization splitting prism and polaroid, improves utilization ratio of optical energy; Adopt plus lens, the light signal originally dispersed is converged on less significant surface, improves the utilization factor of luminous energy; Adopt the detection sensitivity of PSD detector higher, the high measurement realizing high more precision, price is also more cheap simultaneously; The utility model adopts twin shaft " word " graticule, " cross " projected light signal that last PSD detector detects, be through the light signal overlap of two cover arbitrary source systems of twin shaft and produce, this is equivalent to the function achieving twice detection on an autocollimator, meanwhile, adopts a PSD detection and the 2nd PSD to detect, mutually vertically and independently detection mode, the light signal detected is separate, and have dual verification the verifying results, detection accuracy improves further.Improve resolution characteristic and the reaction capacity of system, structure is simple, and production cost is low, and measuring accuracy is higher, can be widely used in the alignment measurement of daily life, commercial production, Aero-Space, boats and ships and military industry field.
Accompanying drawing explanation
Fig. 1 is the principle assumption diagram of the two detecting polarization photoelectric auto-collimator of this convergence twin shaft.
Fig. 2 is the light path principle schematic diagram of the two detecting polarization photoelectric auto-collimator optimal way 1 of this convergence twin shaft.
Fig. 3 is the light path principle schematic diagram of the two detecting polarization photoelectric auto-collimator optimal way 2 of this convergence twin shaft.
Embodiment
The utility model is described in detail below in conjunction with the drawings and specific embodiments.
The utility model provides the two detecting polarization photoelectric auto-collimator of a kind of convergence twin shaft, automatically can identify target, compared to traditional photoelectric auto instrument, there is higher resolution, and measured by twin shaft, the skew detecting measured target two dimension angular that can be sensitiveer; Adopt the mating reaction of polarization splitting prism and quarter wave plate simultaneously, improve the utilization ratio of optical energy of system; Adopt plus lens, improve the convergence degree of luminous energy.
In order to realize above-mentioned target, the utility model takes technical scheme as shown in Figure 1: the two detecting polarization photoelectric auto-collimator of a kind of convergence twin shaft, comprises the first light source 1, secondary light source 2, first graticule 3, second graticule 4, first light source collects lens 5, secondary light source plus lens 6, first Amici prism 7, second Amici prism 8, the 3rd Amici prism 12, quarter wave plate 9, collimation lens 10, a PSD detector 13 and the 2nd PSD detector 14;
Wherein said second Amici prism 8 is polarization splitting prism; Through the P component waves of polarization splitting prism by whole transmission, and S component waves can all be reflected with 45° angle.
Wherein, described first graticule 2 and the second graticule 4 are " word " type graticule, and the first graticule 3 is put with " word " the shape groove on the second graticule 4 is mutually vertical, when the first light source 1, after secondary light source 2 is opened, the light sent illuminates the first graticule 3 and the second graticule 4 respectively, orthogonal " word " shape groove on described first graticule 3 and the second graticule 4, project to respectively, first light source plus lens 5 and secondary light source plus lens 6, after the convergence effect of described first light lens 5 and secondary light source plus lens 6 (when light source is diverging light, its luminous energy is easily disperseed and reduces system looks effect, originally the light signal dispersed can well converge on less significant surface by the application of plus lens, improve the utilization factor of luminous energy, improve the performance of system), project in the first Amici prism 7 respectively, (be wherein transmission to the light signal of the first light source 1 after the transmittance and reflectance effect of the first Amici prism 7, be reflection to the light signal of secondary light source 2), incide in the second Amici prism 8, after the second Amici prism 8, P component waves is wherein by whole transmission, and phase place postpones 90 ° respectively after quarter wave plate 9, project on target reflecting surface 11 after the collimating effect of collimation lens 10, be reflected light that face 11 reflects after the convergence effect of collimation lens 10, again through quarter wave plate 9, phase place postpones 90 ° more respectively, become S ripple, and all reflexed in the 3rd Amici prism 12 by the second Amici prism 8, and after the 3rd Amici prism 12, incide (system optical signaling paths as shown in Figure 2 or Figure 3) in a PSD detector 13 and the 2nd PSD detector 14.
Due to quarter wave plate 9 twice phase delay in the utility model, original S ripple is made to become P ripple, completely through polarization splitting prism, light signal is made to reduce to 0 in the energy loss after Amici prism, the utilization factor of the energy of light source of great raising, the raising of the utilization factor of this luminous energy needs repeatedly to seem particularly important through Amici prism face at light signal, because natural light does not obtain light energy losses close to 50% through an Amici prism face in theory, if through n Amici prism, then residue luminous energy is original 1/2
n.The utilization ratio of optical energy utilizing polarization splitting prism 8 and quarter wave plate 9 that light source is sent in the utility model doubles.
Further, described first light source 1 and secondary light source 2 adopt LED light source, and compared to conventional light source, LED has, cost is low, high-level efficiency, low energy consumption, high brightness, environmental protection, a series of remarkable advantage such as extra long life, meanwhile, because LED light source has very strong polarizability, can be reduced to minimum by the system light energy losses of LED light source.
Further, the utility model adopts biaxial system, wherein the first graticule 3 and the second graticule 4 are: " word " shape groove, two divisions of the graticule are vertically put mutually, respectively through projecting in target reflecting surface 11 after the first Amici prism 7 and the second Amici prism 8, if target reflecting surface 11 is vertical with autocollimator, when there is no deflection angle, in theory, light should become cross one another " cross " shape when each optical surface of collimator finally projects in PSD detector, and overlap with the center set by PSD, when target reflecting surface and the axial journey certain angle of autocollimator offset, " word " shape groove on two graticules just can not form the projection of " cross " shape on the test surface of PSD detector.Graticule image received by the test surface of PSD detector just can better judge that target reflecting surface obtains deviation angle and direction.Compared to the autocollimator of single shaft, " cross " generally used or the graticule of other shapes, the utility model adopts twin shaft " word " graticule, " cross " projected light signal that last PSD detector detects, be through the light signal overlap of two cover arbitrary source systems of twin shaft and produce, this is equivalent to the function achieving twice detection on an autocollimator, improves resolution characteristic and the reaction capacity of system.
Further, the end of probe of the two detecting polarization photoelectric auto-collimator of twin shaft, selects biaxial system equally, an i.e. PSD detection 13 and the 2nd PSD detection 14, mutually vertically and independently detection mode, the light signal detected is separate, have dual verification the verifying results, detection accuracy is higher.
The two detecting polarization photoelectric auto-collimator of this convergence twin shaft adopts PSD detector, and the position quantity information of the light signal detected is analog output, faster system response, and resolution is high, and cost is low, therefore has the value of widespread use.Can modulate echo signal simultaneously, thus the antijamming capability of system can be significantly improved, can be used for realizing high speed, high precision, position detecting system that antijamming capability is strong, compared to ccd detector, the utility model adopts the detection sensitivity of PSD detector higher, the high measurement realizing high more precision.Price is also more cheap simultaneously.
Further, described collimation lens is balsaming lens group, and compared to ordinary lens, balsaming lens group has better spotlight effect.
Optimal way 1, " word " groove on described first graticule is positioned at directly over the axis of autocollimator, is parallel to the axis of autocollimator; " word " groove on described second graticule, horizontal pendulum is put in directly over the axis of autocollimator, perpendicular to the axis (as shown in Figure 2) of autocollimator.
Optimal way 2, " word " groove on described second graticule is positioned at directly over the axis of autocollimator, is parallel to the axis of autocollimator; " word " groove on described first graticule, horizontal pendulum is put in directly over the axis of autocollimator, perpendicular to the axis (as shown in Figure 3) of autocollimator.
The two detecting polarization photoelectric auto-collimator of this convergence twin shaft adopts PSD detector, and the position quantity information of the light signal detected is analog output, faster system response, and resolution is high, and cost is low, therefore has the value of widespread use.Can modulate echo signal simultaneously, thus the antijamming capability of system can be significantly improved, can be used for realizing high speed, high precision, position detecting system that antijamming capability is strong, compared to ccd detector, the utility model adopts the detection sensitivity of PSD detector higher, the high measurement realizing high more precision.Price is also more cheap simultaneously.
Further, described collimation lens is balsaming lens group, and compared to ordinary lens, balsaming lens group has better spotlight effect.
In a word, the two detecting polarization photoelectric auto-collimator the utility model of this convergence twin shaft adopts polarization splitting prism and polaroid, improves utilization ratio of optical energy; Adopt plus lens, the light signal originally dispersed is converged on less significant surface, improves the utilization factor of luminous energy; Adopt the detection sensitivity of PSD detector higher, the high measurement realizing high more precision, price is also more cheap simultaneously; The utility model adopts twin shaft " word " graticule, " cross " projected light signal that last PSD detector detects, be through the light signal overlap of two cover arbitrary source systems of twin shaft and produce, this is equivalent to the function achieving twice detection on an autocollimator, meanwhile, adopts a PSD detection and the 2nd PSD to detect, mutually vertically and independently detection mode, the light signal detected is separate, and have dual verification the verifying results, detection accuracy improves further.Improve resolution characteristic and the reaction capacity of system, structure is simple, and production cost is low, and measuring accuracy is higher, can be widely used in the alignment measurement of daily life, commercial production, Aero-Space, boats and ships and military industry field.
The foregoing is only preferred embodiment of the present utility model; not in order to limit the utility model; all do within spirit of the present utility model and principle any amendment, equivalent to replace and improvement etc., all should be included within protection domain of the present utility model.
Claims (8)
1. one kind is converged the two detecting polarization photoelectric auto-collimator of twin shaft, it is characterized in that, comprise the first light source, secondary light source, the first graticule, the second graticule, the first light source collect lens, secondary light source plus lens, the first Amici prism, the second Amici prism, quarter wave plate and collimation lens;
Described second Amici prism is polarization splitting prism;
Described first graticule and the second graticule are " word " type graticule; " word " shape groove on first and second graticules is vertically put mutually;
After the first light source is opened, the light sent illuminates the first graticule, through described first graticule light through the first light source collect lens converge after be irradiated on the reflective surface of the first Amici prism, after the reflex of the first Amici prism, enter the second Amici prism, thereafter, through quarter wave plate, after entering collimation lens, project on target reflecting surface; Target reflecting surface by light reflect after return after after the convergence of collimation lens, successively through quarter wave plate, the second Amici prism; And after the reflection of the second Amici prism, incide in the next device;
After secondary light source is opened, the light sent illuminates the second graticule, and the light through described second graticule collects after lens convergence through the first Amici prism through secondary light source, thereafter through the second Amici prism, after quarter wave plate, enter collimation lens, project on target reflecting surface; Target reflecting surface return after light is reflected after after the convergence of collimation lens, to incide in the next device after the reflection of the second Amici prism through quarter wave plate.
2. the two detecting polarization photoelectric auto-collimator of a kind of convergence twin shaft as claimed in claim 1, is characterized in that, comprise the 3rd Amici prism, a PSD detector and the 2nd PSD detector; Light signal through the second Amici prism reflection enters respectively in a PSD detector and the 2nd PSD detector after the transmittance and reflectance effect of the 3rd Amici prism.
3. the two detecting polarization photoelectric auto-collimator of a kind of convergence twin shaft as claimed in claim 2, it is characterized in that, described first light source and secondary light source are LED light source.
4. the two detecting polarization photoelectric auto-collimator of a kind of convergence twin shaft as claimed in claim 3, it is characterized in that, described collimation lens is balsaming lens group.
5. the one as described in one of Claims 1-4 converges the two detecting polarization photoelectric auto-collimator of twin shaft, and it is characterized in that, " word " groove on described first graticule is positioned at directly over the axis of autocollimator, is parallel to the axis of autocollimator.
6. the one as described in one of claim 5 converges the two detecting polarization photoelectric auto-collimator of twin shaft, and it is characterized in that, " word " groove on described second graticule, horizontal pendulum is put in directly over the axis of autocollimator, perpendicular to the axis of autocollimator.
7. the one as described in one of Claims 1-4 converges the two detecting polarization photoelectric auto-collimator of twin shaft, and it is characterized in that, " word " groove on described second graticule is positioned at directly over the axis of autocollimator, is parallel to the axis of autocollimator.
8. the one as described in one of claim 7 converges the two detecting polarization photoelectric auto-collimator of twin shaft, and it is characterized in that, " word " groove on described first graticule, horizontal pendulum is put in directly over the axis of autocollimator, perpendicular to the axis of autocollimator.
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| CN201420774863.XU CN204240960U (en) | 2014-12-11 | 2014-12-11 | The two detecting polarization photoelectric auto-collimator of a kind of convergence twin shaft |
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| CN201420774863.XU CN204240960U (en) | 2014-12-11 | 2014-12-11 | The two detecting polarization photoelectric auto-collimator of a kind of convergence twin shaft |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109990735A (en) * | 2018-12-29 | 2019-07-09 | 中国科学院西安光学精密机械研究所 | For improving the light source frequency modulating device and method of autocollimator measurement accuracy |
| CN111504344A (en) * | 2020-05-15 | 2020-08-07 | 天津时空经纬测控技术有限公司 | Calibration system and method for calibrating non-contact attitude measurement equipment |
| CN113639665A (en) * | 2021-07-30 | 2021-11-12 | 哈尔滨工业大学 | High-stability nanoradian magnitude angle measurement method and device based on drift amount feedback |
| CN113639666A (en) * | 2021-07-30 | 2021-11-12 | 哈尔滨工业大学 | High-stability nanoradian magnitude angle measurement method and device based on spatial light modulation |
| CN113686265A (en) * | 2021-07-30 | 2021-11-23 | 哈尔滨工业大学 | High-stability nanoradian magnitude angle measurement method and device based on deformable mirror compensation |
| CN114111570A (en) * | 2021-11-01 | 2022-03-01 | 广东亚微伽科技有限公司 | Two-dimensional autocollimator and image positioning calculation method and device based on same |
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2014
- 2014-12-11 CN CN201420774863.XU patent/CN204240960U/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109990735A (en) * | 2018-12-29 | 2019-07-09 | 中国科学院西安光学精密机械研究所 | For improving the light source frequency modulating device and method of autocollimator measurement accuracy |
| CN109990735B (en) * | 2018-12-29 | 2020-05-19 | 中国科学院西安光学精密机械研究所 | Light source frequency modulation device and method for improving measurement precision of autocollimator |
| CN111504344A (en) * | 2020-05-15 | 2020-08-07 | 天津时空经纬测控技术有限公司 | Calibration system and method for calibrating non-contact attitude measurement equipment |
| CN111504344B (en) * | 2020-05-15 | 2022-03-11 | 天津时空经纬测控技术有限公司 | Calibration system and method for calibrating non-contact attitude measurement equipment |
| CN113639665A (en) * | 2021-07-30 | 2021-11-12 | 哈尔滨工业大学 | High-stability nanoradian magnitude angle measurement method and device based on drift amount feedback |
| CN113639666A (en) * | 2021-07-30 | 2021-11-12 | 哈尔滨工业大学 | High-stability nanoradian magnitude angle measurement method and device based on spatial light modulation |
| CN113686265A (en) * | 2021-07-30 | 2021-11-23 | 哈尔滨工业大学 | High-stability nanoradian magnitude angle measurement method and device based on deformable mirror compensation |
| US20230033342A1 (en) * | 2021-07-30 | 2023-02-02 | Harbin Institute Of Technology | High-Stability Nano-Radian-Order Angle Measuring Method and Device Based on Drift Value Feedback |
| US11698249B2 (en) * | 2021-07-30 | 2023-07-11 | Harbin Institute Of Technology | High-stability nano-radian-order angle measuring method and device based on drift value feedback |
| CN114111570A (en) * | 2021-11-01 | 2022-03-01 | 广东亚微伽科技有限公司 | Two-dimensional autocollimator and image positioning calculation method and device based on same |
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Effective date of registration: 20170904 Address after: 610000, Sichuan, Chengdu, China (Sichuan) free trade zone, Chengdu hi tech Zone, Tianfu Road North, No. 1, building 1, unit 16, 1601, No. 28 Patentee after: Sichuan Rui Rui acme technology Co., Ltd. Address before: 610207, Shuangliu County Industrial Zone, Southwest Economic Zone, Chengdu, Sichuan, three Patentee before: SICHUAN WINDOM PHOTOELECTRIC TECHNOLOGY CO., LTD. |
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150401 Termination date: 20171211 |