CN203683714U - Automated resistance regulating device of resistance strain gauge - Google Patents

Automated resistance regulating device of resistance strain gauge Download PDF

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Publication number
CN203683714U
CN203683714U CN201320829633.4U CN201320829633U CN203683714U CN 203683714 U CN203683714 U CN 203683714U CN 201320829633 U CN201320829633 U CN 201320829633U CN 203683714 U CN203683714 U CN 203683714U
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China
Prior art keywords
resistance
strain gauge
resistance trimming
running gear
axis running
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Expired - Fee Related
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CN201320829633.4U
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Chinese (zh)
Inventor
晏志鹏
刘旭
刘鹏
张志刚
雒平华
王智勇
卢旸
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Zhonghang Electronic Measuring Instruments Co Ltd
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Zhonghang Electronic Measuring Instruments Co Ltd
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Abstract

The utility model discloses an automated resistance regulating device of a resistance strain gauge. The automated resistance regulating device comprises a rack which is placed vertically, wherein a Z-axis moving device is mounted on the rack, and a resistance measuring and regulating device and a CCD (Charge Coupled Device) image acquisition device are fixed on the Z-axis moving device. The automated resistance regulating device further comprises an X-axis moving device, a Y-axis moving device and a gas and liquid integrated valve, wherein a product clamping stage is mounted on the X-axis moving device; a detection unit is arranged on the resistance measuring and regulating device. According to the automated resistance regulating device of the resistance strain gauge, a regulating process is controlled through controlling parameters, such as current or voltage loaded to the resistance strain gauge, voltage loading time, resistance regulating liquid volume and the like, and the equipment is high in control accuracy and easy in operation, so that the automated resistance regulating device has great advantages in the aspect of realizing batch and mechanized operation; meanwhile, a sensitive gate area of a product, which is subjected to resistance regulation by an electrochemical resistance regulating method, does not generate internal stress, so that the stability, uniformity and accuracy of the resistance of the product can be improved greatly.

Description

A kind of resistance strain gauge automatization resistance trimming device
Technical field
The utility model relates to a kind of resistance strain gauge resistance and adjusts equipment, and particularly a kind of resistance strain gauge automatization resistance trimming device and resistance trimming method, automatically adjust strainometer resistance and make it to reach nominal resistance.
Background technology
Resistance strain gauge (hereinafter to be referred as strainometer) is the sensor that utilizes " resistance-strain " principle, conventionally adopts the processing methodes such as substrate preparation, exposure, corrosion to form strainometer graphic structure unit.Due to foil roll compacting and strainometer foozle, cause sensitive grid thickness, width etc. can exist micron to nano grade to disperse, after strainometer corrosion moulding, resistance value cannot all reach nominal resistance, always has certain deviation, cannot be directly used in thermometrically.In order to guarantee that strainometer resistance meets application requiring, need to reach nominal value to its resistance adjustment.
At present, the method for strainometer resistance adjustment has: manual machinery Ginding process, semi-automatic mechanical milling method, manual chemical corrosion inflation method.
It is to make sensitive grid sectional area reduce to promote resistance by mechanical mill that manual machinery grinds resistance trimming method, conventionally adopts and operates with the DC micromotor of grinding head, and grinding head is generally with sand rubber or be moistened with the rayon balls of abrasive material.When adjusting resistance, manual mobile motor makes abrasive material contacting strain meter sensitive grid region, rotarily drives grinding head rotation to sensitive grid polishing, thereby realize the target that resistance is adjusted by motor.
Semi-automatic mechanical grinding device operation logic is similar to preceding method, different piece is moved by hand motor to be become to three-axis moving automatically drive, strainometer resistance value is detected in, front and back upper and lower by grinding head or move left and right and realize resistance trimming simultaneously, controls all parts work.Although tentatively realize equipment resistance trimming, need artificial abrasive material ball or the band sand rubber changed.
Aforesaid method, in actual mechanical process, the variation of strainometer resistance is applied to the pressure on sensitive grid surface, the factors such as hardness and particle diameter of abrasive material, belong to cold working, easily exist polishing inhomogeneous, polishing rear surface stress concentration, human factor affects the problems such as large, efficiency is slow simultaneously, and labour intensity is large.Although semi-automatic mechanical grinding device can replace a part of workman's operation, still cannot improve the problems referred to above.
Manual chemical resistance trimming method is to adopt chemical resistance trimming liquid to sensitive grid surface or side etch, reduces sectional area and adjusts resistance.Generally be divided into 4 steps: rough adjustment, careful adjustment, neutralization, cleaning.Resistance trimming carrier is absorbent cotton or non-woven fabrics etc.The shortcoming of manual chemical resistance trimming method is that neutralization is cleaned and wasted time and energy, and easy residual corrosive fluid causes the overproof or other defect of resistance; Quality product is affected by human factors larger; Resistance trimming efficiency is low.
In a word, aforesaid method or equipment resistance trimming efficiency are low, labour intensity is large, human factor is larger on the impact of strainometer sensitive-mass in the course of processing, cannot meet the efficient demand of suitability for industrialized production in batches of high-quality strainometer.
Utility model content
In order to overcome, aforesaid method or equipment resistance trimming efficiency are low, labour intensity is large, human factor is on the larger problem of strainometer sensitive-mass impact in the course of processing, and the utility model provides a kind of strainometer full-automatic resistance trimming device, fine addressing the above problem.
The technical scheme that the utility model adopts is as follows:
A kind of resistance strain gauge automatization resistance trimming device, comprise the frame of vertical placement, Z axis running gear is installed in described frame, on Z axis running gear, be fixed with measurement, resistance trimming device and ccd image gathering device, described resistance strain gauge automatization resistance trimming device further includes X-axis running gear and Y-axis running gear, and product clamping bench is arranged on X-axis running gear; On described measurement, resistance trimming device, be provided with detecting unit, the initial resistivity value of the contact detection resistance strain gauge by detecting unit and resistance strain gauge, then, by resistance strain gauge jet surface resistance trimming liquid, realizes resistance trimming.
On described X-axis running gear, be further provided with swivel arrangement, described product clamping bench is arranged on swivel arrangement.
On described X-axis running gear, plane self balancing device is further installed, described swivel arrangement is arranged on plane self balancing device.
Described measurement resistance trimming device contacts with resistance strain gauge to realize by gold-plated probe surveys resistance.
The detecting unit of described measurement resistance trimming device is sealed in rubber coating, when described rubber coating and resistance strain gauge close contact, forms enclosed space, to hold the resistance trimming liquid of injection in strainometer sensitive grid region.
On described product clamping bench, being provided with telltale mark and printing opacity designs for product orientation.
Compared with prior art, the utility model at least has following beneficial effect: the utility model is the curtage at resistance strain gauge by controlled loading, the on load voltage time, the parameters such as resistance trimming liquid measure, control adjustment process and the monitoring of resistance result, not only realize automatization resistance trimming function, and because device control precision is high, easy to operate, therefore realizing mass, mechanized aspect has very large advantage, product after simultaneous electrochemical resistance trimming method resistance trimming, product sensitive grid region does not produce internal stress, can greatly improve product resistance stability, homogeneity, accuracy.
Accompanying drawing explanation
Fig. 1 is the structural representation of the utility model device.
Fig. 2 is that the utility model is measured, the structural representation of resistance trimming device.
In figure:
1 Gas-liquid integral valve 2 Marble frame
3 Z axis running gear 4 Measurement, resistance trimming device
5 Ccd image gathering device 6 Product clamping bench
7 Swivel arrangement 8 Self balancing device
9 X-axis running gear 10 Y-axis running gear
11 Housing 12 Movable pulley
13 Base for supporting 14 Marble base station
15 Gold-plated probe 16 Fast connecting-disconnecting interface
17 Circuit substrate 18 Go out sap cavity
19 Admission chamber 20 Rubber coating
21 Negative electrode ? ?
Embodiment
Directly be there is electrochemical reaction and caused in electrochemistry resistance trimming by metallic surface and surrounding medium, its principle is: metallic substance, in certain active positively charged ion, anion solutions, chemical reaction can occur, when the activity of these positively charged ions or negatively charged ion is during much larger than the atomic charge of metal, will there is migration mutually and displacement in them.If add two blocks of metals in solion, the atom activity of two metal has certain potential difference, at this moment on the higher metal of activity, apply positive voltage, on another piece metal, apply negative voltage, form potential difference, by regulating distance, the voltage difference between metal sheet, to form electronic migration, drive atomic migration, thus by metal atoms migrate high reactive behavior to negative plate, positive plate attenuate or volume are reduced.
The utility model is considered strainometer resistance adjusting process process and the condition of production, a kind of full-automatic resistance trimming device of design, refer to shown in Fig. 1, this device comprises marble frame 2, gas-liquid integral valve 1, three-shaft linkage selection mechanism, measurement, resistance trimming device 4, ccd image gathering device 5, product clamping bench 6, swivel arrangement 7, plane self balancing device 8, housing 11, base station 14, main control system, gas-liquid control unit, measure-controlling unit, the organic assembling of these unit, can realize the full-automatic resistance trimming of resistance strain gauge electrochemistry and measurement function.
Described housing 11 supports by the base for supporting 13 at four angles, bottom place, and it is convenient mobile that housing 11 is also provided with movable pulley 12; The top of described housing 11 arranges described base station 14, marble frame 2 is fixed on base station 14 and setting vertical with base station 14 vertically, Z axis running gear 3 is arranged in marble frame 2 and along the track of marble frame 2 and moves in Z-direction, described base station 14 is further provided with described X-axis running gear 9 and Y-axis running gear 10, and described X-axis running gear 9, Y-axis running gear 10 and Z axis running gear 3 form three-dimensional system of coordinate; Described plane self balancing device 8 is further installed on described X-axis running gear 9, and described product clamping bench 6 is fixed on swivel arrangement 7, and swivel arrangement 7 is arranged on plane self balancing device 8; Described measurement, resistance trimming device 4 are fixed on Z axis running gear 3, on described Z axis running gear 3, are further fixed with ccd image gathering device 5.
Refer to shown in Fig. 2, described measurement, resistance trimming device 4 comprise circuit substrate 17, are provided with multiple measuring units on circuit substrate 17, are provided with gold-plated probe 15, negative electrode 21 on each measuring unit, and go out sap cavity 18 and admission chamber 19; Described negative electrode 21, go out sap cavity 18 and admission chamber 19 is sealed in rubber coating 20, a part for described gold-plated probe 15 is stretched out rubber coating 20.Described circuit substrate 17 is further connected with fast connecting-disconnecting interface 16.
Described frame 2 and base station 14 adopt marble material, major function is to provide fixed support and platform, guarantee that in resistance trimming, measuring process, each running gear operates steadily, stroke is accurate, can not cause the stable problems such as resonance because of running gear motion or external shock, cause whole device to move, measure the faults such as inaccurate.For meeting aforementioned requirement, frame, board adopt monoblock cutting marble, grind, process, and to guarantee globality, planarization and rigidity, reach the accurate, reliable of rigging position.
Product clamping bench 6 designs according to the feature of product, be designed with pre-determined bit mark, and there is a printing opacity design, bottom design has LED luminotron, be provided with the just CCD of location simultaneously and observe video, when artificial placement product, by ccd image, product edge is alignd along LED printing opacity mark position, can realize very fast pre-determined bit, guarantee the accuracy of product starting position.There is vacuum suck micropore on described product clamping bench 6 surfaces, and the fixed form of product clamping bench 6 and product adopts the mode of micropore vacuum suck, guarantee that absorption is smooth, reliably fixing, avoid vacuum suck to impact product resistance.
The major function of gas-liquid integral valve 1 is the target according to resistance trimming, voltage between strainometer sensitive grid surface (anode) and negative electrode, electric current, distance, area etc., utilize pid algorithm to calculate time or the cycle of electrochemistry resistance trimming, electrochemistry resistance trimming liquid is accurately ejected into strainometer sensitive grid surface, and complete resorption, air blowing etc. action, realize resistance trimming and accurately control, reach resistance trimming object.
X-axis running gear 9, Y-axis running gear 10, Z axis running gear 3, swivel arrangement 7 major functions are by strainometer pad and gauge head, sensitive grid and negative electrode accurate contraposition, and strainometer product is accurately located.By mobile, rotating function, be combined with video acquisition, software algorithm, X, Y, Z tri-axles move and W360 ° of rotating gang simultaneously, guarantee resistance trimming head, surveying resistance head can be accurate and every a slice strainometer is aimed at, resistance trimming.Wherein X, Y, Z running gear and W swivel arrangement adopt servomotor roller screw closed loop control system or linear induction motor system, X running gear is realized level and is moved left and right, Y running gear is realized level and is moved forward and backward, Z running gear is realized resistance trimming measuring apparatus and is moved up and down, W swivel arrangement is realized the rotation of product clamping bench, i.e. strainometer position rotation.This four axle moves or swivel arrangement can be realized interlock, operation automatically.
First the function of gold-plated probe 15 is to guarantee in resistance trimming process and strainometer pad close contact, assurance contact resistance is low, be convenient to control unit, by gold-plated probe, resistance strain gauge loaded to positive electrode potential, form potential difference with negative electrode, also be convenient to control unit by the direct monitor strain meter of gold-plated probe resistance, regulate the height that applies positive electrode potential to realize resistance trimming function through control unit and software algorithm; Then to guarantee that gold-plated probe does not cause the impacts such as damage in the time contacting with product on product.Gold-plated probe has good elasticity and electroconductibility, can guarantee that contact measurement effect is good.Gold-plated probe may be separately formed unit also can form matrix unit, and the utility model adopts 8 tunnels (two, every road probe) to measure and controls gold-plated probe.Equipment possesses probe in detecting, calibration function, as while going wrong, device measuring unit has automatic prompting function, checks or changes.
Measure-controlling unit is divided into metering circuit, pilot circuit, and major function is real-time Measurement accuracy strainometer resistance, according to by pid algorithm, calculates loading and allows pilot circuit export positive negative potential, how many by controlling electric charge, regulates resistance trimming voltage.Measuring unit is surveyed resistance and is adopted constant current source excitation, and Kelvin's method of measuring resistance, provides constant-current source circuit.Pilot circuit adopts close-loop control mode, has output, gathers feedback, accurately reliable to guarantee output charge current potential, realizes accurate resistance trimming.Measure-controlling unit possesses probe in detecting, calibration, automatic prompting function, as while going wrong, can be according to prompting, check or change.
The major function of main control system is to control the motion of aforementioned each several part or device, measurement, output etc., and realizes supply and the removal of resistance trimming liquid by controlling gas-liquid integral valve.
The beneficial effects of the utility model are: by controlled loading in parameters such as the curtage of resistance strain gauge, on load voltage time, resistance trimming liquid measures, software full powers control adjustment process and the monitoring of resistance result, not only realize automatization resistance trimming function, and because device control precision is high, software is friendly, easy to operate, therefore there is very large advantage realizing aspect mass, mechanized, product after simultaneous electrochemical resistance trimming method resistance trimming, product sensitive grid region does not produce internal stress, can greatly improve product resistance stability, homogeneity, accuracy.
Below in conjunction with accompanying drawing, the utility model is described further.
The electrochemistry resistance trimming technological process that the utility model relates to is: 1, manually justifying product is placed on product clamping bench 6, carry out pre-determined bit by the pre-determined bit mark on ccd image gathering device 5 and product clamping bench 6, start and start to process switch, vacuum suck fixed product.2, product clamping bench 6 moves to the position of ccd image gathering device, and image automatic station-keeping system starts, and CCD captures MARK point on product, automatically adjusts the θ angle forming between X-axis running gear and Y-axis running gear, adjustment aim position automatically, accurately location.3, workplatform moves to resistance trimming station, and Z axis running gear drives and measures, resistance trimming device 4 declines, and gold-plated probe 15 touches strainometer pad, the initial resistance of measure-controlling unit quick obtaining resistance strain gauge; 4, measure-controlling unit calculates and treats the actual resistance of resistance trimming strainometer and the difference of target resistance, by this difference, calculates in advance the resistance trimming magnitude of voltage or the charge value that are loaded on strainometer; 3, apply electric charge or voltage, gas-liquid integral valve 1 is to strainometer sensitive grid jet surface resistance trimming liquid, by the resistance trimming of unit time, and resorption resistance trimming liquid, equipment will be measured resistance again, and revise the next resistance trimming cycle and be loaded into resistance trimming voltage or the electric charge on resistance strain gauge; 5, evaluate the resistance trimming efficiency in the unit time, and carry out pid algorithm correction; 6, then equipment moves according to both parameters such as determining deviation, and lower a slice strainometer or next matrix unit strainometer are carried out to resistance trimming.Said process repeatedly, can adjust to target resistance by the resistance of each strainometer.
Utilize the utility model device to carry out the process of resistance trimming as follows:
First open device power supply (DPS), open computer.
Justifying resistance strain gauge is placed on product clamping bench 6, utilizes LED light transmission device and the pre-determined bit mark of product clamping bench 6, by the mark position alignment of product design, realize quick pre-determined bit, start and start to process switch, vacuum suck fixed product.
By control X-axis running gear 9, Y-axis running gear 10, product clamping bench 6 is moved to the position of ccd image gathering device 5, image automatic station-keeping system starts, ccd image gathering device 5 captures MARK point on product, finely tune by X-axis running gear 9, Y-axis running gear 10 and swivel arrangement 7, automatically adjust X, Y, θ angle, adjustment aim position, accurately location.Meanwhile, plane self balancing device 8 guarantees that product and product clamping bench 6 remain level.
Control product clamping bench 6 and move under measurement, resistance trimming device 4 stations, Z axis travel mechanism 3 drives and measures, resistance trimming device 4 moves down, and gold-plated probe 15 touches strainometer pad, and measure-controlling unit obtains the initial resistance of resistance strain gauge; Meanwhile, rubber coating 20 and product close contact, form temporary transient enclosed space in strainometer sensitive grid region.
Measure-controlling unit calculates treats the actual resistance of resistance trimming strainometer and the difference of target resistance, by this difference, calculate in advance the resistance trimming magnitude of voltage or the charge value that are loaded on strainometer, the resistance trimming time, apply electric charge or voltage to product by gold-plated probe 15, main control system control gas-liquid control unit injects resistance trimming liquid in the enclosed space of rubber coating 20 and product formation by admission chamber 19, under the effect of voltage, active ion in high cupric ion and the resistance trimming liquid of reactive behavior in sensitive grid mutually moves and replaces, there is chemical reaction, the metal level attenuate in product sensitive grid region, volume reduces, thereby realize resistance adjustment.
By the resistance trimming of a time cycle, control gas-liquid control unit by resistance trimming liquid by going out sap cavity 18 sucking-offs, now sensitive grid region does not have resistance trimming liquid, gold-plated probe 15 in measurement, resistance trimming device 4 records new resistance value again, the next resistance trimming cycle of measure-controlling unit correction is loaded into the resistance trimming voltage while on resistance strain gauge, evaluate the resistance trimming efficiency in the unit time, and carry out pid algorithm correction, gas-liquid control unit injects resistance trimming liquid by admission chamber 19 again, and resistance trimming process starts again.Said process repeatedly, until resistance strain gauge resistance is adjusted to target value.
After this sheet resistance strainometer resistance trimming puts in place, equipment moves according to both parameters such as determining deviation, control in Z axis travel mechanism 3 and move, measure, resistance trimming device 4 with on move, by X-axis running gear 9, Y-axis running gear 10, gold-plated probe 15 is moved to lower a slice strainometer or next matrix unit strainometer pad top, repeat above-mentioned steps, thereby realize the resistance trimming to justifying product.

Claims (6)

1. a resistance strain gauge automatization resistance trimming device, it is characterized in that: the frame (2) that comprises vertical placement, Z axis running gear (3) is installed in described frame (2), on Z axis running gear (3), be fixed with measurement, resistance trimming device (4) and ccd image gathering device (5), described resistance strain gauge automatization resistance trimming device further includes X-axis running gear (9) and Y-axis running gear (10), and product clamping bench (6) is arranged on X-axis running gear (9); On described measurement, resistance trimming device, be provided with detecting unit, the initial resistivity value of the contact detection resistance strain gauge by detecting unit and resistance strain gauge, then, to resistance strain gauge jet surface resistance trimming liquid, realizes resistance trimming.
2. a kind of resistance strain gauge automatization resistance trimming device according to claim 1, is characterized in that: on described X-axis running gear (9), be further provided with swivel arrangement (7), described product clamping bench (6) is arranged on swivel arrangement.
3. a kind of resistance strain gauge automatization resistance trimming device according to claim 2, is characterized in that: plane self balancing device (8) is further installed on described X-axis running gear (9), and described swivel arrangement is arranged on plane self balancing device.
4. according to a kind of resistance strain gauge automatization resistance trimming device described in any one in claims 1 to 3, it is characterized in that: described measurement resistance trimming device contacts with resistance strain gauge to realize by gold-plated probe surveys resistance.
5. according to a kind of resistance strain gauge automatization resistance trimming device described in any one in claims 1 to 3, it is characterized in that: the detecting unit of described measurement resistance trimming device is sealed in rubber coating (20), when described rubber coating (20) and resistance strain gauge close contact, form enclosed space in strainometer sensitive grid region, to hold the resistance trimming liquid of injection.
6. according to a kind of resistance strain gauge automatization resistance trimming device described in any one in claims 1 to 3, it is characterized in that: on described product clamping bench (6), be provided with telltale mark and printing opacity and design for product orientation.
CN201320829633.4U 2013-12-16 2013-12-16 Automated resistance regulating device of resistance strain gauge Expired - Fee Related CN203683714U (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103668420A (en) * 2013-12-16 2014-03-26 中航电测仪器股份有限公司 Automatic resistance adjusting device for resistance strain gauge and resistance adjusting method
CN104191333A (en) * 2014-08-22 2014-12-10 深圳市牧己实业有限公司 Resistance adjusting machine for foil strain gauge
CN104714474A (en) * 2015-03-11 2015-06-17 山东理工大学 Automatic resistance adjusting device for resistance strain gage
CN110436141A (en) * 2019-08-09 2019-11-12 银河水滴科技(北京)有限公司 The method and device of feeder feeding
CN111775005A (en) * 2020-07-09 2020-10-16 厦门市诺盛测控技术有限公司 Automatic grinding and resistance-adjusting device for strain gauge

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103668420A (en) * 2013-12-16 2014-03-26 中航电测仪器股份有限公司 Automatic resistance adjusting device for resistance strain gauge and resistance adjusting method
CN103668420B (en) * 2013-12-16 2016-08-17 中航电测仪器股份有限公司 A kind of strain ga(u)ge automatization resistance trimming device and resistance trimming method
CN104191333A (en) * 2014-08-22 2014-12-10 深圳市牧己实业有限公司 Resistance adjusting machine for foil strain gauge
CN104714474A (en) * 2015-03-11 2015-06-17 山东理工大学 Automatic resistance adjusting device for resistance strain gage
CN110436141A (en) * 2019-08-09 2019-11-12 银河水滴科技(北京)有限公司 The method and device of feeder feeding
CN111775005A (en) * 2020-07-09 2020-10-16 厦门市诺盛测控技术有限公司 Automatic grinding and resistance-adjusting device for strain gauge

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