CN203385879U - Infrared broad-spectrum light-splitting film of ZnSe substrate - Google Patents
Infrared broad-spectrum light-splitting film of ZnSe substrate Download PDFInfo
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- CN203385879U CN203385879U CN201320360191.3U CN201320360191U CN203385879U CN 203385879 U CN203385879 U CN 203385879U CN 201320360191 U CN201320360191 U CN 201320360191U CN 203385879 U CN203385879 U CN 203385879U
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Abstract
Disclosed in the utility model is an infrared broad-spectrum light-splitting film of a ZnSe substrate. The light-splitting film with the working angle from 0 to 30 degrees is plated on the ZnSe substrate. Using the Ge and the ZnSe as high-low refractive index materials, the light-splitting film employs the high-low refractive index alternating-based film system design method to obtain refractive index matching. During the preparation process of the infrared broad-spectrum light-splitting film with wide-angle incidence, specific processes of ion source assisting and proper substrate temperature and the like are used. The light-splitting film enables balanced light splitting to be realized at the incidence angle of from 0 to 30 degrees; and the performance of the film is stable. The infrared broad-spectrum light-splitting film is suitable for application to broad-spectrum light splitting of an interference system in an interference type atmospheric detection technology.
Description
Technical field
This patent relates to optical film technique, specifically refers to the infrared spectroscopy film that interior optical energy is carried out balanced light splitting to 4-14.5 μ m infrared broad spectrum scopes that a kind of ZnSe of take crystal is substrate.
Technical background
The SEQUENCING VERTICAL detection instrument is one of main infrared remote sensing instrument carried on weather satellite, the interfere type spectral technique of its employing based on Fourier transform carries out light splitting to the spectrum of atmosphere radiation, and the beam splitting technology is exactly a gordian technique in the interfere type beam splitting system.Because the SEQUENCING VERTICAL detection instrument will be surveyed the atmospheric optical spec in 4-14.5 μ m scope, therefore require the base material of spectro-film at first will guarantee in this scope it is transparent, and consider the impact on spectroscopical effeciency, base material also must be as far as possible little in the absorption of this wave band.It is blank that the research of current infrared beam splitting technology still belongs at home, and development and the application of similar products have abroad just been arranged in the seventies in last century.Due to external technical limitation, for the concrete development status of beam splitting technology in these projects, from the literature survey situation, mention very less.Unique a data shows: its spectral coverage of I.A.S.I of France is 3.5-15.5um, select and almost there is no the KBr absorbed as base material, due to its refractive index lower (n=1.5), thereby reflection loss is less, and the back side is without being coated with the wide spectrum anti-reflection film of achromatism.But the KBr crystal has very strong hydroscopicity, cause its space reliability very poor, need to be coated with the special protection film.Domestic also do not possess at present the cold working of heavy caliber KBr crystal and the ability of carrying out special protection, thus we selected optical property preferably the ZnSe crystal as base material.Although there is certain absorption in the ZnSe crystal at Long wavelength region, its good optical homogeneity, good mechanical hardness and stability, determined that it has good space reliability.Its SEQUENCING VERTICAL Detection Techniques of succeeding in developing for China have great importance.
Summary of the invention
The purpose of this patent is to provide the infrared broad spectrum spectro-film that a kind of ZnSe of take is substrate, and the spectral radiance in 4-14.5 μ m spectral range is carried out to balanced light splitting, to meet the light splitting demand of spacer remote sensing SEQUENCING VERTICAL detection instrument interference system.
The technical scheme of this patent is: adopting the alternately refractive index film of considering Absorption of Medium is the design that design philosophy is carried out spectro-film.
In order to realize balanced light splitting, meeting under the condition of T+R+A=1, it is unique that what can do is exactly to reduce as far as possible absorption.When wide spectrum spectro-film is design, the n of substrate, film material ZnSe and Ge, k value are all taken into account.In order to realize the wide spectral balanced spectro-film of wide-angle incident, adopting alternately refractive index film during design is that method for designing is as solution, its main thought replaces, with the multi-layer film structure of thin layer, carrys out Bandwidth with high low-refraction, obtains the coupling of refractive index simultaneously.Finally by software optimization, obtain available spectro-film system, control the thickness of extremely indivedual key stratums simultaneously by local optimum, realize efficient balanced light splitting.
According to above analysis, the realization of this spectro-film comprises the following steps:
1. the structure that film is
Wide-angle incident infrared broad spectrum spectro-film 1 film is:
n
s/0.836L0.6H1.5L0.84H1.2L0.675H1.09L0.444H1.964L0.198H1.482L0.763H0.586L0.892H0.989L/n
0
In formula, the implication of each symbol is respectively: n
sfor substrate; n
0for air; L means that optical thickness is λ
0/ 4 zinc selenide (ZnSe) rete; H means that optical thickness is λ
0/ 4 germanium (Ge) rete.λ
0centered by wavelength; Numeral before H, L is λ
0/ 4 optical thickness scale-up factor multipliers.
2. Film preparation method
Film preparation is to carry out having on the box type vacuum filming equipment of diffusion pump system, and Ge adopts electron-beam evaporation, and ZnSe adopts the resistance heating evaporation deposition, overall process adopts ion beam assisted depositing, ion gun is the Hall source, and design parameter is: anode voltage 200V, cathode current 14A.By the film material test result analysis, show: when base reservoir temperature is controlled at, rete has good firmness; At this temperature, the Ge rete of electron-beam evaporation gained has finer and close structure, and simultaneously the long wave end absorbs also resistivity to steam the absorption of deposition gained rete little.Ion beam assisted depositing, for reducing stress between rete, improves the rete reliability and has vital role.
The beneficial effect of this patent is as follows:
1. this patent 4-14.5 μ m infrared broad spectrum spectro-films that a kind of ZnSe of take is provided is substrate under 0-30 ° of angle incident conditions, can be realized balanced light splitting, spectroscopical effeciency E in 4-14.5 μ m spectral ranges > 92%.
2. this patent has adopted special process, has reduced the absorption of material at the long wave end, has improved spectroscopical effeciency and space reliability.
3. the technical scheme reasonable of this patent, properties of product are stable, can be widely used in the beam splitting system in Fourier transform spectrometer.
The accompanying drawing explanation
Fig. 1 is the spectro film structural representation, in figure:
1-wide spectrum infrared spectroscopy rete;
2-ZnSe substrate.
Fig. 2 (a) is three kinds of spectro-film actual measurement transmittance graphs (30 ° of incident) under base reservoir temperature; Fig. 2 (b) is three kinds of spectro-film actual measurement reflectance curves (30 ° of incident) under base reservoir temperature.
Fig. 3 is spectroscopical effeciency and the T/R curve (30 ° of incident) of spectro-film.
Embodiment
Embodiment below in conjunction with accompanying drawing to this patent is described in further detail.
The concrete technical requirement of this patent embodiment is:
| Spectral coverage | Beam-splitting surface thoroughly/the reflected energy ratio | Spectroscopical effeciency |
| 4～14.5 | T/R=0.8—1.2 | E=4RT=0.9～1 |
Base material is ZnSe, and maximum incident angle is 30 °.
According to technical requirement, using crystal for infrared use ZnSe as substrate, realize the efficient balanced light splitting of 4-14.5 μ m infrared band, in film system and technological design, at first will consider that the A reduced as far as possible in T+R+A=1 absorbs, therefore suitable rete process for plating is extremely important.In film system design, adopted that high low-refraction replaces, replace the graded index model with the multi-layer film structure of thin layer, thereby obtain the coupling of refractive index, broadening bandwidth.By film, be finally that design software carries out the optimization of film system, obtain final spectro-film to be:
n
s/0.836L0.6H1.5L0.84H1.2L0.675H1.09L0.444H1.964L0.198H1.482L0.763H0.586L0.892H0.989L/n
0
H, L are respectively Ge and ZnSe.
In the present embodiment, under the base reservoir temperature of 180 ℃, 190 ℃ and 200 ℃, prepared the infrared broad spectrum spectro-film respectively.Ge adopts electron-beam evaporation, and ZnSe adopts the resistance heating evaporation deposition, and overall process adopts ion beam assisted depositing.
From Fig. 2 (a), Fig. 2 (b), 3 can find out, the spectro-film optical property prepared at three kinds of temperature is close.The spectro-film that this patent is developed when 30 ° of incident angles, T/R=0.8-1.2 in 4-14.5 μ m work spectral ranges, spectroscopical effeciency E > 92%, can realize balanced light splitting.Therefore the spectro-film that this patent is developed can reach the request for utilization of SEQUENCING VERTICAL detection instrument interference system.
Claims (1)
1. the infrared broad spectrum spectro-film of a ZnSe substrate, it is at the upper preparation of ZnSe substrate (2) wide spectrum infrared spectroscopy film (1), thus the energy light splitting of equilibrium 4-14.5 μ m wide spectral ranges in while realizing that incident angle is 0-30 ° is characterized in that:
The film structure of described wide spectrum infrared spectroscopy film (1) is:
Substrate/0.836L0.6H1.5L0.84H1.2L0.675H1.09L0.444H1.964L0.198H1.48 2L0.763H0.586L0.892H0.989L/ air
In formula: L means that optical thickness is λ
0/ 4 zinc selenide rete; H means that optical thickness is λ
0/ 4 germanium rete; λ
0centered by wavelength; Numeral before H, L is λ
0the scale-up factor multiplier of/4 optical thicknesses.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320360191.3U CN203385879U (en) | 2013-06-21 | 2013-06-21 | Infrared broad-spectrum light-splitting film of ZnSe substrate |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320360191.3U CN203385879U (en) | 2013-06-21 | 2013-06-21 | Infrared broad-spectrum light-splitting film of ZnSe substrate |
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|---|---|
| CN203385879U true CN203385879U (en) | 2014-01-08 |
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|---|---|---|---|
| CN201320360191.3U Withdrawn - After Issue CN203385879U (en) | 2013-06-21 | 2013-06-21 | Infrared broad-spectrum light-splitting film of ZnSe substrate |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103293577A (en) * | 2013-06-21 | 2013-09-11 | 中国科学院上海技术物理研究所 | 4-14.5-micrometer infrared wide-spectrum beam splitting film with ZnSe substrate |
| CN109521505A (en) * | 2017-09-20 | 2019-03-26 | 苏州大学 | A kind of optical absorption multilayer film |
| CN109521504A (en) * | 2017-09-20 | 2019-03-26 | 苏州大学 | A kind of THz wave absorbing structure |
| CN109665722A (en) * | 2017-10-13 | 2019-04-23 | 苏州大学 | A kind of high transparency compound glass |
| CN110879435A (en) * | 2019-11-18 | 2020-03-13 | 中国科学院上海技术物理研究所 | Medium-long wave infrared wide spectrum color separation sheet with zinc selenide crystal as substrate |
-
2013
- 2013-06-21 CN CN201320360191.3U patent/CN203385879U/en not_active Withdrawn - After Issue
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103293577A (en) * | 2013-06-21 | 2013-09-11 | 中国科学院上海技术物理研究所 | 4-14.5-micrometer infrared wide-spectrum beam splitting film with ZnSe substrate |
| CN109521505A (en) * | 2017-09-20 | 2019-03-26 | 苏州大学 | A kind of optical absorption multilayer film |
| CN109521504A (en) * | 2017-09-20 | 2019-03-26 | 苏州大学 | A kind of THz wave absorbing structure |
| CN109521505B (en) * | 2017-09-20 | 2020-12-22 | 苏州大学 | Optical absorption multilayer film |
| CN109521504B (en) * | 2017-09-20 | 2021-02-05 | 苏州大学 | Terahertz wave absorption structure |
| CN109665722A (en) * | 2017-10-13 | 2019-04-23 | 苏州大学 | A kind of high transparency compound glass |
| CN109665722B (en) * | 2017-10-13 | 2022-04-22 | 苏州大学 | High-transparency composite glass |
| CN110879435A (en) * | 2019-11-18 | 2020-03-13 | 中国科学院上海技术物理研究所 | Medium-long wave infrared wide spectrum color separation sheet with zinc selenide crystal as substrate |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20140108 Effective date of abandoning: 20150325 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20140108 Effective date of abandoning: 20150325 |
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| RGAV | Abandon patent right to avoid regrant |