CN202693835U - Optical filter for image chip - Google Patents
Optical filter for image chip Download PDFInfo
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- CN202693835U CN202693835U CN 201220370077 CN201220370077U CN202693835U CN 202693835 U CN202693835 U CN 202693835U CN 201220370077 CN201220370077 CN 201220370077 CN 201220370077 U CN201220370077 U CN 201220370077U CN 202693835 U CN202693835 U CN 202693835U
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Abstract
The utility model discloses an optical filter for an image chip. The optical filter for the image chip comprises a baseboard and a filter multilayer film plated on the baseboard, wherein the filter multilayer film is an odd-level film with above five levels, the filter multilayer film consists of thin dielectric films with the refractive indexes of central wavelengths in a visible light region of greater than 2.3 and metal films with real part refractive indexes of central wavelengths in the visible light region of small than 0.1 and imaginary part refractive indexes of greater than 3.0, the thin dielectric films and the metal films are alternatively arranged, and two outermost layers of films on two ends of the filter multilayer film are the thin dielectric films. Because the filter multilayer film formed by alternatively arranging the thin dielectric films and the metal films can ensure that the wavelength drifting of a transmission-stop transition region due to a light incidence angle is reduced, the filter for the image chip is manufactured without using a special blue glass substrate or blue plastic substrate.
Description
Technical field
The utility model relates to a kind of optical filter for the digital vedio recording image chip, belongs to the optical device field, is mainly used in the image acquisition systems such as digital camera, mobile phone cam and monitoring camera.
Background technology
Be used for the image chip CCD of digital imaging technique, the photodetector that CMOS is a kind of discrete pixel, according to Nyquist's theorem, discernmible high spatial frequency of image chip equals its half of spatial sampling frequency, and this frequency is called the nyquist limit frequency.When obtaining target image with CCD, CMOS shooting, when sampled images surpasses the nyquist limit frequency of system, high-frequency harmonic meeting and fundamental frequency in the image chip cause folded matrix effect, produce Moire fringe, affect picture quality, therefore must the Bian measure of getting eliminate the image disruption that this spatial high-frequency harmonic wave causes, optical filter arises at the historic moment like this.Optical filter often is placed in the image chip front, to improve image quality.
Now often adopt a kind of special smalt (model is QB51) or blue plastics (model is FLXL100AA) as substrate with optical filter, the characteristics of this smalt or blue plastics are: transmissivity is that 50% wavelength is about 650nm in transmission-cut-off zone of transition, because being material, this transmission-cut-off zone of transition absorbs generation, so the wavelength of this 650nm can not produce any movement because of the variation of the angle of incidence of light of target image, thereby can obtain uniform color effect to the image that enters the shooting phtographic lens with different incidence angles.On two surfaces of this smalt or blue plastic base, plate respectively every the infrared filtering film with every the ultraviolet filtering film and consist of optical filter, make the high transmission of visible light, infrared light and ultraviolet light cut-off.From the above, the function of visible light transmissive, cut-off infrared light and ultraviolet light is finished by the optically filtering multilayer film, and the wavelength of stablize transmission-cut-off zone of transition is by absorptive-type smalt substrate or the realization of blue plastic base.So, why can not the optically filtering multilayer film stablize the wavelength of transmission-cut-off zone of transition? this is based on interference of light because of the optically filtering multilayer film and produces transmission-cut-off zone of transition, and interfere relevant with angle of incidence of light, the thickness of optical multilayer is along with the incident cosine of an angle changes in other words, so, the image in shooting phtographic lens dead ahead enters the incident angle minimum of image chip, and wavelength is the longest; The image of visual field, both sides of the edge, camera lens dead ahead enters the incident angle maximum of image chip, wavelength is the shortest, like this, the object of same color has formed the image of different colours because incident angle changes, Here it is existing optical filter must adopt a kind of special smalt or blue plastics are as the reason of substrate.
But, no matter be to use smalt substrate or blue plastic base, some defectives are arranged.For the smalt substrate: (1) require the smalt substrate thicker, but this can cause the aberrations such as spherical aberration, aberration for guaranteeing that transmission-cut-off zone of transition has enough steepness; (2) this smalt only has Japan's exclusive dealing at present, because supply falls short of demand, price is very expensive; (3) some poor-performing of smalt,, poor chemical stability large such as expansion coefficient, mechanical stress are large, fragility, thus very easily broken, also perishable when cutting into small pieces behind the plated film, reduced fabrication yield; (4) Heavy Weight, volume are large, and the application on smart mobile phone is subject to some restrictions.For blue plastic base, (1) although the thinner thickness of used blue plastic base, when alleviating aberration, but because the difficult problem that the substrate that the flexibility of blue plastics has brought membrane stress to cause is out of shape; (2) blue plastic base is a kind of organic material, and film all is inorganic material, and both adhere to very easily failed, and in other words, rete is difficult to be plated to blue plastic base and gets on; (3) poor rigidity of blue plastic base, the application in the large-area image chips such as slr camera is still had any problem.
In fact, all the time, people attempt to replace at present used smalt or blue plastic base of optical filter with other glass or plastics, but can't realize all the time.
The utility model content
The purpose of this utility model provides a kind of new optical filter that is used for image chip, thereby overcomes the part or all of defective of prior art.
Because there is above-mentioned variety of issue in existing used smalt substrate or the blue plastic base of optical filter, can the problem of bringing out thus thinking be: use ordinary optical glass or optical plastic as substrate, thereby replace at present used special smalt or blue plastic base? the answer of this problem is depended on: in photography and vedio recording is used, can when the angle of incidence of light on inciding image chip is-14 ° ~ 14 ° of scopes, design transmissivity in transmission-cut-off transition wave-length district and be the drift at 50% wavelength 650nm place less than the optically filtering multilayer film of required value 3nm?
Based on this, for reducing membrane system to the susceptibility of incident angle, reduce wave length shift, utility model people has proposed following design: 1. select high as far as possible thin dielectric film refractive index, because according to refraction law, film refractive index is higher, the refraction angle is less, and angle susceptibility is less; 2. select metallic film, because on the one hand the behavior of metallic film is equivalent to high-index material (metallic film is complex index of refraction, can't be directly and thin dielectric film refractive index relatively, its refraction angle also is to answer the angle); On the other hand, absorb larger when light is propagated in metallic film, interference effect weakens (just no longer interfering during adequate thickness), and since light when in metallic film, propagating equal-amplitude surface and cophasal surface do not overlap mutually, so propagation wave is inhomogeneous wave, these characteristics are very useful to the susceptibility that suppresses or reduce to interfere, reduce incident angle; 3. the absorption of metallic film is large, reflectivity is high, and when metallic film silver (Ag) especially commonly used surpassed certain thickness, ultraviolet, visible, infrared region were all light tight because of reflection, absorption basically, and this specific character claims again its cut-off.And wave filter requires visible region transmission, infrared and ultraviolet region cut-off.
For this reason, the utility model changes the structure of original optical filter, utilizes the thin dielectric film of high index of refraction to induce metallic film in the transmissivity of visible region, reduces thus metallic film in absorption and the reflection of visible region.Because wavelength is depended in the interference of film, make visible region when interfering reinforcement, increasing transmission, it is possible making infrared region and ultraviolet region weaken, keep the cutoff performance of metallic film by interference.
Further, the filtering multilayer film is designed to thin dielectric film to the utility model and metallic film constantly replaces the odd-level multi-layer film structure that forms, and the outermost tunic at filtering multilayer film two ends is thin dielectric film.Because the both sides of every layer of metallic film have thin dielectric film to induce, therefore, after visible light is through the filtering multilayer film of repeatedly inducing, can significantly reduces the filtering multilayer film to reflectivity and the absorptivity of visible light, and infrared light and ultraviolet light are had good cut-off effect.
Specifically, for achieving the above object, technical solution adopted in the utility model is as follows:
As one of the technical solution of the utility model, the optical filter that the utility model is used for image chip comprises substrate and the filtering multilayer film that is plated on this substrate, described filtering multilayer film is the odd number tunic more than 5 layers, described filtering multilayer film by the refractive index of the centre wavelength of visible region greater than 2.3 thin dielectric film and the real part refractive index of the centre wavelength of visible region less than 0.1, the imaginary part refractive index alternately forms greater than 3.0 metallic film, and the outermost tunic at filtering multilayer film two ends is described thin dielectric film.Further, the utility model can only be comprised of described substrate and the described filtering multilayer film that is plated on this substrate.Filtering multilayer film described in the utility model is preferably 5 ~ 13 layers.
As one of the technical solution of the utility model, the optical filter that the utility model is used for image chip comprises the substrate of being made by clear optical glass or transparent optical plastics and is plated in filtering multilayer film on this substrate, described filtering multilayer film is the odd number tunic more than 5 layers, described filtering multilayer film by the refractive index of the centre wavelength of visible region greater than 2.3 thin dielectric film and in the real part refractive index of the centre wavelength of visible region less than 0.1, the imaginary part refractive index alternately forms greater than 3.0 metallic film, and the outermost tunic at filtering multilayer film two ends is described thin dielectric film.Further, the utility model can only be comprised of described substrate and the described filtering multilayer film that is plated on this substrate.Filtering multilayer film described in the utility model is preferably 5 ~ 13 layers.
As one of the technical solution of the utility model, the utility model comprises the substrate of being made by clear optical glass or transparent optical plastics and is plated in filtering multilayer film on this substrate, described filtering multilayer film is the odd number tunic more than 5 layers, and described filtering multilayer film is by TiO
2, Nb
2O
5Or the thin dielectric film made of ZnS and silver-colored film alternately form, and the outermost tunic at filtering multilayer film two ends is described thin dielectric film.Further, the utility model can only be comprised of described substrate and the described filtering multilayer film that is plated on this substrate.Filtering multilayer film described in the utility model is preferably 5 ~ 13 layers.
In summary, the bottleneck that the smalt substrate that the smalt wave filter of prior art and blue plastic filter are used and blue plastic base have some to be difficult to cross over: concerning the smalt substrate, in order to guarantee that transmission-cut-off zone of transition has enough steepness, the thickness of smalt substrate is thicker, thereby causes the aberration of can not ignore; This smalt is price not only, and machinery, chemical property is poor, and fabrication yield is low; Because thickness is thick, Heavy Weight, the application in smart mobile phone is subject to certain limitation.Concerning blue plastic base, because blue plastic base is thin, when alleviating aberration, the difficult problem that the substrate that has but brought membrane stress to cause owing to the flexibility of plastics is out of shape; And inorganic membraneous material is difficult to be attached to organic blue plastic base and gets on; Because poor rigidity, the thin thickness of blue plastic base, the application in the large-area image chips such as slr camera is still had any problem.Compared with prior art, the utility model has changed the structure of existing optical filter, because the odd number tunic that the filtering multilayer film on its substrate alternately is comprised of thin dielectric film and metallic film, and the both sides of every layer of metallic film have thin dielectric film to induce, thus the wavelength of transmission-cut-off zone of transition with the drift of incident angle less than 3nm.Like this, the utility model is by changing the structure of existing optical filter, can adopt again the used smalt substrate of prior art or blue plastic base to stablize the wavelength of transmission-cut-off zone of transition, and directly available common optical glass or optical plastic replace substrate as wave filter.And substrate of the present utility model all can be done thinlyyer, is generally 0.1-0.2mm; And the number of plies of filtering multilayer film of the present utility model is wanted much less than the full dielectric filter multilayer film of prior art.In other words, filtering multi-layer film structure of the present utility model possesses simultaneously the high transmission of visible light, infrared light and ultraviolet light cut-off and stablizes these two kinds of performances of transmission-cut-off zone of transition wavelength, solve all the time unsolved technical barrier of this area, obtained unforeseeable technique effect.
Description of drawings
Fig. 1 is the transmission spectrum curve figure of the smalt substrate (QB51) of existing optical filter;
Fig. 2 is the transmission spectrum curve figure of the blue plastic base (FLXL100AA) of existing optical filter;
Fig. 3 is the structural representation of the utility model optical filter;
Fig. 4 is transmission and the reflectance spectrum curve map of the used silverskin of filtering multilayer film of the present utility model;
The transmission spectrum curve figure of the three metafiltration ripple multilayer films that Fig. 5 is comprised of thin dielectric film-metallic film-thin dielectric film;
Fig. 6 is the transmission spectrum curve figure of a kind of 5 layers of structure filtering multilayer film of the present utility model;
When Fig. 7 is a kind of 9 layers of structure filtering multilayer film of the present utility model at the transmission spectrum curve figure of angle of incidence of light when being 0 ° and 14 °;
Fig. 8 is a kind of 38 layers of full dielectric filter multilayer film at the transmission spectrum curve figure of angle of incidence of light when being 0 ° and 14 °.
Embodiment
Fig. 1 is the transmission spectrum curve figure of the smalt substrate (model is QB51) of existing optical filter.As shown in Figure 1 and since the smalt substrate transmission-cut-off zone of transition steepness is not good enough, therefore need be increased to 0.5mm to its thickness.Even if yet as than, its steepness is relatively poor (as shown in Figure 1) still.
Fig. 2 is the transmission spectrum curve figure of the blue plastic base (model is FLXL100AA) of existing optical filter.Although blue plastic base thickness shown in Figure 2 only has 0.1mm, the steepness in its transition wave-length district has had obvious improvement with respect to smalt substrate shown in Figure 1.Yet not enough is that than the smalt substrate, blue plastic base only provides transmission-cut-off zone of transition, because the transmissivity in infrared light district is high, ends the required rete number meeting BELAND glass substrate of infrared light more.
This shows, smalt substrate illustrated in figures 1 and 2 or the common function of blue plastic base are: the stable transmission that does not change with angle of incidence of light-cut-off zone of transition (transmissivity is that 50% wavelength is about 650nm) is provided.Because being the characteristic absorption by smalt substrate or blue plastic base, this transmission-cut-off zone of transition forms, so this transmissivity is 50% wavelength 650nm can not changed because of the angle of incidence of light of target image and produce drift, thereby can make the image that enters the photography and vedio recording camera lens with different incidence angles obtain uniform color effect.
But, because smalt substrate or blue plastic base exist various defectives, so the utility model is attempted special smalt substrate or blue plastic base with transparent ordinary optical glass substrate or optical plastic substrate replacement prior art, expect the technical barrier that solves with solution those skilled in the art all the time.Adopt the technical solution of the utility model, substrate can use normal transparent optical glass or the optical plastic of cheap and function admirable commonly used.For example, the clear optical glass commonly used such as K series crown glass, D263T glass, B270 glass, Borofloat glass, Gorilla glass or EagleXG glass, these glass have following general character: refractive index is low, light transmission is good, lightweight, machinery, chemistry, thermal behavior is good, reprocessing easily, low price.Particularly, D263T glass, B270 glass, Borofloat glass, Gorilla glass and EagleXG glass all be adopt batch production new technology---pulling method, horizontal sheet process and float glass process---manufacturing, so price is very low.And the utility model also can be selected common polycarbonate or polymethyl methacrylate etc. when adopting transparent optical plastic as substrate.In photography and vedio recording is used, the angle of incidence of light scope that incides on the image chip is about-14 ° ~ 14 °, optical filter of the present utility model can obtain under this ranges of incidence angles, and transmission-cut-off zone of transition is that the drift at 50% wavelength 650nm place is less than the optically filtering multilayer film of 3nm in transmissivity.
As shown in Figure 3, the utility model optical filter mainly is made of the filtering multilayer film 4 on substrate 1 and the substrate 1.Wherein, the odd number tunic that filtering multilayer film 4 alternately is comprised of thin dielectric film 2 and the metallic film 3 of high index of refraction, and the two ends outermost tunic that forms as the filtering multilayer film is thin dielectric film, thus, the both sides of every one deck metallic film all have thin dielectric film to induce, and the transmissivity of visible region is derived as much as possible.Thin dielectric film should be greater than 2.3 in the refractive index at the centre wavelength 550nm place of visible region, metallic film the real part refractive index at the centre wavelength 550nm place of visible region less than 0.1, the imaginary part refractive index is greater than 3.0.When the incident light of different incidence angles incides the filtering multilayer film 4 that the utility model alternately is made of thin dielectric film and metallic film, can not only see through visible light, cut-off ultraviolet light and infrared light, and can reach stable transmission-cut-off zone of transition.Optical filter structure of the present utility model is so that Bian becomes possibility with transparent ordinary optical glass or optical plastic as substrate 1.For example, select the optical plastics such as the optical glass such as K commonly used series crown glass, D263T glass, B270 glass, Borofloat glass, Gorilla glass, EagleXG glass and polycarbonate commonly used, polymethyl methacrylate.The material of thin dielectric film 2 can use TiO
2, Nb
2O
5Or ZnS etc.As preferred version, the material of metallic film 3 can be selected silver (Ag).
Below further describe the utility model as an example of a kind of filtering multilayer film 4 with 9 tunics example.Specifically, in substrate 1, plate in the following order filtering multilayer film 4: thin dielectric film 2-Ag film 3-thin dielectric film 2-Ag film 3-thin dielectric film 2-Ag film 3-thin dielectric film 2-Ag film 3-thin dielectric film 2.As a kind of embodiment of the present utility model, the composition of 9 layers of structure of filtering multilayer film 4 can see table 1 for details.Wherein, substrate 1 adopts B270 glass.As shown in Figure 3, incident light incides the filtering multilayer film 4 of wave filter from air one side (being the right side of Fig. 3), and the visible light of transmission is from substrate 1 one sides (being the left side of Fig. 3) outgoing, and the infrared and ultraviolet light of reflection then returns air one side.The illustrated filtering multilayer film of table 1 is optimized through commercial film design software TFCal, and wherein the Ag film has 4 layers.
Table 1
Fig. 4 is transmission and the reflectance spectrum curve map of the used silverskin of filtering multilayer film of the present utility model.In the embodiment shown in the table 1, the gross thickness of 4 layers of Ag film is 70.7nm, transmission (T) curve of spectrum (shown in the curve 5 of Fig. 4) that calculates by this Ag film thickness shows, the average transmittance of visible region (450-600nm) only is 1.1%, and the average transmittance of infrared region (750-1200nm) is 0.18%; Reflection (R) curve of spectrum (shown in the curve 6 of Fig. 4) that calculates by this Ag film thickness shows, the average reflectance of visible region (450-600nm) is 96.8%, and the average reflectance of infrared region (750-1200nm) is 98.7%.So this moment, metallic film consisted of the catoptron of typical ultraviolet light, visible light and an infrared light in fact.
In order to form the transmission area of a high-transmission rate at visible region, the utility model proposes concept and the scheme thereof of inducing design: the multiple layer metal film is set, and plates the thin dielectric film of high index of refraction in the both sides of every layer of metallic film in the filtering multilayer film.Because the interference effect of thin dielectric film derives the transmissivity of every layer of metallic film at visible region.In other words, metallic film can reduce greatly in absorption and the reflection of visible region, and transmissivity increases, and interferes the strongest; And this moment infrared region and ultraviolet region absorption and reflection keep substantially constant with the curve of Fig. 4, interfere the most weak.
In fact, the composition of filtering multilayer film of the present utility model is except as shown in table 1, concrete application requirements according to optical filter, those skilled in the art possess under the situation of following architectural feature knowing in advance the filtering multilayer film: the odd number tunic more than 5 layers that the filtering multilayer film alternately is comprised of thin dielectric film 2 and metallic film 3, and the outermost tunic at filtering multilayer film two ends is thin dielectric film (wherein, thin dielectric film in the refractive index of the centre wavelength of visible region greater than 2.3, metallic film in the real part refractive index of the centre wavelength of visible region less than 0.1, the imaginary part refractive index is greater than 3.0), be optimized design by its film design software (such as TFCal) of being familiar with, can determine the concrete number of plies that filtering multilayer film of the present utility model is required, and the thickness of every layer of metallic film and thin dielectric film, thereby make the filtering multilayer film of acquisition when effectively ending infrared light and ultraviolet light, improve the transmissivity of visible region.
Need to prove, the filtering multilayer film of three-decker can not be produced the optical filter with practical value.Fig. 5 is a kind of transmission spectrum curve figure of the three metafiltration ripple multilayer films that are comprised of thin dielectric film-metallic film-thin dielectric film, and wherein, metallic film is the Ag film.In this filtering trilamellar membrane structure, because the layer of metal film only being arranged, for making this Ag film have good cut-off effect to infrared light and ultraviolet light, need make the thickness thicker (such as 70.7nm) of this layer Ag film, but this causes the average transmittance of visible region no matter how to induce also all the time not enough 10%(shown in the curve 7 of Fig. 5), obviously can't become an optical filter with practical value.Therefore, in order to improve the transmissivity of visible region, have only the thickness that reduces the Ag film.Yet, when the reduced thickness (such as 29nm) of Ag film, although obtained the high-transmission rate of the visible region shown in the curve 8 of Fig. 5, but this moment is because Ag film attenuate, but make infrared light and ultraviolet light lose the cut-off effect, so even adopt inductive technology, the filtering multilayer film of three-decker can not have practical value.
And the utility model arranges the metallic film more than two-layer in the filtering multi-layer film structure, and all there is thin dielectric film to induce in the both sides of every layer of metallic film, then make average transmittance experience the inducing more than at least twice of visible region, thereby improve the transmissivity of visible region.Fig. 6 is the transmission spectrum curve figure of the 5 metafiltration ripple multilayer films that alternately are comprised of thin dielectric film and metallic film on the B270 of the being plated in glass substrate of the present utility model.As seen from Figure 6, the average transmittance of visible region (450-600nm) is 88.9%, the average transmittance of infrared region (750-1200nm) is 2.74%, the average transmittance of ultraviolet region (350-380nm) is 33%, and transmissivity is that 50% wave length shift is 2.0nm near the transmission the long wave 650nm-cut-off zone of transition.Shown by curve shown in Figure 6, the filtering multilayer film of this structure can satisfy the basic demand of optical filter.
Fig. 7 is the B270 of the being plated in of the present utility model 9 metafiltration ripple multilayer films that alternately are made of thin dielectric film and metallic film on glass at the transmission spectrum curve figure of angle of incidence of light when being 0 ° and 14 °.Curve shown in Figure 7 is that wherein, the thickness of B270 glass substrate is got 0.15mm according to the Structure Calculation of the filtering multilayer film shown in the table 1, and this not only has enough physical strengths to satisfy the rigidity requirement of optical filter, can avoid introducing again aberration.The gross thickness of 9 metafiltration ripple multilayer films shown in the table 1 is 317nm, and wherein the gross thickness of 4 layers of Ag film is 70.7nm, and the both sides of every layer of Ag film have the TiO2 film of high index of refraction to induce.As preferred implementation of the present utility model, in the embodiment shown in the table 1, the thickness of every layer of Ag film between 13～21nm, and from substrate 1 on the direction away from substrate, the thickness of each layer Ag film increases progressively gradually, and this will be conducive to further reduce visible Optical Absorption.This 9 tunic structure can reach good performance: the average transmittance of visible region (450-600nm) is 90%, and the average transmittance of infrared region (750-1200nm) is 0.34%, and the average transmittance of ultraviolet region (350-380nm) is 2.29%.Simultaneously the calculating of different incidence angles also obtained, when incident angle that light incides wave filter is 0 ° and 14 ° (in incident angle-14 ° ~ 14 ° scope, minimum incident angle is 0 °, maximum incident angle is 14 °), transmissivity is that 50% wave length shift is 0.3nm near the transmission shortwave 415nm-cut-off zone of transition, and transmissivity is that 50% wave length shift is 1.9nm near the transmission the long wave 650nm-cut-off zone of transition.As can be seen from Figure 7, two transmission spectrum curves with 0 ° and 14 ° calculating of incident angle almost coincide together, and this odd-level filtering multilayer film that illustrates that thin dielectric film of the present utility model and metallic film alternately consist of can satisfy real requirement (and real requirement is that wave length shift is less than 3nm) fully with the wave length shift that incident angle changes.
And for B270 shown in Figure 8 38 layers of full dielectric filter multilayer film on glass, equally when angle of incidence of light is 0 ° and 14 °, transmissivity is that 50% wave length shift is 3.1nm near the transmission shortwave 420nm-cut-off zone of transition, and transmissivity is that 50% wave length shift is 6.8nm near the transmission the long wave 650nm-cut-off zone of transition.Also can find out from Fig. 8, separate larger with 0 ° of incident angle with two transmission spectrum curves of 14 ° of calculating, the drift of transition wave-length district is obvious, so full dielectric filter multilayer film must use special smalt substrate or blue plastic base could satisfy optical filter to the real requirement of wave length shift.
As fully visible, optical filter of the present utility model compared with prior art, because its filtering multilayer film only needs the number of plies seldom just can reach request for utilization, its overall film thickness is usually not as good as 1/10 of full dielectric filter multilayer film, this has suppressed the substrate distortion that membrane stress causes greatly, therefore the aberration that causes of substrate distortion can be ignored, and the cutting difficulty that the substrate distortion brings also can be avoided.In addition, the wave length shift that the filtering multilayer film that alternately is made of thin dielectric film and metallic film of the present utility model causes incident angle reduces greatly than the full dielectric filter multilayer film of prior art, therefore after replacing used special smalt substrate or blue plastic base with common optical glass or optical plastic, the wave filter that can obtain to have equally practical value.
Claims (9)
1. optical filter that is used for image chip, it is characterized in that: it comprises substrate (1) and is plated in filtering multilayer film (4) on this substrate, described filtering multilayer film is the odd number tunic more than 5 layers, described filtering multilayer film by the refractive index of the centre wavelength of visible region greater than 2.3 thin dielectric film and the real part refractive index of the centre wavelength of visible region less than 0.1, the imaginary part refractive index alternately forms greater than 3.0 metallic film, and the outermost tunic at filtering multilayer film two ends is described thin dielectric film.
2. the optical filter for image chip according to claim 1 is characterized in that: it is comprised of described substrate (1) and the described filtering multilayer film (4) that is plated on this substrate.
3. the optical filter for image chip according to claim 1 and 2, it is characterized in that: described filtering multilayer film is 5 ~ 13 layers.
4. optical filter that is used for image chip, it is characterized in that: it comprises the substrate (1) of being made by clear optical glass or transparent optical plastics and is plated in filtering multilayer film (4) on this substrate, described filtering multilayer film is the odd number tunic more than 5 layers, described filtering multilayer film by the refractive index of the centre wavelength of visible region greater than 2.3 thin dielectric film and in the real part refractive index of the centre wavelength of visible region less than 0.1, the imaginary part refractive index alternately forms greater than 3.0 metallic film, and the outermost tunic at filtering multilayer film two ends is described thin dielectric film.
5. the optical filter for image chip according to claim 4 is characterized in that: it is comprised of described substrate (1) and the described filtering multilayer film (4) that is plated on this substrate.
6. according to claim 4 or 5 described optical filters for image chip, it is characterized in that: described filtering multilayer film is 5 ~ 13 layers.
7. optical filter that is used for image chip, it is characterized in that: it comprises the substrate (1) of being made by clear optical glass or transparent optical plastics and is plated in filtering multilayer film (4) on this substrate, described filtering multilayer film is the odd number tunic more than 5 layers, and described filtering multilayer film is by TiO
2, Nb
2O
5Or the thin dielectric film made of ZnS and silver-colored film alternately form, and the outermost tunic at filtering multilayer film two ends is described thin dielectric film.
8. the optical filter for image chip according to claim 7 is characterized in that: it is comprised of described substrate (1) and the described filtering multilayer film (4) that is plated on this substrate.
9. according to claim 7 or 8 described optical filters for image chip, it is characterized in that: described filtering multilayer film is 5 ~ 13 layers.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102749667A (en) * | 2012-07-28 | 2012-10-24 | 杭州科汀光学技术有限公司 | Optical filter for image chip |
| CN105511004A (en) * | 2014-10-14 | 2016-04-20 | 岩崎电气株式会社 | Wavelength selection filter and light irradiation apparatus |
| CN105645750A (en) * | 2016-01-11 | 2016-06-08 | 信利光电股份有限公司 | Cutting method of blue glass, blue glass and application thereof |
| CN109665722A (en) * | 2017-10-13 | 2019-04-23 | 苏州大学 | A kind of high transparency compound glass |
| CN109983374A (en) * | 2016-08-31 | 2019-07-05 | 株式会社大真空 | Optical filter |
| CN110927850A (en) * | 2018-09-19 | 2020-03-27 | 张家港康得新光电材料有限公司 | Infrared broadband cut-off filter, optical filter and camera |
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2012
- 2012-07-28 CN CN 201220370077 patent/CN202693835U/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102749667A (en) * | 2012-07-28 | 2012-10-24 | 杭州科汀光学技术有限公司 | Optical filter for image chip |
| CN102749667B (en) * | 2012-07-28 | 2014-09-17 | 杭州科汀光学技术有限公司 | Optical filter for image chip |
| CN105511004A (en) * | 2014-10-14 | 2016-04-20 | 岩崎电气株式会社 | Wavelength selection filter and light irradiation apparatus |
| CN105511004B (en) * | 2014-10-14 | 2019-07-30 | 岩崎电气株式会社 | Wavelength selecting filter and light irradiation device |
| CN105645750A (en) * | 2016-01-11 | 2016-06-08 | 信利光电股份有限公司 | Cutting method of blue glass, blue glass and application thereof |
| CN109983374A (en) * | 2016-08-31 | 2019-07-05 | 株式会社大真空 | Optical filter |
| CN109665722A (en) * | 2017-10-13 | 2019-04-23 | 苏州大学 | A kind of high transparency compound glass |
| CN109665722B (en) * | 2017-10-13 | 2022-04-22 | 苏州大学 | High-transparency composite glass |
| CN110927850A (en) * | 2018-09-19 | 2020-03-27 | 张家港康得新光电材料有限公司 | Infrared broadband cut-off filter, optical filter and camera |
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