CN102580786A - Micro-channel sheet used as catalytic reaction carrier, and manufacturing method thereof - Google Patents

Micro-channel sheet used as catalytic reaction carrier, and manufacturing method thereof Download PDF

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Publication number
CN102580786A
CN102580786A CN2012100183821A CN201210018382A CN102580786A CN 102580786 A CN102580786 A CN 102580786A CN 2012100183821 A CN2012100183821 A CN 2012100183821A CN 201210018382 A CN201210018382 A CN 201210018382A CN 102580786 A CN102580786 A CN 102580786A
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Prior art keywords
microchannel
sheet metal
thin plate
optical fiber
sheet
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CN2012100183821A
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Chinese (zh)
Inventor
周伟
万珍平
汤勇
邱孝新
吴汝素
周波
林磊
刘彬
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South China University of Technology SCUT
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South China University of Technology SCUT
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Priority to CN2012100183821A priority Critical patent/CN102580786A/en
Publication of CN102580786A publication Critical patent/CN102580786A/en
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Abstract

The invention discloses a micro-channel sheet used as a catalytic reaction carrier, and a manufacturing method of the micro-channel sheet. The manufacturing method of the micro-channel sheet comprises the following steps of: (1) carrying out surface rust removal on a metal sheet, and cleaning for removing the surface stain; (2) firmly fixing the metal sheet; (3) drawing a processing path in a laser device, setting process parameters, and using infrared light to locate the metal sheet; (4) processing the metal sheet under an optical fiber laser device, forming a micro channel on the metal sheet; (5) washing the metal sheet by distilled water; and (6) drying by a blower, and obtaining the micro-channel sheet used as the catalytic reaction carrier. The invention also discloses the micro-channel sheet manufactured by the method. Compared with the prior art, the sheet and the method disclosed by the invention are simple in technology and low in cost; a micro-channel film manufactured by the method is low in pressure loss and high in specific surface area; and the shape and the size of the micro channel can be well controlled.

Description

A kind of microchannel thin plate and manufacturing approach thereof as the catalytic reaction carrier
Technical field
The present invention relates to catalytic reaction carrier and manufacturing approach thereof, particularly a kind of microchannel thin plate and manufacturing approach thereof as the catalytic reaction carrier.
Background technology
Mostly catalytic reaction carrier commonly used at present is the foam metal porous material; Though porous material has the characteristic of high osmosis, high-specific surface area and high hole; But because the distribution arrangement in hole is a random distribution; Be difficult to the efficient fast reaction of realization response object, and exist the pressure loss serious, problems such as negotiability difference.
The microchannel is a kind of newer big metal structure of specific area that grew up in recent years, and it is little to have a volume, and therefore characteristics such as heat transfer efficiency height, response time weak point, uniformity of temperature profile are particularly suitable for the carrier as various catalytic reactions.The microchannel can address these problems as reaction carriers preferably, thereby fully demonstrates wide application prospect.The process technology of microchannel probably can be divided three classes now: the one, and silicon body micro-processing technology; The 2nd, LIAG, the 3rd, Ultraprecision Machining technology.Preceding two kinds of process technologies have significant limitation, and complicated like processing technology, machining accuracy is low, and processing cost is high.Laser processing technology belongs to a kind of of ultraprecise processing; Machining accuracy is high; The microchannel shape and the controlled amount property that are processed are good, have very big development prospect and are one of the large-scale processing technologys of making of high efficiency, low cost that is expected to realize the microchannel of high-aspect-ratio most.
Summary of the invention
In order to overcome the above-mentioned deficiency of prior art; The object of the present invention is to provide a kind of manufacturing approach that is used as the microchannel thin plate of catalytic reaction carrier, this method technology is simple, with low cost, and the microchannel diaphragm pressure loss of manufacturing is little; Specific area is high, and microchannel shape and controlled amount property are good.Another object of the present invention is to provide the microchannel thin plate of said method manufacturing.
The object of the invention is realized through following technical scheme:
A kind of manufacturing approach that is used as the microchannel thin plate of catalytic reaction carrier may further comprise the steps:
(1) sheet metal is carried out surface derusting, cleans to remove surface blot;
(2) sheet metal is carried out firm fixation: be installed on the anchor clamps after with rolling device sheet metal being flattened;
(3) in optical fiber laser, draw machining path, machined parameters is set, and launch ruddiness sheet metal is positioned;
(4) adopt optical fiber laser that sheet metal is processed, on sheet metal, form the microchannel;
(5) with distilled water sheet metal is cleaned;
(6) blowing is dry, obtains the microchannel thin plate as the catalytic reaction carrier.
The said employing optical fiber laser of step (4) is processed sheet metal, on sheet metal, forms the microchannel, is specially: the employing optical fiber laser is processed on the single face of sheet metal, on sheet metal, forms to be parallel to each other or vertical microchannel.
The said employing optical fiber laser of step (4) is processed sheet metal, on sheet metal, forms the microchannel, is specially: adopt the front-back two-sided staggered processing of optical fiber laser priority to sheet metal; Form the slotted hole structure microchannel, may further comprise the steps: start optical fiber laser, behind one group of microchannel of processing on the front of sheet metal; Sheet metal is unloaded; Translate into reverse side, carry out step (2)~(3), restart another group microchannel of optical fiber laser processing; Double-edged machine direction is vertical each other, and the working depth sum forms the groove of two groups of square crossings greater than the thickness of plate on sheet metal, and infall forms through hole.
The said machined parameters of step (3) comprises filling mode, working power, process velocity, processing number of times.
Said sheet metal is any one in aluminium sheet, copper plate, the brass sheet.
By the microchannel thin plate that said method is made, the width of microchannel is 0.01mm~10mm.
The distance of every adjacent two microchannels is 0.01mm~10mm.
The cross section of microchannel is approximately rectangle, semicircle or V-arrangement.
The microchannel be shaped as linear or shaped form.
The mutual square crossing in the double-edged microchannel of microchannel thin plate, infall forms through hole; The shape approximation of through hole is rectangle, circle or rhombus.
Compared with prior art, the present invention has the following advantages and beneficial effect:
1, the present invention processes MCA with the method for Laser Processing, adopts the microchannel porous carrier plate of the method processing to have bigger serface, and microchannel shape and controlled amount property are good, and machining accuracy is high, and has good heat transfer and mass transfer ability.The microchannel thin plate of manufacturing has tiny little groove; The cross sectional shape controllability is good; Simultaneously because the guide effect of MCA; Compare with the foam metal porous material with traditional powder sintered porous filter material, make directed microchannel carrier board have high negotiability, aspect such as, specific area uniform and stable at filtering accuracy, drag losses, duct, heat transference efficiency also is significantly improved.Have at present as the powder sintered porous material of catalyst carrier or foam metal porous material incomparable superiority, with the performance that improves catalyst greatly.This microchannel porous carrier plate can be widely used in the research of chemical engineering process simultaneously, and excellent, particular performances that reaction channel has has the very big market potentiality, has a wide range of applications.
2, processing technology of the present invention is simple, and production efficiency is high, and is with low cost, is prone to realize that microchannel porous carrier plate is extensive, low cost is made.Compare with fine edm metal MCA, saved the technology of large amount of complex, and machining accuracy is high.Than electron beam processing and ion beam processing, adopt this kind processing method, saved extracting vacuum environment and expensive process equipment, so processing charges is lower.
Description of drawings
Fig. 1 is the structural representation of single face linear V shaped sections of the present invention microchannel thin plate.
Fig. 2 is the structural representation of microchannel, single face linear square-section of the present invention thin plate.
Fig. 3 is the structural representation of single face linear semi-circular cross-section of the present invention microchannel thin plate.
Fig. 4 is the structural representation of the snakelike microchannel of single face of the present invention thin plate.
Fig. 5 is the structural representation of single face shaped form of the present invention microchannel thin plate.
Fig. 6 is the structural representation of microchannel, the two-way square-section of single face of the present invention thin plate.
Fig. 7 is the structural representation of two-sided V shaped sections of the present invention microchannel thin plate.
Fig. 8 is the sem photograph of two-sided semi-circular cross-section of the present invention microchannel thin plate.
The specific embodiment
Below in conjunction with embodiment and accompanying drawing, the present invention is done to specify further, but embodiment of the present invention is not limited thereto.
Embodiment 1
It is 0.5mm that present embodiment is selected thickness for use, length and width be the aluminium sheet of 70mm * 40mm as rapidoprint, the manufacturing approach of microchannel multihole lamina may further comprise the steps:
(1) aluminium sheet is carried out surface derusting, cleans to remove surface blot;
(2) aluminium sheet is carried out firm fixation: be installed on the anchor clamps after with rolling device sheet metal being flattened; Avoiding in ensuing process, owing to the uneven of aluminium sheet or be heated and roll the MCA that causes being processed and the uneven phenomenon of the degree of depth occurs.
(3) in optical fiber laser, draw machining path: linearly along the aluminium sheet width; The machined parameters that is provided for controlling the microchannel cross sectional shape is following, the processing number of times: 75, and working power: 19W, process velocity 1000mm/s, filling mode are two-way filling, the fill area is that to be that 0.5mm is long be the rectangle of 70mm to width; And launch ruddiness sheet metal is positioned;
(4) under the employing optical fiber laser one side of aluminium sheet is processed, on aluminium sheet, form the microchannel in single face linear V-arrangement cross section;
(5) with distilled water aluminium sheet is cleaned;
(6) blowing is dry, obtains the microchannel thin plate as the catalytic reaction carrier.
As shown in Figure 1, microchannel, the single face linear V-arrangement cross section thin plate of present embodiment manufacturing has 70 MCAs, and every adjacent two microchannels are at a distance of 0.5mm, and the width in microchannel own also is about 0.5mm, and the degree of depth of microchannel is approximately 0.3mm.
Embodiment 2
It is 0.5mm that present embodiment is selected thickness for use, length and width be the copper plate of 70mm * 40mm as rapidoprint, the manufacturing approach of microchannel multihole lamina may further comprise the steps:
(1) copper plate is carried out surface derusting, cleans to remove surface blot;
(2) copper plate is carried out firm fixation: be installed on the anchor clamps after with rolling device sheet metal being flattened; Avoiding in ensuing process, owing to the uneven of copper plate or be heated and roll the MCA that causes being processed and the uneven phenomenon of the degree of depth occurs.
(3) in laser instrument, draw machining path: linearly along the copper plate width; The machined parameters that is provided for controlling the microchannel cross sectional shape is following, the processing number of times: 30, and working power: 19W, process velocity 750mm/s, filling mode are two-way filling, the fill area is that to be that 10mm is long be the rectangle of 70mm to width; And launch ruddiness sheet metal is positioned;
(4) one side to copper plate is processed under optical fiber laser, on copper coin, forms the microchannel of single face linear square-section;
(5) with distilled water copper plate is cleaned;
(6) blowing is dry, obtains the microchannel thin plate as the catalytic reaction carrier.
As shown in Figure 2, microchannel, the single face linear square-section thin plate of present embodiment manufacturing has 70 MCAs, and every adjacent two microchannels are at a distance of 10mm, and the width in microchannel own also is about 10mm, and the degree of depth of microchannel is approximately 0.3mm.
Embodiment 3
It is 0.5mm that present embodiment is selected thickness for use, length and width be the copper plate of 70mm * 40mm as rapidoprint, the manufacturing approach of microchannel multihole lamina may further comprise the steps:
(1) copper plate is carried out surface derusting, cleans to remove surface blot;
(2) copper plate is carried out firm fixation: be installed on the anchor clamps after with rolling device sheet metal being flattened; Avoiding in ensuing process, owing to the uneven of copper plate or be heated and roll the MCA that causes being processed and the uneven phenomenon of the degree of depth occurs.
(3) in laser instrument, draw machining path: linearly along the copper coin width; The machined parameters that is provided for controlling the microchannel cross sectional shape is following, processing number of times 45, and working power: 14W, process velocity 750mm/s, filling mode are two-way filling, the fill area is that to be that 0.5mm is long be the rectangle of 70mm to width; And launch ruddiness sheet metal is positioned;
(4) one side to copper coin is processed under optical fiber laser, on copper plate, forms the microchannel in single face linear U-shaped cross section;
(5) with distilled water copper coin is cleaned;
(6) blowing is dry, obtains the microchannel thin plate as the catalytic reaction carrier.
As shown in Figure 3, the microchannel thin plate in the single face linear U-shaped cross section of present embodiment manufacturing has 70 MCAs, and every adjacent two microchannels are at a distance of 5mm, and the width in microchannel own also is about 5mm, and the degree of depth of microchannel is approximately 0.3mm.
Embodiment 4
It is 0.5mm that present embodiment is selected thickness for use, length and width be the brass sheet of 70mm * 40mm as rapidoprint, the manufacturing approach of microchannel multihole lamina may further comprise the steps:
(1) brass sheet is carried out surface derusting, cleans to remove surface blot;
(2) brass sheet is carried out firm fixation: be installed on the anchor clamps after with rolling device sheet metal being flattened; Avoiding in ensuing process, owing to the uneven of copper coin or be heated and roll the MCA that causes being processed and the uneven phenomenon of the degree of depth occurs.
(3) in laser instrument, draw machining path: be snakelike along the copper coin width; The machined parameters that is provided for controlling the microchannel cross sectional shape is following, the processing number of times: 15, and working power: 19W, process velocity 750mm/s, the unidirectional filling of filling mode; The fill area is that width is the snakelike of 0.5mm; And launch ruddiness brass sheet is positioned;
(4) one side to brass sheet is processed under optical fiber laser, on brass sheet, forms the microchannel of snakelike square-section;
(5) with distilled water copper coin is cleaned;
(6) blowing is dry, obtains the microchannel thin plate as the catalytic reaction carrier.
As shown in Figure 4, microchannel, the snakelike square-section of the single face of present embodiment manufacturing thin plate has 70 MCAs, and every adjacent two microchannels are at a distance of 0.5mm, and the width in microchannel own also is 0.5mm, and the degree of depth of microchannel is approximately 0.3mm.
Embodiment 5
It is 0.5mm that present embodiment is selected thickness for use, length and width be the copper coin of 70mm * 40mm as rapidoprint, the manufacturing approach of microchannel multihole lamina may further comprise the steps:
(1) copper coin is carried out surface derusting, cleans to remove surface blot;
(2) copper coin is carried out firm fixation: be installed on the anchor clamps after with rolling device sheet metal being flattened; Avoiding in ensuing process, owing to the uneven of copper coin or be heated and roll the MCA that causes being processed and the uneven phenomenon of the degree of depth occurs.
(3) in laser instrument, draw machining path: be circular arc along the copper coin width; The machined parameters that is provided for controlling the microchannel cross sectional shape is following, the processing number of times: 25, and working power: 19W, process velocity 750mm/s, filling mode are two-way filling; The fill area is that width is 0.5 circular arc; And launch ruddiness copper coin is positioned;
(4) one side to copper coin is processed under optical fiber laser, on copper coin, forms the microchannel of pedion circular arc shape square-section;
(5) with distilled water copper coin is cleaned;
(6) blowing is dry, obtains the microchannel thin plate as the catalytic reaction carrier.
As shown in Figure 5, microchannel, the pedion circular arc shape square-section thin plate of present embodiment manufacturing has 70 MCAs, and every adjacent two microchannels are at a distance of 0.5mm, and the width in microchannel own also is about 0.5mm, and the degree of depth of microchannel is approximately 0.3mm.
Embodiment 6
It is 0.5mm that present embodiment is selected thickness for use, length and width be the copper coin of 70mm * 40mm as rapidoprint, the manufacturing approach of microchannel multihole lamina may further comprise the steps:
(1) copper coin is carried out surface derusting, cleans to remove surface blot;
(2) copper coin is carried out firm fixation: be installed on the anchor clamps after with rolling device sheet metal being flattened; Avoiding in ensuing process, owing to the uneven of copper coin or be heated and roll the MCA that causes being processed and the uneven phenomenon of the degree of depth occurs.
(3) in laser instrument, draw machining path: processing at twice, for the first time machine direction is along copper coin width shape linearly; For the second time machine direction with the first time machine direction become 90 ° of angles, linearly shapes; The machined parameters that is provided for controlling the microchannel cross sectional shape is following, the processing number of times: 15, and working power: 19W, process velocity 750mm/s, filling mode are two-way filling; The fill area is that width is that 0.5mm length is the rectangle of 70mm; And launch ruddiness copper coin is positioned;
(4) one side to copper coin is processed under optical fiber laser, on copper coin, forms the microchannel of single face linear square-section;
(5) with distilled water copper coin is cleaned;
(6) blowing is dry, obtains the microchannel thin plate as the catalytic reaction carrier.
As shown in Figure 6, microchannel, the single face right-angled intersection square-section thin plate of present embodiment manufacturing has 70 MCAs, and every adjacent two microchannels are at a distance of 0.5mm, and the width in microchannel own also is approximately 0.5mm, and the degree of depth of microchannel is approximately 0.3mm.
Embodiment 7
It is 0.5mm that present embodiment is selected thickness for use, length and width be the aluminium sheet of 70mm * 40mm as rapidoprint, the manufacturing approach of microchannel multihole lamina may further comprise the steps:
(1) aluminium sheet is carried out surface derusting, cleans to remove surface blot;
(2) aluminium sheet is carried out firm fixation: be installed on the anchor clamps after with rolling device sheet metal being flattened; Avoiding in ensuing process, owing to the uneven of aluminium sheet or be heated and roll the MCA that causes being processed and the uneven phenomenon of the degree of depth occurs.
(3) in laser instrument, draw machining path: processing at twice, for the first time machine direction is along aluminium sheet width shape linearly; For the second time machine direction with the first time machine direction become 90 ° of angles, linearly shapes; The machined parameters that is provided for controlling the microchannel cross sectional shape is following, the processing number of times: 75, and working power: 19W, process velocity 1000mm/s, filling mode are two-way filling, the fill area is that to be that 0.5mm is long be the rectangle of 70mm to width; And launch ruddiness aluminium sheet is positioned;
(4) adopt of the front-back two-sided staggered processing of optical fiber laser priority to aluminium sheet; Form the slotted hole structure microchannel, may further comprise the steps: start laser instrument, behind the microchannel in one group of linear V-arrangement cross section of processing on the front of aluminium sheet; Sheet metal is unloaded; Translate into reverse side, carry out step (2)~(3), restart the microchannel in another group linear V-arrangement cross section of laser instrument processing; Double-edged machine direction is vertical each other, and the working depth sum forms the groove of two groups of square crossings greater than the thickness of plate on sheet metal, and infall forms the rhombus through hole;
(5) with distilled water aluminium sheet is cleaned;
(6) blowing is dry, obtains the microchannel thin plate as the catalytic reaction carrier.
As shown in Figure 7, the multihole lamina of present embodiment manufacturing has 70 MCAs, and the width in microchannel own also is approximately 0.5mm, and the degree of depth of microchannel is approximately 0.3mm, the mutual square crossing in double-edged microchannel, and infall forms the rhombus through hole.
Embodiment 8
It is 0.5mm that present embodiment is selected thickness for use, length and width be the copper plate of 70mm * 40mm as rapidoprint, the manufacturing approach of microchannel multihole lamina may further comprise the steps:
(1) copper plate is carried out surface derusting, cleans to remove surface blot;
(2) copper plate is carried out firm fixation: be installed on the anchor clamps after with rolling device sheet metal being flattened; Avoiding in ensuing process, owing to the uneven of copper plate or be heated and roll the MCA that causes being processed and the uneven phenomenon of the degree of depth occurs.
(3) in laser instrument, draw machining path: processing at twice, for the first time machine direction is along aluminium sheet width shape linearly; For the second time machine direction with the first time machine direction become 90 ° of angles, linearly shapes; The machined parameters that is provided for controlling the microchannel cross sectional shape is following, processing number of times 45, and working power: 18W, process velocity 750mm/s, filling mode are two-way filling, the fill area is that to be that 0.5mm is long be the rectangle of 70mm to width; And launch ruddiness copper plate is positioned;
(4) adopt of the front-back two-sided staggered processing of optical fiber laser priority to sheet metal; Form the slotted hole structure microchannel, may further comprise the steps: start laser instrument, behind one group of linear semi-circular cross-section microchannel of processing on the front of sheet metal; Sheet metal is unloaded; Translate into reverse side, carry out step (2)~(3), restart another group linear semi-circular cross-section microchannel of laser instrument processing; Double-edged machine direction is vertical each other, and the working depth sum forms the groove of two groups of square crossings greater than the thickness of plate on sheet metal, and infall forms the sub-circular through hole.
(5) with distilled water copper coin is cleaned;
(6) blowing is dry, obtains the microchannel thin plate as the catalytic reaction carrier.
Shown in Fig. 8 electron-microscope scanning figure; The multihole lamina of present embodiment manufacturing has 70 MCAs; The multihole lamina of present embodiment manufacturing has 70 MCAs, and the width in microchannel own also is approximately 0.5mm, and the degree of depth of microchannel is approximately 0.3mm; The mutual square crossing in double-edged microchannel, infall forms the sub-circular through hole.
The foregoing description is a preferred implementation of the present invention; But embodiment of the present invention is not limited by the examples; Can be other shapes, when the positive and negative microchannel is rectangle, can obtain rectangular through-hole etc. like the cross section, microchannel; Other any do not deviate from change, the modification done under spirit of the present invention and the principle, substitutes, combination, simplify, and all should be the substitute mode of equivalence, is included within protection scope of the present invention.

Claims (10)

1. the manufacturing approach as the microchannel thin plate of catalytic reaction carrier is characterized in that, may further comprise the steps:
(1) sheet metal is carried out surface derusting, cleans to remove surface blot;
(2) sheet metal is carried out firm fixation: be installed on the anchor clamps after with rolling device sheet metal being flattened;
(3) in optical fiber laser, draw machining path, machined parameters is set, and launch ruddiness sheet metal is positioned;
(4) adopt optical fiber laser that sheet metal is processed, on sheet metal, form the microchannel;
(5) with distilled water sheet metal is cleaned;
(6) blowing is dry, obtains the microchannel thin plate as the catalytic reaction carrier.
2. the manufacturing approach that is used as the microchannel thin plate of catalytic reaction carrier according to claim 1; It is characterized in that; The said employing optical fiber laser of step (4) is processed sheet metal; On sheet metal, form the microchannel, be specially: the employing optical fiber laser is processed on the single face of sheet metal, on sheet metal, forms to be parallel to each other or vertical microchannel.
3. the manufacturing approach that is used as the microchannel multihole lamina of catalytic reaction carrier according to claim 1 is characterized in that the said employing optical fiber laser of step (4) is processed sheet metal; On sheet metal, form the microchannel, be specially: adopt optical fiber laser successively to the front-back two-sided staggered processing of sheet metal, form the slotted hole structure microchannel; May further comprise the steps: start optical fiber laser; Behind one group of microchannel of processing on the front of sheet metal, sheet metal is unloaded, translate into reverse side; Carry out step (2)~(3), restart another group microchannel of optical fiber laser processing; Double-edged machine direction is vertical each other, and the working depth sum forms the groove of two groups of square crossings greater than the thickness of plate on sheet metal, and infall forms through hole.
4. the manufacturing approach that is used as the microchannel thin plate of catalytic reaction carrier according to claim 1 is characterized in that the said machined parameters of step (3) comprises filling mode, working power, process velocity, processing number of times.
5. the manufacturing approach that is used as the microchannel thin plate of catalytic reaction carrier according to claim 1 is characterized in that said sheet metal is any one in aluminium sheet, copper plate, the brass sheet.
6. the microchannel thin plate of being made by each said method of claim 1~5 is characterized in that the width of microchannel is 0.01mm~10mm.
7. microchannel according to claim 6 thin plate is characterized in that, the distance of every adjacent two microchannels is 0.01mm~10mm.
8. microchannel according to claim 6 thin plate is characterized in that the cross section of microchannel is approximately rectangle, semicircle or V-arrangement.
9. microchannel according to claim 6 thin plate is characterized in that, the microchannel be shaped as linear or shaped form.
10. microchannel according to claim 6 thin plate is characterized in that, the mutual square crossing in the double-edged microchannel of microchannel thin plate, and infall forms through hole; The shape approximation of through hole is rectangle, circle or rhombus.
CN2012100183821A 2012-01-18 2012-01-18 Micro-channel sheet used as catalytic reaction carrier, and manufacturing method thereof Pending CN102580786A (en)

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CN113649687A (en) * 2021-08-31 2021-11-16 西安交通大学 Interlayer difference-based laser processing rear wall combination protection method and system

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Cited By (3)

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Publication number Priority date Publication date Assignee Title
CN106925895A (en) * 2017-03-16 2017-07-07 上海理工大学 Based on the micro-machined glassy carbon electrode surface coarsening preparation method of ultra-short pulse laser
CN107717355A (en) * 2017-11-10 2018-02-23 厦门大学 A kind of reactor microchannel manufacture method based on laser secondary operation
CN113649687A (en) * 2021-08-31 2021-11-16 西安交通大学 Interlayer difference-based laser processing rear wall combination protection method and system

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Application publication date: 20120718