CN109665722A - A kind of high transparency compound glass - Google Patents

A kind of high transparency compound glass Download PDF

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Publication number
CN109665722A
CN109665722A CN201710953902.0A CN201710953902A CN109665722A CN 109665722 A CN109665722 A CN 109665722A CN 201710953902 A CN201710953902 A CN 201710953902A CN 109665722 A CN109665722 A CN 109665722A
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China
Prior art keywords
compound glass
thickness
high transparency
film
optical film
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CN201710953902.0A
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Chinese (zh)
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CN109665722B (en
Inventor
罗杰
赖耘
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Suzhou University
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Suzhou University
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/73—Anti-reflective coatings with specific characteristics
    • C03C2217/734—Anti-reflective coatings with specific characteristics comprising an alternation of high and low refractive indexes

Abstract

The present invention provides a kind of high transparency compound glass.The high transparency compound glass includes: multi-layer silica dioxide film；Multi-layer optical film, it is alternately arranged with the multi-layer silica dioxide film, to form odd number tunic of the number of plies as odd number, the outermost two membranes of the odd number tunic are the silica membrane, the refractive index of the optical film is greater than or equal to 1.8, and outermost two layers of film thickness is the 45%-50% of the thickness of intermediate silica membrane.The high transparency compound glass, it can form stronger optical resonance mode in optical film by reasonably designing and match the light wave in air and compound glass, and two membranes on the outermost side are able to achieve in air the smooth transition of resonance mode and perfect matching in light wave and high-index material, it is important that, it can be realized the impedance exact matching of intimate full angle incidence wave, realize unexpected technical effect, and the compound glass has even curface, is suitable for the very high micronano optical device of flatness requirement.

Description

A kind of high transparency compound glass
Technical field
The present invention relates to compound glass technical fields, more particularly to a kind of high transparency compound glass.
Background technique
Common quartz (silica SiO2) glass because of its high transparency to light wave, for it is most common, using the most One of extensive important optically transparent material.However, glass be not it is fully transparent to light wave, it is oblique especially for wide-angle Light wave under incident, the reflection of glass is apparent.Under normal conditions, for H mode, (field parallel of light wave is in glass Plane), the energy that the light wave on from normal incidence in air to smooth glass plate has nearly 5% can be reflected back, and with The increase of incidence angle, it will have bigger reflection, for example, having nearly 20% light wave when incidence angle is 60 ° and being reflected back toward Come, and when incidence angle increases to 80 °, the incident light wave that will have more than half is reflected by glass plate.Much applying In, it is this reflection be it is harmful, this needs is eliminated, for example, the reflection of night glass for vehicle window influences whether that driver satisfies the need The observation of condition, the reflection of glass prism will cause decline of image quality, etc. in optical imaging system.On the other hand, due to Transverse magnetic wave (magnetic field of light wave is parallel to glass planar) have Brewster corner effect, the reflection of horizontal magneto-optic wave on a glass with The increase of incident angle and the trend that increases is less obvious.
Improving simple glass conventional method of transparency under large angle incidence is using antireflective film, i.e., in glass pane surface On plate a tunic or plural layers, or " moth eye " type coating eliminates the reflection on glass plate.
Method for plating a tunic or multilayer antireflective film in glass pane surface, although can eliminate it is a certain or certain Back wave in a little incidence angles or even a bit of incident angular zone, but for big incidence angle (> 60 °), the effect of this kind of antireflective film Fruit is then very limited.
Method for plating " moth eye " type coating in glass pane surface, although may be implemented within the scope of wider angle Anti-reflection effect, but since " moth eye " type coating is some concaveconvex structures, influence whether the flatness of glass surface, this meeting pair The very high micronano optical device of some pairs of flatness requirements generates big adverse effect.
Summary of the invention
It is an object of the invention to design the material that the elimination to back wave can be realized under intimate full angle incidence angle Material, while being suitable for the very high micronano optical device of flatness requirement.
A kind of high transparency compound glass proposed by the present invention, comprising:
Multi-layer silica dioxide film；
Multi-layer optical film is alternately arranged, to form odd-level of the number of plies as odd number with the multi-layer silica dioxide film Film, the odd number tunic is the silica membrane in outermost two membranes, and the refractive index of the optical film is big In or be equal to 1.8, outermost two layers of film thickness is the 45%-50% of the thickness of intermediate silica membrane.
Optionally, outermost two layers of film thickness is the 50% of the thickness of the silica membrane.
Optionally, any value with a thickness of range between 100-300nm of the silica membrane, the optics Any value with a thickness of range between 50-150nm of film.
Optionally, the silica membrane with a thickness of 200nm, the optical film with a thickness of 100nm.
Optionally, energy transmission rate of the high transparency compound glass under predetermined light wave in 0-85 ° of angular range More than or equal to 96%.
Optionally, the predetermined light wave is transverse electric light wave.
Under normal conditions, different with the refractive index of glass due to air, prevent the light wave in air and glass is from complete Matching, therefore result in the generation of back wave.However, inventor is by test of many times and deep analysis and summary creativeness hair It is existing, in compound glass of the invention, by reasonably design can be formed in optical film stronger optical resonance mode come The light wave in air and compound glass is matched, and two membranes on the outermost side can be realized light wave and high refractive index material in air The smooth transition of resonance mode and perfect matching in material, it is important that the impedance that can be realized intimate full angle incidence wave is complete Matching, realizes unexpected technical effect.
The inventors of the present application found that the impedance mismatch of common glass and air, the two are constantly present on interface Back wave, thus cannot achieve perfect absorption, especially when incidence angle is bigger, have bigger reflection.However, the application It can be come by the thickness of adjusting silica membrane and optical film so that the optical absorption multilayer film is to the work under specific wavelength Make the high grade of transparency (energy transmission rate >=96%) with intimate full angle (0-85 °), this principle is, the glass and air Between full angle impedance matching effect.
In addition, the selection of optical film can be multiplicity, for example, it may be titanium dioxide TiO2, tantalum pentoxide Ta2O5, Silicon nitride SiNxDeng.Therefore, in practical applications, it is suitable to be selected according to the application properties such as required mechanics, calorifics Optical film material, this is greatly expanded the possible application field of compound glass.
On the basis of above-mentioned cognition and discovery, inventor is obtained imaginary by designing simple composite glass structure Less than technical effect.Compound glass of the invention, realizing the high grade of transparency of intimate full angle for transverse electric light wave, (energy is saturating Penetrate rate >=96%).In addition, the compound glass has even curface, it is suitable for the very high micronano optical device of flatness requirement Part.
According to the following detailed description of specific embodiments of the present invention in conjunction with the accompanying drawings, those skilled in the art will be brighter The above and other objects, advantages and features of the present invention.
Detailed description of the invention
Some specific embodiments of the present invention is described in detail by way of example and not limitation with reference to the accompanying drawings hereinafter. Identical appended drawing reference denotes same or similar part or part in attached drawing.It should be appreciated by those skilled in the art that these What attached drawing was not necessarily drawn to scale.In attached drawing:
Fig. 1 is the schematic diagram of high transparency compound glass according to an embodiment of the invention；
Fig. 2 is energy transmission rate of the high transparency compound glass according to an embodiment of the invention to 600nm wavelength light wave With the change curve of incidence angle；
Fig. 3 is high transparency compound glass in accordance with another embodiment of the present invention to the energy transmission rate of transverse electric light wave with entering The change curve of firing angle.
Appended drawing reference:
110- silica membrane,
120- optical film.
Specific embodiment
Fig. 1 shows the schematic diagram of high transparency compound glass according to an embodiment of the invention.Such as Fig. 1 institute Show, which includes silica membrane 110 and optical film 120.The silica membrane 110 and optical film 120 number of plies all can be multilayer, and the multi-layer silica dioxide film 110 and multi-layer optical film 120 are alternately arranged.Multilayer two Silicon oxide film 110 and multi-layer optical film 120 are formed together the odd number tunic that the number of plies is odd number, and outermost the two of odd number tunic Tunic is silica membrane 110.Wherein, the refractive index of optical film 120 is greater than or equal to 1.8.Outermost two layers of film thickness is equal It is the 45%-50% of the thickness of silica membrane 110.
Under normal conditions, different with the refractive index of glass due to air, prevent the light wave in air and glass is from complete Matching, therefore result in the generation of back wave.However, the present inventor is by test of many times and deep analysis and summary wound It finds to the property made, in compound glass of the invention, stronger optics can be formed in optical film 120 by reasonably designing Resonance mode matches the light wave in air and compound glass, and two membranes on the outermost side can be realized in air light wave and The smooth transition of resonance mode and perfect matching in high-index material, it is important that can be realized intimate full angle incidence wave Impedance exact matching, unexpected technical effect may be implemented.
To realize that the impedance matching effect of full angle, the outermost two membranes of odd number tunic are necessary for silica membrane 110, and the thickness of the outermost two membranes is the 45%-50% of the thickness of intermediate silica membrane 110.In addition, optical film 120 refractive index also has the influence of highly significant to the impedance matching effect for realizing full angle, by largely realizing verifying hair Existing, the refractive index of optical film 120 must be greater than or equal to 1.8.If the refractive index of optical film 120 is less than 1.8, with dioxy The contrast of refractive index of SiClx film 110 is inadequate, it may be difficult to realize the impedance matching under wide-angle and high-transmission rate.Optical film 120 refractive index can be bigger, i.e., larger with the contrast of silica membrane 110, is easier to realize wide-angle in this way Impedance matching and high-transmission rate, but if the refractive index of optical film 120 too big such as larger than 5, it is more demanding to prepare precision etc..
In one embodiment, the thickness of the outermost two membranes of odd number tunic is intermediate silica membrane 110 The half of thickness.In this way, can be by wherein one layer of outermost tunic 110, light adjacent with the outermost tunic in outermost two membranes It learns film 120 and takes the silica membrane 110 adjacent with the optical film 120 of a half thickness (i.e. secondary outer layer silica is thin Film) regard a structural unit as, and entire compound glass can be regarded as by multiple such structural unit periodic arrangements It forms, this makes structural unit have translational symmetry, also can guarantee in air and has been total in light wave and high-index material Mode of shaking realizes optimal smooth transition.In another embodiment, the thickness of outermost two membranes is intermediate silica The thickness 45%, 46%, 47%, 48% or 49% of film 110.In one embodiment, the thickness of outermost two membranes is equal.? In another embodiment, the thickness of outermost two membranes is unequal.
In one embodiment, silica membrane 110 with a thickness of 100-300nm, such as 100nm, 150nm, Other any values in 200nm, 250nm or 300nm or 100-300nm.Optical film 120 with a thickness of 50nm, 100nm or 150nm, or any value in 50-150nm.In another embodiment, the thickness of silica membrane 110 is about 200nm, the thickness of optical film 120 are about 100nm.It in the design, can be by adjusting silica membrane 110 and optical film 120 thickness changes operation wavelength.
Wherein, the number of plies of the odd number tunic has little effect the transparency of compound glass, in practical applications, can be with According to application demand come flexible value.
The inventors of the present application found that the impedance mismatch of common glass and air, the two are constantly present on interface Back wave, thus cannot achieve perfect absorption, especially when incidence angle is bigger, have bigger reflection.However, the application It can be come by the thickness of adjusting silica membrane 110 and optical film 120 so that the optical absorption multilayer film is to specific wavelength Under work there is the high grade of transparency (energy transmission rate >=96%) of intimate full angle (0-85 °), this principle is, the glass Full angle impedance matching effect between air.
In addition, the selection of optical film 120 can be multiplicity, for example, it may be titanium dioxide TiO2, tantalum pentoxide Ta2O5, silicon nitride SiNxDeng.Therefore, in practical applications, can select to close according to the application properties such as required mechanics, calorifics Suitable 120 material of optical film, this is greatly expanded the possible application field of compound glass.
Also, the compound glass to incidence angle be 0-85 °, such as 0 °, 20 °, 30 °, 40 °, 50 °, 60 °, 70 °, 80 ° or The energy transmission rate of 85 ° of transverse electric light wave can achieve even more than 96%.
Fig. 2 shows energy of the high transparency compound glass according to an embodiment of the invention to 600nm wavelength light wave is saturating Rate is penetrated with the change curve of incidence angle.In this embodiment, the refractive index of the silica membrane 110 of odd number tunic is 1.5, Intermediate silica membrane 110 with a thickness of 170nm, outermost two membranes with a thickness of 85nm.The material of optical film 120 is selected as TiO2Material, refractive index 2.4, with a thickness of 79nm.In one embodiment, incident light wave is H mode, and wavelength is taken as 600nm, and be incident in glass from air.
As shown in Fig. 2, dash-dotted gray line is energy transmission rate of the light wave in the common quartz glass of the prior art in figure, it can To see, with the increase of incidence angle, energy transmission rate sharply declines, and when incidence angle is 80 °, transmissivity has been lowered to 50% Below.Black dotted lines and grey filled lines indicate energy transmission rate of the light wave in the compound glass of the embodiment of the present invention in figure, The number of plies of the corresponding odd number tunic of black dotted lines is 51 layers, and the number of plies of the corresponding odd number tunic of grey filled lines is 11 layers, You Tuke Know, for the compound glass of the embodiment of the present invention, energy transmission rate hardly happens variation with the increase of incidence angle, and always Close to 100%.These results are also shown that the transparency of compound glass of the invention is unrelated with the number of plies of odd number tunic, and Further demonstrate the full angle impedance matching effect of compound glass.
Fig. 3 shows high transparency compound glass in accordance with another embodiment of the present invention to the energy transmission rate of transverse electric light wave With the change curve of incidence angle.In this embodiment, the refractive index of the silica membrane 110 of odd number tunic is 1.5, intermediate Silica membrane 110 with a thickness of 206nm, outermost two membranes with a thickness of 103nm.The material of optical film 120 is selected as Ta2O5Material, refractive index 2.1, with a thickness of 58nm.In one embodiment, incident light wave is H mode, and wavelength is taken as 600nm, and be incident in glass from air.
As shown in figure 3, dash-dotted gray line is energy transmission rate of the light wave in the common quartz glass of the prior art in figure, it can To see, with the increase of incidence angle, energy transmission rate sharply declines.Black dotted lines and grey filled lines indicate that light wave exists in figure Energy transmission rate in the compound glass of the embodiment of the present invention, the number of plies of the corresponding odd number tunic of black dotted lines are 51 layers, grey The number of plies of the corresponding odd number tunic of solid line is 11 layers, as seen from the figure, for the compound glass of the embodiment of the present invention, energy transmission rate Small variation only occurs with the increase of incidence angle, >=96% high-transmission rate is remained within the scope of 0 ° -80 °.
According to the solution of the present invention, inventor obtains unexpected skill by designing simple composite glass structure Art effect.Compound glass of the invention, for transverse electric light wave realize intimate full angle high transparency (energy transmission rate >= 96%).In addition, the compound glass has even curface, it is suitable for the very high micronano optical device of flatness requirement.
So far, although those skilled in the art will appreciate that present invention has been shown and described in detail herein multiple shows Example property embodiment still without departing from the spirit and scope of the present invention, still can according to the present disclosure directly Determine or deduce out many other variations or modifications consistent with the principles of the invention.Therefore, the scope of the present invention is understood that and recognizes It is set to and covers all such other variations or modifications.

Claims (6)

1. a kind of high transparency compound glass characterized by comprising
Multi-layer silica dioxide film；
Multi-layer optical film is alternately arranged with the multi-layer silica dioxide film, to form odd number tunic of the number of plies as odd number, institute State odd number tunic is the silica membrane in outermost two membranes, and the refractive index of the optical film is greater than or waits In 1.8, outermost two layers of film thickness is the 45%-50% of the thickness of intermediate silica membrane.
2. high transparency compound glass according to claim 1, which is characterized in that outermost two layers of film thickness is described The 50% of the thickness of silica membrane.
3. high transparency compound glass according to claim 1 or 2, which is characterized in that the thickness of the silica membrane Any value for being range between 100-300nm, any number with a thickness of range between 50-150nm of the optical film Value.
4. high transparency compound glass according to claim 3, which is characterized in that the silica membrane with a thickness of 200nm, the optical film with a thickness of 100nm.
5. high transparency compound glass according to claim 1,2 or 4, which is characterized in that the high transparency compound glass exists Energy transmission rate under predetermined light wave in 0-85 ° of angular range is greater than or equal to 96%.
6. high transparency compound glass according to claim 5, which is characterized in that the predetermined light wave is transverse electric light wave.
CN201710953902.0A 2017-10-13 2017-10-13 High-transparency composite glass Active CN109665722B (en)

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Application Number Priority Date Filing Date Title
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CN109665722B CN109665722B (en) 2022-04-22

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1341865A (en) * 2000-08-29 2002-03-27 保谷株式会社 Optical element with anti-reflection film
CN102798919A (en) * 2012-08-24 2012-11-28 杭州科汀光学技术有限公司 Cut-off filter for frustrating wavelength shift
CN202693835U (en) * 2012-07-28 2013-01-23 杭州科汀光学技术有限公司 Optical filter for image chip
CN203385879U (en) * 2013-06-21 2014-01-08 中国科学院上海技术物理研究所 Infrared broad-spectrum light-splitting film of ZnSe substrate

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1341865A (en) * 2000-08-29 2002-03-27 保谷株式会社 Optical element with anti-reflection film
CN202693835U (en) * 2012-07-28 2013-01-23 杭州科汀光学技术有限公司 Optical filter for image chip
CN102798919A (en) * 2012-08-24 2012-11-28 杭州科汀光学技术有限公司 Cut-off filter for frustrating wavelength shift
CN203385879U (en) * 2013-06-21 2014-01-08 中国科学院上海技术物理研究所 Infrared broad-spectrum light-splitting film of ZnSe substrate

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