CN203798133U - 一种半导体立式炉的保温桶 - Google Patents
一种半导体立式炉的保温桶 Download PDFInfo
- Publication number
- CN203798133U CN203798133U CN201420074271.7U CN201420074271U CN203798133U CN 203798133 U CN203798133 U CN 203798133U CN 201420074271 U CN201420074271 U CN 201420074271U CN 203798133 U CN203798133 U CN 203798133U
- Authority
- CN
- China
- Prior art keywords
- heat
- quartz plate
- preserving container
- quartz
- hollow housing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 12
- 238000004321 preservation Methods 0.000 title abstract 8
- 239000010453 quartz Substances 0.000 claims abstract description 61
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 61
- 239000012774 insulation material Substances 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 21
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 8
- 238000005338 heat storage Methods 0.000 abstract description 8
- 229910052710 silicon Inorganic materials 0.000 abstract description 8
- 239000010703 silicon Substances 0.000 abstract description 8
- 230000002411 adverse Effects 0.000 abstract description 6
- 235000012431 wafers Nutrition 0.000 abstract 1
- 238000009413 insulation Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 10
- 238000005516 engineering process Methods 0.000 description 6
- 230000007547 defect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
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- Resistance Heating (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201420074271.7U CN203798133U (zh) | 2014-02-20 | 2014-02-20 | 一种半导体立式炉的保温桶 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201420074271.7U CN203798133U (zh) | 2014-02-20 | 2014-02-20 | 一种半导体立式炉的保温桶 |
Publications (1)
Publication Number | Publication Date |
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CN203798133U true CN203798133U (zh) | 2014-08-27 |
Family
ID=51380338
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201420074271.7U Expired - Lifetime CN203798133U (zh) | 2014-02-20 | 2014-02-20 | 一种半导体立式炉的保温桶 |
Country Status (1)
Country | Link |
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CN (1) | CN203798133U (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103791714A (zh) * | 2014-02-20 | 2014-05-14 | 北京七星华创电子股份有限公司 | 一种立式炉的保温桶 |
-
2014
- 2014-02-20 CN CN201420074271.7U patent/CN203798133U/zh not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103791714A (zh) * | 2014-02-20 | 2014-05-14 | 北京七星华创电子股份有限公司 | 一种立式炉的保温桶 |
CN103791714B (zh) * | 2014-02-20 | 2015-11-04 | 北京七星华创电子股份有限公司 | 一种立式炉的保温桶 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CP03 | Change of name, title or address |
Address after: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100016 Jiuxianqiao East Road, Beijing, No. 1, No. Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
|
CP03 | Change of name, title or address | ||
TR01 | Transfer of patent right |
Effective date of registration: 20180112 Address after: 100176 No. 8, Wenchang Avenue, Daxing District economic and Technological Development Zone, Beijing Patentee after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd. Address before: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee before: North China Science and technology group Limited by Share Ltd. |
|
TR01 | Transfer of patent right | ||
CX01 | Expiry of patent term |
Granted publication date: 20140827 |
|
CX01 | Expiry of patent term |