CN203845824U - Graphite frame and component - Google Patents
Graphite frame and component Download PDFInfo
- Publication number
- CN203845824U CN203845824U CN201320868650.9U CN201320868650U CN203845824U CN 203845824 U CN203845824 U CN 203845824U CN 201320868650 U CN201320868650 U CN 201320868650U CN 203845824 U CN203845824 U CN 203845824U
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- Prior art keywords
- frame
- graphite
- graphite frame
- slot
- frames
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 154
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 133
- 239000010439 graphite Substances 0.000 title claims abstract description 133
- 238000005192 partition Methods 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 8
- 230000000630 rising effect Effects 0.000 claims description 3
- 230000000712 assembly Effects 0.000 claims 1
- 238000000429 assembly Methods 0.000 claims 1
- 229910021389 graphene Inorganic materials 0.000 abstract description 21
- 238000000151 deposition Methods 0.000 abstract description 14
- 239000011159 matrix material Substances 0.000 abstract description 5
- 238000000034 method Methods 0.000 description 12
- 230000008021 deposition Effects 0.000 description 9
- 239000002184 metal Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- 239000011889 copper foil Substances 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 238000005137 deposition process Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000003780 insertion Methods 0.000 description 4
- 230000037431 insertion Effects 0.000 description 4
- 239000003575 carbonaceous material Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 241000272165 Charadriidae Species 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000001413 cellular effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- -1 graphite alkene Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 230000033116 oxidation-reduction process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Landscapes
- Carbon And Carbon Compounds (AREA)
Abstract
The utility model provides a graphite frame for depositing graphene in a tunnel furnace. The graphite frame takes the shape of a hollow square as a whole; four frames of the graphite frame are made of graphite, wherein inner surfaces of two opposite frames are provided with a plurality of slots; each slot formed in the inner surface of each one of the two frames corresponds to one slot arranged in the inner surface of the other frame; the inclined angle between the slot and the bottom plane of the graphite frame is 10-90 degrees and does not include 90 degrees. The utility model further provides a graphite frame component which comprises the graphite frame, a plug board and an optional supporting piece. The graphite frame is of a slot type structure, so that the loading sample volume of a metallic matrix is greatly improved; single plug board can be freely inserted and taken out along the slot, and the operation is convenient; the graphene deposited by the graphite frame has good uniformity.
Description
Technical field
The utility model relates to a kind of graphite frame and assembly, and in particular to a kind of graphite frame and assembly that can be used for depositing Graphene, this graphite frame is particularly useful in high temperature tunnel furnace.
Background technology
Graphene is a kind of by the former molecular two-dirnentional structure material of cellular monolayer carbon, has the performances such as good physics, chemistry, electricity, has a wide range of applications at numerous areas such as new forms of energy, novel material and electronic devices and components.
The preparation method of Graphene mainly comprises microcomputer stripping method, epitaxial method, oxidation reduction process and chemical Vapor deposition process, wherein, chemical Vapor deposition process is mass growing graphene on a large scale, the crystal structure of graphite of producing is relatively complete, quality is higher, can be used for transparency electrode, Flat panel touch display screen etc.The principle of chemical Vapor deposition process is that one or more gaseous substances are imported in a reaction chamber chemical reaction occurs, and in substrate, deposits a kind of material.
At present, the Graphene serialization of applied chemistry vapour deposition process principle is produced and can be adopted the high temperature tunnel furnace that is provided with automatic conveyor to carry out, and wherein Copper Foil is cut into sheet and is positioned over travelling belt and is conveyed into sedimentary province deposition.The shortcoming of the method is, equipment flat-temperature zone useful length is limited, and single deposits open ended copper foil comparatively small amt, and sedimentation effect is not high; Directly Copper Foil is placed on travelling belt, at high temperature, may causes a small amount of micro-fold or adhesion; Copper Foil is directly placed on travelling belt surface, and in deposition process, copper foil surface gas field may be disorderly, thereby affects the homogeneity of Graphene.
So far, still do not produce the special graphite alkene device of Graphene by chemical Vapor deposition process serialization in high temperature tunnel furnace.
Utility model content
The purpose of this utility model is to overcome shortcoming of the prior art, provides a kind of for depositing graphite frame and the assembly of Graphene.
For achieving the above object, the utility model adopts following technical scheme:
A kind of graphite frame, wherein, this graphite frame entirety is the square of hollow, its four frames are made up of graphite, wherein the internal surface of two relative frames is respectively provided with several slots, and the slot that each slot that one of them internal surface of these two frames is provided with is provided with another frame internal surface is respectively corresponding, and the angle of described slot and graphite frame baseplane is 10-90 ° and does not comprise 90 °.
In a preferred embodiment, graphite frame of the present invention, is characterized in that, every pair of corresponding slot equates apart from the distance of two other relative graphite frame frame.
In a preferred embodiment, graphite frame of the present invention, is characterized in that, between the plane that every pair of corresponding slot forms, is parallel.
In a preferred embodiment, graphite frame of the present invention, is characterized in that, the distance between adjacent two slotting grains is identical.
In a preferred embodiment, graphite frame of the present invention, is characterized in that, the angle of described slot and graphite frame base plane is 45-90 ° and does not comprise 90 °.
In a preferred embodiment, graphite frame of the present invention, is characterized in that, the bottom of the each frame of graphite frame is all with projection, and these rising heights are identical, form smooth plane.
In a preferred embodiment, graphite frame of the present invention, is characterized in that, the material of described graphite frame is highly oriented pyrolytic graphite.
It is a kind of for depositing the graphite frame assembly of Graphene that the utility model also provides, and comprises aforementioned graphite frame and plate.In a preferred embodiment, described graphite frame assembly also comprises strut member.
In a preferred embodiment, assembly of the present invention, is characterized in that, also comprises strut member, and this strut member is for supporting the bottom of graphite frame, and the upper surface of strut member is smooth, and lower surface is smooth or be provided with pin.
In a preferred embodiment, assembly of the present invention, is characterized in that, also comprises the partition panel of being located at graphite frame inside.
In a preferred embodiment, assembly of the present invention, is characterized in that, the material of wherein said graphite frame and assembly is highly oriented pyrolytic graphite.
Graphite frame framework of the present utility model is three-dimensional insertion slot type structure, for the preparation of Graphene, for example especially can be used for being provided with, on the transport unit of high temperature deposition equipment (high temperature tunnel furnace) of automatic conveyor.Graphite frame of the present utility model, compared with the technical scheme that " Copper Foil is cut into the travelling belt that sheet is directly positioned over high temperature tunnel furnace and is conveyed into sedimentary province deposition " in prior art, can make the sample-loading amount of metallic matrix greatly improve; Single plate can freely be inserted and get along slot, easy to operate, and the dress that is easy to deposition front and back metallic matrix is got.
Brief description of the drawings
Fig. 1 is the graphite frame of an embodiment of the utility model and the stereographic map of assembly.
Fig. 2 is the graphite frame of an embodiment of the utility model and the side-view of assembly.
Embodiment
Graphite frame entirety of the present utility model is the square of hollow, for example square or rectangular, its four frames are made up of graphite, wherein the internal surface of two relative frames is respectively provided with several slots, and the slot that each slot that in these two frames, the internal surface of one of them is provided with is provided with another frame internal surface is respectively corresponding, the angle of described slot and graphite frame baseplane is 10-90 ° and does not comprise 90 °.
In the utility model, in the time describing described graphite frame, " wherein the internal surface of two relative frames is respectively provided with several slots being parallel to each other; and the slot that each slot that in these two frames, the internal surface of one of them is provided with is provided with another frame internal surface is respectively corresponding " refer in relative frame internal surface, corresponding a pair of slot forms a plane.Preferably, this every pair of corresponding slot equates apart from the distance of two other relative graphite frame frame.
In the utility model, preferably parallel between the plane that every pair of corresponding slot forms.
In a preferred embodiment, each corresponding a pair of slot equates apart from the distance of two other relative graphite frame frame and the plane of its formation is parallel.
In the utility model, to the size of graphite frame framework, for example length, width and be highly not specifically limited, the graphite frame that those skilled in the art can suit the requirements according to required Graphene output and space size design.In an exemplary embodiment, the length of this graphite frame is 500-1000mm, preferably 600-800mm; Width is 300-500mm, preferably 350-450mm; Be highly 150-250mm, preferably 150-200mm; And the thickness of graphite frame frame is 5-20mm, preferably 8-10mm.
Described slot is extend from top to the bottom of frame at the internal surface of frame but do not run through the groove shape thing of frame bottom completely, described " extend but do not run through completely " refers to the bottom of slot and the distance from bottom 1-5mm of frame, the wearing and tearing that this can guarantee the steadiness of plate and prevent slot edge.The size of described slot is not conclusive for the utility model, and those skilled in the art can design according to the size of graphite frame frame the size of slot, for example, is 500-1000mm for the length of graphite frame, preferably 600-800mm; Width is 300-500mm, preferably 350-450mm; Be highly 150-250mm, preferably 150-200mm; And the thickness of graphite frame frame is 5-20mm, preferably this exemplary embodiment of 8-10mm, the width of slot is 2-5mm, preferably 2-3mm, the degree of depth is 2-10mm, preferably 3-5mm.
The angle of described slot and graphite frame base plane is 10-90 ° and do not comprise 90 °, preferably 45-90 ° and do not comprise 90 °.In this graphite frame is used in the high temperature tunnel furnace of automatic conveyor time, because air flow stream in deposition process is crossed this graphite frame, if this angle is less than 10 °, affect on the one hand the consistence of metal base surface and gas flow direction, thereby destroy the homogeneity of Graphene, the metal base quantity of loading on the other hand also can greatly reduce; If equal 90 °, insert grain perpendicular to base plane, can cause landing and the fold of metallic matrix, be unfavorable for forming the Graphene of surface uniform.
Distance between each slotting grain can be identical or different, preferably identical, the distance of for example inserting between grain can be 1-10mm, and this distance is for effect of the present utility model without special impact, and those skilled in the art can determine concrete spacing according to the output of the length of graphite frame and required Graphene.
In one embodiment, the bottom of the each frame of graphite frame is all with projection, and in this case, the height of graphite frame comprises the height of projection.These rising heights are identical, form smooth plane, for supporting whole graphite frame.Number, shape to projection and be not highly subject to concrete restriction, preferably, the bottom of each frame is with the projection of equal amts, and symmetrical; Projection can be positioned at any position of graphite frame frame bottom, in a specific embodiment, projection can be positioned at the nook of local or two the adjacent frames of each frame except end points, or the two combination, be preferably both positioned at the place of each frame except end points and be also positioned at the nook of two adjacent frames.
The utility model also relates to the graphite frame assembly for depositing Graphene, comprises aforesaid graphite frame and plate.Plate is tabular, can insert in the slotting grain of this graphite frame, this plate is for laying the carrier of metallic matrix in the process of deposition Graphene, the size of plate is by the respective change along with slotting poor size, condition is to make to keep between plate and slotting grain suitable frictional force, get and can also keep during insertion certain stability to ensure that plate can freely be inserted from slot, be i.e. rocking or gas shock etc. and coming off along with framework in operating process not.
In the utility model, if graphite frame does not have projection mentioned above,, in the utility model, described assembly also comprises strut member, for supporting the bottom of described graphite frame.The upper surface of strut member is smooth, can support graphite frame, and lower surface can be smooth or be provided with pin, like this, in the time of this graphite frame of supports support, strut member upper surface contacts with graphite frame bottom, and strut member lower surface plays load graphite frame and interior plate, strut member itself thereof.The height of each strut member is preferably consistent, to form flat surface; Number, shape and the size of strut member are not subject to concrete restriction.With above for " projection " describe the same, strut member can be positioned at any position of graphite frame frame bottom, in a specific embodiment, strut member can be positioned at the nook of local or two the adjacent frames of each frame except end points, or the two combination, be preferably both positioned at the place of each frame except end points and be also positioned at the nook of two adjacent frames.
In a preferred embodiment, graphite frame of the present utility model self frame bottom does not comprise described strut member with projection.Certainly,, if do not consider formation technique with bossed graphite frame and in order to use more neatly graphite frame, graphite frame of the present utility model also can comprise described strut member and without projection.
In the utility model, " projection " is identical with the effect that " strut member " risen, particularly, in the high temperature tunnel furnace with automatic conveyor, the framework of this graphite frame is by himself base projections or strut member and built on stilts with transport unit, make in deposition process air-flow consistent at metal base surface, thereby improve the homogeneity of Graphene.The base projections of described graphite frame or the size of strut member, shape, number and present position, are stablized and make to form space between graphite frame and transport unit as long as it can maintain graphite frame without special impact effect of the present utility model.
In a specific embodiment, graphite frame assembly of the present utility model also comprises partition panel, and this partition panel is located at the inside of graphite frame, and graphite frame is divided into the parallel unit of several long strip types, thereby carries out when realizing some Graphene depositions; In the time being provided with partition panel, described graphite frame is provided with corresponding slot from the inside that inside mentioned above is provided with two other different relative frame of slotting two poor frames, for the insertion of partition panel, and, in this case, two outside surfaces of partition panel are provided with too inserts grain, herein about inserting poor specific descriptions with identical for the description of graphite frame frame above.The thickness of described partition panel is slightly larger than the thickness of frame, than the thick 8-15mm of the thickness of frame, and preferably 10-15mm; The quantity of partition panel is 1-6, preferably 2-4.
In a preferred embodiment, the frame of graphite frame of the present utility model, plate and partition panel employing highly oriented pyrolytic graphite (Highly Oriented Pyrolytic Graphite) are material.Highly oriented pyrolytic graphite is the conventional high purity carbon material in a kind of this area, is a kind of carbon material that pyrolytic graphite makes after high temperature high pressure process, and is easy to processing, and high temperature stability performance is good, does not at high temperature react with metal base; Itself has self lubricity, does not at high temperature stick together with metal base; Its surfacing, after deposition, metal substrate surface is smooth, is easy to subsequent transfer technique; In addition, highly oriented pyrolytic graphite and Graphene are all carbon material, can avoid the impact of other impurity elements as metal base carrier.
Graphite frame of the present utility model can be used on all high temperature deposition stoves with transport unit known in the art, preferably in continuous tunnel furnace.The furnace chamber cross section described in it will be understood by those skilled in the art that with the high temperature deposition stove of transport unit should adapt with the one-piece construction of described graphite frame.
Below with reference to accompanying drawing, each embodiment of the present utility model is described, described embodiment is only to exemplary illustration of the present utility model, is not intended to limit scope of the present utility model.In the accompanying drawings, identical reference marker represents identical assembly.
Embodiment 1
A kind of graphite frame of Fig. 1 example, entirety is the rectangle of hollow, comprises four frames 1, and wherein the internal surface of two relative frames is provided with 7 slots that are parallel to each other 2, for insertion and the taking-up of plate 4; The bottom even of described graphite frame frame is distributed with projection 3, comprises laying respectively at the contour projection of bottom except end points and 4 described projection forming smooth plane by adjacent two projections that frame nook forms, for supporting whole graphite frame; This graphite frame also comprises 3 partition panels of the inside of being located at graphite frame, and graphite frame is divided into 4 parallel unit.The length of this graphite frame is 700mm; Width is 400mm; Be highly 180mm; The thickness of graphite frame frame is 6mm; The width of slot is 3mm, and the degree of depth is 3mm; The thickness of described partition panel is 12mm; Frame 1, plate 4 and the partition panel 3 of this graphite frame are made by highly oriented pyrolytic graphite.
Fig. 2 is the side-view of the graphite frame of embodiment 1, and the angle theta between the plane that wherein the each projection of slot 2 and graphite frame bottom forms is 70 °.
Embodiment 2
The graphite frame that the assembly of the present embodiment comprises and plate are substantially the same with embodiment 1, and difference is, the bottom of graphite frame is flat, without projection.The shape of strut member is identical with the projection of graphite frame in embodiment 1, and the also distribution in graphite frame bottom corresponding to projection distributes.Thus, the support of graphite frame and plate is born by strut member, and can accomplish ventilative.
This specific embodiment is only to explanation of the present utility model; it is not to restriction of the present utility model; those skilled in the art are reading after this specification sheets and can make to the present embodiment the amendment that there is no creative contribution as required, but as long as within the scope of claim of the present utility model, are all subject to the protection of patent law.
Claims (11)
1. a graphite frame, it is characterized in that, this graphite frame entirety is the square of hollow, its four frames are made up of graphite, wherein the internal surface of two relative frames is respectively provided with several slots, and the slot that each slot that one of them internal surface of these two frames is provided with is provided with another frame internal surface is respectively corresponding, and the angle of described slot and graphite frame baseplane is 10-90 ° and does not comprise 90 °.
2. graphite frame claimed in claim 1, is characterized in that, wherein every pair of corresponding slot equates apart from the distance of two other relative graphite frame frame.
3. graphite frame claimed in claim 1, is characterized in that, between the plane that every pair of corresponding slot forms, is parallel.
4. graphite frame claimed in claim 1, is characterized in that, the distance between adjacent two slotting grains is identical.
5. graphite frame claimed in claim 1, is characterized in that, the angle of wherein said slot and graphite frame base plane is 45-90 ° and does not comprise 90 °.
6. graphite frame claimed in claim 1, is characterized in that, wherein the bottom of the each frame of graphite frame is all with projection, and these rising heights are identical, form smooth plane.
7. graphite frame claimed in claim 1, is characterized in that, the material of wherein said graphite frame is highly oriented pyrolytic graphite.
8. graphite frame assembly, is characterized in that, comprises graphite frame claimed in claim 1 and plate.
9. assembly claimed in claim 8, is characterized in that, also comprises strut member, and this strut member is for supporting the bottom of graphite frame, and the upper surface of strut member is smooth, and lower surface is smooth or be provided with pin.
10. assembly claimed in claim 8, is characterized in that, also comprises the partition panel of being located at graphite frame inside.
11. assemblies claimed in claim 8, is characterized in that, the material of wherein said graphite frame and assembly is highly oriented pyrolytic graphite.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201320868650.9U CN203845824U (en) | 2013-12-26 | 2013-12-26 | Graphite frame and component |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201320868650.9U CN203845824U (en) | 2013-12-26 | 2013-12-26 | Graphite frame and component |
Publications (1)
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CN203845824U true CN203845824U (en) | 2014-09-24 |
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CN201320868650.9U Expired - Lifetime CN203845824U (en) | 2013-12-26 | 2013-12-26 | Graphite frame and component |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104609416A (en) * | 2015-02-15 | 2015-05-13 | 重庆墨希科技有限公司 | Carrier used for graphene growth and method for preparing graphene |
CN105883779A (en) * | 2015-01-26 | 2016-08-24 | 中国科学院金属研究所 | Method for large-scale CVD growth of graphene |
CN114657531A (en) * | 2020-12-22 | 2022-06-24 | 北京石墨烯研究院 | Growth method and device of graphene wafer |
-
2013
- 2013-12-26 CN CN201320868650.9U patent/CN203845824U/en not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105883779A (en) * | 2015-01-26 | 2016-08-24 | 中国科学院金属研究所 | Method for large-scale CVD growth of graphene |
CN104609416A (en) * | 2015-02-15 | 2015-05-13 | 重庆墨希科技有限公司 | Carrier used for graphene growth and method for preparing graphene |
CN104609416B (en) * | 2015-02-15 | 2017-01-18 | 重庆墨希科技有限公司 | Carrier used for graphene growth and method for preparing graphene |
CN114657531A (en) * | 2020-12-22 | 2022-06-24 | 北京石墨烯研究院 | Growth method and device of graphene wafer |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee |
Owner name: CHANGZHOU 2D CARBON TECHNOLOGY CO., LTD. Free format text: FORMER NAME: 2D CARBON (CHANGZHOU) TECHNOLOGY CO., LTD. |
|
CP01 | Change in the name or title of a patent holder |
Address after: 213149 No. 6 Xiangyun Road, Wujin Economic Development Zone, Jiangsu, Changzhou Patentee after: 2D CARBON (CHANGZHOU) TECH Inc.,Ltd. Address before: 213149 No. 6 Xiangyun Road, Wujin Economic Development Zone, Jiangsu, Changzhou Patentee before: 2D CARBON (CHANGZHOU) TECH Co.,Ltd. |
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CX01 | Expiry of patent term |
Granted publication date: 20140924 |
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CX01 | Expiry of patent term |