CN201858873U - Five-tube silicon wafer conveying device - Google Patents
Five-tube silicon wafer conveying device Download PDFInfo
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- CN201858873U CN201858873U CN2010205814554U CN201020581455U CN201858873U CN 201858873 U CN201858873 U CN 201858873U CN 2010205814554 U CN2010205814554 U CN 2010205814554U CN 201020581455 U CN201020581455 U CN 201020581455U CN 201858873 U CN201858873 U CN 201858873U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
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Abstract
The utility model relates to a five-tube silicon wafer conveying device for a mesh-belt free sintering furnace for silicon cell plates. The five-tube silicon wafer conveying device comprises two fixed brackets and three movable brackets which are in the same structure and respectively comprises a quartz glass tube, metal sleeves, support legs and limiting screws, wherein the support legs are fixed on the metal sleeves, and the metal sleeves are provided with threaded holes and are fixed on the quartz glass tubes at the equal interval through the limiting screws. As the fixed brackets are mounted on two fixing frames, the movable brackets are fixed on two sliding plates, the sliding plates complete rising, advancing, falling and backing sequentially under the action of a reciprocating lifting mechanism and a reciprocating translation mechanism, silicon wafers on the fixed brackets pass through a tunnel sintering box sequentially under the action of the movable brackets, thereby sintering is completed smoothly. Since the silicon wafers only contact with the support legs, sintering quality of the silicon wafer is improved.
Description
Technical field:
The utility model relates to a kind of no guipure silicon cell sintering furnace, relates in particular to chip transmission device in the no guipure silicon cell sintering furnace.
Background technology:
At present, the sintering furnace that manufacture of solar cells both domestic and external manufacturing firm mainly uses American-European enterprise and produced, this class sintering furnace structure all is a net belt type tunnel sintering furnace, sintering furnace vertically on be provided with preheating binder removal district successively, heating zone, sintering zone and cooling area, arrange the heating fluorescent tube of different densities in zones of different, control each regional temperature with this, the silicon chip that prints electrode transmits by guipure, pass through the different furnace temperature district of sintering furnace successively, finish the preheating binder removal, heat up, the electrode sintering process of sintering and cooling, though this net belt type tunnel sintering technology comparative maturity, but vertical floor space of whole sintering furnace is big, need the very long body of heater of design could guarantee the preheating binder removal of silicon chip in the tunnel transmission course, heat up, sintering, temperature-fall period, because the technological temperature in high temperature sintering district need be between 850-950 ℃, therefore need the length of tunnel of design 2-3 rice just can reach so high temperature, this makes the bulky of net belt type sintering furnace.Can't satisfy the sintering process requirement if dwindle then.In addition, high temperature resistant guipure is in the process of running, need be inside and outside body of heater cycle operation, guipure partly follows silicon chip to accept the process that heats up and lower the temperature, therefore, in operation process, guipure can carry out a large amount of heats in stove, and this part heat will be all as loss, not only caused the waste of big energy, and the operating ambient temperature that raise, for this reason, the applicant has developed a kind of no guipure silicon cell sintering furnace, it can overcome the deficiency that existing net belt type tunnel sintering furnace exists well, and this occupation area of equipment is little, thermal efficiency height, power consumption is few, and energy-saving effect is remarkable.
Described no guipure silicon cell sintering furnace, comprise loading bay 1, tunnel type sinter box 2, discharge pedestal 3, silicon chip conveying mechanism 4 and furnace body frame 5, as shown in Figure 1, loading bay 1 comprises fixed base plate 11, fixed mount 12, guide post 13, fairlead 14, portable plate 15, slide rail 16 and sliding panel 17, be connected with the suit fit structure of fairlead 14 by guide post 13 between portable plate 15 and the fixed base plate 11, slide rail 16 is fixed on the portable plate 15, and sliding panel 17 is sleeved on the slide rail 16; Discharge pedestal 3 comprises fixed base plate 31, fixed mount 32, guide post 33, fairlead 34, portable plate 35, slide rail 36 and sliding panel 37, be connected with the suit fit structure of fairlead 34 by guide post 33 between portable plate 35 and the fixed base plate 31, slide rail 36 is fixed on the portable plate 35, and sliding panel 37 is sleeved on the slide rail 36; Tunnel type sinter box 2 vertically be provided with preheating binder removal district, heating zone, sintering zone and four zones of cooling area successively, between each warm area, be equipped with thermal insulation board, in preheating binder removal district, heating zone and sintering zone, be provided with the heating fluorescent tube; Silicon chip conveying mechanism 4 is arranged between loading bay 1 and the discharge pedestal 3, it comprises analog bracket 41 and movable support bracket 42, the two ends of analog bracket 41 are separately fixed on the fixed mount 12 and 32 in loading bay 1 and the discharge pedestal 3, the two ends of movable support bracket 42 are separately fixed on the sliding panel 17,37 in loading bay 1 and the discharge pedestal 3, and analog bracket 41 is between two adjacent movable support brackets 42; Between fixed base plate 11 and portable plate 15, be provided with reciprocal elevating mechanism 6, between fixed base plate 11 and sliding panel 17, be provided with reciprocal translation mechanism 7, fixed base plate 11 is installed on the furnace body frame 5, as shown in Figure 2, back and forth elevating mechanism 6 and reciprocal translation mechanism 7 drive movable support brackets 42 and periodically finish rising, reach, decline and backward movement, thereby the silicon chip that will be placed on the analog bracket is progressively moved forward.
The utility model content:
The purpose of this utility model is to provide a kind of five tubular type silicon chip conveying devices for no guipure silicon cell sintering furnace.
The technical scheme that the utility model adopted is:
Described five tubular type silicon chip conveying devices, it is characterized in that: it comprises two analog brackets and three movable support brackets, the two ends of two analog brackets are installed on the fixed mount respectively, the two ends of three movable support brackets are installed on the sliding panel respectively, and the analog bracket compartment of terrain is between movable support bracket, the structure of analog bracket and movable support bracket is identical, they all comprise quartz glass tube, metallic sheath, stand-off and stop screw, stand-off is fixed on the metallic sheath, be provided with screwed hole on metallic sheath, metallic sheath is fixed on the quartz glass tube equally spacedly by stop screw.
Further, on quartz glass tube, in axial direction have spacing hole equidistantly; On metallic sheath, also be provided with opening.
Further, described stand-off is made by steel wire, scribbles ceramic coating in Steel Wire Surface.
Further, the two ends of two analog brackets are installed on the fixed base plate respectively by ear seat, fixed mount, in analog bracket, two stand-offs are fixed on the metallic sheath symmetrically, and the overhanging pin section of stand-off is higher than the exposed junction that is installed in the stop screw on the metallic sheath, and the distance between the overhanging pin section of two stand-offs is 0.70～0.90 of a silicon chip width.
Further, the two ends of three movable support brackets are installed in respectively on the sliding panel by the ear seat, and described movable support bracket is divided into double-legged carriage, left foot carriage and right crus of diaphragm carriage, and in double-legged carriage, two stand-offs are fixed on the metallic sheath symmetrically; In the left foot carriage, a stand-off is fixed on the right side of metallic sheath; In the right crus of diaphragm carriage, a stand-off is fixed on the left side of metallic sheath; All stand-offs on both feet carriage, left foot carriage and the right crus of diaphragm carriage are all in the same plane, and the distance between the overhanging end of adjacent stand-off is 0.70～0.90 of a silicon chip width on left foot carriage and the double-legged carriage; Distance on right crus of diaphragm carriage and the double-legged carriage between the overhanging end of adjacent stand-off is 0.70～0.90 of a silicon chip width.
Because the two ends of analog bracket are separately fixed on the fixed mount in loading bay and the discharge pedestal; The two ends of movable support bracket are separately fixed on the sliding stand in loading bay and the discharge pedestal; Fixed mount is fixed on the fixed base plate, sliding panel is under the effect of reciprocal elevating mechanism and reciprocal translation mechanism, finish rising successively, reach, descend, backward movement, make and to be placed on the preheating binder removal district in the process of passing through tunnel formula sinter box successively under the effect of movable support bracket of the silicon chip on adjacent two metallic sheaths on the analog bracket, heating zone, sintering zone and cooling area, finish sintering smoothly, in this silicon chip conveying device, silicon chip only contacts with stand-off, and contact form is some contact or line contact, thus reduce silicon chip in sintering process owing to the metal ion that Metal Contact is introduced silicon chip is stained.
Description of drawings:
Fig. 1 is the structural representation of no guipure silicon cell sintering furnace;
Fig. 2 is the structural representation of loading bay and discharge pedestal;
Fig. 3, Fig. 4 are structural representation of the present utility model;
Fig. 4 is a vertical view among Fig. 3, and Fig. 3 is a C-C cutaway view among Fig. 4;
Fig. 5 is the structural representation of analog bracket;
Fig. 6-1 is the structural representation of double-legged movable support bracket; ,
The structural representation of Fig. 6-2 left foot movable support bracket;
The structural representation of Fig. 6-3 right crus of diaphragm movable support bracket;
Fig. 7 is the structural representation of stand-off, metallic sheath;
Among the figure: the 1-loading bay; 2-tunnel type sinter box; The 3-discharge pedestal; 4-silicon chip conveying mechanism; The 5-furnace body frame; The reciprocal elevating mechanism of 6-; The reciprocal translation mechanism of 7-; 11,31-fixed base plate; 12,32-fixed mount; 13,33-guide post; 14,34-fairlead; 15,35-traveling table; 16,36-slide rail; 17,37-sliding panel; The 41-analog bracket; The 411-quartz glass tube; The 412-metallic sheath; The 413-stand-off; The 414-stop screw; The 415-spacing hole; The 416-screwed hole; The 417-opening; The 418-ceramic coating; The 42-movable support bracket; 43-ear seat.
The specific embodiment:
Below in conjunction with Figure of description the specific embodiment of the present utility model is described:
Described five tubular type silicon chip conveying devices, as Fig. 2～shown in Figure 7, it is made up of fixed mount 12, fixed mount 32, two analog brackets 41, sliding panel 17, sliding panel 37, three movable support brackets 42 and ear seat 43, described analog bracket 41 is made up of quartz glass tube 411, metallic sheath 412, stand-off 413 and stop screw 414, on quartz glass tube 411, in axial direction have spacing hole 415 equidistantly, be provided with screwed hole 416 and opening 417 on metallic sheath 412, metallic sheath 412 is fixed on the quartz glass tube 411 equally spacedly by stop screw 414; Stand-off 413 is made by steel wire, scribble ceramic coating 418 in Steel Wire Surface, the inner of stand-off 413 is fixed on the metallic sheath 412, the overhanging pin section of stand-off 413 is higher than the exposed junction of the stop screw 414 that is installed on the metallic sheath 412, and the distance between the overhanging pin section of two stand-offs 413 is 0.70～0.90 of a silicon chip width; Described movable support bracket 42 is divided into double-legged carriage, left foot carriage and right crus of diaphragm carriage, they all have quartz glass tube 411, metallic sheath 412, stand-off 413 and stop screw 414 are formed, on quartz glass tube 411, in axial direction have spacing hole 415 equidistantly, on metallic sheath 412, be provided with screwed hole 416 and opening 417, stand-off 413 is fixed on the metallic sheath 412, metallic sheath 412 is fixed on the quartz glass tube 411 equally spacedly by stop screw 414, described stand-off 413 is made by steel wire, scribble ceramic coating 418 in Steel Wire Surface, in double-legged carriage, two stand-offs 413 are fixed on the metallic sheath 412 symmetrically; In the left foot carriage, a stand-off 413 is fixed on the right side of metallic sheath 412; In the right crus of diaphragm carriage, a stand-off 413 is fixed on the left side of metallic sheath 412; All stand-offs 413 on both feet carriage, left foot carriage and the right crus of diaphragm carriage are all in the same plane, and the distance between the overhanging end of adjacent stand-off 413 is 0.70～0.90 of a silicon chip width on left foot carriage and the double-legged carriage; Distance on right crus of diaphragm carriage and the double-legged carriage between the overhanging end of adjacent stand-off 413 is 0.70～0.90 of a silicon chip width; The two ends of both feet carriage, left foot carriage and right crus of diaphragm carriage are fixed on sliding panel 17 and 37 by ear seat 43 respectively, and the two ends of analog bracket 41 are separately fixed on the fixed mount 12,32 by ear seat 43; Analog bracket 41 compartment of terrains are between movable support bracket 42.
Claims (5)
1. tubular type silicon chip conveying device, it is characterized in that: it comprises two analog brackets (41) and three movable support brackets (42), the two ends of two analog brackets (41) are installed in fixed mount (12 respectively, 32) on, the two ends of three movable support brackets (42) are installed in sliding panel (17 respectively, 37) on, and analog bracket (41) compartment of terrain is positioned between the movable support bracket (42), analog bracket (41) is identical with the structure of movable support bracket (42), they all comprise quartz glass tube (411), metallic sheath (412), stand-off (413) and stop screw (414), stand-off (413) is fixed on the metallic sheath (412), be provided with screwed hole (416) on metallic sheath (412), metallic sheath (412) is fixed on the quartz glass tube (411) equally spacedly by stop screw (414).
2. five tubular type silicon chip conveying devices according to claim 1 is characterized in that: in axial direction have spacing hole (415) on quartz glass tube (411) equidistantly; On metallic sheath (412), also be provided with out (417).
3. five tubular type silicon chip conveying devices according to claim 1, it is characterized in that: described stand-off (413) is made by steel wire, scribbles ceramic coating (418) in Steel Wire Surface.
4. five tubular type silicon chip conveying devices according to claim 1, it is characterized in that: the two ends of two analog brackets (41) are installed in respectively on the fixed base plate (11,31) by ear seat (43) and fixed mount (12,32), in analog bracket (41), two stand-offs (413) are fixed on the metallic sheath (412) symmetrically, and the overhanging pin section of stand-off (413) is higher than the exposed junction of the stop screw (414) that is installed on the metallic sheath (412), and the distance between the overhanging pin section of two stand-offs (413) is 0.70～0.90 of a silicon chip width.
5. five tubular type silicon chip conveying devices according to claim 1, it is characterized in that: the two ends of three movable support brackets (42) are installed in respectively on the sliding panel (17,37) by ear seat (43), described movable support bracket (42) is divided into double-legged carriage, left foot carriage and right crus of diaphragm carriage, in double-legged carriage, two stand-offs (413) are fixed on the metallic sheath (412) symmetrically; In the left foot carriage, a stand-off (413) is fixed on the right side of metallic sheath (412); In the right crus of diaphragm carriage, a stand-off (413) is fixed on the left side of metallic sheath (412); All stand-offs (413) on both feet carriage, left foot carriage and the right crus of diaphragm carriage are all in the same plane, and the distance between the overhanging end of adjacent stand-off (413) is 0.70～0.90 of a silicon chip width on left foot carriage and the double-legged carriage; Distance on right crus of diaphragm carriage and the double-legged carriage between the overhanging end of adjacent stand-off (413) is 0.70～0.90 of a silicon chip width.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205814554U CN201858873U (en) | 2010-10-29 | 2010-10-29 | Five-tube silicon wafer conveying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205814554U CN201858873U (en) | 2010-10-29 | 2010-10-29 | Five-tube silicon wafer conveying device |
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| Publication Number | Publication Date |
|---|---|
| CN201858873U true CN201858873U (en) | 2011-06-08 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010205814554U Expired - Fee Related CN201858873U (en) | 2010-10-29 | 2010-10-29 | Five-tube silicon wafer conveying device |
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| CN (1) | CN201858873U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102054729A (en) * | 2010-10-29 | 2011-05-11 | 常州亿晶光电科技有限公司 | Five tube-type silicon chip conveying device |
| CN102809270A (en) * | 2012-06-28 | 2012-12-05 | 杭州大和热磁电子有限公司 | Silicon wafer drying furnace capable of preventing metal ion pollution and silicon wafer drying method |
| CN103557701A (en) * | 2013-11-18 | 2014-02-05 | 北京金晟阳光科技有限公司 | Air-floating roller bed type thermal treatment furnace for semiconductor devices |
| CN103743231A (en) * | 2013-11-25 | 2014-04-23 | 安徽赛耐尔机械制造有限公司 | Roller-bed-type drying and sintering integrated furnace for solar battery silicon wafers |
-
2010
- 2010-10-29 CN CN2010205814554U patent/CN201858873U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102054729A (en) * | 2010-10-29 | 2011-05-11 | 常州亿晶光电科技有限公司 | Five tube-type silicon chip conveying device |
| CN102809270A (en) * | 2012-06-28 | 2012-12-05 | 杭州大和热磁电子有限公司 | Silicon wafer drying furnace capable of preventing metal ion pollution and silicon wafer drying method |
| CN102809270B (en) * | 2012-06-28 | 2014-11-05 | 杭州大和热磁电子有限公司 | Silicon wafer drying furnace capable of preventing metal ion pollution and silicon wafer drying method |
| CN103557701A (en) * | 2013-11-18 | 2014-02-05 | 北京金晟阳光科技有限公司 | Air-floating roller bed type thermal treatment furnace for semiconductor devices |
| CN103557701B (en) * | 2013-11-18 | 2015-07-15 | 北京金晟阳光科技有限公司 | Air-floating roller bed type thermal treatment furnace for semiconductor devices |
| CN103743231A (en) * | 2013-11-25 | 2014-04-23 | 安徽赛耐尔机械制造有限公司 | Roller-bed-type drying and sintering integrated furnace for solar battery silicon wafers |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110608 Termination date: 20131029 |