CN107555421B - Graphene growth protection device - Google Patents
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Abstract
本发明公开了一种石墨烯生长保护装置,包括底座,所述底座的上端固定有炉体,所述炉体的内部设有空腔,所述空腔内从上至下依次设有加热器、传热网与冷却器,所述加热器的内部设有石英管,所述石英管的两端均贯穿加热器并分别连接有真空法兰与连接法兰,所述连接法兰远离石英管的一端连通有输气管、冷却气体出管、冷却气体进管与压力表,所述石英管的两端套设有第一安装板与第二安装板,所述炉体的两侧均通过锁紧螺钉固定有支撑板,两个所述支撑板的上端均固定有安装架。该石墨烯生长保护装置冷却保护措施完善,提高石墨烯的品质,且石英管拆卸方便,降低清理难度,降低工作人员的工作负担。
The invention discloses a graphene growth protection device, comprising a base, a furnace body is fixed on the upper end of the base, a cavity is arranged inside the furnace body, and heaters are arranged in the cavity in sequence from top to bottom , heat transfer network and cooler, the inside of the heater is provided with a quartz tube, both ends of the quartz tube penetrate the heater and are respectively connected with a vacuum flange and a connecting flange, and the connecting flange is far away from the quartz tube One end of the quartz tube is connected with a gas transmission pipe, a cooling gas outlet pipe, a cooling gas inlet pipe and a pressure gauge, both ends of the quartz tube are sleeved with a first mounting plate and a second mounting plate, and both sides of the furnace body are locked The support plates are fixed with the tightening screws, and mounting brackets are fixed on the upper ends of the two support plates. The graphene growth protection device has perfect cooling protection measures, improves the quality of graphene, and facilitates disassembly of the quartz tube, which reduces the difficulty of cleaning and reduces the workload of staff.
Description
技术领域technical field
本发明涉及石墨烯生产技术领域,尤其涉及一种石墨烯生长保护装置。The invention relates to the technical field of graphene production, in particular to a graphene growth protection device.
背景技术Background technique
石墨烯本来就存在于自然界,只是难以剥离出单层结构。石墨烯一层层叠起来就是石墨,厚1毫米的石墨大约包含300万层石墨烯。铅笔在纸上轻轻划过,留下的痕迹就可能是几层甚至仅仅一层石墨烯石墨烯是由碳六元环组成的两维周期蜂窝状点阵结构,它可以翘曲成零维的富勒烯,卷成一维的碳纳米管或者堆垛成三维的石墨,因此石墨烯是构成其他石墨材料的基本单元,石墨烯的基本结构单元为有机材料中最稳定的苯六元环,是目前最理想的二维纳米材料,理想的石墨烯结构是平面六边形点阵,可以看作是一层被剥离的石墨分子,每个碳原子均为sp2杂化,并贡献剩余一个p轨道上的电子形成大π键,π电子可以自由移动,赋予石墨烯良好的导电性,二维石墨烯结构可以看是形成所有sp2杂化碳质材料的基本组成单元。但是现有石墨烯生长过程中保护措施不完善,影响石墨烯性能,且在石英管内进行石墨烯生长工作,但石英管拆卸繁琐,导致清理困难,增加工作人员的工作负担。Graphene originally exists in nature, but it is difficult to exfoliate a single-layer structure. Graphene is layered up to form graphite, and graphite 1 mm thick contains about 3 million layers of graphene. The pencil scratches lightly on the paper, and the traces left may be several layers or even only one layer of graphene. Graphene is a two-dimensional periodic honeycomb lattice structure composed of carbon six-membered rings, which can be warped into zero-dimensional The fullerene is rolled into one-dimensional carbon nanotubes or stacked into three-dimensional graphite, so graphene is the basic unit of other graphite materials, and the basic structural unit of graphene is the most stable benzene six-membered ring in organic materials. It is currently the most ideal two-dimensional nanomaterial. The ideal graphene structure is a plane hexagonal lattice, which can be regarded as a layer of exfoliated graphite molecules. Each carbon atom is sp2 hybridized and contributes the remaining p The electrons on the orbital form large π bonds, and the π electrons can move freely, giving graphene good electrical conductivity. The two-dimensional graphene structure can be seen as the basic unit for forming all sp2 hybrid carbonaceous materials. However, the protection measures in the existing graphene growth process are not perfect, which affects the performance of graphene, and the graphene growth work is carried out in a quartz tube, but the disassembly of the quartz tube is cumbersome, which makes cleaning difficult and increases the workload of the staff.
发明内容SUMMARY OF THE INVENTION
本发明的目的是为了解决现有技术中保护措施不完善,石英管拆卸繁琐的问题,而提出的一种石墨烯生长保护装置。The purpose of the present invention is to solve the problems of imperfect protection measures and complicated disassembly of quartz tubes in the prior art, and propose a graphene growth protection device.
为了实现上述目的,本发明采用了如下技术方案:In order to achieve the above object, the present invention adopts the following technical solutions:
一种石墨烯生长保护装置,包括底座,所述底座的上端固定有炉体,所述炉体的内部设有空腔,所述空腔内从上至下依次设有加热器、传热网与冷却器,所述加热器的内部设有石英管,所述石英管的两端均贯穿加热器并分别连接有真空法兰与连接法兰,所述连接法兰远离石英管的一端连通有输气管、冷却气体出管、冷却气体进管与压力表,所述石英管的两端套设有第一安装板与第二安装板,所述炉体的两侧均通过锁紧螺钉固定有支撑板,两个所述支撑板的上端均固定有安装架,且两个安装架的上端分别套接在石英管的两端,两个所述安装架与第一安装板、第二安装板之间均设有连接杆,所述连接杆的两端均套设有限位装置。A graphene growth protection device, comprising a base, the upper end of the base is fixed with a furnace body, the interior of the furnace body is provided with a cavity, and a heater and a heat transfer network are sequentially arranged in the cavity from top to bottom As with the cooler, the inside of the heater is provided with a quartz tube, both ends of the quartz tube penetrate the heater and are respectively connected with a vacuum flange and a connection flange, and the end of the connection flange away from the quartz tube communicates with The gas transmission pipe, the cooling gas outlet pipe, the cooling gas inlet pipe and the pressure gauge, the two ends of the quartz tube are sheathed with a first mounting plate and a second mounting plate, and the two sides of the furnace body are fixed with locking screws. Support plates, the upper ends of the two support plates are fixed with mounting brackets, and the upper ends of the two mounting brackets are respectively sleeved on both ends of the quartz tube, and the two mounting brackets are connected to the first mounting plate and the second mounting plate. There are connecting rods between them, and both ends of the connecting rods are sleeved with limiting devices.
优选地,所述限位装置包括第一限位板与第二限位板,所述第一限位板与第二限位板靠近连接杆的一侧设有橡胶板,所述第一限位板与第二限位板的两端分别设有第一限位块与第二限位块,所述第一限位块与第二限位块之间设有限位杆,所述第一限位块与第二限位块的内部均设有与限位杆对应的螺孔,两个所述螺孔内分别设有方向相反的螺纹,所述限位杆的两端分别贯穿两个螺孔,且限位杆与第一限位块、第二限位块之间均为螺纹连接。Preferably, the limiting device includes a first limiting plate and a second limiting plate, a rubber plate is provided on the side of the first limiting plate and the second limiting plate close to the connecting rod, and the first limiting plate is Both ends of the position plate and the second limit plate are respectively provided with a first limit block and a second limit block, and a limit rod is arranged between the first limit block and the second limit block, and the first limit block and the second limit block are provided with a limit rod. Both the limit block and the second limit block are provided with screw holes corresponding to the limit rods, the two screw holes are respectively provided with threads in opposite directions, and the two ends of the limit rods respectively penetrate two A screw hole is provided, and the limit rod, the first limit block and the second limit block are all threadedly connected.
优选地,所述支撑板的内部设有通槽,所述通槽内设有固定杆,所述通槽内侧壁上设有与固定杆螺纹连接的内螺纹,所述固定杆的下端贯穿通槽并连接有固定块,所述固定块与支撑板之间设有弹簧,所述固定杆的两端均贯穿通槽,且固定杆的上端套设有橡胶圈,所述固定杆的下端与固定块之间转动连接。Preferably, a through groove is provided inside the support plate, a fixing rod is arranged in the through groove, an inner thread is provided on the inner side wall of the through groove and is threadedly connected with the fixing rod, and the lower end of the fixing rod penetrates through The groove is connected with a fixed block, a spring is arranged between the fixed block and the support plate, both ends of the fixed rod pass through the through groove, and the upper end of the fixed rod is sleeved with a rubber ring, and the lower end of the fixed rod is connected to the Rotational connection between fixed blocks.
优选地,所述冷却器通过锁紧螺钉固定在空腔内的底端侧壁上。Preferably, the cooler is fixed on the bottom side wall in the cavity by means of locking screws.
优选地,所述输气管、冷却气体出管与冷却气体进管上均设有阀门。Preferably, valves are provided on the gas delivery pipe, the cooling gas outlet pipe and the cooling gas inlet pipe.
优选地,所述底座的下端设有行走机构,所述行走机构采用万向轮。Preferably, the lower end of the base is provided with a running mechanism, and the running mechanism adopts a universal wheel.
本发明中,该石墨烯生长保护装置通过底座下端的行走机构实现整体的移动,使装置适用于不同的地点工作,提高装置的利用率,到达指定地点后,转动固定杆,使固定块向下移动,推动固定块与地点接触,完成装置的位置限定,保证工作时的稳定性,需要移动时,反向转动固定杆,弹簧将固定块拉起,方便移动,将石墨烯材料通过输气管进入石英管内,通过加热器在石英管外部加热,实现石英管内部温度的提高,达到石墨烯生长需要的温度,加热完成石墨烯的生长,关闭加热器,通过冷却器进行冷却,传热网实现冷却速度的加快,同时通过将冷却气体从冷却气体进管进入石英管内,从冷却气体出管完成冷却气体在石英管内冷却循环,加快冷却速度,使石墨烯沉淀,压力表可以实现石英管内的压力监测,保证石英管的安全,需要清理石英管时,转动限位杆,使第一限位块与第二限位块同时移动,使第一限位板与第二限位板松开对连接杆的固定,将连接杆抽离,方便石英管的拆卸,使清理简单。该石墨烯生长保护装置冷却保护措施完善,提高石墨烯的品质,且石英管拆卸方便,降低清理难度,降低工作人员的工作负担。In the present invention, the graphene growth protection device realizes the overall movement through the walking mechanism at the lower end of the base, so that the device is suitable for working in different places, and the utilization rate of the device is improved. After reaching the designated place, the fixed rod is rotated to make the fixed block downward Move, push the fixed block to contact the location, complete the position limit of the device, and ensure the stability of the work. When moving, turn the fixed rod in the opposite direction, the spring will pull the fixed block up, which is convenient for moving, and the graphene material enters through the gas pipe. In the quartz tube, the heater is heated outside the quartz tube to increase the internal temperature of the quartz tube to reach the temperature required for graphene growth. After heating, the graphene growth is completed, the heater is turned off, and the cooler is used for cooling, and the heat transfer network realizes cooling. The speed is accelerated, and at the same time, by passing the cooling gas from the cooling gas inlet tube into the quartz tube, and from the cooling gas outlet tube to complete the cooling cycle of the cooling gas in the quartz tube, the cooling speed is accelerated, and the graphene is precipitated, and the pressure gauge can realize the pressure monitoring in the quartz tube. , to ensure the safety of the quartz tube. When the quartz tube needs to be cleaned, turn the limit rod to make the first limit block and the second limit block move at the same time, so that the first limit plate and the second limit plate are loosened to the connecting rod. To fix it, the connecting rod is pulled away, which facilitates the disassembly of the quartz tube and makes the cleaning simple. The graphene growth protection device has perfect cooling protection measures, improves the quality of graphene, and facilitates disassembly of the quartz tube, which reduces the difficulty of cleaning and reduces the workload of staff.
附图说明Description of drawings
图1为本发明提出的一种石墨烯生长保护装置的结构示意图;Fig. 1 is the structural representation of a kind of graphene growth protection device proposed by the present invention;
图2为本发明提出的一种石墨烯生长保护装置的A处结构示意图;Fig. 2 is the structural representation of the A place of a kind of graphene growth protection device proposed by the present invention;
图3为本发明提出的一种石墨烯生长保护装置的限位装置结构示意图。3 is a schematic structural diagram of a limiting device of a graphene growth protection device proposed by the present invention.
图中:1行走机构、2底座、3冷却器、4传热网、5支撑板、6固定杆、7固定块、8弹簧、9橡胶圈、10安装架、11真空法兰、12石英管、13输气管、14连接法兰、15冷却气体出管、16冷却气体进管、17阀门、18压力表、19加热器、20炉体、21第一安装板、22连接杆、23限位装置、24第一限位板、25第二限位板、26第一限位块、27第二限位块、28限位杆、29橡胶板、30第二安装板。In the picture: 1 traveling mechanism, 2 base, 3 cooler, 4 heat transfer net, 5 support plate, 6 fixing rod, 7 fixing block, 8 spring, 9 rubber ring, 10 mounting frame, 11 vacuum flange, 12 quartz tube , 13 gas pipeline, 14 connecting flange, 15 cooling gas outlet pipe, 16 cooling gas inlet pipe, 17 valve, 18 pressure gauge, 19 heater, 20 furnace body, 21 first mounting plate, 22 connecting rod, 23 limit Device, 24 first limit plate, 25 second limit plate, 26 first limit block, 27 second limit block, 28 limit rod, 29 rubber plate, 30 second installation plate.
具体实施方式Detailed ways
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments.
在本发明的描述中,需要理解的是,术语“上”、“下”、“前”、“后”、“左”、“右”、“顶”、“底”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inside", " The orientation or positional relationship indicated by "outside" is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the indicated device or element must have a specific orientation, so as to The specific orientation configuration and operation are therefore not to be construed as limitations of the present invention.
参照图1-2,一种石墨烯生长保护装置,包括底座2,底座2的上端固定有炉体20,炉体20的内部设有空腔,空腔内从上至下依次设有加热器19、传热网4与冷却器3,加热器19的内部设有石英管12,石英管12的两端均贯穿加热器19并分别连接有真空法兰11与连接法兰14,连接法兰14远离石英管12的一端连通有输气管13、冷却气体出管15、冷却气体进管16与压力表18,关闭加热器19,通过冷却器3进行冷却,传热网4实现冷却速度的加快,同时通过将冷却气体从冷却气体进管16进入石英管12内,从冷却气体出管15完成冷却气体在石英管12内冷却循环,加快冷却速度,使石墨烯沉淀,压力表18可以实现石英管12内的压力监测,保证石英管12的安全,石墨烯材料通过输气管13进入石英管12内,通过加热器19在石英管12外部加热,实现石英管12内部温度的提高,达到石墨烯生长需要的温度,加热完成石墨烯的生长,石英管12的两端套设有第一安装板21与第二安装板30,炉体20的两侧均通过锁紧螺钉固定有支撑板5,两个支撑板5的上端均固定有安装架10,且两个安装架10的上端分别套接在石英管12的两端,两个安装架10与第一安装板21、第二安装板30之间均设有连接杆22,连接杆22的两端均套设有限位装置23。1-2, a graphene growth protection device, comprising a base 2, the upper end of the base 2 is fixed with a
本发明中,限位装置23包括第一限位板24与第二限位板25,第一限位板24与第二限位板25靠近连接杆22的一侧设有橡胶板29,第一限位板24与第二限位板25的两端分别设有第一限位块26与第二限位块27,第一限位块26与第二限位块27之间设有限位杆28,第一限位块26与第二限位块27的内部均设有与限位杆28对应的螺孔,两个螺孔内分别设有方向相反的螺纹,限位杆28的两端分别贯穿两个螺孔,且限位杆28与第一限位块26、第二限位块27之间均为螺纹连接,需要清理石英管12时,转动限位杆28,使第一限位块26与第二限位块27同时移动,使第一限位板24与第二限位板25松开对连接杆22的固定,将连接杆22抽离,方便石英管12的拆卸,使清理简单,支撑板5的内部设有通槽,通槽内设有固定杆6,通槽内侧壁上设有与固定杆6螺纹连接的内螺纹,固定杆6的下端贯穿通槽并连接有固定块7,固定块7与支撑板5之间设有弹簧8,固定杆6的两端均贯穿通槽,且固定杆6的上端套设有橡胶圈9,固定杆6的下端与固定块7之间转动连接,到达指定地点后,转动固定杆6,使固定块7向下移动,推动固定块7与地点接触,完成装置的位置限定,保证工作时的稳定性,需要移动时,反向转动固定杆6,弹簧8将固定块7拉起,方便移动,冷却器3通过锁紧螺钉固定在空腔内的底端侧壁上,输气管13、冷却气体出管15与冷却气体进管16上均设有阀门17,锁紧阀门17,放置气体外泄,底座2的下端设有行走机构1,行走机构1采用万向轮,行走机构1实现整体的移动,使装置适用于不同的地点工作,提高装置的利用率。In the present invention, the
本发明中,该石墨烯生长保护装置通过底座2下端的行走机构1实现整体的移动,使装置适用于不同的地点工作,提高装置的利用率,到达指定地点后,转动固定杆6,使固定块7向下移动,推动固定块7与地点接触,完成装置的位置限定,保证工作时的稳定性,需要移动时,反向转动固定杆6,弹簧8将固定块7拉起,方便移动,将石墨烯材料通过输气管13进入石英管12内,通过加热器19在石英管12外部加热,实现石英管12内部温度的提高,达到石墨烯生长需要的温度,加热完成石墨烯的生长,关闭加热器19,通过冷却器3进行冷却,传热网4实现冷却速度的加快,同时通过将冷却气体从冷却气体进管16进入石英管12内,从冷却气体出管15完成冷却气体在石英管12内冷却循环,加快冷却速度,使石墨烯沉淀,压力表18可以实现石英管12内的压力监测,保证石英管12的安全,需要清理石英管12时,转动限位杆28,使第一限位块26与第二限位块27同时移动,使第一限位板24与第二限位板25松开对连接杆22的固定,将连接杆22抽离,方便石英管12的拆卸,使清理简单。该石墨烯生长保护装置冷却保护措施完善,提高石墨烯的品质,且石英管拆卸方便,降低清理难度,降低工作人员的工作负担。In the present invention, the graphene growth protection device realizes the overall movement through the walking mechanism 1 at the lower end of the base 2, so that the device is suitable for working in different locations, and the utilization rate of the device is improved. After reaching the designated location, the
以上所述,仅为本发明较佳的具体实施方式,但本发明的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本发明揭露的技术范围内,根据本发明的技术方案及其发明构思加以等同替换或改变,都应涵盖在本发明的保护范围之内。The above description is only a preferred embodiment of the present invention, but the protection scope of the present invention is not limited to this. The equivalent replacement or change of the inventive concept thereof shall be included within the protection scope of the present invention.
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