CN203712074U - High-accuracy double-sensor laser scanning galvanometer system and scanning galvanometer motor thereof - Google Patents
High-accuracy double-sensor laser scanning galvanometer system and scanning galvanometer motor thereof Download PDFInfo
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- CN203712074U CN203712074U CN201320829923.9U CN201320829923U CN203712074U CN 203712074 U CN203712074 U CN 203712074U CN 201320829923 U CN201320829923 U CN 201320829923U CN 203712074 U CN203712074 U CN 203712074U
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Abstract
The utility model belongs to the technical field of laser processing, and relates to a high-accuracy double-sensor laser scanning galvanometer system and a scanning galvanometer motor thereof. The high-accuracy double-sensor laser scanning galvanometer system comprises a focusing system, an execution motor and a control system, wherein the focusing system is connected with the execution motor, the execution motor is connected with the control system; the scanning galvanometer motor comprises a grating sensor and a photoelectric sensor which are respectively connected with a coaxial galvanometer motor. The high-accuracy double-sensor laser scanning galvanometer system and the scanning galvanometer motor, disclosed by the utility model have the beneficial effects that a real-time correction function of a motor position can be realized, the problem of temperature drift of the system can be reduced by virtue of a temperature drift control system, and the high-accuracy locating of laser can be finally completed.
Description
Technical field
The utility model belongs to technical field of laser processing, relates in particular to a kind of high accuracy dual sensor laser scanning galvanometer system and scanning galvanometer motor thereof.
Background technology
Galvanometer laser scanning system is made up of the scanning focused mirror of xy bidimensional, its operation principle is that the laser beam of laser instrument output is converged to surface of the work through x axle scanning galvanometer, y axle scanning galvanometer and scanning focused mirror successively after beam expanding lens amplifies collimation, control laser beam displacement and position in the x of material surface direction and y direction by the rotation of controlling x axle, y axle scanning galvanometer, surface of the work is processed, also had z axle scanning galvanometer for 3 D stereo scanning.It is large that scanning galvanometer control system has output torque, and rotary inertia is little, speed is fast, precision is high and the feature such as motion stabilization, is widely used in the fields such as mark, engraving, boring, cutting, welding, rapid processing.
Along with China's industrial development is rapid, laser is more and more extensive in the application of all trades and professions, to laser, control accurately and fast requires also more and more higher, as the effect of how minimum manufacturing cost acquisition scanning galvanometer the best, reach optimal sweep limits, reach the highest sweep speed, can reach minimum focal spot, realize precise positioning, to meet the application of different high-tech areas, become the problem that the numerous experts of current laser industry and scholar are concerned about very much.
Utility model content
In order to overcome above-mentioned the deficiencies in the prior art, the purpose of this utility model is to provide a kind of high accuracy dual sensor laser scanning galvanometer system and scanning galvanometer motor thereof, realize the accurate location of laser scanning surface galvanometer, can automatically carry out the site error adjustment itself occurring, the final hi-Fix and the real-time zero offset capability that reach laser scanning galvanometer system realized.
To achieve these goals, the utility model adopts following technical scheme:
A kind of high accuracy dual sensor laser scanning galvanometer system, comprises focusing system, operating motor, control system, and described focusing system is connected with described operating motor, and described operating motor is connected with described control system;
Described focusing system comprises laser instrument, beam expanding lens, dynamic focusing system, object lens, the coaxial galvanometer of x axle, the coaxial galvanometer of y axle, the coaxial galvanometer of z axle, described laser instrument is connected with described beam expanding lens, described beam expanding lens is connected with described dynamic focusing system, described dynamic focusing system is arranged on the coaxial galvanometer of described z axle, described dynamic focusing system is connected with described object lens, described object lens are connected with the coaxial galvanometer of described x axle, the coaxial galvanometer of described x axle is connected with the coaxial galvanometer of described y axle, the minute surface center of the coaxial galvanometer of described x axle and the coaxial galvanometer of described y axle and the optical axis coincidence of described laser instrument and described beam expanding lens, the center of described dynamic focusing system and the coaxial galvanometer of described x axle and the coaxial galvanometer minute surface of y axle center superposition,
Described control system comprises scanning monitor and laser controller, and described scanning monitor is connected with described laser controller, and described laser controller is connected with described laser instrument, and described scanning monitor is connected with described operating motor;
The coaxial galvanometer of described x axle, the coaxial galvanometer of y axle, the coaxial galvanometer of z axle are connected with x axle scanning galvanometer motor, y axle scanning galvanometer motor, z axle scanning galvanometer motor respectively, and described x axle vibration mirror scanning motor, y axle vibration mirror scanning motor, z axle galvanometer are that motor is all connected with described operating motor.
Described operating motor is servo drive motor.
Described x axle scanning galvanometer motor, described y axle scanning galvanometer motor, described z axle scanning galvanometer motor includes coaxial galvanometer motor, the motor driven systems being connected with coaxial galvanometer motor, grating sensor, photoelectric sensor, signal processing circuit for photoelectric sensor, photoelectric sensor adjustment control circuit, real time position corrective system, low frequency damping circuit, location comparison circuit, closed control circuit, described grating sensor, photoelectric sensor is connected with described coaxial galvanometer motor respectively, described photoelectric sensor adjustment control circuit is connected with the unidirectional input of described photoelectric sensor, described signal processing circuit for photoelectric sensor connects to the unidirectional output of described photoelectric sensor, described grating sensor, described photoelectric sensor is adjusted control circuit and is connected with described real time position corrective system respectively, described photoelectric sensor respectively with described low frequency damping circuit, location comparison circuit connects, described low frequency damping circuit, location comparison circuit is connected with described motor driven systems respectively, and described closed control circuit is connected with described motor driven systems closed loop.
The beneficial effects of the utility model are: the dual sensor that utilizes photoelectric sensor and grating physical sensors composition, complete the real-time detection to coaxial motor motion, by real time position corrective system low resistance circuit, location comparison circuit, thereby reach the accurate location of laser scanning surface galvanometer, and system itself has PID zero offset capability, can automatically carry out the site error adjustment itself occurring, the final hi-Fix and the real-time zero offset capability that reach laser scanning galvanometer system realized, and repetitive positioning accuracy has been controlled at 6/1000ths radians substantially, the linearity can reach in one thousandth, meet the demand of high-end customer.The utility model has been realized the real time calibration function of motor position, reduces the temperature of system float problem by temperature drift control system, finally completes the hi-Fix of laser.
Brief description of the drawings
Fig. 1 is the utility model laser scanning galvanometer system schematic;
Fig. 2 is the structural representation of scanning galvanometer motor of the present utility model.
In figure, 1, laser instrument, 2, beam expanding lens, 3, dynamic focusing system, 4, object lens, 5, the coaxial galvanometer of x axle, 6, the coaxial galvanometer of y axle, 7, the coaxial galvanometer of z axle, 8, scanning monitor, 9, laser controller, 10, x axle scanning galvanometer motor, 11, y axle scanning galvanometer motor, 12, z axle scanning galvanometer motor, 13, servo drive motor, 14, coaxial galvanometer motor, 15, motor driven systems, 16, grating sensor, 17, photoelectric sensor, 18, signal processing circuit for photoelectric sensor, 19, photoelectric sensor adjustment control circuit, 20, real time position corrective system, 21, low frequency damping circuit, 22, location comparison circuit, 23, closed control circuit, 24, scanning work plane.
Detailed description of the invention
Below in conjunction with accompanying drawing, a kind of detailed description of the invention of the present utility model is explained.
As shown in Figure 1 and Figure 2, the utility model provides a kind of high accuracy dual sensor laser scanning galvanometer system, comprise focusing system, operating motor, control system, described focusing system is connected with described operating motor, and described operating motor is connected with described control system;
Described focusing system comprises laser instrument 1, beam expanding lens 2, dynamic focusing system 3, object lens 4, the coaxial galvanometer 5 of x axle, the coaxial galvanometer 6 of y axle, the coaxial galvanometer 7 of z axle, described laser instrument 1 is connected with described beam expanding lens 2, described beam expanding lens 2 is connected with described dynamic focusing system 3, described dynamic focusing system 3 is arranged on the coaxial galvanometer 7 of described z axle, described dynamic focusing system 3 is connected with described object lens 4, described object lens 4 are connected with the coaxial galvanometer 5 of described x axle, the coaxial galvanometer 5 of described x axle is connected with the coaxial galvanometer 6 of described y axle, the minute surface center of the coaxial galvanometer 5 of described x axle and the coaxial galvanometer 6 of described y axle and the optical axis coincidence of described laser instrument 1 and described beam expanding lens 2, the center of described dynamic focusing system 3 and the coaxial galvanometer 5 of described x axle and the coaxial galvanometer 6 minute surface center superpositions of y axle,
Described control system comprises scanning monitor 8 and laser controller 9, and described scanning monitor 8 is connected with described laser controller 9, and described laser controller 9 is connected with described laser instrument 1, and described scanning monitor 8 is connected with described operating motor;
The coaxial galvanometer 5 of described x axle, the coaxial galvanometer 6 of y axle, the coaxial galvanometer 7 of z axle are connected with x axle scanning galvanometer motor 10, y axle scanning galvanometer motor 11, z axle scanning galvanometer motor 12 respectively, and described x axle vibration mirror scanning motor 10, y axle vibration mirror scanning motor 11, z axle vibration mirror scanning motor 12 are all connected with described operating motor.
Described operating motor is servo drive motor.
Operating motor is mainly galvanometer finite corner motor, and its mechanical deflection angle is generally in ± 20 °.Reflecting optics is bonded in the rotating shaft of operating motor, forms coaxial galvanometer with operating motor, realizes the deflection of laser beam by the deflection that rotarily drives speculum of operating motor.The light beam that laser instrument 1 is launched is after beam expanding lens, obtain uniform collimated light beam, then after the focusing by dynamic focusing system and optical amplifier, project successively on the coaxial galvanometer 5 of X-axis, the coaxial galvanometer 6 of Y-axis, the coaxial galvanometer 7 of control system control z axle drives dynamic focusing system 3 to move up and down at z direction of principal axis, finally by Laser Focusing point reflection on scanning work plane 24, form the scanning element in scanning work plane 24.
A kind of scanning galvanometer motor, comprises coaxial galvanometer motor 14, motor driven systems 15 with coaxial galvanometer motor 14 is connected, characterized by further comprising grating sensor 16, photoelectric sensor 17, signal processing circuit for photoelectric sensor 18, photoelectric sensor adjustment control circuit 19, real time position corrective system 20, low frequency damping circuit 21, location comparison circuit 22, closed control circuit 23, described grating sensor 16, photoelectric sensor 17 is connected with described coaxial galvanometer motor 14 respectively, described photoelectric sensor adjustment control circuit 19 is connected with the unidirectional input of described photoelectric sensor 17, described signal processing circuit for photoelectric sensor 18 is connected with the unidirectional output of described photoelectric sensor 17, described grating sensor 16, described photoelectric sensor is adjusted control circuit 19 and is connected with described real time position corrective system 20 respectively, described photoelectric sensor 17 respectively with described low frequency damping circuit 21, location comparison circuit 22 connects, described low frequency damping circuit 21, location comparison circuit 22 is connected with described motor driven systems 15 respectively, and described closed control circuit 23 is connected with described motor driven systems 15 closed loops.
Above an example of the present utility model is had been described in detail, but described content is only preferred embodiment of the present utility model, can not be considered to for limiting practical range of the present utility model.All equalization variation and improvement etc. of doing according to the utility model application range, within all should still belonging to patent covering scope of the present utility model.
Claims (3)
1. a high accuracy dual sensor laser scanning galvanometer system, comprises focusing system, operating motor, control system, and described focusing system is connected with described operating motor, and described operating motor is connected with described control system;
Described focusing system comprises laser instrument, beam expanding lens, dynamic focusing system, object lens, the coaxial galvanometer of x axle, the coaxial galvanometer of y axle, the coaxial galvanometer of z axle, described laser instrument is connected with described beam expanding lens, described beam expanding lens is connected with described dynamic focusing system, described dynamic focusing system is arranged on the coaxial galvanometer of described z axle, described dynamic focusing system is connected with described object lens, described object lens are connected with the coaxial galvanometer of described x axle, the coaxial galvanometer of described x axle is connected with the coaxial galvanometer of described y axle, the minute surface center of the coaxial galvanometer of described x axle and the coaxial galvanometer of described y axle and the optical axis coincidence of described laser instrument and described beam expanding lens, the center of described dynamic focusing system and the coaxial galvanometer of described x axle and the coaxial galvanometer minute surface of y axle center superposition,
Described control system comprises scanning monitor and laser controller, and described scanning monitor is connected with described laser controller, and described laser controller is connected with described laser instrument, and described scanning monitor is connected with described operating motor;
The coaxial galvanometer of described x axle, the coaxial galvanometer of y axle, the coaxial galvanometer of z axle are connected with x axle scanning galvanometer motor, y axle scanning galvanometer motor, z axle scanning galvanometer motor respectively, and described x axle vibration mirror scanning motor, y axle vibration mirror scanning motor, z axle galvanometer are that motor is all connected with described operating motor.
2. high accuracy dual sensor laser scanning galvanometer system according to claim 1, is characterized in that described operating motor is servo drive motor.
3. high accuracy dual sensor laser scanning galvanometer system according to claim 1, is characterized in that described x axle scanning galvanometer motor, described y axle scanning galvanometer motor, described z axle scanning galvanometer motor includes coaxial galvanometer motor, the motor driven systems being connected with coaxial galvanometer motor, grating sensor, photoelectric sensor, signal processing circuit for photoelectric sensor, photoelectric sensor adjustment control circuit, real time position corrective system, low frequency damping circuit, location comparison circuit, closed control circuit, described grating sensor, photoelectric sensor is connected with described coaxial galvanometer motor respectively, described photoelectric sensor adjustment control circuit is connected with the unidirectional input of described photoelectric sensor, described signal processing circuit for photoelectric sensor connects to the unidirectional output of described photoelectric sensor, described grating sensor, described photoelectric sensor is adjusted control circuit and is connected with described real time position corrective system respectively, described photoelectric sensor respectively with described low frequency damping circuit, location comparison circuit connects, described low frequency damping circuit, location comparison circuit is connected with described motor driven systems respectively, and described closed control circuit is connected with described motor driven systems closed loop.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320829923.9U CN203712074U (en) | 2013-12-12 | 2013-12-12 | High-accuracy double-sensor laser scanning galvanometer system and scanning galvanometer motor thereof |
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| CN201320829923.9U CN203712074U (en) | 2013-12-12 | 2013-12-12 | High-accuracy double-sensor laser scanning galvanometer system and scanning galvanometer motor thereof |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104625437A (en) * | 2015-01-12 | 2015-05-20 | 李凯 | Scanning mechanism for precision processing of laser drilling and cutting of special-shaped hole |
| CN107342719A (en) * | 2016-10-25 | 2017-11-10 | 北京市汉华环球科技发展有限责任公司 | A kind of scanning galvanometer motor driven systems |
| CN110682005A (en) * | 2019-10-16 | 2020-01-14 | 佛山科学技术学院 | Laser marking real-time correction method and control device |
| CN110899990A (en) * | 2019-12-03 | 2020-03-24 | 深圳供电局有限公司 | Laser engraving method and device, computer equipment and storage medium |
| CN113014175A (en) * | 2019-12-19 | 2021-06-22 | 广东汉邦激光科技有限公司 | Galvanometer motor control device and control method |
-
2013
- 2013-12-12 CN CN201320829923.9U patent/CN203712074U/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104625437A (en) * | 2015-01-12 | 2015-05-20 | 李凯 | Scanning mechanism for precision processing of laser drilling and cutting of special-shaped hole |
| CN107342719A (en) * | 2016-10-25 | 2017-11-10 | 北京市汉华环球科技发展有限责任公司 | A kind of scanning galvanometer motor driven systems |
| CN107342719B (en) * | 2016-10-25 | 2019-11-12 | 北京市汉华环球科技发展有限责任公司 | A kind of scanning galvanometer motor driven systems |
| CN110682005A (en) * | 2019-10-16 | 2020-01-14 | 佛山科学技术学院 | Laser marking real-time correction method and control device |
| CN110682005B (en) * | 2019-10-16 | 2021-04-27 | 佛山科学技术学院 | Laser marking real-time correction method and control device |
| CN110899990A (en) * | 2019-12-03 | 2020-03-24 | 深圳供电局有限公司 | Laser engraving method and device, computer equipment and storage medium |
| CN110899990B (en) * | 2019-12-03 | 2022-03-01 | 深圳供电局有限公司 | Laser engraving method and device, computer equipment and storage medium |
| CN113014175A (en) * | 2019-12-19 | 2021-06-22 | 广东汉邦激光科技有限公司 | Galvanometer motor control device and control method |
| CN113014175B (en) * | 2019-12-19 | 2022-06-10 | 广东汉邦激光科技有限公司 | Galvanometer motor control device and control method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140716 Termination date: 20151212 |
|
| EXPY | Termination of patent right or utility model |