CN109665722B - High-transparency composite glass - Google Patents

High-transparency composite glass Download PDF

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Publication number
CN109665722B
CN109665722B CN201710953902.0A CN201710953902A CN109665722B CN 109665722 B CN109665722 B CN 109665722B CN 201710953902 A CN201710953902 A CN 201710953902A CN 109665722 B CN109665722 B CN 109665722B
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composite glass
film
silicon dioxide
films
thickness
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CN109665722A (en
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罗杰
赖耘
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Suzhou University
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Suzhou University
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/73—Anti-reflective coatings with specific characteristics
    • C03C2217/734—Anti-reflective coatings with specific characteristics comprising an alternation of high and low refractive indexes

Abstract

The invention provides high-transparency composite glass. The high-transparency composite glass comprises: a multilayer silicon dioxide film; the multilayer optical film and the multilayer silicon dioxide thin film are alternately arranged to form an odd number of layers of films, the outermost two layers of the odd number of films are the silicon dioxide thin film, the refractive index of the optical film is greater than or equal to 1.8, and the thicknesses of the outermost two layers of films are 45% -50% of the thickness of the middle silicon dioxide thin film. This high transparent composite glass can form stronger optical resonance mode through reasonable design in the optical film and match the light wave in air and the composite glass, and two-layer membrane that lie in the outside can realize the smooth transition and the perfect match of resonance mode in light wave in the air and the high refractive index material, and importantly, can realize being close to the impedance perfect match of full angle incident wave, has realized unexpected technological effect, and this composite glass has smooth surface, is applicable to the optical device that receives a little that the degree of flatness requires very high.

Description

High-transparency composite glass
Technical Field
The invention relates to the technical field of composite glass, in particular to high-transparency composite glass.
Background
Common quartz (silicon dioxide SiO)2) Glass has been one of the most common and most widely used optically transparent materials because of its high transparency to light waves. However, glass is not completely transparent to light waves, and especially for light waves at high angular oblique incidence, the reflection of glass is significant. Generally, for transverse waves (the electric field of the light wave is parallel to the plane of the glass), approximately 5% of the energy of a light wave normally incident on a flat glass plate from air will be reflected back, and with increasing angle of incidence, more reflection will occur, for example, approximately 20% of the light wave will be reflected back at an angle of incidence of 60 °, and more than half of the incident light wave will be reflected back by the glass plate at an angle of incidence of 80 °. In many applications, this reflection is detrimental and needs to be eliminated, for example, the reflection from the window glass at night can affect the driver's view of the road conditions, the reflection from the glass prism in the optical imaging system can cause a reduction in the imaging quality, etc. On the other hand, since transverse magnetic waves (the magnetic field of the light wave is parallel to the glass plane) have the brewster angle effect, the tendency of the reflection of transverse magnetic light waves on the glass plate to increase with increasing angle of incidence is less pronounced.
The traditional method of improving the transparency of ordinary glass at high angle incidence is to use an antireflective film, i.e. a film or films, or a "moth-eye" type coating, to plate on the surface of the glass sheet to eliminate the reflection on the glass sheet.
Although it is possible to eliminate reflections in a region of a certain angle of incidence or some angles, even a small fraction of the angle of incidence, the effect of such an antireflection film is limited for large angles of incidence (>60 °).
Although the method of plating a "moth-eye" type coating on the surface of a glass plate can achieve an antireflection effect in a wide angle range, the "moth-eye" type coating has some irregularities and therefore affects the flatness of the glass surface, which may have a great adverse effect on some micro-nano optical devices requiring high flatness.
Disclosure of Invention
The invention aims to design a material which can eliminate reflected waves under nearly all-angle incident angles and is suitable for micro-nano optical devices with high requirements on flatness.
The invention provides high-transparency composite glass, which comprises the following components in parts by weight:
a multilayer silicon dioxide film;
the multilayer optical film and the multilayer silicon dioxide thin films are alternately arranged to form an odd number of layers of the film with the odd number of layers, the two outermost layers of the odd number of layers of the film are both the silicon dioxide thin films, the refractive index of the optical film is greater than or equal to 1.8, and the thicknesses of the two outermost layers of the film are 45% -50% of the thickness of the middle silicon dioxide thin film.
Optionally, the thicknesses of the two outermost layers are both 50% of the thickness of the silica thin film.
Optionally, the thickness of the silicon dioxide film is any value in the range of 100-300nm, and the thickness of the optical film is any value in the range of 50-150 nm.
Optionally, the thickness of the silicon dioxide thin film is 200nm, and the thickness of the optical film is 100 nm.
Optionally, the energy transmittance of the high-transparency composite glass in an angle range of 0-85 ° at a predetermined light wave is greater than or equal to 96%.
Optionally, the predetermined light wave is a transverse electro-optic wave.
In general, since the refractive indexes of air and glass are different, light waves in air and glass cannot be perfectly matched, thereby causing generation of reflected waves. However, through multiple experiments and intensive summary analysis creatively, the inventor finds that, in the composite glass of the present invention, through reasonable design, a stronger optical resonance mode can be formed in the optical film to match the light waves in the air and the composite glass, while the two films located at the outermost sides can realize smooth transition and perfect matching of the resonance modes in the air and the high refractive index material, and importantly, impedance complete matching of nearly all-angle incident waves can be realized, and an unexpected technical effect is realized.
The inventors of the present application have found that the impedance of ordinary glass and air is not matched, and there is always a reflected wave at the interface between the two, so perfect absorption cannot be achieved, especially when the incident angle is larger, there is a larger reflection. However, the present application can make the optically absorbing multilayer film have nearly full-angle (0-85 °) high transparency (energy transmittance ≧ 96%) for operation at a specific wavelength by adjusting the thicknesses of the silicon dioxide thin film and the optical film, which is based on the full-angle impedance matching effect between the glass and air.
In addition, the optical film may be selected variously, for example, titanium oxide TiO2Ta, tantalum pentoxide2O5Silicon nitride SiNxAnd the like. Therefore, in practical application, a suitable optical film material can be selected according to the mechanical property, the thermal property and the like required by application, and the possible application fields of the composite glass are greatly expanded.
Based on the above knowledge and findings, the inventors have achieved unexpected technical effects by designing a simple composite glass structure. The composite glass realizes high transparency (energy transmissivity is more than or equal to 96%) at nearly all angles for transverse electro-optical waves. In addition, the composite glass has a smooth surface, and is suitable for micro-nano optical devices with high requirements on flatness.
The above and other objects, advantages and features of the present invention will become more apparent to those skilled in the art from the following detailed description of specific embodiments thereof, taken in conjunction with the accompanying drawings.
Drawings
Some specific embodiments of the invention will be described in detail hereinafter, by way of illustration and not limitation, with reference to the accompanying drawings. The same reference numbers in the drawings identify the same or similar elements or components. Those skilled in the art will appreciate that the drawings are not necessarily drawn to scale. In the drawings:
FIG. 1 is a schematic structural view of a high transparency composite glass according to one embodiment of the present invention;
FIG. 2 is a graph of energy transmission of a highly transparent composite glass according to one embodiment of the present invention for light having a wavelength of 600nm as a function of incident angle;
fig. 3 is a graph of energy transmission of a highly transparent composite glass according to another embodiment of the present invention with respect to a transverse electric wave as a function of an incident angle.
Reference numerals:
110-a film of silicon dioxide, and,
120-optical film.
Detailed Description
Fig. 1 shows a schematic structural view of a high-transparency composite glass according to an embodiment of the present invention. As shown in fig. 1, the high-transparency composite glass includes a silica thin film 110 and an optical film 120. The number of layers of the silica thin film 110 and the optical film 120 may be multiple, and the multilayer silica thin film 110 and the multilayer optical film 120 are alternately arranged. The multilayer silica film 110 and the multilayer optical film 120 together form an odd-numbered film having an odd number of layers, and the outermost two films of the odd-numbered film are both silica films 110. Wherein the refractive index of the optical film 120 is greater than or equal to 1.8. The thicknesses of the two outermost films are 45-50% of the thickness of the silicon dioxide film 110.
In general, since the refractive indexes of air and glass are different, light waves in air and glass cannot be perfectly matched, thereby causing generation of reflected waves. However, the inventor of the present invention has creatively found through a plurality of experiments and intensive summary analysis that, in the composite glass of the present invention, a stronger optical resonance mode can be formed in the optical film 120 through reasonable design to match the light waves in the air and the composite glass, while the two outermost films can realize smooth transition and perfect matching of the resonance modes in the air and the high refractive index material, and importantly, complete impedance matching of nearly all-angle incident waves can be realized, and unexpected technical effects can be realized.
In order to realize the full-angle impedance matching effect, the outermost two films of the odd-numbered films must be the silicon dioxide film 110, and the thickness of the outermost two films is 45% -50% of the thickness of the middle silicon dioxide film 110. In addition, the refractive index of the optical film 120 has a very significant effect on achieving the full-angle impedance matching effect, and a large number of implementations have verified that the refractive index of the optical film 120 must be greater than or equal to 1.8. If the refractive index of the optical film 120 is less than 1.8, the refractive index contrast with the silica thin film 110 is insufficient, and it will be difficult to achieve impedance matching at a large angle and high transmittance. The refractive index of the optical film 120 may be larger, i.e., the contrast with the silica thin film 110 is larger, so that it is easier to achieve impedance matching at a large angle and high transmittance, but if the refractive index of the optical film 120 is too large, e.g., greater than 5, the requirement for manufacturing accuracy, etc. is higher.
In one embodiment, the outermost two of the odd-numbered layers are each half the thickness of the intermediate silicon dioxide film 110. Thus, one of the outermost two films 110, the optical film 120 adjacent to the outermost film, and the silica thin film 110 (i.e., the second outermost silica thin film) having a half thickness and adjacent to the optical film 120 can be regarded as a structural unit, and the entire composite glass can be regarded as being formed by periodically arranging a plurality of such structural units, so that the structural unit has translational symmetry, and the best smooth transition of the resonance modes of the optical wave in the air and the high-refractive-index material can be ensured. In another embodiment, the outermost two films each have a thickness of 45%, 46%, 47%, 48%, or 49% of the thickness of the intermediate silicon dioxide film 110. In one embodiment, the outermost two films are of equal thickness. In another embodiment, the outermost two films are not equal in thickness.
In one embodiment, the thickness of the silicon dioxide film 110 is 100-300nm, such as 100nm, 150nm, 200nm, 250nm, or 300nm or any other value of 100-300 nm. The thickness of the optical film 120 is 50nm, 100nm, or 150nm, and may be any value of 50 to 150 nm. In another embodiment, the thickness of the silicon dioxide film 110 is about 200nm and the thickness of the optical film 120 is about 100 nm. In the design, the operating wavelength can be changed by adjusting the thicknesses of the silica thin film 110 and the optical film 120.
The number of the layers of the odd-numbered layer film hardly influences the transparency of the composite glass, and in practical application, the value can be flexibly selected according to application requirements.
The inventors of the present application have found that the impedance of ordinary glass and air is not matched, and there is always a reflected wave at the interface between the two, so perfect absorption cannot be achieved, especially when the incident angle is larger, there is a larger reflection. However, the present application can adjust the thickness of the silicon dioxide thin film 110 and the optical film 120 to make the optical absorption multilayer film have nearly full angle (0-85 °) high transparency (energy transmittance ≧ 96%) for operation at a specific wavelength, which is based on the full angle impedance matching effect between the glass and air.
In addition, the optical film 120 may be selected variously, for example, titanium dioxide TiO2Ta, tantalum pentoxide2O5Silicon nitride SiNxAnd the like. Therefore, in practical applications, suitable optical film 120 materials can be selected according to the mechanical and thermal properties required by the applications, which greatly expands the possible application fields of the composite glass.
And the energy transmittance of the composite glass to transverse electric light waves with the incident angle of 0-85 degrees, such as 0 degrees, 20 degrees, 30 degrees, 40 degrees, 50 degrees, 60 degrees, 70 degrees, 80 degrees or 85 degrees can reach or even exceed 96 percent.
FIG. 2 is a graph showing the energy transmittance of a highly transparent composite glass according to an embodiment of the present invention with respect to light waves having a wavelength of 600nm as a function of the incident angle. In this embodiment, the refractive index of the odd-numbered silicon dioxide thin films 110 is 1.5, the thickness of the middle silicon dioxide thin film 110 is 170nm, and the thicknesses of the outermost two films are 85 nm. The material of the optical film 120 is selected to be TiO2A material having a refractive index of 2.4 and a thickness of 79 nm. In one embodiment, the incident light wave is a transverse electric wave, the wavelength is 600nm, and the incident light is incident into the glass from the air.
As shown in fig. 2, where the gray dotted line is the energy transmittance of light in the conventional silica glass of the prior art, it can be seen that the energy transmittance is sharply decreased as the incident angle is increased, and the transmittance is decreased to 50% or less when the incident angle is 80 °. In the figure, both the black dotted line and the gray solid line represent the energy transmittance of the light wave in the composite glass according to the example of the present invention, the number of odd-numbered layers corresponding to the black dotted line is 51, and the number of odd-numbered layers corresponding to the gray solid line is 11. These results also show that the transparency of the composite glass of the present invention is independent of the number of odd-numbered layer films and also further demonstrate the full-angle impedance matching effect of the composite glass.
Fig. 3 is a graph showing energy transmittance of a highly transparent composite glass according to another embodiment of the present invention with respect to transverse electric light waves as a function of incident angle. In this embodiment, the refractive index of the odd-numbered silicon dioxide thin films 110 is 1.5, the thickness of the middle silicon dioxide thin film 110 is 206nm, and the thicknesses of the outermost two films are 103 nm. The material of the optical film 120 is selected to be Ta2O5The material has a refractive index of 2.1 and a thickness of 58 nm. In one embodiment, the incident light wave is a transverse electric wave, the wavelength is 600nm, and the incident light is incident into the glass from the air.
As shown in fig. 3, the gray dotted line in the figure is the energy transmittance of the light wave in the conventional silica glass, and it can be seen that the energy transmittance is sharply decreased as the incident angle is increased. In the figure, the black dotted line and the gray solid line both represent the energy transmittance of the light wave in the composite glass of the embodiment of the invention, the number of the odd-numbered layer films corresponding to the black dotted line is 51, and the number of the odd-numbered layer films corresponding to the gray solid line is 11.
According to the scheme of the invention, the inventor designs a simple composite glass structure to obtain unexpected technical effects. The composite glass of the invention realizes high transparency (energy transmissivity is more than or equal to 96%) for transverse electro-optical waves at almost all angles. In addition, the composite glass has a smooth surface, and is suitable for micro-nano optical devices with high requirements on flatness.
Thus, it should be appreciated by those skilled in the art that while a number of exemplary embodiments of the invention have been illustrated and described in detail herein, many other variations or modifications consistent with the principles of the invention may be directly determined or derived from the disclosure of the present invention without departing from the spirit and scope of the invention. Accordingly, the scope of the invention should be understood and interpreted to cover all such other variations or modifications.

Claims (5)

1. A high-transparency composite glass, comprising:
a multilayer silicon dioxide film;
the multilayer optical films and the multilayer silicon dioxide thin films are alternately arranged to form odd number layer films with odd number of layers, the two outermost layers of the odd number layer films are both the silicon dioxide thin films, the refractive index of the optical films is greater than or equal to 1.8, and the thicknesses of the outermost layers of the optical films are 45-50% of the thickness of the middle silicon dioxide thin film;
the thickness of the silicon dioxide film is any value within the range of 100-300nm, and the thickness of the optical film is any value within the range of 50-150 nm.
2. The high-transparency composite glass according to claim 1, wherein the outermost two film thicknesses are each 50% of the thickness of the intermediate silica thin film.
3. The high-transparency composite glass according to claim 1, wherein the silica thin film has a thickness of 200nm and the optical film has a thickness of 100 nm.
4. The high transparency composite glass according to any one of claims 1-3, wherein the high transparency composite glass has an energy transmittance of greater than or equal to 96% at predetermined light waves in an angular range of 0-85 °.
5. The high-transparency composite glass according to claim 4, wherein the predetermined light wave is a transverse electro-optic wave.
CN201710953902.0A 2017-10-13 2017-10-13 High-transparency composite glass Active CN109665722B (en)

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CN109665722B true CN109665722B (en) 2022-04-22

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1341865A (en) * 2000-08-29 2002-03-27 保谷株式会社 Optical element with anti-reflection film
CN102798919A (en) * 2012-08-24 2012-11-28 杭州科汀光学技术有限公司 Cut-off filter for frustrating wavelength shift
CN202693835U (en) * 2012-07-28 2013-01-23 杭州科汀光学技术有限公司 Optical filter for image chip
CN203385879U (en) * 2013-06-21 2014-01-08 中国科学院上海技术物理研究所 Infrared broad-spectrum light-splitting film of ZnSe substrate

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1341865A (en) * 2000-08-29 2002-03-27 保谷株式会社 Optical element with anti-reflection film
CN202693835U (en) * 2012-07-28 2013-01-23 杭州科汀光学技术有限公司 Optical filter for image chip
CN102798919A (en) * 2012-08-24 2012-11-28 杭州科汀光学技术有限公司 Cut-off filter for frustrating wavelength shift
CN203385879U (en) * 2013-06-21 2014-01-08 中国科学院上海技术物理研究所 Infrared broad-spectrum light-splitting film of ZnSe substrate

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