CN113014175A - Galvanometer motor control device and control method - Google Patents

Galvanometer motor control device and control method Download PDF

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Publication number
CN113014175A
CN113014175A CN201911316266.6A CN201911316266A CN113014175A CN 113014175 A CN113014175 A CN 113014175A CN 201911316266 A CN201911316266 A CN 201911316266A CN 113014175 A CN113014175 A CN 113014175A
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Prior art keywords
galvanometer motor
deflection position
grating sensor
galvanometer
digital signal
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CN113014175B (en
Inventor
刘建业
高文华
戚文军
关子民
梁自品
邱信儒
卓荣秋
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Guangdong Hanbang3d Technology Co ltd
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Guangdong Hanbang3d Technology Co ltd
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02PCONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P23/00Arrangements or methods for the control of AC motors characterised by a control method other than vector control
    • H02P23/14Estimation or adaptation of motor parameters, e.g. rotor time constant, flux, speed, current or voltage
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02PCONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P25/00Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details
    • H02P25/02Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details characterised by the kind of motor
    • H02P25/032Reciprocating, oscillating or vibrating motors

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Laser Beam Processing (AREA)
  • Mechanical Optical Scanning Systems (AREA)

Abstract

一种振镜电机控制装置包括:反射镜;振镜电机;光电传感器,用于实时感测振镜电机的偏转位置并输出与偏转位置对应的模拟信号;光栅传感器,用于感测振镜电机的偏转位置并定期输出与偏转位置对应的数字信号,光栅传感器输出相邻两次的数字信号的时间间隔大于光栅传感器获取相邻两次的偏转位置的时间间隔;及控制器,与光电传感器与光栅传感器电连接,用于根据定期获取的数字信号确定振镜电机当时的偏转位置并根据确定的偏转位置调整振镜电机的转动,还用于在未获取数字信号时根据模拟信号确定振镜电机当时的偏转位置并根据确定的偏转位置调整振镜电机的转动,使振镜电机带动反射镜转动从而调整反射镜的位置。本发明还提供了一种振镜电机控制方法。

Figure 201911316266

A galvanometer motor control device includes: a mirror; a galvanometer motor; a photoelectric sensor for sensing the deflection position of the galvanometer motor in real time and outputting an analog signal corresponding to the deflection position; a grating sensor for sensing the galvanometer motor and the digital signal corresponding to the deflection position is regularly output, and the time interval of the grating sensor outputting the two adjacent digital signals is greater than the time interval of the grating sensor acquiring the two adjacent deflection positions; and the controller, in conjunction with the photoelectric sensor and the photoelectric sensor The grating sensor is electrically connected to determine the current deflection position of the galvanometer motor according to the regularly acquired digital signal and adjust the rotation of the galvanometer motor according to the determined deflection position, and is also used to determine the galvanometer motor according to the analog signal when the digital signal is not obtained. The current deflection position and the rotation of the galvanometer motor are adjusted according to the determined deflection position, so that the galvanometer motor drives the mirror to rotate so as to adjust the position of the mirror. The invention also provides a method for controlling the galvanometer motor.

Figure 201911316266

Description

Galvanometer motor control device and control method
Technical Field
The invention relates to the technical field of laser processing, in particular to a galvanometer motor control device and a galvanometer motor control method.
Background
The current deflection control mode of the galvanometer motor can be divided into analog signal control and digital signal control, and the actual position of the galvanometer deflection motor is fed back to the controller through a corresponding sensor to carry out closed-loop control on the deflection motor. The analog signal sensor is transmitted by voltage analog signals, and the method has the advantages of realization of ultra-high-speed signal transmission and low manufacturing cost, and has the defects that signal deviation is easily caused by external factors such as temperature change, interference and the like in the working process of the galvanometer, the actual scanning track is deviated, and the scanning precision is low. The digital signal sensor is transmitted by a digital signal, and the method has the advantages of strong anti-interference capability, capability of avoiding signal deviation caused by external factors such as temperature change, interference and the like, and the defects that a large number of high-precision position sensors are required to be arranged to realize full-digital signal feedback, the data volume is huge, the actual control speed is low, and the cost is high.
In view of the above, it is necessary to provide a galvanometer motor control apparatus and method, which effectively combine the advantages of the digital galvanometer and the analog galvanometer to achieve high precision, high interference resistance, and low cost of galvanometer control.
Disclosure of Invention
The invention provides a galvanometer motor control device and method combining a digital galvanometer and an analog galvanometer.
The utility model provides a mirror motor control device shakes, including the speculum and with the mirror motor that shakes that the speculum is connected, mirror motor control device shakes still includes: the photoelectric sensor is connected with the galvanometer motor and used for sensing the deflection position of the galvanometer motor in real time and outputting an analog signal corresponding to the deflection position; the grating sensor is connected with the galvanometer motor and used for sensing the deflection position of the galvanometer motor and periodically outputting a digital signal corresponding to the deflection position, and the time interval of outputting the digital signals of two adjacent times by the grating sensor is larger than the time interval of acquiring the deflection positions of two adjacent times by the grating sensor; and the controller is electrically connected with the photoelectric sensor and the grating sensor, is used for determining the deflection position of the galvanometer motor at the moment according to the digital signal acquired periodically and adjusting the rotation of the galvanometer motor according to the determined deflection position, and is also used for determining the deflection position of the galvanometer motor at the moment according to the analog signal and adjusting the rotation of the galvanometer motor according to the determined deflection position when the digital signal is not acquired, so that the galvanometer motor drives the reflector to rotate so as to adjust the position of the reflector.
Further, the grating sensor outputs the digital signals of two adjacent times in an output rule with a time interval gradually reduced.
Further, the galvanometer motor comprises a rotating shaft, and the photoelectric sensor and the grating sensor are fixed on the rotating shaft.
Further, the photoelectric sensor comprises a rotary disc, the grating sensor comprises a plurality of gratings, and the gratings are fixed on the rotary disc at intervals.
Further, the gratings are uniformly fixed on the turntable at intervals.
Furthermore, the photoelectric sensor and the grating sensor are coaxial with the rotating shaft, and the photoelectric sensor is arranged between the galvanometer motor and the grating sensor.
A galvanometer motor control method comprises the following steps: sensing the deflection position of a galvanometer motor in real time through a photoelectric sensor and outputting an analog signal corresponding to the deflection position; sensing the deflection position of a galvanometer motor through a grating sensor and periodically outputting a digital signal corresponding to the deflection position, wherein the time interval of outputting the digital signal of two adjacent times by the grating sensor is larger than the time interval of acquiring the deflection position of two adjacent times by the grating sensor; and determining the deflection position of the galvanometer motor at the moment according to the digital signal acquired periodically, adjusting the rotation of the galvanometer motor according to the determined deflection position, determining the deflection position of the galvanometer motor at the moment according to the analog signal when the digital signal is not acquired, and adjusting the rotation of the galvanometer motor according to the determined deflection position.
Further, still include: and driving a reflector to rotate by the vibrating mirror motor.
Further, the photoelectric sensor comprises a rotary disc, the grating sensor comprises a plurality of gratings, and the gratings are fixed on the rotary disc at intervals.
Further, the mirror motor that shakes includes the axis of rotation, photoelectric sensor reaches the grating sensor with the axis of rotation is coaxial, photoelectric sensor arranges in shake the mirror motor with between the grating sensor.
According to the device and the method for controlling the galvanometer motor, the photoelectric sensor and the grating sensor are combined, so that the galvanometer control is high in precision, high in interference resistance and low in cost.
Drawings
Fig. 1 is a schematic diagram of a galvanometer motor control device in one embodiment.
Fig. 2 is a schematic diagram of a galvanometer motor control device in another embodiment.
Fig. 3 is a flowchart of a galvanometer motor control method.
Description of the main elements
Galvanometer motor control device 100
Reflecting mirror 20
Vibrating mirror motor 22
Photoelectric sensor 24
Grating sensor 26
Controller 28
Rotating shaft 21
Rotary disc 25
Grating 27
The following detailed description will further illustrate the invention in conjunction with the above-described figures.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without inventive effort based on the embodiments of the present invention, are within the scope of the present invention.
It is to be understood that the terminology used in the embodiments of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used in the description of the invention and the appended claims, the singular forms "a", "an", and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It should also be understood that the term "and/or" as used herein refers to and encompasses any and all possible combinations of one or more of the associated listed items. Furthermore, the terms "first," "second," and the like in the description and in the claims, as well as in the drawings, are used for distinguishing between different objects and not necessarily for describing a particular order. Furthermore, the terms "include" and "have," as well as any variations thereof, are intended to cover non-exclusive inclusions.
Referring to fig. 1 and 2, the present invention provides a galvanometer motor control device 100, wherein the galvanometer motor control device 100 is applied to a laser forming apparatus for precisely aligning a product with a laser.
The galvanometer motor control device 100 includes a reflector 20, a galvanometer motor 22, a photoelectric sensor 24, a grating sensor 26 and a controller 28.
The mirror vibration motor 22 is connected with the reflector 20, and is used for driving the reflector 20 to rotate when the mirror vibration motor 22 is driven, and adjusting the position of the laser emission on the reflector 20 to the product.
The photoelectric sensor 24 is connected to the galvanometer motor 22, and is configured to sense a deflection position of the galvanometer motor 22 in real time and output an analog signal corresponding to the deflection position to the controller 28. The grating sensor 26 is connected to the galvanometer motor 22, and is configured to sense a deflection position of the galvanometer motor 22 and periodically output a digital signal corresponding to the deflection position. The time interval between the two adjacent times of output of the digital signal by the grating sensor 26 is larger than the time interval between the two adjacent times of acquisition of the deflection position by the grating sensor 26.
The controller 28 is electrically connected to the photosensor 24 and the grating sensor 26. The controller 28 is configured to determine a current deflection position of the galvanometer motor 22 according to the digital signal obtained periodically, and adjust a rotational deflection position of the galvanometer motor 22 according to the determined deflection position, so that the galvanometer motor 22 drives the mirror 20 to rotate, thereby adjusting the position of the mirror 20. The controller 28 is further configured to determine a current deflection position of the galvanometer motor 22 according to the analog signal and adjust rotation of the galvanometer motor 22 according to the determined deflection position when the digital signal is not acquired, so that the galvanometer motor 22 drives the mirror 20 to rotate, thereby adjusting the position of the mirror 20.
The aforementioned galvanometer motor control device 100 adjusts the deflection position of the galvanometer motor 22 according to the analog signal acquired by the photoelectric sensor 24, and also adjusts the deflection position of the galvanometer motor 22 periodically according to the digital signal periodically acquired by the grating sensor 26 as a priority signal, so that the deflection position of the galvanometer motor 22 can be acquired by the photoelectric sensor 24 even when the galvanometer motor 22 is operated at a high speed, and the deflection position of the galvanometer motor 22 is adjusted by the digital signal periodically fed back by the grating sensor 26, thereby correcting the deviation problem caused by external factors when the photoelectric sensor 24 senses the deflection position of the galvanometer motor 22.
In addition, the control device 100 of the mirror motor adjusts the deflection position of the mirror motor 22 according to the digital signal sensed by the grating sensor 26 acquired periodically, and the adjustment is discontinuous selective adjustment, so that the deviation of the deflection position is corrected, and the influence of the mirror motor on the service life of the mirror motor 22 due to the adjustment of high frequency is avoided.
In one embodiment, the time interval between two adjacent times of acquiring the deflection position by the optical grating sensor 26 is a first time, such as 1 microsecond, and the time interval between two adjacent times of outputting the digital signal by the optical grating sensor 26 is 10 times of the first time, such as 10 microseconds, that is, the optical grating sensor 26 outputs the digital signal once every 5 times of acquiring the deflection position of the galvanometer motor 22. In this way, the galvanometer motor control device 100 adjusts the deflection position of the galvanometer motor 22 once every 5 times the raster sensor 26 acquires the deflection position of the galvanometer motor 22. In another embodiment, the time interval between the two adjacent deflection positions obtained by the grating sensor 26 is a first time, such as 1 microsecond, and the grating sensor 26 outputs the two adjacent output digital signals according to an output rule with a gradually decreasing time interval, such as 1000 microseconds, 997 microseconds, and 994 microseconds … …. In this way, the time interval of the digital signal acquired by the mirror motor control device 100 is gradually reduced, and the frequency of the polarization position adjustment of the mirror motor 22 is gradually increased, which is more favorable for correcting the deviation of the determination of the deflection position caused by the influence of the temperature increase on the photoelectric sensor 24 over time by the mirror motor 22.
Specifically, the galvanometer motor 22 includes a rotating shaft 21, and the mirror 20 is fixed on the rotating shaft 21. The photoelectric sensor 24 and the grating sensor 26 are fixed to the rotating shaft 21. In one embodiment, as shown in fig. 1, the photoelectric sensor 24 includes a turntable 25, and the grating sensor 26 includes a plurality of gratings 27, wherein the gratings 27 are fixed on the turntable 25 at intervals. In this way, the photoelectric sensor 24 and the grating sensor 26 are integrated, and the installation space is saved. The gratings 27 may be uniformly spaced on the turntable 25 or may be non-uniformly spaced on the turntable 25 according to a rule. As shown in fig. 2, the photoelectric sensor 24 is fixed on the rotating shaft 21 of the galvanometer motor 22, the grating sensor 26 is also fixed on the rotating shaft 21, and the photoelectric sensor 24 is disposed between the galvanometer motor 22 and the grating sensor 26. Because the grating sensor 26 and the photoelectric sensor 24 are separately arranged, the sensor does not need to be modified, and the development time of the galvanometer motor control device 100 is saved.
Referring to fig. 3, a flowchart of a method for controlling a galvanometer motor according to the present disclosure is shown, where the method for controlling a galvanometer motor is applied to a laser forming apparatus for precisely aligning a laser to a product, and the method for controlling a galvanometer motor includes the following steps.
Step S30: the deflection position of a galvanometer motor 22 is sensed in real time by a photosensor 24 and an analog signal corresponding to the deflection position is output.
Step S32: the deflection position of the galvanometer motor 22 is sensed by a grating sensor 26 and a digital signal corresponding to the deflection position is periodically output. Wherein, the time interval of the digital signals outputted by the grating sensor 26 is greater than the time interval of the deflection positions acquired by the grating sensor 26.
In one embodiment, the photoelectric sensor 24 includes a rotating disk 25, and the grating sensor 26 includes a plurality of gratings 27, wherein the gratings 27 are fixed on the rotating disk 25 at intervals. In another embodiment, the galvanometer motor 22 includes a rotating shaft 21, the photosensor 24 and the grating sensor 26 are coaxial with the rotating shaft 21, and the photosensor 24 is disposed between the galvanometer motor 22 and the grating sensor 26.
Step S34: determining the deflection position of the galvanometer motor 22 at the moment according to the digital signal acquired periodically and adjusting the rotation of the galvanometer motor 22 according to the determined deflection position, and determining the deflection position of the galvanometer motor 22 at the moment according to the analog signal and adjusting the rotation of the galvanometer motor 22 according to the determined deflection position when the digital signal is not acquired.
Step S36: a mirror 20 is rotated by the galvanometer motor 22.
It is understood that the steps of the above-mentioned galvanometer motor control method are not limited to the above listed order, and may be modified or deleted. The order of steps S30 and S32 may be reversed, and the mirror motor control method may not include step S36.
The galvanometer motor control device 100 and the galvanometer motor control method combine the photoelectric sensor 24 and the grating sensor 26, so that the galvanometer control is high in precision, high in interference resistance and low in cost.
It will be appreciated by those skilled in the art that the above embodiments are illustrative only and not intended to be limiting, and that suitable modifications and variations to the above embodiments are within the scope of the disclosure provided that the invention is not limited thereto.

Claims (10)

1. The utility model provides a mirror motor control device shakes, including the speculum and with the mirror motor that shakes that the speculum is connected, its characterized in that, mirror motor control device shakes still includes:
the photoelectric sensor is connected with the galvanometer motor and used for sensing the deflection position of the galvanometer motor in real time and outputting an analog signal corresponding to the deflection position;
the grating sensor is connected with the galvanometer motor and used for sensing the deflection position of the galvanometer motor and periodically outputting a digital signal corresponding to the deflection position, and the time interval of outputting the digital signals of two adjacent times by the grating sensor is larger than the time interval of acquiring the deflection positions of two adjacent times by the grating sensor; and
and the controller is electrically connected with the photoelectric sensor and the grating sensor, is used for determining the deflection position of the galvanometer motor at the moment according to the digital signal acquired periodically and adjusting the rotation of the galvanometer motor according to the determined deflection position, and is also used for determining the deflection position of the galvanometer motor at the moment according to the analog signal and adjusting the rotation of the galvanometer motor according to the determined deflection position when the digital signal is not acquired, so that the galvanometer motor drives the reflector to rotate to adjust the position of the reflector.
2. The galvanometer motor control device of claim 1, wherein the raster sensor outputs the digital signal of two adjacent outputs in an output rule of a time interval gradually decreasing.
3. The galvanometer motor control device of claim 1, wherein the galvanometer motor includes a rotating shaft, the photosensor and the grating sensor being fixed to the rotating shaft.
4. A galvanometer motor control device according to claim 3, wherein the photoelectric sensor comprises a rotary plate, and the grating sensor comprises a plurality of gratings which are fixed on the rotary plate at intervals.
5. The galvanometer motor control device of claim 4, wherein said plurality of gratings are fixed to said turntable at regular intervals.
6. A galvanometer motor control device according to claim 3, wherein the photosensor and the grating sensor are coaxial with the rotary shaft, the photosensor being interposed between the galvanometer motor and the grating sensor.
7. A galvanometer motor control method comprises the following steps:
sensing the deflection position of a galvanometer motor in real time through a photoelectric sensor and outputting an analog signal corresponding to the deflection position;
sensing the deflection position of a galvanometer motor through a grating sensor and periodically outputting a digital signal corresponding to the deflection position, wherein the time interval of outputting the digital signal of two adjacent times by the grating sensor is larger than the time interval of acquiring the deflection position of two adjacent times by the grating sensor; and
and determining the deflection position of the galvanometer motor at the moment according to the digital signal acquired periodically, adjusting the rotation of the galvanometer motor according to the determined deflection position, determining the deflection position of the galvanometer motor at the moment according to the analog signal when the digital signal is not acquired, and adjusting the rotation of the galvanometer motor according to the determined deflection position.
8. The galvanometer motor control method of claim 7, further comprising:
and driving a reflector to rotate by the vibrating mirror motor.
9. The galvanometer motor control method of claim 7, wherein the photosensor comprises a rotating disk, and the grating sensor comprises a plurality of gratings, and the gratings are fixed on the rotating disk at intervals.
10. The galvanometer motor control method of claim 7, wherein the galvanometer motor includes a rotating shaft, the photosensor and the grating sensor are coaxial with the rotating shaft, and the photosensor is disposed between the galvanometer motor and the grating sensor.
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