CN204240961U - A kind of twin shaft converges two detecting polarization photoelectric auto-collimator - Google Patents
A kind of twin shaft converges two detecting polarization photoelectric auto-collimator Download PDFInfo
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- CN204240961U CN204240961U CN201420775524.3U CN201420775524U CN204240961U CN 204240961 U CN204240961 U CN 204240961U CN 201420775524 U CN201420775524 U CN 201420775524U CN 204240961 U CN204240961 U CN 204240961U
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Abstract
The utility model relates to field of optical measurements, a kind of twin shaft of concrete finger converges two detecting polarization photoelectric auto-collimator, comprises the first light source, secondary light source, the first graticule, the second graticule, the first light source collect lens, secondary light source plus lens, the first Amici prism, the second Amici prism, the 3rd Amici prism, quarter wave plate, collimation lens, a PSD detector and the 2nd PSD detector.Adopt plus lens and polaroid, decrease optical energy loss; Adopt PSD detector, resolution is high; Adopt the mode of the two detection of two light source, be equivalent on an autocollimator, achieve the function detected for 4 times, improve resolution characteristic and the reaction capacity of system, structure is simple, measuring accuracy is higher, can be widely used in the alignment measurement of daily life, commercial production, Aero-Space, boats and ships and military industry field.
Description
Technical field
The utility model relates to photodetection field, especially relates to autocollimatic instrument field.
Background technology
Autocollimator utilizes optical autocollimating principle, realizes the fine measuring instrument of small angle measurement.Because it is easy to use and have higher accuracy of detection, be widely used in the industry that the precision such as Aero-Space, boats and ships, military project are high, the test of such as, in the quality assurance (flatness, flatness, verticality, the depth of parallelism etc.) of Mechanical Processing Industry, measurement verification industry angle measurement standard, prism angle location and monitoring, optical element and installation accuracy control etc., its range of application is wide.Autocollimator experienced by visual type, photoelectricity nulling formula and digital display type three developing stage.
Raising resolving power and stability of display are the developing direction of universal digital display autocollimator.
High resolution is guarantee and the prerequisite of pin-point accuracy, and high stability is again guarantee and the prerequisite of high resolution.Rising space amount is feature and the difficult point of static digital display autocollimator.Kinetic measurement is sampled at every turn and is only had a numerical value to export, and can not react beating of indicating value, its difficult point is dynamic responding speed and dynamic accuracy, but all purpose instrument will read the stable reading value of each position, rising space just can only be estimated greatly and reads, and affects the accuracy of indicating value, also affects resolving power.
The appearance of digital display type autocollimator makes the performance of autocollimator have qualitative leap, and digital display type is instrument accuracy grade by 1 " level is increased to 0.1 " level, and minimum displayed value is by 0.1 " level is increased to 0.01 " level.The accuracy of digital display type autocollimator is high, easy to use, simple to operate, can realize automatically measuring.
The photoelectric auto-collimator produced both at home and abroad is at present mainly by human eye reading, and for static test, response frequency is not high, cannot meet the needs measured at a high speed; The measuring accuracy of single shaft autocollimator is poor, well can not realize the measurement of two dimension angular; In addition the diversity of light source, have impact on the utilization ratio of optical energy of system; And when current autocollimator is general repeatedly through the semi-transparent semi-reflecting effect of Amici prism, finally can project the luminous energy of pick-up unit, loss is very large, can up to 80%, light energy losses large like this, proposes requirements at the higher level to the luminous sensitivity of pick-up unit.
Utility model content
In view of the foregoing, the utility model provides a kind of twin shaft and converges two detecting polarization photoelectric auto-collimator, automatically can identify target, compared to traditional photoelectric auto instrument, there is higher resolution, and measured by twin shaft, the skew detecting measured target two dimension angular that can be sensitiveer; Adopt the mating reaction of polarization splitting prism and quarter wave plate simultaneously, improve the utilization ratio of optical energy of system; Adopt plus lens, improve the convergence degree of luminous energy.
In order to realize above-mentioned target, the utility model takes following technical scheme: a kind of twin shaft converges two detecting polarization photoelectric auto-collimator, comprises the first light source, secondary light source, the first graticule, the second graticule, the first Amici prism, the second Amici prism, the 3rd Amici prism, quarter wave plate, collimation lens, the first detection collect lens, the second detection plus lens, the first detector and the second detector;
Wherein said second Amici prism is polarization splitting prism; Through the P component waves of polarization splitting prism by whole transmission, and S component waves can all be reflected with 45° angle.
Further, described first graticule and the second graticule are " word " type graticule, and " word " the shape groove on the first and second graticules is vertically put mutually, when the first light source, after secondary light source is opened, the light sent illuminates the first graticule and the second graticule respectively, orthogonal " word " shape groove on described first graticule and the second graticule, project to respectively, in first Amici prism, after the transmittance and reflectance effect of the first Amici prism, incide in the second Amici prism, after the second Amici prism, P component waves is wherein by whole transmission, and phase place postpones 90 ° respectively after quarter wave plate, project on target reflecting surface after the collimating effect of collimation lens, the light that the face of being reflected reflects is after the convergence effect of collimation lens, again through quarter wave plate, phase place postpones 90 ° more respectively, become S ripple, and all reflexed in the 3rd Amici prism by the second Amici prism, and after the 3rd Amici prism, incide respectively the first detection plus lens and second detection plus lens in (when light source is diverging light, its luminous energy is easily disperseed and reduces system looks effect, originally the light signal dispersed can well converge on less significant surface by the application of plus lens, improve the utilization factor of luminous energy, improve the performance of system), after described first detection plus lens and second detect the convergence effect of plus lens, incide respectively in a PSD detector and the 2nd PSD detector.
Due to quarter wave plate twice phase delay in the utility model, original S ripple is made to become P ripple, completely through polarization splitting prism, light signal is made to reduce to 0 in the energy loss after Amici prism, the utilization factor of the energy of light source of great raising, the raising of the utilization factor of this luminous energy needs repeatedly to seem particularly important through Amici prism face at light signal, because natural light does not obtain light energy losses close to 50% through an Amici prism face in theory, if through n Amici prism, then residue luminous energy is original 1/2
n.The utilization ratio of optical energy utilizing polarization splitting prism and quarter wave plate that light source is sent in the utility model doubles.
Further, described first light source and secondary light source adopt LED light source, and compared to conventional light source, LED has, cost is low, high-level efficiency, low energy consumption, high brightness, environmental protection, a series of remarkable advantage such as extra long life, meanwhile, because LED light source has very strong polarizability, can be reduced to minimum by the system light energy losses of LED light source.
Further, the utility model adopts biaxial system, wherein the first graticule and the second graticule are: " word " shape groove, two divisions of the graticule are vertically put mutually, respectively through projecting in target reflecting surface after the reflex of the first Amici prism and the second Amici prism, if reflecting surface is vertical with autocollimator, when there is no deflection angle, in theory, light should become cross one another " cross " shape when each optical surface of collimator finally projects in PSD detector, and overlap with the center set by PSD, when target reflecting surface and the axial journey certain angle of autocollimator offset, " word " shape groove on two graticules just can not form the projection of " cross " shape on the test surface of PSD detector.Graticule image received by the test surface of PSD detector just can better judge that target reflecting surface obtains deviation angle and direction.Compared to the autocollimator of single shaft, " cross " generally used or the graticule of other shapes, the utility model adopts twin shaft " word " graticule, " cross " projected light signal that last PSD detector detects, be through the light signal overlap of two cover arbitrary source systems of twin shaft and produce, this is equivalent to the function achieving twice detection on an autocollimator, improves resolution characteristic and the reaction capacity of system.
Further, twin shaft converges the end of probe of two detecting polarization photoelectric auto-collimator, selects biaxial system equally, namely a PSD detection and the 2nd PSD detect, mutually vertically and independently detection mode, and the light signal detected is separate, have dual verification the verifying results, detection accuracy is higher.
Preferred as one, " word " groove on described first graticule is positioned at directly over the axis of autocollimator, is parallel to the axis of autocollimator; " word " groove on described second graticule, horizontal pendulum is put in directly over the axis of autocollimator, perpendicular to the axis of autocollimator.
Preferred as one, " word " groove on described second graticule is positioned at directly over the axis of autocollimator, is parallel to the axis of autocollimator; " word " groove on described first graticule, horizontal pendulum is put in directly over the axis of autocollimator, perpendicular to the axis of autocollimator.
This twin shaft converges two detecting polarization photoelectric auto-collimator and adopts PSD detector, and the position quantity information of the light signal detected is analog output, faster system response, and resolution is high, and cost is low, therefore has the value of widespread use.Can modulate echo signal simultaneously, thus the antijamming capability of system can be significantly improved, can be used for realizing high speed, high precision, position detecting system that antijamming capability is strong, compared to ccd detector, the utility model adopts the detection sensitivity of PSD detector higher, the high measurement realizing high more precision.Price is also more cheap simultaneously.
Further, described collimation lens is balsaming lens group, and compared to ordinary lens, balsaming lens group has better spotlight effect.
the utility model has following beneficial effect:this twin shaft converges two detecting polarization photoelectric auto-collimator the utility model and adopts polarization splitting prism and polaroid, improves utilization ratio of optical energy; Adopt plus lens, the light signal originally dispersed is converged on less significant surface, improves the utilization factor of luminous energy; Adopt the detection sensitivity of PSD detector higher, the high measurement realizing high more precision, price is also more cheap simultaneously; The utility model adopts twin shaft " word " graticule, " cross " projected light signal that last PSD detector detects, be through the light signal overlap of two cover arbitrary source systems of twin shaft and produce, this is equivalent to the function achieving twice detection on an autocollimator, meanwhile, adopts a PSD detection and the 2nd PSD to detect, mutually vertically and independently detection mode, the light signal detected is separate, and have dual verification the verifying results, detection accuracy improves further.Improve resolution characteristic and the reaction capacity of system, structure is simple, and production cost is low, and measuring accuracy is higher, can be widely used in the alignment measurement of daily life, commercial production, Aero-Space, boats and ships and military industry field.
Accompanying drawing explanation
Fig. 1 is the principle assumption diagram that this twin shaft converges two detecting polarization photoelectric auto-collimator.
Fig. 2 is the light path principle schematic diagram that this twin shaft converges two detecting polarization photoelectric auto-collimator optimal way 1.
Fig. 3 is the light path principle schematic diagram that this twin shaft converges two detecting polarization photoelectric auto-collimator optimal way 2.
Embodiment
The utility model is described in detail below in conjunction with the drawings and specific embodiments.
The utility model provides a kind of twin shaft and converges two detecting polarization photoelectric auto-collimator, automatically can identify target, compared to traditional photoelectric auto instrument, there is higher resolution, and measured by twin shaft, the skew detecting measured target two dimension angular that can be sensitiveer; Adopt the mating reaction of polarization splitting prism and quarter wave plate simultaneously, improve the utilization ratio of optical energy of system; Adopt plus lens, improve the convergence degree of luminous energy.
In order to realize above-mentioned target, the utility model takes technical scheme as shown in Figure 1: a kind of twin shaft converges two detecting polarization photoelectric auto-collimator, comprises the first light source 1, secondary light source 2, first graticule 3, second graticule 4, first Amici prism 5, second Amici prism 6, the 3rd Amici prism 10, quarter wave plate 7, collimation lens 8, first detection collect lens 11, second and detect plus lens 13, first detector 12 and the second detector 14;
Wherein said second Amici prism 6 is polarization splitting prism; Through the P component waves of polarization splitting prism by whole transmission, and S component waves can all be reflected with 45° angle.
Further, described first graticule 2 and the second graticule 4 are " word " type graticule, and the first graticule 3 is put with " word " the shape groove on the second graticule 4 is mutually vertical, when the first light source 1, after secondary light source 2 is opened, the light sent illuminates the first graticule 3 and the second graticule 4 respectively, orthogonal " word " shape groove on described first graticule 3 and the second graticule 4, project in the first Amici prism 5 respectively, (be wherein transmission to the light signal of the first light source 1 after the transmittance and reflectance effect of the first Amici prism 5, be reflection to the light signal of secondary light source 2), incide in the second Amici prism 6, after the second Amici prism 6, P component waves is wherein by whole transmission, and phase place postpones 90 ° respectively after quarter wave plate 7, project on target reflecting surface 9 after the collimating effect of collimation lens 8, be reflected light that face 9 reflects after the convergence effect of collimation lens 8, again through quarter wave plate 7, phase place postpones 90 ° more respectively, become S ripple, and all reflexed in the 3rd Amici prism 12 by the second Amici prism 6, and after the 3rd Amici prism 12, incide respectively the first detection plus lens and second detection plus lens in (when light source is diverging light, its luminous energy is easily disperseed and reduces system looks effect, originally the light signal dispersed can well converge on less significant surface by the application of plus lens, improve the utilization factor of luminous energy, improve the performance of system), after the convergence effect that described first detects plus lens 11 and the second detection plus lens 13, incide respectively in the first detector 12 and the second detector 14 (system optical signaling paths as shown in Figure 2 or Figure 3).
Due to quarter wave plate 7 twice phase delay in the utility model, original S ripple is made to become P ripple, completely through polarization splitting prism, light signal is made to reduce to 0 in the energy loss after Amici prism, the utilization factor of the energy of light source of great raising, the raising of the utilization factor of this luminous energy needs repeatedly to seem particularly important through Amici prism face at light signal, because natural light does not obtain light energy losses close to 50% through an Amici prism face in theory, if through n Amici prism, then residue luminous energy is original 1/2
n.The utilization ratio of optical energy utilizing polarization splitting prism and quarter wave plate 7 that light source is sent in the utility model doubles.
Further, described first light source 1 and secondary light source 2 adopt LED light source, and compared to conventional light source, LED has, cost is low, high-level efficiency, low energy consumption, high brightness, environmental protection, a series of remarkable advantage such as extra long life, meanwhile, because LED light source has very strong polarizability, can be reduced to minimum by the system light energy losses of LED light source.
Further, the utility model adopts biaxial system, wherein the first graticule 3 and the second graticule 4 are: " word " shape groove, two divisions of the graticule are vertically put mutually, respectively through projecting in target reflecting surface 9 after the first Amici prism 5 and the second Amici prism 6, if target reflecting surface 9 is vertical with autocollimator, when there is no deflection angle, in theory, light should become cross one another " cross " shape when each optical surface of collimator finally projects in PSD detector, and overlap with the center set by PSD, when target reflecting surface and the axial journey certain angle of autocollimator offset, " word " shape groove on two graticules just can not form the projection of " cross " shape on the test surface of PSD detector.Graticule image received by the test surface of PSD detector just can better judge that target reflecting surface obtains deviation angle and direction.Compared to the autocollimator of single shaft, " cross " generally used or the graticule of other shapes, the utility model adopts twin shaft " word " graticule, " cross " projected light signal that last PSD detector detects, be through the light signal overlap of two cover arbitrary source systems of twin shaft and produce, this is equivalent to the function achieving twice detection on an autocollimator, improves resolution characteristic and the reaction capacity of system.
Further, twin shaft converges the end of probe of two detecting polarization photoelectric auto-collimator, selects biaxial system equally, i.e. the first detector 12 and the second detector 14, mutually vertically and independently detection mode, the light signal detected is separate, have dual verification the verifying results, detection accuracy is higher.
Further, described first detector and the second detector are PSD detector; The position quantity information of the light signal detected is analog output, faster system response, and resolution is high, and cost is low, therefore has the value of widespread use.Can modulate echo signal simultaneously, thus the antijamming capability of system can be significantly improved, can be used for realizing high speed, high precision, position detecting system that antijamming capability is strong, compared to ccd detector, the utility model adopts the detection sensitivity of PSD detector higher, the high measurement realizing high more precision.Price is also more cheap simultaneously.
Further, described collimation lens is balsaming lens group, and compared to ordinary lens, balsaming lens group has better spotlight effect.
Optimal way 1, " word " groove on described first graticule is positioned at directly over the axis of autocollimator, is parallel to the axis of autocollimator; " word " groove on described second graticule, horizontal pendulum is put in directly over the axis of autocollimator, perpendicular to the axis (as shown in Figure 2) of autocollimator.
Optimal way 2, " word " groove on described second graticule is positioned at directly over the axis of autocollimator, is parallel to the axis of autocollimator; " word " groove on described first graticule, horizontal pendulum is put in directly over the axis of autocollimator, perpendicular to the axis (as shown in Figure 3) of autocollimator.
This twin shaft converges two detecting polarization photoelectric auto-collimator and adopts PSD detector, and the position quantity information of the light signal detected is analog output, faster system response, and resolution is high, and cost is low, therefore has the value of widespread use.Can modulate echo signal simultaneously, thus the antijamming capability of system can be significantly improved, can be used for realizing high speed, high precision, position detecting system that antijamming capability is strong, compared to ccd detector, the utility model adopts the detection sensitivity of PSD detector higher, the high measurement realizing high more precision.Price is also more cheap simultaneously.
Further, described collimation lens is balsaming lens group, and compared to ordinary lens, balsaming lens group has better spotlight effect.
In a word, this twin shaft converges two detecting polarization photoelectric auto-collimator the utility model and adopts polarization splitting prism and polaroid, improves utilization ratio of optical energy; Adopt plus lens, the light signal originally dispersed is converged on less significant surface, improves the utilization factor of luminous energy; Adopt the detection sensitivity of PSD detector higher, the high measurement realizing high more precision, price is also more cheap simultaneously; The utility model adopts twin shaft " word " graticule, " cross " projected light signal that last PSD detector detects, be through the light signal overlap of two cover arbitrary source systems of twin shaft and produce, this is equivalent to the function achieving twice detection on an autocollimator; Meanwhile, adopt a PSD detection and the 2nd PSD to detect, mutually vertically and independently detection mode, the light signal detected is separate, and have dual verification the verifying results, detection accuracy improves further.Improve resolution characteristic and the reaction capacity of system, structure is simple, and production cost is low, and measuring accuracy is higher, can be widely used in the alignment measurement of daily life, commercial production, Aero-Space, boats and ships and military industry field.
The foregoing is only preferred embodiment of the present utility model; not in order to limit the utility model; all do within spirit of the present utility model and principle any amendment, equivalent to replace and improvement etc., all should be included within protection domain of the present utility model.
Claims (8)
1. a twin shaft converges two detecting polarization photoelectric auto-collimator, it is characterized in that, comprise the first light source, secondary light source, the first graticule, the second graticule, the first Amici prism, the second Amici prism, the 3rd Amici prism, quarter wave plate, collimation lens, first detection collect lens, second detection plus lens, the first detector and the second detector;
Described second Amici prism is polarization splitting prism;
Described first graticule and the second graticule are " word " type graticule; " word " shape groove on first and second graticules is vertically put mutually;
After the first light source is opened, the light sent illuminates the first graticule, after the light of described first graticule is successively through described first Amici prism and the second Amici prism, after quarter wave plate, enters collimation lens, projects on target reflecting surface; Target reflecting surface by light reflect after return after after the convergence of collimation lens, through quarter wave plate and after the reflection of the second Amici prism, incide in the 3rd Amici prism, incided respectively after entering the transmittance and reflectance of the 3rd Amici prism in the first detection plus lens and the second detection plus lens, incide thereafter in the first detector and the second detector respectively;
After secondary light source is opened, the light sent illuminates the second graticule, through the light of described second graticule after the reflex of the first Amici prism, enter the second Amici prism, thereafter, through quarter wave plate, after entering collimation lens, project on target reflecting surface; Target reflecting surface by light reflect after return after after the convergence of collimation lens, successively through quarter wave plate, the second Amici prism; And after the reflection of the second Amici prism, incide in the 3rd Amici prism, incided respectively after entering the transmittance and reflectance of the 3rd Amici prism in the first detection plus lens and the second detection plus lens, incide respectively thereafter in the first detector and the second detector.
2. a kind of twin shaft as claimed in claim 1 converges two detecting polarization photoelectric auto-collimator, and it is characterized in that, described first detector and the second detector are PSD detector.
3. a kind of twin shaft as claimed in claim 2 converges two detecting polarization photoelectric auto-collimator, and it is characterized in that, described first light source and secondary light source are LED light source.
4. a kind of twin shaft as claimed in claim 3 converges two detecting polarization photoelectric auto-collimator, and it is characterized in that, described collimation lens is balsaming lens group.
5. a kind of twin shaft as described in one of Claims 1-4 converges two detecting polarization photoelectric auto-collimator, and it is characterized in that, " word " groove on described first graticule is positioned at directly over the axis of autocollimator, is parallel to the axis of autocollimator.
6. a kind of twin shaft as claimed in claim 5 converges two detecting polarization photoelectric auto-collimator, and it is characterized in that, " word " groove on described second graticule, horizontal pendulum is put in directly over the axis of autocollimator, perpendicular to the axis of autocollimator.
7. a kind of twin shaft as described in one of Claims 1-4 converges two detecting polarization photoelectric auto-collimator, and it is characterized in that, " word " groove on described second graticule is positioned at directly over the axis of autocollimator, is parallel to the axis of autocollimator.
8. a kind of twin shaft as claimed in claim 7 converges two detecting polarization photoelectric auto-collimator, and it is characterized in that, " word " groove on described first graticule, horizontal pendulum is put in directly over the axis of autocollimator, perpendicular to the axis of autocollimator.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110440720A (en) * | 2019-08-14 | 2019-11-12 | 中国科学院长春光学精密机械与物理研究所 | A kind of device for detecting parallelism of chip and substrate |
| CN110837218A (en) * | 2019-10-25 | 2020-02-25 | 伟力驱动技术（深圳）有限公司 | Clock motor |
| CN114963033A (en) * | 2022-07-29 | 2022-08-30 | 歌尔股份有限公司 | LED light source module and lens module detection equipment |
-
2014
- 2014-12-11 CN CN201420775524.3U patent/CN204240961U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110440720A (en) * | 2019-08-14 | 2019-11-12 | 中国科学院长春光学精密机械与物理研究所 | A kind of device for detecting parallelism of chip and substrate |
| CN110837218A (en) * | 2019-10-25 | 2020-02-25 | 伟力驱动技术（深圳）有限公司 | Clock motor |
| CN114963033A (en) * | 2022-07-29 | 2022-08-30 | 歌尔股份有限公司 | LED light source module and lens module detection equipment |
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| GR01 | Patent grant | ||
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Assignee: Chengdu Fuyu Technology Co., Ltd. Assignor: SICHUAN WINDOM PHOTOELECTRIC TECHNOLOGY CO., LTD. Contract record no.: 2016510000039 Denomination of utility model: Dual-axis convergent dual-detection polarized photoelectric autocollimator Granted publication date: 20150401 License type: Common License Record date: 20161220 |