CN203846100U - Movable type multi-station deposition furnace used for graphene deposition - Google Patents
Movable type multi-station deposition furnace used for graphene deposition Download PDFInfo
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- CN203846100U CN203846100U CN201320822356.4U CN201320822356U CN203846100U CN 203846100 U CN203846100 U CN 203846100U CN 201320822356 U CN201320822356 U CN 201320822356U CN 203846100 U CN203846100 U CN 203846100U
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 99
- 229910021389 graphene Inorganic materials 0.000 title claims abstract description 99
- 230000008021 deposition Effects 0.000 title claims abstract description 46
- 238000001816 cooling Methods 0.000 claims abstract description 15
- 238000010438 heat treatment Methods 0.000 claims abstract description 13
- 238000000151 deposition Methods 0.000 claims description 90
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 41
- 238000009413 insulation Methods 0.000 claims description 30
- 239000000377 silicon dioxide Substances 0.000 claims description 20
- 239000000463 material Substances 0.000 claims description 7
- 230000000740 bleeding effect Effects 0.000 claims description 6
- 238000009434 installation Methods 0.000 claims description 6
- 210000002268 wool Anatomy 0.000 claims description 6
- 238000007789 sealing Methods 0.000 claims description 5
- 239000011148 porous material Substances 0.000 claims description 3
- 239000002657 fibrous material Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 13
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 238000005137 deposition process Methods 0.000 abstract description 4
- 238000010276 construction Methods 0.000 abstract 1
- 238000005086 pumping Methods 0.000 abstract 1
- 238000009423 ventilation Methods 0.000 abstract 1
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 239000003365 glass fiber Substances 0.000 description 3
- 230000036760 body temperature Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229920000742 Cotton Polymers 0.000 description 1
- YKTSYUJCYHOUJP-UHFFFAOYSA-N [O--].[Al+3].[Al+3].[O-][Si]([O-])([O-])[O-] Chemical compound [O--].[Al+3].[Al+3].[O-][Si]([O-])([O-])[O-] YKTSYUJCYHOUJP-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000033116 oxidation-reduction process Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000003245 working effect Effects 0.000 description 1
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- Carbon And Carbon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The utility model relates to the technical field of deposition furnaces, and in particular relates to a movable type multi-station deposition furnace used for graphene deposition; the movable type multi-station deposition furnace includes a plurality of groups of graphene deposition systems which are horizontally disposed, and movable furnace bodies for heating the graphene deposition systems; and the mobile furnace bodies can switch between the plurality of groups of graphene deposition systems. The mobile furnace body can quit a deposition area after deposition, an air shower system and a ventilation system are arranged in a thermally-insulated shroud for realizing the fast cooling of the graphene deposition systems, the cooling time is greatly shortened; a group of mobile furnace bodies are corresponding to the plurality of groups of graphene deposition systems, and are independent of each other, multi-station operation of the deposition process can be realized, during deposition of the first set of mobile furnace bodies and the graphene deposition systems, sample loading, vacuum pumping and other processes of the other set of the mobile furnace bodies and the graphene deposition systems can be performed, an unnecessary before-deposition construction period can be avoided, resources are saved, the deposition cycle is shortened, and the production efficiency is improved.
Description
Technical field
The utility model relates to cvd furnace technical field, especially relates to a kind of deposition Graphene Mobile multi-station cvd furnace.
Background technology
Graphene is that Novoselov and the Geim of 2004 Nian Man Chester universities finds, it has the excellent properties of the each side such as good physics, chemistry, electricity, mechanics, at numerous areas such as new forms of energy, novel material and electronic devices and components, has a wide range of applications.Graphene is current preparation method mainly contain: (1) microcomputer stripping method.This method can only be prepared the few Graphene of quantity.(2) epitaxial method.This method main drawback is that cost is high, because die size is less, has limited its large-scale application.(3) oxidation reduction process.The Graphene defect that the method is produced is more.(4) solvent stripping method.The main shortcoming of the method is that production efficiency is lower, limits its industrialization.(5) chemical Vapor deposition process (CVD).This method on a large scale mass is prepared Graphene, and the Graphene crystalline structure of production is relatively complete, and quality is higher, can be used for transparency electrode, Flat panel touch display screen etc.The principle of chemical Vapor deposition process is that one or more gaseous substances are imported in a reaction chamber chemical reaction occurs, and in substrate, deposits a kind of material.
At present, Graphene cvd furnace deposition single, deposition body of heater need to be warmed up to depositing temperature, and after deposition, sample wants furnace cooling could sample to room temperature, and the heating-cooling cycle is long, and speed is slow; After cooling, from silica tube, sample, while depositing, need again fill sample next time, the process such as system vacuumizes, body of heater intensification, the preorder duration of deposition is longer; The long-term rapid temperature rise and drop of body of heater can cause certain damage to the heating system of body of heater and temperature controlling system, has shortened work-ing life, has also wasted the energy.
Utility model content
The technical problems to be solved in the utility model is: in order to overcome, prepare the problem that the Graphene cycle is long, production efficiency is lower in prior art, a kind of deposition Graphene Mobile multi-station cvd furnace is provided, some groups are moved the corresponding some groups of Graphene depositing systems of body of heater, be mutually independent, realize the multi-work-station operation of deposition process, save resource, shortened deposition cycle, improved production efficiency.
The utility model solves the technical scheme that its technical problem adopts: a kind of deposition Graphene Mobile multi-station cvd furnace, comprise some groups of horizontally disposed Graphene depositing systems and for heating the mobile body of heater of Graphene depositing system, described mobile body of heater can switch between some groups of Graphene depositing systems.
As preferably, described Graphene depositing system is provided with two groups, and described mobile body of heater is provided with one group.
As preferably, described deposition Graphene also comprises base station with Mobile multi-station cvd furnace, described Graphene depositing system is fixedly installed on base station upper surface by silica tube stationary installation, described base station upper surface is provided with and facilitates mobile body of heater mobile guide track system switching between some groups of Graphene depositing systems, can make silica tube be placed in behind base station surface, highly be positioned at the pleasant operation height of human body; Base station bottom can arrange wind and drench system, can improve cooling efficiency.
As preferably, described guide track system comprises and is fixedly installed on base station surface, be convenient to the horizontal guide rail that mobile body of heater moves horizontally and be slidably arranged on horizontal guide rail, be convenient to mobile body of heater and lead platform in the level moving perpendicular to horizontal direction, described level is led platform upper surface and is fixed with upright guide rail, on described upright guide rail, slide and be provided with mobile body of heater, level is led platform and can be moved left and right with respect to horizontal guide rail, mobile body of heater is arranged on level and leads on platform upright guide rail, mobile body of heater can move forward and backward along upright guide rail, make mobile body of heater can complete all around and move on horizontal plane, mobile like this body of heater just can accurately move to Graphene depositing system place, for the heating of Graphene depositing system, improved the stability of Graphene depositing system deposition.
Particularly, described Graphene depositing system comprises silica tube, and described silica tube comprises opening end and sealed end, and described opening end external stability is provided with airtight flange, and described airtight flange is provided with inlet mouth, bleeding point and tensimeter.
Particularly, described mobile body of heater comprises body of heater and furnace chamber, described furnace chamber one end opening one end sealing, and described oven cavity opening place is provided with fire door, described lower portion of furnace body is provided with the pulley that the mobile body of heater of some confessions moves, body of heater is provided with portable fire door, and body of heater exits behind sedimentary province, closes fire door, furnace body temperature remains on Graphene and deposits required temperature, while again depositing, without heating and cooling again, greatly saved the time, also reduced the waste of resource.
Particularly, described Graphene depositing system is provided with insulation plate outward, and described insulation plate can enter for mobile body of heater, in insulation plate, carry out Graphene deposition process, reduce mobile body of heater and extraneous heat exchange, reduced the loss of energy consumption, improved Graphene sedimentation effect.
As preferably, described insulation plate comprises shell and inwall.
Particularly, described shell is stainless material, and described inwall is a kind of in refractory wool, refractory fibrous material or high temperature resistant porous material, and refractory wool adopts superfine glass fiber cotton etc.; High-temperature fibre is quartz glass fibre, resurrection glass fibre, aluminum silicate fiber etc.; High temperature resistant porous material is porous alumina ceramic etc.
After completing in deposition, the temperature of the envrionment temperature in fast reducing insulation plate and Graphene depositing system, described insulation plate is provided with at least one group of wind for Graphene depositing system fast cooling and drenches system, on described insulation plate at least one group for detaching fast the exhausting system of the heat that Graphene depositing system distributes.
The beneficial effects of the utility model are: a kind of deposition Graphene Mobile multi-station cvd furnace of the present utility model, after mobile body of heater deposition, can exit sedimentary province, the wind being provided with in insulation plate drenches system and exhausting system can realize Graphene depositing system fast cooling, has greatly shortened cooling time; Body of heater is provided with portable fire door, and body of heater exits behind sedimentary province, closes fire door, and furnace body temperature remains on Graphene and deposits required temperature, while again depositing, without heating and cooling again, has greatly saved the time, has also reduced the waste of resource; Some groups are moved the corresponding some groups of Graphene depositing systems of body of heater, be mutually independent, realize the multi-work-station operation of deposition process, can be when first set deposits, other are packed into luggage sample, the process such as vacuumize, avoided unnecessary deposition preorder time duration, saved resource, shorten deposition cycle, improved production efficiency; Only need to mobile body of heater, the danger of having avoided mobile silica tube to bring.
Accompanying drawing explanation
Below in conjunction with drawings and Examples, the utility model is further illustrated.
Fig. 1 is a kind of front view of Mobile multi-station cvd furnace for Graphene that deposits of the present utility model;
Fig. 2 be Fig. 1 A-A to right view;
Fig. 3 is the vertical view of Fig. 1;
Fig. 4 is the schematic diagram of Graphene depositing system of the present utility model;
Fig. 5 is the sectional view of insulation plate of the present utility model;
Fig. 6 is the structural representation of the utility model embodiment 2;
Fig. 7 is the structural representation of the utility model embodiment 3.
In figure: 1. Graphene depositing system, 2. moves body of heater, 3. base station, 4. silica tube stationary installation, 5. guide track system, 6. insulation plate, 7. wind drenches system, 8. exhausting system, 11. silica tubes, 12. airtight flanges, 13. inlet mouths, 14. bleeding points, 15 tensimeters, 21 bodies of heater, 22. furnace chambers, 23. fire doors, 24. pulleys, 51. horizontal guide rails, 52. levels are led platform, 53. upright guide rails, 61. shells, 62. inwalls.
Embodiment
Below in conjunction with specific embodiment, further the utility model is set forth, should be understood that and quote embodiment only for the utility model is described, and be not used in restriction scope of the present utility model.
Embodiment 1
As shown in Figures 1 to 5, a kind of deposition Graphene Mobile multi-station cvd furnace, comprises that two groups of horizontally disposed Graphene depositing systems 1, one group are for heating mobile body of heater 2 and the base station 3 of Graphene depositing system 1;
Graphene depositing system 1 comprises silica tube 11, and silica tube 11 comprises opening end and sealed end, and opening end external stability is provided with airtight flange 12, and airtight flange 12 is provided with inlet mouth 13, bleeding point 14 and tensimeter 15;
Mobile body of heater 2 comprises body of heater 21 and furnace chamber 22, furnace chamber 22 1 end opening one end sealings, and furnace chamber 22 opening parts are provided with fire door 23, and body of heater 21 bottoms are provided with the pulley 24 that the mobile body of heater 2 of some confessions moves;
Graphene depositing system 1 is fixedly installed on base station 3 upper surfaces by silica tube stationary installation 4, base station 3 upper surfaces are provided with and facilitate mobile body of heater 2 mobile guide track system 5 switching between two groups of Graphene depositing systems 1, guide track system 5 comprises and is fixedly installed on base station 3 surfaces, is convenient to the horizontal guide rail 51 that mobile body of heater 2 moves horizontally and is slidably arranged on horizontal guide rail 51, is convenient to mobile body of heater 2 and leads platform 52 in the level moving perpendicular to horizontal direction, level is led platform 52 upper surfaces and is fixed with upright guide rail 53, on upright guide rail 53, slides and is provided with mobile body of heater 2;
The outer insulation plate 6 that is provided with of Graphene depositing system 1, insulation plate 6 can enter for mobile body of heater 2, with heating Graphene depositing system 1, insulation plate 6 comprise shell 61 and inwall 62 two-layer, shell 61 is stainless material, inwall 62 is refractory wool, and insulation plate 6 is provided with one group of wind for Graphene depositing system 1 fast cooling and drenches system 7, and insulation plate 6 is provided with one group for detaching fast the exhausting system 8 of Graphene depositing system 1 distribute heat.
Embodiment 2
As shown in Figure 6, a kind of deposition Graphene Mobile multi-station cvd furnace, comprises that four groups of horizontally disposed Graphene depositing systems 1, one group are for heating mobile body of heater 2 and the base station 3 of Graphene depositing system 1;
Graphene depositing system 1 comprises silica tube 11, and silica tube 11 comprises opening end and sealed end, and opening end external stability is provided with airtight flange 12, and airtight flange 12 is provided with inlet mouth 13, bleeding point 14 and tensimeter 15;
Mobile body of heater 2 comprises body of heater 21 and furnace chamber 22, furnace chamber 22 1 end opening one end sealings, and furnace chamber 22 opening parts are provided with fire door 23, and body of heater 21 bottoms are provided with the pulley 24 that the mobile body of heater 2 of some confessions moves;
Graphene depositing system 1 is fixedly installed on base station 3 upper surfaces by silica tube stationary installation 4, base station 3 upper surfaces are provided with and facilitate mobile body of heater 2 mobile guide track system 5 switching between two groups of Graphene depositing systems 1, guide track system 5 comprises and is fixedly installed on base station 3 surfaces, is convenient to the horizontal guide rail 51 that mobile body of heater 2 moves horizontally and is slidably arranged on horizontal guide rail 51, is convenient to mobile body of heater 2 and leads platform 52 in the level moving perpendicular to horizontal direction, level is led platform 52 upper surfaces and is fixed with upright guide rail 53, on upright guide rail 53, slides and is provided with mobile body of heater 2;
The outer insulation plate 6 that is provided with of Graphene depositing system 1, insulation plate 6 can enter for mobile body of heater 2, with heating Graphene depositing system 1, insulation plate 6 comprise shell 61 and inwall 62 two-layer, shell 61 is stainless material, inwall 62 is refractory wool, and insulation plate 6 is provided with one group of wind for Graphene depositing system 1 fast cooling and drenches system 7, and insulation plate 6 is provided with one group for detaching fast the exhausting system 8 of Graphene depositing system 1 distribute heat.
Embodiment 3
As shown in Figure 7, a kind of deposition Graphene Mobile multi-station cvd furnace, comprises that four groups of horizontally disposed Graphene depositing systems 1, two groups are for heating mobile body of heater 2 and the base station 3 of Graphene depositing system 1;
Graphene depositing system 1 comprises silica tube 11, and silica tube 11 comprises opening end and sealed end, and opening end external stability is provided with airtight flange 12, and airtight flange 12 is provided with inlet mouth 13, bleeding point 14 and tensimeter 15;
Mobile body of heater 2 comprises body of heater 21 and furnace chamber 22, furnace chamber 22 1 end opening one end sealings, and furnace chamber 22 opening parts are provided with fire door 23, and body of heater 21 bottoms are provided with the pulley 24 that the mobile body of heater 2 of some confessions moves;
Graphene depositing system 1 is fixedly installed on base station 3 upper surfaces by silica tube stationary installation 4, base station 3 upper surfaces are provided with and facilitate mobile body of heater 2 mobile guide track system 5 switching between two groups of Graphene depositing systems 1, guide track system 5 comprises and is fixedly installed on base station 3 surfaces, is convenient to the horizontal guide rail 51 that mobile body of heater 2 moves horizontally and is slidably arranged on horizontal guide rail 51, is convenient to mobile body of heater 2 and leads platform 52 in the level moving perpendicular to horizontal direction, level is led platform 52 upper surfaces and is fixed with upright guide rail 53, on upright guide rail 53, slides and is provided with mobile body of heater 2;
The outer insulation plate 6 that is provided with of Graphene depositing system 1, insulation plate 6 can enter for mobile body of heater 2, with heating Graphene depositing system 1, insulation plate 6 comprise shell 61 and inwall 62 two-layer, shell 61 is stainless material, inwall 62 is refractory wool, and insulation plate 6 is provided with one group of wind for Graphene depositing system 1 fast cooling and drenches system 7, and insulation plate 6 is provided with one group for detaching fast the exhausting system 8 of Graphene depositing system 1 distribute heat.
The above-mentioned foundation desirable embodiment of the present utility model of take is enlightenment, and by above-mentioned description, relevant staff can, within not departing from the scope of this utility model technological thought, carry out various change and modification completely.The technical scope of this utility model is not limited to the content on specification sheets, must determine its technical scope according to claim scope.
Claims (10)
1. one kind deposits Graphene Mobile multi-station cvd furnace, it is characterized in that comprising: some groups of horizontally disposed Graphene depositing systems (1) and for heating the mobile body of heater (2) of Graphene depositing system (1), described mobile body of heater (2) can switch between some groups of Graphene depositing systems (1).
2. a kind of deposition Graphene Mobile multi-station cvd furnace as claimed in claim 1, is characterized in that: described Graphene depositing system (1) is provided with two groups, and described mobile body of heater (2) is provided with one group.
3. a kind of deposition Graphene Mobile multi-station cvd furnace as claimed in claim 1 or 2, it is characterized in that: described deposition Graphene also comprises base station (3) with Mobile multi-station cvd furnace, described Graphene depositing system (1) is fixedly installed on base station (3) upper surface by silica tube stationary installation (4), and described base station (3) upper surface is provided with and facilitates mobile body of heater (2) mobile guide track system (5) switching between some groups of Graphene depositing systems (1).
4. a kind of deposition Graphene Mobile multi-station cvd furnace as claimed in claim 3, it is characterized in that: described guide track system (5) comprises being fixedly installed on base station (3) surface, being convenient to the horizontal guide rail (51) that mobile body of heater (2) moves horizontally and being slidably arranged in horizontal guide rail (51) to be gone up, be convenient to mobile body of heater (2) and lead platform (52) in the level moving perpendicular to horizontal direction, described level is led platform (52) upper surface and is fixed with upright guide rail (53), and upper slip of described upright guide rail (53) is provided with mobile body of heater (2).
5. a kind of deposition Graphene Mobile multi-station cvd furnace as claimed in claim 1 or 2, it is characterized in that: described Graphene depositing system (1) comprises silica tube (11), described silica tube (11) comprises opening end and sealed end, described opening end external stability is provided with airtight flange (12), and described airtight flange (12) is provided with inlet mouth (13), bleeding point (14) and tensimeter (15).
6. a kind of deposition Graphene Mobile multi-station cvd furnace as claimed in claim 1 or 2, it is characterized in that: described mobile body of heater (2) comprises body of heater (21) and furnace chamber (22), described furnace chamber (22) one end opening one end sealings, described furnace chamber (22) opening part is provided with fire door (23), and described body of heater (21) bottom is provided with the mobile pulley (24) of the mobile body of heater of some confessions (2).
7. a kind of deposition Graphene Mobile multi-station cvd furnace as claimed in claim 1 or 2, it is characterized in that: the outer insulation plate (6) that is provided with of described Graphene depositing system (1), described insulation plate (6) can enter for mobile body of heater (2), to heat Graphene depositing system (1).
8. a kind of deposition Graphene Mobile multi-station cvd furnace as claimed in claim 7, is characterized in that: described insulation plate (6) comprises shell (61) and inwall (62).
9. a kind of deposition Graphene Mobile multi-station cvd furnace as claimed in claim 8, is characterized in that: described shell (61) is stainless material, and described inwall (62) is a kind of in refractory wool, refractory fibrous material or high temperature resistant porous material.
10. a kind of deposition Graphene Mobile multi-station cvd furnace as claimed in claim 7, it is characterized in that: described insulation plate (6) is provided with at least one group of wind for Graphene depositing system (1) fast cooling and drenches system (7), and described insulation plate (6) is provided with at least one group for detaching fast the exhausting system (8) of Graphene depositing system (1) distribute heat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320822356.4U CN203846100U (en) | 2013-12-12 | 2013-12-12 | Movable type multi-station deposition furnace used for graphene deposition |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320822356.4U CN203846100U (en) | 2013-12-12 | 2013-12-12 | Movable type multi-station deposition furnace used for graphene deposition |
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| CN203846100U true CN203846100U (en) | 2014-09-24 |
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| CN201320822356.4U Expired - Lifetime CN203846100U (en) | 2013-12-12 | 2013-12-12 | Movable type multi-station deposition furnace used for graphene deposition |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104860305A (en) * | 2015-05-07 | 2015-08-26 | 安徽贝意克设备技术有限公司 | Graphene device capable of achieving continuous growth |
| CN106041102A (en) * | 2016-08-10 | 2016-10-26 | 宁波百琪达自动化设备有限公司 | Continuous rotation type hydrogen demolishing production line |
| CN106119806A (en) * | 2016-06-27 | 2016-11-16 | 重庆墨希科技有限公司 | A kind of continuous-flow type continuous Large-scale graphene film preparation device |
| CN106801221A (en) * | 2017-03-27 | 2017-06-06 | 重庆墨希科技有限公司 | Multistation Graphene fast-growth equipment |
| CN107555421A (en) * | 2017-10-31 | 2018-01-09 | 南京旭羽睿材料科技有限公司 | A kind of graphene growth protection device |
| CN114031070A (en) * | 2021-12-18 | 2022-02-11 | 北京泰科诺科技有限公司 | Device capable of realizing continuous growth of graphene |
-
2013
- 2013-12-12 CN CN201320822356.4U patent/CN203846100U/en not_active Expired - Lifetime
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104860305A (en) * | 2015-05-07 | 2015-08-26 | 安徽贝意克设备技术有限公司 | Graphene device capable of achieving continuous growth |
| CN106119806A (en) * | 2016-06-27 | 2016-11-16 | 重庆墨希科技有限公司 | A kind of continuous-flow type continuous Large-scale graphene film preparation device |
| CN106119806B (en) * | 2016-06-27 | 2018-12-28 | 重庆墨希科技有限公司 | A kind of continuous Large-scale graphene film preparation device of continuous-flow type |
| CN106041102A (en) * | 2016-08-10 | 2016-10-26 | 宁波百琪达自动化设备有限公司 | Continuous rotation type hydrogen demolishing production line |
| CN106041102B (en) * | 2016-08-10 | 2018-05-01 | 百琪达智能科技（宁波）股份有限公司 | A kind of continuous rotation formula hydrogen breaks production line |
| CN106801221A (en) * | 2017-03-27 | 2017-06-06 | 重庆墨希科技有限公司 | Multistation Graphene fast-growth equipment |
| CN106801221B (en) * | 2017-03-27 | 2019-10-11 | 重庆墨希科技有限公司 | Multistation graphene fast-growth equipment |
| CN107555421A (en) * | 2017-10-31 | 2018-01-09 | 南京旭羽睿材料科技有限公司 | A kind of graphene growth protection device |
| CN107555421B (en) * | 2017-10-31 | 2020-10-02 | 南京旭羽睿材料科技有限公司 | Graphene growth protection device |
| CN114031070A (en) * | 2021-12-18 | 2022-02-11 | 北京泰科诺科技有限公司 | Device capable of realizing continuous growth of graphene |
| CN114031070B (en) * | 2021-12-18 | 2022-05-24 | 北京泰科诺科技有限公司 | Device capable of realizing continuous growth of graphene |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: CHANGZHOU 2D CARBON TECHNOLOGY CO., LTD. Free format text: FORMER NAME: 2D CARBON (CHANGZHOU) TECHNOLOGY CO., LTD. |
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| CP01 | Change in the name or title of a patent holder |
Address after: 213149 No. 6 Xiangyun Road, Wujin Economic Development Zone, Jiangsu, Changzhou Patentee after: 2D CARBON (CHANGZHOU) TECH Inc.,Ltd. Address before: 213149 No. 6 Xiangyun Road, Wujin Economic Development Zone, Jiangsu, Changzhou Patentee before: 2D CARBON (CHANGZHOU) TECH Co.,Ltd. |
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| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140924 |