CN203625224U - Molten glass treatment device and manufacturing device of glass substrate - Google Patents
Molten glass treatment device and manufacturing device of glass substrate Download PDFInfo
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- CN203625224U CN203625224U CN201320613413.8U CN201320613413U CN203625224U CN 203625224 U CN203625224 U CN 203625224U CN 201320613413 U CN201320613413 U CN 201320613413U CN 203625224 U CN203625224 U CN 203625224U
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- melten glass
- gas
- phase space
- finer
- treatment unit
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
- C03B5/16—Special features of the melting process; Auxiliary means specially adapted for glass-melting furnaces
- C03B5/225—Refining
Abstract
The utility model relates to a molten glass treatment device and a manufacturing device of a glass substrate. The agglutination of vaporized volatile matters of platinum or platinum alloy and the like is inhibited in the molten glass treatment device made of platinum or platinum alloy and used in the manufacturing process of the glass substrate. When introduced to a forming device, molten glass is introduced to the forming device by using the molten glass treatment device; the molten glass treatment device comprises a liquid phase space, a gas phase space and an inner wall, wherein the liquid phase space contains molten glass; the gas phase space is located above the liquid level of the molten glass; the inner wall is used for forming the liquid phase space and the gas phase space, and at least one part of the gas phase space is made of a material containing platinum group metals; an airflow is formed in the gas phase space in a way that the platinum group metals contained in the gas phase space do not pass through a region with the temperature lower than the temperature for forming saturated vapor pressure.
Description
Technical field
The utility model relates to a kind of by the melten glass treatment unit that the melten glass that frit melting is generated is shaped use in the manufacturing installation of the glass substrate of manufacturing glass substrate and the manufacturing installation of glass substrate.
Background technology
Glass substrate is usually afterwards configured as the step of glass substrate by melten glass and manufactures through utilizing frit to generate melten glass.
But, in order to utilize the melten glass of high temperature to produce high-grade glass substrate in batches, expect that the impurity etc. of the major cause of considering the defect that becomes glass substrate is not sneaked into melten glass from arbitrary device of manufacturing glass substrate.The inwall of the member therefore, contacting with melten glass in the manufacturing processed of glass substrate must be made up of appropriate material according to temperature, the quality of desired glass substrate etc. of the melten glass contacting with this member.For example, the material of the pipe of the described finer of known formation uses the alloy (being designated hereinafter simply as platinum or platinum alloy etc.) (patent documentation 1) of the various metals comprising in platinum metals or platinum metals conventionally.Although the price such as platinum or platinum alloy is higher but fusing point is high and also excellent for the solidity to corrosion of melten glass, so, be suitable for finer or steel basin.
[background technology document]
[patent documentation]
The special table of [patent documentation 1] Japanese Patent 2006-522001 communique
Utility model content
[utility model problem to be solved]
But platinum or platinum alloy have the problem that can volatilize in the time of high temperature.And a part for the crystallization (platinum impurity or platinum alloy impurity) that the volatile matter that has this platinum or a platinum alloy etc. obtains in the wall aggegation of surrounding gas-phase space is sneaked into melten glass and the worry that causes the quality of glass substrate to decline as micropartical.
The micropartical that derives from the agglutinator of the volatile matter of described platinum or platinum alloy etc. sneak into problem to melten glass in the high-precision refinement along with in recent years and the more and more stricter flat-panel monitor (FPD, FlatPanelDisplay) take liquid-crystal display as representative of quality requirements with larger in glass substrate.
Therefore, the purpose of this utility model is to provide in view of above aspect the melten glass treatment unit using in the manufacturing installation of glass substrate of the aggegation that suppresses the volatile matter of platinum or the platinum alloy etc. of having vaporized in the manufacturing processed of glass substrate in the device that a kind of at least a portion that can use is made up of the material that comprises platinum metals and the manufacturing installation of glass substrate.
[technique means of dealing with problems]
A form of the present utility model is the melten glass treatment unit that melten glass is processed.This melten glass treatment unit is
[1]:
A kind of melten glass treatment unit, comprises:
Inwall, at least a portion is made up of the material that comprises platinum metals;
Liquid Space, comprises melten glass;
Gas-phase space, is formed by liquid level and the described inwall of described melten glass; And
Air-flow forms device, in described gas-phase space, does not form air-flow by the mode in region lower than the temperature that becomes saturated vapor pressure with platinum metals contained in described gas-phase space.
The preferred mode of the melten glass treatment unit of recording as described [1], enumerates following [2]～[13].
[2]:
According to the melten glass treatment unit described [1] Suo Shu, wherein said air-flow is that part that the described inwall from contacting with described gas-phase space, temperature is lower is towards the mobile air-flow of the higher part of temperature.
[3]: according to the melten glass treatment unit described [1] or [2] Suo Shu, it is to control the pressure in described gas-phase space and the pressure control device that forms air-flow that wherein said air-flow forms device.
[4]: according to the melten glass treatment unit described [3] Suo Shu, wherein said pressure control device comprises gas is imported to the gas introduction port in described gas-phase space.
[5]: according to the melten glass treatment unit described [4] Suo Shu, wherein said gas introduction port is arranged in the inwall of the described melten glass treatment unit contacting with described gas-phase space temperature than the low part of temperature around.
[6]: according to the melten glass treatment unit described [1] or [2] Suo Shu, wherein said air flow controller comprises to be connected with described gas-phase space and aspirates the suction unit that the mode of the gas in described gas-phase space arranges.
[7]: according to the melten glass treatment unit described [1] or [2] Suo Shu, wherein said treatment unit is to carry out the clarification of described melten glass and make the gas producing by described clarification be discharged to the clarifying tank in atmosphere by ventpipe, and described air-flow is the fluid towards described ventpipe.
[8]: according to the melten glass treatment unit described [7] Suo Shu, the finer that wherein said clarifying tank comprises strip, is arranging the flange of the periphery of a part for the length direction that surrounds described finer in described finer,
Described gas introduction port is arranged on the part that is provided with described flange of described finer.
[9]: according to the melten glass treatment unit described [8] Suo Shu, wherein said flange is that the mode of surrounding the periphery of at least 2 positions, place of the length direction of described finer arranges at least 2,
Described ventpipe is to arrange at least 1 between described at least 2 places of described length direction,
Described rare gas element is to import in described gas-phase space and manufacture towards the mobile air-flow of the direction of mutual subtend from described at least 2, and discharges from described at least 1 ventpipe.
[10]: according to the melten glass treatment unit described [9] Suo Shu, described in being wherein arranged in the described flange at least 2 places at least 1 is arranged on the end of described finer.
[11]: according to the melten glass treatment unit described [7] Suo Shu, wherein said clarifying tank is the energising by utilizing described clarifying tank and described clarifying tank generates heat to adjust the temperature of described melten glass.
[12]: according to the treatment unit of the melten glass described [7] Suo Shu, the finer that wherein said clarifying tank comprises strip, is arranging the flange of the periphery of the position of a part for the length direction that surrounds described finer in described finer,
This device also comprises by making electric current flow to described finer from described flange makes described finer generate heat the electric power supply source of the temperature of adjusting described melten glass.
[13]: according to the treatment unit of the melten glass described [12] Suo Shu, wherein said flange is arranged on the end of described finer.
And another form of the present utility model is
[14]: a kind of manufacturing installation of glass substrate, is characterized in that generating melten glass, and comprise
Fusing device, melts frit and manufacture melten glass;
Building mortion, is shaped described melten glass and makes sheet glass; And
The feedway of melten glass, leads described building mortion by described melten glass;
Described feedway comprises:
Liquid Space, comprises melten glass;
Gas-phase space, is positioned at the top from the liquid level of described melten glass;
Inwall, surrounds described gas-phase space; And
Gas introduction port, produce the mode of air-flow with temperature is lower from the described inwall contacting with described gas-phase space in described gas-phase space part towards the higher part of the temperature of described inwall, the gas that is rare gas element with respect to described melten glass and described inwall is imported in described gas-phase space.
And another form of the present utility model is
[15]: a kind of manufacturing installation of glass substrate, is characterized in that generating melten glass, and comprise:
Fusing device, melts frit and manufacture melten glass;
Building mortion, is shaped described melten glass and makes sheet glass; And
According to the melten glass treatment unit described in any one in described [1] to [13], be arranged between described fusing device and described building mortion, for described melten glass is processed.
[effect of utility model]
According to the manufacturing installation of the glass substrate of described form and melten glass treatment unit, the aggegation of the volatile matter of platinum or the platinum alloy etc. that can suppress to have vaporized.
Accompanying drawing explanation
Fig. 1 is the figure that represents an example of the step of the manufacture method of the glass substrate of present embodiment.
Fig. 2 is the figure that schematically shows an example of the device of melting step～cut-out step of carrying out in present embodiment.
Fig. 3 (a) is the stereographic map that the clarifying tank of present embodiment is described, Fig. 3 (b) is the figure that an example of the gas flow of the finer inside to present embodiment describes, and Fig. 3 (c) is the figure that another example of the gas flow to finer inside describes.
Fig. 4 is the figure that represents an example of the length direction temperature distribution of the finer inwall of present embodiment.
[explanation of symbol]
100 melten glass generating apparatus
101 melt groove
101d feeding screw
102 clarifying tanks
102a finer
102b ventpipe
102c, 102d battery lead plate
102e, 102f flange
102g AC power
102h, 102i gas introduction tube
102j, 102k gas introduction port
103 steel basins
103a agitator
104,105,106 glass supply-pipes
200 building mortions
210 moldinies
300 shut-off devices
Embodiment
Below, the manufacturing installation of the glass substrate to present embodiment and melten glass treatment unit describe.Fig. 1 is the figure that represents an example of the step of method for manufacturing glass substrate of the present utility model.
Below platinum or the platinum alloy etc. of explanation are platinum metals, comprise the alloy of platinum, ruthenium, rhodium, palladium, osmium, iridium and these metals.
The manufacture method of glass substrate mainly comprises melting step (ST1), clarification steps (ST2), homogenization step (ST3), forming step (ST4), slow cooling step (ST5) and cuts off step (ST6).In addition, also comprise grinding and cut step, grinding steps, cleaning step, inspection step, bale packing step etc., in bale packing step stacked multiple glass substrates by conveyance the businessman to order party.
Melting step (ST1) is to carry out in melting groove.Melting in step, drop into frit to the liquid level that melts melten glass stored in groove, manufacture thus melten glass.In addition, preferably in frit, add finings.About finings, from reducing the aspect of carrying capacity of environment, be applicable to using stannic oxide.
Clarification steps (ST2) is to carry out in the inside of the finer being made up of platinum or platinum alloy etc. of clarifying tank.In clarification steps, the melten glass in the pipe of clarifying tank heats up.In this process, finings becomes by reduction reaction and discharges the material playing a role as reductive agent after oxygen.The contained O that comprises in melten glass
2, CO
2or SO
2bubble absorb the O producing by the reduction reaction of finings
2and increase, the liquid level that floats up to melten glass breaks and disappears.The gas comprising in bubble is that the gas-phase space by being arranged on clarifying tank is discharged in extraneous gas.
Then,, in clarification steps, the temperature of melten glass is declined.In this process, the reductive agent generation oxidizing reaction obtaining by the reduction reaction of finings.Thus, remain in the O in the bubble of melten glass
2again be absorbed in melten glass etc. gaseous constituent, and bubble collapse.
In homogenization step (ST3), use agitator to stir the melten glass in the steel basin of supplying with by the pipe arrangement extending from clarifying tank, thus, carry out homogenizing of glass ingredient.
In building mortion, form step (ST4) and slow cooling step (ST5).
In forming step (ST4), melten glass is configured as to sheet glass, manufacture the fluid of sheet glass.Shaping can be used overflow downdraw or floating method.In following present embodiment, enumerate and use the example of overflow downdraw to describe.
In slow cooling step (ST5), become desired thickness and the mode that do not produce internal strain and then do not produce warpage is carried out cooling with sheet glass mobile after being shaped.
Cutting off in step (ST6), the sheet glass of supplying with from building mortion is cut into the length of regulation in shut-off device, thus, obtain tabular sheet glass.Sheet glass after cutting off is further cut into the size of regulation, the glass substrate of manufacturing objective size.
In the manufacture method of the glass substrate of present embodiment, in the device using, implement following methods in clarification steps～homogenization step.
, being melted, frit after the melting step of generation melten glass and before melten glass is configured as to sheet glass, make it by the melten glass treatment unit for melten glass is processed.This treatment unit comprises the metal pipe or the groove that comprise platinum or platinum alloy etc.Now, melten glass treatment unit is to comprise the liquid phase that contains melten glass and be positioned at the gas-phase space of the top from the liquid level of melten glass and device that at least a portion of gas-phase space is made up of the material that comprises platinum metals.In the gas-phase space of this melten glass treatment unit, do not form air-flow by the mode in region lower than the temperature that becomes saturated vapor pressure with platinum metals contained in gas-phase space.The part that preferably temperature is lower from the inwall of the melten glass treatment unit that contacts with gas-phase space forms air-flow towards the higher part of the temperature of inwall.Now, preferably gas imported in gas-phase space and form air-flow.And, by as gas, rare gas element being imported in gas-phase space, also can in gas-phase space, suppress the volatile matter aggegation of platinum or the platinum alloy etc. of having vaporized in gas-phase space.This aspect is below being narrated.
Melten glass treatment unit is as described applied to clarification steps to the device using in the step between homogenization step.For example, the steel basin that is applied to carrying out the clarifying tank of clarification steps and carries out homogenization step.Below, describe in the mode that is applied to clarifying tank typically.
Fig. 2 is the figure that schematically shows an example of the device of melting step (the ST1)～cut-out step (ST6) of carrying out in present embodiment.As shown in Figure 2, this device mainly comprises melten glass generating apparatus 100, building mortion 200 and shut-off device 300.Melten glass generating apparatus 100 comprises melting groove 101, clarifying tank 102, steel basin 103 and glass supply-pipe 104,105,106.
The melting groove (fusing device) the 101st of the example shown in Fig. 2, melts frit and manufacture melten glass.Clarifying tank 102 comprises the finer 102a (with reference to Fig. 3) that comprises platinum or platinum alloy etc.In finer 102a, at least carry out defoaming treatment, this defoaming treatment be under the mode with melten glass MG with liquid level is formed with the state of gas-phase space, melten glass MG is passed through during, make electric current by finer 102a energising heating, make melten glass MG discharge bubble being arranged on mobile between the pair of electrodes plate of clarifying tank 102 in gas-phase space.Steel basin 103 is to utilize agitator 103a stir and it is homogenized melten glass MG.
Building mortion 200 is to comprise molding 210, utilizes and uses the overflow downdraw of molding 210 the melten glass MG processing in clarifying tank 200, steel basin 103 is shaped and makes sheet glass SG.In addition,, in building mortion 200, the mode that does not produce thickness deviation, strain and warpage with sheet glass SG makes sheet glass SG slow cooling.
Shut-off device 300 is that the sheet glass SG cut-out after slow cooling is made to glass substrate.
(clarification steps and clarifying tank)
Fig. 3 (a) is the main figure that represents the device formation of carrying out clarification steps.
Clarification steps comprises defoaming treatment and absorbs processing.In the following description, to use stannic oxide to describe as the example of finings.Stannic oxide clarification function compared with the general arsenus acid using is in the past low, but can be suitable as finings because of the low aspect of carrying capacity of environment.But, because the clarification function ratio arsenus acid of stannic oxide is low, so, using in the situation of stannic oxide, the temperature of the melten glass MG must make the clarification steps of melten glass MG time is higher than in the past.In the case, for example top temperature of the temperature of the melten glass in clarification steps is for example 1630 ℃～1720 ℃, preferably 1670 ℃～1710 ℃.
Melten glass MG after melting in melting groove 101 utilizes glass supply-pipe 104 (with reference to Fig. 2) to import to clarifying tank 102.
As shown in Fig. 3 (a), clarifying tank 102 comprises the finer 102a of the strip that comprises platinum or platinum alloy etc., and the ventpipe 102b that comprises the top that is arranged on finer 102a, battery lead plate 102c, 102d, flange 102e, 102f and gas introduction tube 102h, 102i.
Specifically, the finer 102a of clarifying tank 102 comprises the liquid phase that contains melten glass and the gas-phase space being formed by the liquid level of this melten glass and the inwall of clarifying tank 102a.At least a portion of surrounding the inwall of the clarifying tank 102 of gas-phase space is to be made up of the material such as platinum or platinum alloy.In the gas-phase space of finer 102a, do not form air-flow by the mode in region lower than the temperature that becomes saturated vapor pressure with platinum metals contained in gas-phase space.The mode that preferably produces air-flow with the part that temperature is lower from the inwall of the finer 102a that contacts with gas-phase space towards the higher part of the temperature of inwall forms air-flow.Air-flow preferably uses air-flow to form device and produces.Form device as air-flow, preferably use the pressure control device of controlling the pressure in gas-phase space.Poor by mineralization pressure in gas-phase space, can produce air-flow towards the lower region of pressure from the higher region of pressure.As pressure control device, enumerate to suction unit that imports the gas introduction tube of gas in gas-phase space or gas-phase space is aspirated etc.
Clarifying tank 102 preferably comprises gas is imported to gas introduction tube 102h, the 102i in gas-phase space.Gas preferably uses such as, the mixed gas for the rare gas such as rare gas element, nitrogen or nitrogen, helium, neon or these gases with respect to melten glass and platinum or platinum alloy etc. Gas introduction tube 102h, 102i are connected in gas introduction port 102j, the 102k of the inwall that is arranged on finer 102a.Therefore,, as shown in Fig. 3 (b), rare gas element imports in gas-phase space by gas introduction port 102j, 102k.Fig. 3 (b) is the mobile figure describing of the gas of the inside to finer 102a.
Importing from the rare gas element of gas introduction tube 102h, 102i is in the present embodiment, imports, but might not be limited to nozzle from the nozzle as gas introduction port 102j, 102k, also can utilize known method to import rare gas element.The rare gas element importing is preferably heated near the temperature of part of the gas-phase space being imported in advance, make with gas-phase space in the temperature head of temperature little.
As shown in Fig. 3 (b), ventpipe 102b is connected the gas-phase space of finer 102b with atmosphere, the gas in gas-phase space or rare gas element are discharged in atmosphere.The shape of the ventpipe 102b of present embodiment forms and is the shape that chimney-like is extended as the crow flies upward, but is not restricted to this shape.Also can be bending halfway shape etc.
Clarifying tank 102 preferably arranges the suction unit of the gas in suction gas-phase space.And suction unit preferably arranges in the mode being connected with ventpipe 102b.By use gas introduction tube, suction unit or described both control the air pressure of gas-phase space, can in gas-phase space, produce desired air-flow.
Though end diagram, also can be around clarifying tank 102 covering refractory brick.In the substantial middle portion of clarifying tank 102, between flange 102e and flange 102f, ventpipe 102b is being set.
Via flange 102e, 102f, battery lead plate 102c, 102d are being set at finer 102a.Flange 102e is arranged on an end of finer 102a.Flange 102f is arranged on the position midway of length direction of finer 102a.Certainly, flange 102f also can be arranged on the other end of finer 102a. Battery lead plate 102c, 102d are and are connected as the AC power 102g of electric power supply source, be applied in the voltage of regulation.Flange 102e, 102f are made up of the metal with electroconductibility, make to flow in the mode of disperseing equably on the week at finer 102a from the electric current of battery lead plate 102c, 102d. Battery lead plate 102c, 102d heat finer 102a energising by making current flowing arrive finer 102a, will be warming up to for example more than 1630 ℃ along the temperature of the mobile melten glass MG of finer 102a.
On the other hand, melten glass MG be in finer 102a with melten glass MG have liquid level mode flow.The melten glass MG that viscosity for example becomes 120～400 pools by the energising heating of described finer 102a float the bubble expanding by the effect of finings in melten glass MG, the liquid level of melten glass MG break and by the air release comprising in bubble in gas-phase space., carry out defoaming treatment.Therefore, finer 102a is that the mode that has a liquid level with melten glass MG therein comprises gas-phase space.
Gas-phase space above finer 202 breaks and in the gas that the discharges atmosphere from ventpipe 102b is discharged into finer 102.
In finer 102a the temperature of mobile melten glass MG for example maintain 1630 ℃ above after, below the latter half of finer 102a or (the periodically or continuously) cooling gradually below 105 of follow-up glass supply-pipe, carry out the absorption processing of bubble.In absorption is processed, bubble is absorbed in melten glass MG and is disappeared by the cooling of melten glass MG as described.
In Fig. 3 (a), represent arranging the example of pair of electrodes plate 102c, 102d, but for example in the case of the latter half of finer 102a is lowered the temperature, except battery lead plate 102c, 102d, 1 pair of above battery lead plate also can be set.
In addition, for example, because finer 102a is heated and is heated to high temperature (1700 ℃ of left and right) by energising as described, so platinum or platinum alloy etc. are easily from the inwall volatilization of the finer 102a that comprises platinum or platinum alloy etc.And, because the gas-phase space of finer 102a communicates with atmosphere as described, so, in gas-phase space, there is oxygen, in addition, oxygen is also included in the gas producing by froth breaking as composition, so the oxygen concn in gas-phase space is higher than the oxygen concn of atmosphere.Therefore, promote the volatilization of platinum or platinum alloy etc.In gas-phase space, contain like this more platinum of having vaporized from the inwall of finer 102a or the volatile matter of platinum alloy.
In the clarifying tank 102 of present embodiment, as shown in Fig. 3 (a), gas introduction port 102j, 102k are arranged on to the part that flange 102e, 102f are being set.Its reason is to make the rare gas element importing from gas introduction port 102j, 102k to flow towards ventpipe 102b as shown in Fig. 3 (b). Flange 102e, 102f to spread equably and arrange from the electric current of battery lead plate 102c, 102d in order to make on the week of finer 102a, flange 102e, 102f be for by the heat of transmitting from finer 102a to external radiation and suppress the illustrated refrigerating unit in damaged end of the flange 102e, the 102f that are caused by heat and be located at flange 102e, 102f and by cooling to flange 102e, 102f, so the inner wall section that the finer 102a of flange 102e, 102f is set is that the temperature of flange corresponding part is lower than the temperature of the surrounding of this flange corresponding part.
Fig. 4 is the figure of the example that distributes along the length direction of finer 102a of the inner wall temperature that schematically shows finer 102a.As described in temperature can be by measuring and obtain at the inwall of finer 102a or near configuring thermopair etc. in the gas-phase space of inwall.The in the situation that of finer 102a, lower than the temperature of peripheral part in the flange corresponding part temperature that flange 102e, 102f are set, if furthermore, be minimum, along with before permeability cell 102b so that temperature uprise gradually.But, because permeability cell 102b is the region of giving prominence near atmosphere, so, cannot avoid dispelling the heat to atmosphere.Therefore,, in the part that permeability cell 102b is set, temperature declines.But the temperature of this part is higher than the temperature of flange corresponding part.Finer 102a have as described in temperature distribution.
Like this, in the flange corresponding part temperature that flange 102e, 102f are set than low around it.Therefore, if the volatile matter of platinum or platinum alloy etc. of volatilization touches the described flange corresponding part that temperature is lower around described flange corresponding part, the easy aggegation of volatile matter according to the temperature dependency of the saturated vapor pressure of volatile matter.Therefore, for the volatile matter of platinum or platinum alloy etc. of the surrounding volatilization that makes the flange corresponding part that described flange 102e, 102f are set can not touch the described flange corresponding part that temperature is lower, forcibly produce the air-flow of rare gas element towards the temperature part higher than described flange corresponding part from flange corresponding part.; the mode that produces strip air-flow with the part that temperature is lower from the inwall of the finer 102a that contacts with gas-phase space towards the higher part of the temperature of inwall along the length direction of finer 102a, will not have activated rare gas element to import in gas-phase space for melten glass and platinum or platinum alloy etc.In the present embodiment, at the flange corresponding part that described flange 102e, 102f are set, described gas introduction port 102j, 102k are being set.
In addition, as shown in Figure 4, in the case of the portion temperature decline that permeability cell 102b is set, the heating permeability cell 102b such as well heater are set around permeability cell 102b, thus, can prevent the volatile matter of inwall aggegation platinum or the platinum alloy etc. of near finer 102a inwall and the permeability cell 102b of permeability cell 102b.
And except the gas discharging from melten glass, the rare gas element not reacting with finer 102a and melten glass also imports in gas-phase space, so the air pressure in gas-phase space is higher than atmosphere.Because of this pressure difference, the volatile matter of gas and then platinum or the platinum alloy etc. that can make passing through in gas-phase space clarify to produce is discharged in atmosphere rapidly via permeability cell 102b.Therefore, the volatile matter of platinum or platinum alloy etc. is difficult for producing aggegation.Or, also can connect last illustrated suction unit at permeability cell 102b, the volatile matter of gas and then platinum or the platinum alloy etc. that passing through in gas-phase space is clarified produce is discharged rapidly from permeability cell 102b.Now, the air pressure in gas-phase space is lower than the external pressure of normal atmosphere or encirclement clarifying tank 103.Specifically, the air pressure in gas-phase space also can exceed 0 and be less than 10Pa (0Pa < normal atmosphere-gas-phase space internal gas pressure < 10Pa) than normal atmosphere is little.And, because import rare gas element in gas-phase space, so, point drops of the oxygen that can make easily to make the volatilization such as platinum or platinum alloy in gas-phase space.Therefore, can suppress the volatilization of platinum or platinum alloy etc.
In the present embodiment, because producing the temperature distribution of inwall on the length direction at finer 102a, so the air-flow of manufacturing by the importing of rare gas element is as shown in Fig. 3 (b), along the length direction of finer 102a.But described air-flow is not limited to along the length direction of finer 102a, the part that temperature is lower from the inwall of the finer 102a that contacts with gas-phase space produces air-flow towards the higher part of the temperature of inwall.
In addition, in the present embodiment, the top temperature of the inwall of finer 102a is 1400 ℃ above 1750 ℃ when following, and it is large that the effect of the aggegation of the volatile matter of the inhibition platinum or the platinum alloy etc. that are produced by air-flow in present embodiment becomes.And, the effect that suppresses the aggegation of the volatile matter of platinum or platinum alloy etc. be along with the top temperature of the inwall of finer 102a become 1600 ℃ above, 1630 ℃ above and then more than 1650 ℃, and sequentially become large.The top temperature of the temperature of the inwall of finer 102a is less than in the situation of 1400 ℃, and the volatilization of platinum or platinum alloy etc. is difficult for becoming problem, and the described effect of present embodiment is less.And if the minimum temperature of the inwall of finer 102a and the temperature head of top temperature are larger, the poor of the saturated vapor pressure of platinum or platinum alloy etc. becomes large, and aggegation easily occurs.In the temperature of inwall, the temperature head of top temperature and minimum temperature is 50 ℃ above 300 ℃ when following, and it is large that the effect of the aggegation of the volatile matter of inhibition platinum or platinum alloy etc. in present embodiment becomes.Described temperature head is less than in the situation of 50 ℃, and the degree of the aggegation of the volatile matter of platinum or platinum alloy etc. is less, is difficult for producing the problem of aggegation.If more than described temperature head is 150 ℃ and then more than 250 ℃, the inhibition of the aggegation of volatile matter obviously becomes large.
The glass substrate of manufacturing in present embodiment is suitable for glass substrate for plane display device.And the glass substrate of manufacturing in present embodiment is suitable for the few liquid crystal display glass substrate of content of requirement alkalimetal oxide.And, be also suitable for organic EL (Electro-Luminescence, electroluminescent) glass substrate for display.In other words, the manufacture method of the glass substrate of present embodiment is suitable for the manufacture of glass substrate for plane display device, is particularly suitable for the manufacture of liquid crystal display glass substrate.
And the glass substrate of manufacturing in present embodiment also can be applied to cover glass, glass, glass substrate used for solar batteries etc. for disk.
In addition, in the thinner glass substrate of the thickness of slab of glass substrate of making, glass substrate below for example 0.5mm and then below 0.3mm and then below 0.1mm, the effect of the aggegation of the volatile matter of inhibition platinum or the platinum alloy etc. of the present embodiment also glass substrate thicker than thickness of slab is obvious.A part at the agglutinator of platinum or the platinum alloy etc. of the inwall aggegation of finer 102a etc. becomes micropartical and falls in melten glass, sneaks into melten glass and is contained in glass substrate.In the case, the thickness of slab of glass substrate is thinner, and the micropartical that becomes defect is just positioned at the surface of glass substrate manyly.Depart from the panel manufacturing step that uses glass substrate if be arranged in the surperficial micropartical of glass substrate, the part after departing from becomes recess, and the film being formed on glass substrate forms unevenly, and manufactures the display defect of picture.Therefore, if the effect that suppresses the aggegation of the volatile matter of platinum or platinum alloy etc. as present embodiment in finer 102a is that the glass substrate that thickness of slab is thinner is larger.
In addition, in the present embodiment, represent to be applied to the example of clarifying tank 102, but also can be applied to the steel basin 103 that melten glass is homogenized.In the case, the part that in the inwall of steel basin 103, temperature is lower is in most cases the connection portion of roof and the sidewall of steel basin 103.In the case, preferably from described connection portion, rare gas element is supplied in gas-phase space.Now, can make gas in gas-phase space or gas from the Clearance Flow between steel basin 103 and agitator 103a to outside.
If above present embodiment is summarized, can narrate following content.
(1), in embodiment, in gas-phase space, form platinum metals contained in described gas-phase space not by the such air-flow in region of temperature lower than becoming saturated vapor pressure.Thus, the aggegation of the platinum in gas-phase space or platinum alloy is inhibited.And, manufacture air-flow by the region that the temperature in gas-phase space is lower towards higher region, can further suppress the aggegation of platinum or platinum alloy.This air-flow preferably uses the air-flow that comprises the pressure control device of controlling the pressure in gas-phase space form device and form.
As pressure control device, preferably use to the suction unit or its combination that import the gas introduction tube of gas, gas-phase space is aspirated in gas-phase space.
The pressure of gas-phase space is preferably controlled in the lower mode in the higher region of the temperature of gas-phase space.Thus, air-flow is manufactured towards higher region in region that can be lower from the temperature in gas-phase space.
(2) gas importing from gas introduction tube in the present embodiment, is preferably rare gas element with respect to melten glass and platinum metals.By rare gas element is imported to gas-phase space, can make the oxygen partial pressure in gas-phase space decline, and reduction platinum or platinum alloy are from the volatile quantity of the inwall of finer 102a.In addition, in the present embodiment, from suppressing the aspect of aggegation of volatile matter of platinum or platinum alloy etc., preferably from the inwall of the finer 102a that contacts with gas-phase space, the lower part of temperature of inwall imports rare gas element in gas-phase space, and the platinum having volatilized or platinum alloy are manufactured air-flow from the lower region of the temperature in gas-phase space towards higher region.For example, rare gas element preferably from the inwall of finer 102a temperature import in gas-phase space than the low minimum part of for example temperature of part of temperature around.The part that particularly preferably temperature is minimum from the inwall of finer 102a imports in gas-phase space.
In the present embodiment, the lower part of temperature of holding agglutinophilic inwall because of volatile matter from finer 102a imports rare gas element, so, from volatile matter holds agglutinophilic place, manufacture and make volatile matter mobile air-flow rapidly, and make oxygen partial pressure step-down.Therefore, according to the dividing potential drop interdependence of the saturated vapor pressure of volatile matter and the aggegation of volatile matter is inhibited.
(3) present embodiment is applied to the finer 102a of the clarification of carrying out melten glass.Finer 102a is from clarification until the temperature of melten glass is heated to the highest device the device by the use platinum or the platinum alloy etc. that are shaped.Therefore,, in finer 102a, the volatilization of platinum or platinum alloy etc. is the most violent in described device.And, be discharged into the oxygen of the volatilization that comprises more growth encourage platinum or platinum alloy etc. in the composition of gas of gas-phase space by the froth breaking carrying out in finer 102a, so the oxygen partial pressure in gas-phase space is higher than atmosphere.Therefore,, in gas-phase space, platinum or platinum alloy etc. further volatilizees from inwall.In addition, finer 102a is compared with steel basin 103 other devices such as grade, and the top temperature of inwall and the difference of minimum temperature are larger, the difference of the saturated vapor pressure of volatile matter is also larger, so before volatile matter is discharged to atmosphere by ventpipe 102b, easily there is aggegation in volatile matter.Therefore,, in order to suppress the aggegation of volatile matter, preferably finer 102a application is formed to platinum metals contained in gas-phase space not by the such air-flow in region of temperature lower than becoming saturated vapor pressure.In the case, be the fluid towards ventpipe 102b by clarifying the air-flow of the gas producing and the rare gas element importing, so, also can easily be discharged in atmosphere by clarifying the gas producing.
In addition, because the ventpipe 102b of finer 102a is arranged near on the position of atmosphere, so easy step-down compared with the temperature of the temperature of ventpipe 102b and the inwall of finer 102a, by the easy aggegation of volatile matter of ventpipe 102b.Therefore, preferably heat the aggegation that ventpipe 102b suppresses volatile matter.
(4) the finer 102a that clarifying tank 102 comprises strip, is arranging flange 102e, the 102f of the periphery of a part for the length direction that surrounds finer 102a at finer 102a.And gas is to import from the part that flange 102e, 102f are set of finer 102a.Because flange 102e, 102f are exposed in the outside temperature of finer 102a, so, from flange 102e, 102f rejected heat.Therefore, temperature step-down around it of the part of the inwall of the finer 102a of flange 102e, 102f is set.Because this part is imported to gas, so the volatile matter that makes wish touching that the part of the inwall of the finer 102a of flange 102e, 102f is set moves to the higher part of temperature around, therefore, can effectively suppress to make volatile matter aggegation.
(5) flange 102e, 102f are that the mode of surrounding the periphery of 2 positions, place of the length direction of finer 102a arranges 2.And ventpipe 102b arranges 1 between described 2 places of the length direction of finer 102a.Now, as shown in Fig. 2 (b), gas is to import in gas-phase space and manufacture towards the mobile air-flow of the direction of mutual subtend from described 2, and discharges from 1 ventpipe.Therefore, can suppress 2 place's partial coagulations of the inwall that volatile matter declines in the flange 102e of 2 positions, place of the length direction because being arranged on finer 102a, 102f temperature simultaneously.
(6) in the present embodiment, be arranged in the flange at 2 places at least 1 and be arranged on the end of finer 102a, thus, can be from the end heating and melting glass of finer 102a.Especially, by being arranged on the end of melten glass towards the finer 102a of the upstream side of the mobile direction of steel basin 103, expeditiously heating and melting glass.
Clarifying tank 102 is energising heating by utilizing finer 102a and finer 102a generates heat to adjust the temperature of melten glass.Thus, can carry out rapidly the clarification of melten glass.But, because finer 102a energising is heated, so the temperature of the inwall of finer 102a becomes high.Therefore, the volatilization of platinum or platinum alloy etc. is very violent.Even as described in the situation that, because the clarifying tank 102 of present embodiment is manufactured air-flow as described in gas-phase space, so, also can in finer 102a, suppress the aggegation of volatile matter.
Because flange 102, the 102f of the periphery of the position of a part for the length direction that surrounds finer 102a are set at the finer 102a of clarifying tank 102, and the finer 102a comprising by making electric current flow to clarifying tank 102 from flange 102e, 102f makes finer 102a generate heat the electric power supply source of the temperature of adjusting melten glass, so, on the week of finer 102a, finer 102a generates heat relatively equably, makes the temperature of melten glass not produce inequality.Therefore, can carry out expeditiously the clarification of melten glass.
In addition, in the present embodiment, the heating of melten glass made electric current directly flow to finer 102a and makes the logical electrically heated mode of its heating, but being not restricted to logical electrically heated mode.For example, also can carry out hot defecation pipe 102a indirectly by the thermals source such as well heater are set around finer 102a, adjust thus the temperature of melten glass.Making current flowing in the logical electrically heated mode of finer 102a, easily adjust the temperature of melten glass.But the inwall of finer 102a also becomes high temperature simultaneously, so, easily produce inequality at the inner wall temperature of finer 102a, easily there is aggegation in the volatile matter of platinum or platinum alloy etc.But, by adopting present embodiment, even in the case of logical electrically heated mode as described, also can suppress the aggegation of the volatile matter of platinum or platinum alloy etc.Therefore, the situation of logical electrically heated mode with utilize well heater etc. indirectly compared with the situation of hot defecation pipe 102a, the effect that suppresses the aggegation of the volatile matter of platinum or platinum alloy etc. becomes large.
(7) in the present embodiment, from gas introduction port 102j, 102k to gas-phase space in along the direction jet flow stream that is vertical lower with respect to the liquid level of melten glass, but the injection direction of gas there is no particular restriction.Fig. 3 (c) is the figure that another example flowing of the gas of the inside to finer 102a describes.From can easily manufacturing the aspect of the fluid towards ventpipe 102b of gas, preferably, as shown in Fig. 3 (c), towards the mode of the center side of the length direction that ventpipe 102b is set of finer 102a, gas is sprayed obliquely with the injection direction of gas.And, also can gas be imported in gas-phase space towards the two ends of finer 102a, after the wall at the two ends of finer 102a makes gas reflection, manufacture the fluid towards ventage 102b.
Above, manufacturing installation to glass substrate of the present utility model and melten glass treatment unit are at length illustrated, certainly, the utility model is not limited to described embodiment, also can in the scope that does not depart from purport of the present utility model, carry out multiple improvement or change.
Claims (15)
1. a melten glass treatment unit, it is processed melten glass, and this melten glass treatment unit comprises:
Inwall, at least a portion is made up of the material that contains platinum metals;
Liquid Space, comprises melten glass;
Gas-phase space, is formed by liquid level and the described inwall of described melten glass; And
Air-flow forms device, in described gas-phase space, does not form air-flow by the mode in region lower than the temperature that becomes saturated vapor pressure with platinum metals contained in described gas-phase space.
2. melten glass treatment unit according to claim 1, wherein said air-flow is that part that the described inwall from contacting with described gas-phase space, temperature is lower is towards the mobile air-flow of the higher part of temperature.
3. melten glass treatment unit according to claim 2, it is to control the pressure in described gas-phase space and the pressure control device that forms air-flow that wherein said air-flow forms device.
4. melten glass treatment unit according to claim 3, wherein said pressure control device comprises gas is imported to the gas introduction port in described gas-phase space.
5. melten glass treatment unit according to claim 4, wherein said gas introduction port is arranged in the inwall of the described melten glass treatment unit contacting with described gas-phase space temperature than the low part of temperature around.
6. melten glass treatment unit according to claim 2, wherein said air flow controller comprises to be connected with described gas-phase space and aspirates the suction unit that the mode of the gas in described gas-phase space arranges.
7. melten glass treatment unit according to claim 2, wherein said treatment unit is to carry out the clarification of described melten glass and make the gas producing by described clarification be discharged to the clarifying tank in atmosphere by permeability cell, and described air-flow is the fluid towards described permeability cell.
8. melten glass treatment unit according to claim 7, the finer that wherein said clarifying tank comprises strip, is arranging the flange of a part of periphery of the length direction that surrounds described finer in described finer,
Described gas introduction port is the part that is provided with described flange that the mode that imports rare gas element is arranged on described finer.
9. melten glass treatment unit according to claim 8, wherein said flange is that the mode of surrounding at least 2 place's circumferential position of the length direction of described finer arranges at least 2,
Described permeability cell is to arrange at least 1 between described at least 2 places of described length direction,
Described rare gas element is to import in described gas-phase space and manufacture towards the mobile air-flow of the direction of mutual subtend from described at least 2, and discharges from described at least 1 permeability cell.
10. melten glass treatment unit according to claim 9, described in being wherein arranged in the described flange at least 2 places at least 1 is arranged on the end of described finer.
11. melten glass treatment unit according to claim 7, wherein said clarifying tank is that the energising by utilizing described clarifying tank makes described clarifying tank generate heat to adjust the temperature of described melten glass.
12. melten glass treatment unit according to claim 7, the finer that wherein said clarifying tank comprises strip, is arranging the flange of a part of position periphery of the length direction that surrounds described finer in described finer,
This device also comprises by making electric current flow to described finer from described flange makes described finer generate heat the power supply of the temperature of adjusting described melten glass.
13. melten glass treatment unit according to claim 12, wherein said flange is arranged on the end of described finer.
The manufacturing installation of 14. 1 kinds of glass substrates, is characterized in that generating melten glass, and comprises:
Fusing device, melts frit and manufacture melten glass;
Building mortion, is shaped described melten glass and makes sheet glass; And
Melten glass treatment unit, leads described building mortion by described melten glass;
Described treatment unit comprises:
Liquid Space, comprises melten glass;
Gas-phase space, is positioned at above the liquid level of described melten glass;
Inwall, surrounds described gas-phase space; And
Gas introduction port, the mode that produces air-flow with the part that temperature is lower from the described inwall contacting with described gas-phase space in described gas-phase space towards the higher part of the temperature of described inwall, will not have activated rare gas element to import in described gas-phase space with respect to described melten glass and described inwall.
The manufacturing installation of 15. 1 kinds of glass substrates, is characterized in that generating melten glass, and comprises:
Fusing device, melts frit and manufacture melten glass;
Building mortion, is shaped described melten glass and makes sheet glass; And
According to the melten glass treatment unit described in any one in claim 1 to 13, be arranged between described fusing device and described building mortion, for described melten glass is processed.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013192191 | 2013-09-17 | ||
| JP2013-192191 | 2013-09-17 |
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| CN201320613413.8U Expired - Lifetime CN203625224U (en) | 2013-09-17 | 2013-09-30 | Molten glass treatment device and manufacturing device of glass substrate |
| CN201410475198.9A Active CN104445868B (en) | 2013-09-17 | 2014-09-17 | Method for manufacturing glass substrate |
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| CN201410475198.9A Active CN104445868B (en) | 2013-09-17 | 2014-09-17 | Method for manufacturing glass substrate |
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| JP (1) | JP5883093B2 (en) |
| KR (1) | KR101646343B1 (en) |
| CN (2) | CN203625224U (en) |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016069251A (en) * | 2014-09-30 | 2016-05-09 | ＡｖａｎＳｔｒａｔｅ株式会社 | Manufacturing method for glass substrate and manufacturing apparatus for glass substrate |
| JP2016069246A (en) * | 2014-09-30 | 2016-05-09 | ＡｖａｎＳｔｒａｔｅ株式会社 | Manufacturing method for glass substrate and manufacturing apparatus for glass substrate |
| CN107879598A (en) * | 2016-09-30 | 2018-04-06 | 安瀚视特控股株式会社 | The manufacture method and glass substrate manufacture device of glass substrate |
| CN107879597A (en) * | 2016-09-30 | 2018-04-06 | 安瀚视特控股株式会社 | The manufacture method and glass substrate manufacture device of glass substrate |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP7025720B2 (en) * | 2017-12-22 | 2022-02-25 | 日本電気硝子株式会社 | Manufacturing method of glass articles and glass melting furnace |
| CN108069579A (en) * | 2018-02-05 | 2018-05-25 | 东旭集团有限公司 | A kind of platinum channel and the equipment for improving glass clarifying effect |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7032412B2 (en) | 2003-03-13 | 2006-04-25 | Corning Incorporated | Methods of manufacturing glass sheets with reduced blisters |
| US20060042318A1 (en) * | 2004-08-31 | 2006-03-02 | Burdette Steven R | Method and apparatus for homogenizing a glass melt |
| CN100572310C (en) * | 2006-08-10 | 2009-12-23 | 河南安彩高科股份有限公司 | Be used for reducing the glass manufacturing equipment and the method for glass impurities |
| KR101160495B1 (en) * | 2007-01-31 | 2012-06-28 | 아사히 가라스 가부시키가이샤 | Process for producing glass and vacuum degassing apparatus |
| KR101221249B1 (en) * | 2008-02-29 | 2013-01-11 | 아사히 가라스 가부시키가이샤 | Vacuum defoaming apparatus for molten glass |
| US20100080078A1 (en) * | 2008-09-29 | 2010-04-01 | Martin Herbert Goller | Method and apparatus for homogenizing a glass melt |
| US20100199721A1 (en) * | 2008-11-12 | 2010-08-12 | Keisha Chantelle Ann Antoine | Apparatus and method for reducing gaseous inclusions in a glass |
| JP2010147123A (en) | 2008-12-17 | 2010-07-01 | Lintec Corp | Apparatus for peeling sheet and method for peeling |
| CN102803161B (en) * | 2009-06-19 | 2015-05-06 | 旭硝子株式会社 | Vacuum degassing device for molten glass and method for producing molten glass using same |
| TWI471280B (en) * | 2009-11-30 | 2015-02-01 | Corning Inc | Method and apparatus for reducing condensate related defects in a glass manufacturing process |
| WO2012043769A1 (en) | 2010-09-30 | 2012-04-05 | ＡｖａｎＳｔｒａｔｅ株式会社 | Method for producing glass sheet |
| JP5769574B2 (en) * | 2011-09-30 | 2015-08-26 | ＡｖａｎＳｔｒａｔｅ株式会社 | Manufacturing method of glass plate |
-
2013
- 2013-09-30 CN CN201320613413.8U patent/CN203625224U/en not_active Expired - Lifetime
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- 2014-09-11 TW TW103131427A patent/TWI568695B/en active
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016069251A (en) * | 2014-09-30 | 2016-05-09 | ＡｖａｎＳｔｒａｔｅ株式会社 | Manufacturing method for glass substrate and manufacturing apparatus for glass substrate |
| JP2016069246A (en) * | 2014-09-30 | 2016-05-09 | ＡｖａｎＳｔｒａｔｅ株式会社 | Manufacturing method for glass substrate and manufacturing apparatus for glass substrate |
| CN107879598A (en) * | 2016-09-30 | 2018-04-06 | 安瀚视特控股株式会社 | The manufacture method and glass substrate manufacture device of glass substrate |
| CN107879597A (en) * | 2016-09-30 | 2018-04-06 | 安瀚视特控股株式会社 | The manufacture method and glass substrate manufacture device of glass substrate |
| CN107879598B (en) * | 2016-09-30 | 2020-09-15 | 安瀚视特控股株式会社 | Method for manufacturing glass substrate, and glass substrate manufacturing apparatus |
| CN107879597B (en) * | 2016-09-30 | 2020-09-15 | 安瀚视特控股株式会社 | Method for manufacturing glass substrate and glass substrate manufacturing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI568695B (en) | 2017-02-01 |
| TW201512123A (en) | 2015-04-01 |
| KR101646343B1 (en) | 2016-08-05 |
| KR20150032211A (en) | 2015-03-25 |
| CN104445868A (en) | 2015-03-25 |
| CN104445868B (en) | 2017-05-17 |
| JP5883093B2 (en) | 2016-03-09 |
| JP2015083531A (en) | 2015-04-30 |
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