CN103743231A - Roller-bed-type drying and sintering integrated furnace for solar battery silicon wafers - Google Patents

Roller-bed-type drying and sintering integrated furnace for solar battery silicon wafers Download PDF

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Publication number
CN103743231A
CN103743231A CN201310607228.2A CN201310607228A CN103743231A CN 103743231 A CN103743231 A CN 103743231A CN 201310607228 A CN201310607228 A CN 201310607228A CN 103743231 A CN103743231 A CN 103743231A
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China
Prior art keywords
roller
sintering
silicon wafers
silicon wafer
solar battery
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CN201310607228.2A
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鲍定胜
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ANHUI SNELL MACHINERY MANUFACTURING Co Ltd
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ANHUI SNELL MACHINERY MANUFACTURING Co Ltd
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Priority to CN201310607228.2A priority Critical patent/CN103743231A/en
Publication of CN103743231A publication Critical patent/CN103743231A/en
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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Abstract

The invention discloses a roller-bed-type drying and sintering integrated furnace for solar battery silicon wafers and relates to production equipment for the solar battery silicon wafers. The roller-bed-type drying and sintering integrated furnace for the solar battery silicon wafers comprises a base frame. A roller bed for conveying the silicon wafers in one direction is arranged on the base frame. A plurality of roller bodies capable of rotating are arranged in the roller bed and are respectively designed to be a V-shaped spiral roller in the axial direction in the limited space for conveying the silicon wafers. A baking oven is arranged on the base frame. A partition plate is arranged on the baking oven. A microwave tube is arranged in the partition plate. A draught fan is arranged at the outlet of the baking oven. Contact between the silicon wafers on the V-shaped spiral rollers and the V-shaped spiral rollers is linear contact in both the axial direction and the radial direction, and therefore surface contact between silicon wafers and a mesh bag during mesh-bag-type silicon wafer conveying is effectively avoided; due to the design of V-shaped spiral grooves, the advantage of double-surface sintering of the front surface field and the back surface field of each solar battery silicon wafer is well achieved, and mesh patterns, formed during mesh bag sintering, on the back surface field of each solar battery silicon wafer are avoided as well.

Description

Roller bed type solar cell silicon wafer drying and sintering all-in-one oven
Technical field:
The present invention relates to solar cell piece production equipment, be specifically related to roller bed type solar cell silicon wafer drying and sintering all-in-one oven.
Background technology:
Infrared heating Fast Sintering stove is the key equipment of producing solar cell piece, and its performance indications are directly connected to the height of the conversion ratio of cell piece, yield rate and production efficiency.
In the whole technological process of production of solar cell piece, diffusion, plated film and sintering three process are topmost, and wherein sintering is to make crystalline silicon substrate really have a vital step of photoelectric converting function.Therefore, the performance quality of agglomerating plant directly affects the quality of cell piece.
Solar cell piece adopts at present only needs once sintered co-firing technology, forms the Ohmic contact of upper/lower electrode simultaneously.The silicon chip of silver slurry, silver-colored aluminium paste, aluminium paste printing, volatilizees organic solvent through drying completely, and rete shrinks becomes decorating film tight adhesion on silicon chip, at this moment can be considered metal electrode material layer and silicon chip and contacts.When the heating of electrode metal material and single crystal silicon semiconductor reaches eutectic temperature, monocrystalline silicon atom is added in the alloy electrode material of melting in certain proportion.The whole process that monocrystalline silicon atom is added in electrode metal is quickish, and general needs several seconds.The monocrystalline silicon atom number dissolving in depends on the volume of alloy temperature and electrode material, and sintered alloy temperature is higher, and electrode metal material volume is larger, and the silicon atom number dissolving in is also more, and state is at this moment called as the alloy system of crystalline electrode metal.If now temperature reduces, system begins to cool down formation recrystallized layer, and the silicon atom being at this moment originally added in electrode metal material crystallizes out with solid-state form again, namely on metal and crystal contact interface, grows one deck epitaxial layer.If epitaxial layer contains the impurity composition identical with original crystalline material conduction type of q.s, this has just obtained by alloyage technique and has formed Ohmic contact; If contain q.s and impurity composition original crystalline material conduction type abnormal shape at crystallizing layer, this has just obtained by alloyage technique and has formed P.N knot.
The sintering curre of typical solar cell piece is as shown in figure below Fig. 1.About 120s of whole time, is divided into oven dry, pre-burning, sintering and cooling four-stage.Wherein sintering stage is warming up to rapidly 850 ℃ of left and right from 500 ℃, then below reduces heat to 500 ℃, and about 10s during this period of time, and only stop 2~3s at 850 ℃.This process curve that skyrockets and suddenly fall, requires agglomerating plant must carry out special design and R&D at aspects such as mesh bag structure, mesh bag transmission, heating element heater, chamber structure, atmosphere layout, control principle, transmission system and the types of cooling.
The manufacture of solar cells technique of main flow, all adopts positive and back side while Fast Sintering at present.Yet due to the different requirements of cell piece two in the face of sintering condition, furnace atmosphere is very large on sintering impact with the mesh bag of carrying cell piece.This mainly comes from net-bag type sintering furnace and all adopts friction-type drive, with regulating wheel, mesh bag is pressed on main driving wheel, follows driving wheel and moves together.The factors such as steady degree of the braiding structure of mesh bag, supporting way, operation, all can directly have influence on the outward appearance of cell piece and the electrical property of ohm joint that forms.
Along with the growing stronger day by day and develop of photovoltaic industry, people are more and more higher to cell piece presentation quality and its requirement on electric performance.And there are obvious shortcomings and deficiencies in the sintering of net-bag type cell piece, such as:
1, there is obvious reticulate pattern phenomenon in the back surface field of cell piece.Cause the main cause of back surface field reticulate pattern phenomenon to be: mesh bag is that face contacts with cell piece.Mesh bag has many contact points after solar cell back, and in sintering process, the organic effective volatilization on contacting points position in aluminium paste has been subject to impact.Organic substance residues has affected the Ohmic contact of electrode and silicon chip.
2, cell piece and mesh bag comprehensive engagement, cover mesh bag, is unfavorable for the stirring of gas stream in the stove, easily causes the cell piece inequality of being heated.
3, the aluminium under molten condition on cell piece and mesh bag contact point, easily adsorbs the foreign material on mesh bag, affects the surface topography of back surface field, even produces aluminium thorn, causes the generation of waste product.From this point, it seems, the contact-making surface of cell piece and mesh bag is the smaller the better.
4, experiment also shows, though by the tensioning of mesh bag and the improvement of transmission speed, can keep the sintering of most cell pieces all right.But experiment is also found: the phenomenon of elongated cut appears in back surface field and mesh bag contact point.Tracing it to its cause, may be that cell piece is lightweight, in the process that the point contacting with mesh bag rocks at mesh bag, easily and mesh bag be subjected to displacement and cause.
All this kind, develop cell piece oven dry of new generation, sintering furnace, has been photovoltaic industry realistic problem urgently to be resolved hurrily.
Summary of the invention:
Technical problem to be solved by this invention is to overcome the defect of prior art, provides a kind of and can well evade and the roller bed type solar cell silicon wafer drying and sintering all-in-one oven that solves net belt type oven dry, the existing all deficiencies of sintering furnace.
Technical problem to be solved by this invention realizes by the following technical solutions.
Roller bed type solar cell silicon wafer drying and sintering all-in-one oven, it is characterized in that: comprise underframe, underframe is provided with along the roller-way of a direction transmission, and roller-way comprises a plurality of rotatable roll bodies, and the roller-way of each rotation, in transmission silicon chip limited range, at axial design forming V-shape propellers, described underframe is provided with baking box, in described baking box, is provided with dividing plate, in dividing plate, be provided with microwave tube, described baking box exit is provided with blower fan.
Described underframe below is provided with baking box, is provided with dividing plate in baking box, is provided with microwave tube between dividing plate.
Described baking box is positive has cabinet door for chain connection.
On described cabinet door, be interval with observation window.
Described baking box top is provided with ventilating opening.
Described and roll body material silicon chip contact site are nonmetal.
Beneficial effect of the present invention is: V-arrangement propellers silicon chip contacts with V-arrangement propellers, no matter axially or radially, be linear contact, thereby effectively evaded the phenomenon that during net belt type silicon chip transmits, the silicon chip of existence contacts with mesh bag face, the design of V-arrangement spiral fluted, the characteristic of positive of well compatible net belt type cell piece and the two-sided sintering of back surface field, overcome again the reticulate pattern phenomenon that cell piece back surface field falls because of mesh bag sintering, more scientific, with the roll body material of silicon chip contact site be nonmetallic.Between sintering zone and discharging area, be provided with air blast cooling district, substituted traditional water-cooled district.This roller bed type solar cell silicon wafer sintering furnace is compared with traditional wire netting belt sintering furnace, not only can avoid silicon chip polluted and occur " reticulate pattern " in the process of transmission, and can improve transfer rate, realize be rapidly heated and cooling, reach desirable temperature spikes effect, raising battery sintering quality; Because cancelled water-cooled district, can also shorten body of heater length, reduce energy consumption.
Accompanying drawing explanation:
Fig. 1 is the front elevational schematic of structure of the present invention;
Fig. 2 is structure side-looking generalized section of the present invention;
Fig. 3 is solar cell piece sintering process curve;
Wherein: 1: underframe; 2: roller-way; 3: roll body; 4: baking box; 5: dividing plate; 6: microwave tube; 7: cabinet door; 8: ventilating opening; 9: blower fan.
The specific embodiment:
For technological means, creation characteristic that the present invention is realized, reach object and effect is easy to understand, below in conjunction with concrete diagram, further set forth the present invention.
Roller bed type solar cell silicon wafer drying and sintering all-in-one oven as depicted in figs. 1 and 2, comprise underframe 1, underframe 1 is provided with along the roller-way 2 of a direction transmission, roller-way 2 comprises a plurality of rotatable roll bodies 3, and the roller-way 2 of each rotation, in transmission silicon chip limited range, at axial design forming V-shape propellers, wherein on underframe 1, have baking box 4, wherein in baking box 4, be provided with dividing plate 5, in dividing plate 5, be provided with microwave tube 6, baking box 4 exits are provided with blower fan 9, wherein baking box 4 is positive has cabinet door 7 for chain connection, on cabinet door 7, be interval with observation window, baking box 4 tops are provided with ventilating opening 8, wherein nonmetal with the roll body material of silicon chip contact site.
More than show and described basic principle of the present invention, principal character and advantage of the present invention.The technical staff of the industry should understand; the present invention is not restricted to the described embodiments; that in above-described embodiment and description, describes just illustrates principle of the present invention; without departing from the spirit and scope of the present invention; the present invention also has various changes and modifications, and these changes and improvements all fall in the claimed scope of the invention.The claimed scope of the present invention is defined by appending claims and equivalent thereof.

Claims (6)

1. roller bed type solar cell silicon wafer drying and sintering all-in-one oven, it is characterized in that: comprise underframe, underframe is provided with along the roller-way of a direction transmission, and roller-way comprises a plurality of rotatable roll bodies, and the roller-way of each rotation, in transmission silicon chip limited range, at axial design forming V-shape propellers, described underframe is provided with baking box, in described baking box, is provided with dividing plate, in dividing plate, be provided with microwave tube, described baking box exit is provided with blower fan.
2. according to the roller bed type solar cell silicon wafer drying and sintering all-in-one oven described in claim 1, it is characterized in that: described underframe below is provided with baking box, is provided with dividing plate in baking box, is provided with microwave tube between dividing plate.
3. according to the roller bed type solar cell silicon wafer drying and sintering all-in-one oven described in claim 1 or 2, it is characterized in that: described baking box is positive has cabinet door for chain connection.
4. according to the roller bed type solar cell silicon wafer drying and sintering all-in-one oven described in claim 3, it is characterized in that: on described cabinet door, be interval with observation window.
5. according to the roller bed type solar cell silicon wafer drying and sintering all-in-one oven described in claim 1, it is characterized in that: described baking box top is provided with ventilating opening.
6. according to the roller bed type solar cell silicon wafer drying and sintering all-in-one oven described in claim 1, it is characterized in that: described and roll body material silicon chip contact site are nonmetal.
CN201310607228.2A 2013-11-25 2013-11-25 Roller-bed-type drying and sintering integrated furnace for solar battery silicon wafers Pending CN103743231A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103994647A (en) * 2014-05-13 2014-08-20 通华玻纤复合材料(上海)有限公司 High-silicon-dioxide glass fabric sintering device
CN109841706A (en) * 2019-03-23 2019-06-04 东莞市科隆威自动化设备有限公司 Solar silicon wafers tear piece laminating method and imbrication general assembly line open
CN112670370A (en) * 2020-12-24 2021-04-16 横店集团东磁股份有限公司 Sintering method and application of solar cell
CN115235219A (en) * 2022-06-29 2022-10-25 浙江晶科能源有限公司 Sintering system, sintering method and solar cell production line

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003292154A (en) * 2002-04-04 2003-10-15 Noritake Co Ltd Heat-treating apparatus for thick-film printed circuit board, and carrier roller
US20100220983A1 (en) * 2009-03-02 2010-09-02 Doherty Timothy R Infrared furnace system
CN201858873U (en) * 2010-10-29 2011-06-08 常州亿晶光电科技有限公司 Five-tube silicon wafer conveying device
CN102393139A (en) * 2011-11-16 2012-03-28 杨桂玲 Roller way type solar battery silicon wafer sintering furnace
CN202329094U (en) * 2011-11-16 2012-07-11 杨桂玲 Roller-way type solar cell silicon wafer sintering furnace
CN102953123A (en) * 2011-08-19 2013-03-06 Tp太阳能公司 Diffusion furnaces employing ultra low mass transport systems
CN202817009U (en) * 2012-08-29 2013-03-20 常州捷佳创精密机械有限公司 Silicon chip transmission device without directive wheel
CN203642678U (en) * 2013-11-25 2014-06-11 安徽赛耐尔机械制造有限公司 Roller way type solar cell silicon chip drying and sintering integrated furnace

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003292154A (en) * 2002-04-04 2003-10-15 Noritake Co Ltd Heat-treating apparatus for thick-film printed circuit board, and carrier roller
US20100220983A1 (en) * 2009-03-02 2010-09-02 Doherty Timothy R Infrared furnace system
CN201858873U (en) * 2010-10-29 2011-06-08 常州亿晶光电科技有限公司 Five-tube silicon wafer conveying device
CN102953123A (en) * 2011-08-19 2013-03-06 Tp太阳能公司 Diffusion furnaces employing ultra low mass transport systems
CN102393139A (en) * 2011-11-16 2012-03-28 杨桂玲 Roller way type solar battery silicon wafer sintering furnace
CN202329094U (en) * 2011-11-16 2012-07-11 杨桂玲 Roller-way type solar cell silicon wafer sintering furnace
CN202817009U (en) * 2012-08-29 2013-03-20 常州捷佳创精密机械有限公司 Silicon chip transmission device without directive wheel
CN203642678U (en) * 2013-11-25 2014-06-11 安徽赛耐尔机械制造有限公司 Roller way type solar cell silicon chip drying and sintering integrated furnace

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103994647A (en) * 2014-05-13 2014-08-20 通华玻纤复合材料(上海)有限公司 High-silicon-dioxide glass fabric sintering device
CN103994647B (en) * 2014-05-13 2015-11-18 通华新材料(平湖)有限公司 High silica glass-fiber-fabric sintering equipment
CN109841706A (en) * 2019-03-23 2019-06-04 东莞市科隆威自动化设备有限公司 Solar silicon wafers tear piece laminating method and imbrication general assembly line open
CN109841706B (en) * 2019-03-23 2024-03-29 广东科隆威智能装备股份有限公司 Solar silicon wafer disassembling and laminating method and laminated tile assembly line
CN112670370A (en) * 2020-12-24 2021-04-16 横店集团东磁股份有限公司 Sintering method and application of solar cell
CN115235219A (en) * 2022-06-29 2022-10-25 浙江晶科能源有限公司 Sintering system, sintering method and solar cell production line

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Application publication date: 20140423