CN203811542U - Fluorescence testing device for phosphorus content of dust-free cloth - Google Patents
Fluorescence testing device for phosphorus content of dust-free cloth Download PDFInfo
- Publication number
- CN203811542U CN203811542U CN201420195841.8U CN201420195841U CN203811542U CN 203811542 U CN203811542 U CN 203811542U CN 201420195841 U CN201420195841 U CN 201420195841U CN 203811542 U CN203811542 U CN 203811542U
- Authority
- CN
- China
- Prior art keywords
- cloth
- dust
- phosphorus content
- dark box
- camera bellows
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004744 fabric Substances 0.000 title claims abstract description 60
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 title claims abstract description 21
- 229910052698 phosphorus Inorganic materials 0.000 title claims abstract description 21
- 239000011574 phosphorus Substances 0.000 title claims abstract description 21
- 238000012360 testing method Methods 0.000 title abstract description 19
- 239000000428 dust Substances 0.000 claims description 35
- 238000011835 investigation Methods 0.000 claims description 10
- 239000010881 fly ash Substances 0.000 claims description 6
- 238000001514 detection method Methods 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract description 4
- 230000001678 irradiating effect Effects 0.000 abstract description 2
- 238000012544 monitoring process Methods 0.000 abstract 1
- 238000004140 cleaning Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000004451 qualitative analysis Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
The utility model discloses a fluorescence testing device for phosphorus content of dust-free cloth. The fluorescence testing device comprises a dark box, wherein the dark box is provided with a safety door; at least two cloth clips are further arranged at the top of the dark box; a side plate of the dark box is provided with a 365nm ultraviolet lamp corresponding to the dust-free cloth on the cloth clips; the dark box is internally provided with an image acquisition device corresponding to the dust-free cloth on the cloth clips; the image acquisition device is connected to an external display through a data line. According to the fluorescence testing device, the 365nm ultraviolet lamp with the wavelength of 365nm in the dark box is used for irradiating the dust-free cloth and the dust-free cloth is clamped by the cloth clips at the top of the dark box to be completely expanded; a phosphorus light source is acquired by the image acquisition device and an image is transmitted to the external display so that a tester can observe conveniently, so that the fluorescence testing device can be used for monitoring whether the phosphorus content of the dust-free cloth of each LOT meets the requirements or not in real time; a detection result is timely and effective and a testing process is safe and controllable.
Description
Technical field
The utility model relates to a kind of non-dust cloth phosphorus content fluorometric investigation device.
Background technology
Dust-free cleaning cloth is widely used in semiconductor industry, panel industry, TP industry and solar energy industry, in above-mentioned industry, non-dust cloth is to be directly used in wiping production equipment or product, and very high to the requirement of phosphorus in above-mentioned industry, even require test for ND, think and meet the requirement of client for non-dust cloth phosphorus content, be the quantitative levels of utilizing gas phase or the popularize law of liquid phase look to test phosphorus in the world at present, or do qualitative analysis by fluorescent lamp, said method has following shortcoming:
1. testing apparatus price is high, and maintenance cost is high, and needs the outer test of committee;
2. testing time-effectiveness is poor, can not test in time and control in time in non-dust cloth, whether to contain phosphorus;
If 3. use fluorescent light direct irradiation, human body is had to certain harmfulness.
Utility model content
For solving the problems of the technologies described above, the utility model provides a kind of non-dust cloth phosphorus content fluorometric investigation device, to realize real-time, the efficient detection of P elements on non-dust cloth, improves production efficiency and product quality.
For achieving the above object, the technical solution of the utility model is as follows:
A kind of non-dust cloth phosphorus content fluorometric investigation device, comprises camera bellows, and described camera bellows is provided with safety door; Described camera bellows top is also provided with at least two cloth clamps, and described camera bellows side plate is provided with 365nm uviol lamp with the non-dust cloth on the described cloth clamp of correspondence; In described camera bellows, be also provided with the image collection device of the non-dust cloth on corresponding described cloth clamp, described image collection device is connected to remote data indicator by data line.
Wherein, described uviol lamp has three, and the upper lower position of non-dust cloth on corresponding described cloth clamp respectively, to guarantee that non-dust cloth is carried out to complete test.
Wherein, described camera bellows sidewall is also provided with fly-ash separator, to guarantee before phosphorus content test, as non-dust cloth provides clean room, guaranteeing the serviceable life of accuracy of detection and inner facility.
Pass through technique scheme, a kind of non-dust cloth phosphorus content fluorometric investigation device that the utility model provides, it adopts wavelength is the ultra violet lamp non-dust cloth of 365nm, uviol lamp is arranged in a lighttight camera bellows simultaneously, guarantee not to be subject to the impact of other light sources, and can protect tester not to be subject to inner ultraviolet impact simultaneously, non-dust cloth is clamped fully to launch by the cloth clamp at camera bellows top, and gather phosphorescence source and image is sent to external display to facilitate tester to observe by image collection device, therefore, whether the phosphorus content that this utility model can be monitored the non-dust cloth of each LOT in real time meets the demands, testing result is timely, effective and test process is safe controlled.
Brief description of the drawings
In order to be illustrated more clearly in the technical scheme in the utility model embodiment, below the accompanying drawing of required use during embodiment is described is briefly described.
Fig. 1 is the disclosed a kind of non-dust cloth phosphorus content fluorometric investigation apparatus structure schematic diagram of the utility model embodiment.
Numeral in figure:
11. camera bellows 12. cloth clamp 13. uviol lamps
14. non-dust cloth 15. fly-ash separators
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is clearly and completely described.
With reference to figure 1, the non-dust cloth phosphorus content fluorometric investigation device that the utility model provides, comprises camera bellows 11, and camera bellows 11 is provided with safety door to facilitate tester to carry out non-dust cloth 14 loading or unloading operations; Camera bellows 11 tops are also provided with at least two cloth clamps 12, and camera bellows 11 side plates are provided with the uviol lamp 13 of three 365nm with the upper lower position of the non-dust cloth 14 on corresponding cloth clamp 12, to guarantee that non-dust cloth 14 is carried out to complete test; The image collection device (not shown) that is also provided with the non-dust cloth 14 on corresponding cloth clamp 12 in camera bellows 11, image collection device is connected to remote data indicator (not shown) by data line; Camera bellows 11 sidewalls are also provided with fly-ash separator 15, to guarantee before phosphorus content test, as non-dust cloth 14 provides clean room, guaranteeing the serviceable life of accuracy of detection and inner facility.
Principle of work of the present utility model:
First open the safety door of camera bellows 11, by the cloth clamp 12 that is clipped in camera bellows 11 tops smooth non-dust cloth 14, then shut safety door;
Open fly-ash separator 15 to guarantee camera bellows 11 close beta environment cleanings, then close fly-ash separator 15;
Opening uviol lamp 13 carries out fully comprehensively irradiating to non-dust cloth 14;
Open image collection device, gather the phosphorescence source on non-dust cloth 14 by image collection device, and by external display show image collection result, tester can facilitate, timely or testing result by demonstration result;
Repeat above-mentioned steps with realize the different non-dust cloths 14 of the interior different batches of camera bellows 11 efficient, in time, the controlled detection of safety.
To the above-mentioned explanation of the disclosed embodiments, make professional and technical personnel in the field can realize or use the utility model.To be apparent for those skilled in the art to the multiple amendment of above-described embodiment, General Principle as defined herein can, in the situation that not departing from spirit or scope of the present utility model, realize in other embodiments.Therefore, the utility model will can not be restricted to these embodiment shown in this article, but will meet the widest scope consistent with principle disclosed herein and features of novelty.
Claims (3)
1. a non-dust cloth phosphorus content fluorometric investigation device, is characterized in that, comprises camera bellows, and described camera bellows is provided with safety door; Described camera bellows top is also provided with at least two cloth clamps, and described camera bellows side plate is provided with 365nm uviol lamp with the non-dust cloth on the described cloth clamp of correspondence; In described camera bellows, be also provided with the image collection device of the non-dust cloth on corresponding described cloth clamp, described image collection device is connected to remote data indicator by data line.
2. a kind of non-dust cloth phosphorus content fluorometric investigation device according to claim 1, is characterized in that, described uviol lamp has three, respectively the upper lower position of non-dust cloth on corresponding described cloth clamp.
3. a kind of non-dust cloth phosphorus content fluorometric investigation device according to claim 1, is characterized in that, described camera bellows sidewall is also provided with fly-ash separator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420195841.8U CN203811542U (en) | 2014-04-22 | 2014-04-22 | Fluorescence testing device for phosphorus content of dust-free cloth |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420195841.8U CN203811542U (en) | 2014-04-22 | 2014-04-22 | Fluorescence testing device for phosphorus content of dust-free cloth |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203811542U true CN203811542U (en) | 2014-09-03 |
Family
ID=51450276
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420195841.8U Expired - Lifetime CN203811542U (en) | 2014-04-22 | 2014-04-22 | Fluorescence testing device for phosphorus content of dust-free cloth |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203811542U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114593774A (en) * | 2021-12-30 | 2022-06-07 | 江苏迈思德超净科技有限公司 | Dust-free cloth detection method and portable detection equipment |
| CN114624374A (en) * | 2020-12-14 | 2022-06-14 | 无锡华润上华科技有限公司 | Method for measuring phosphorus content in clean room environment |
-
2014
- 2014-04-22 CN CN201420195841.8U patent/CN203811542U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114624374A (en) * | 2020-12-14 | 2022-06-14 | 无锡华润上华科技有限公司 | Method for measuring phosphorus content in clean room environment |
| CN114593774A (en) * | 2021-12-30 | 2022-06-07 | 江苏迈思德超净科技有限公司 | Dust-free cloth detection method and portable detection equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140903 |
|
| CX01 | Expiry of patent term |