CN203150895U - 266nm all-solid state ultraviolet laser capable of being used for material elaborate machining - Google Patents
266nm all-solid state ultraviolet laser capable of being used for material elaborate machining Download PDFInfo
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- CN203150895U CN203150895U CN 201320055897 CN201320055897U CN203150895U CN 203150895 U CN203150895 U CN 203150895U CN 201320055897 CN201320055897 CN 201320055897 CN 201320055897 U CN201320055897 U CN 201320055897U CN 203150895 U CN203150895 U CN 203150895U
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Abstract
The utility model relates to a 266nm all-solid state ultraviolet laser capable of being used for material elaborate machining. The 266nm all-solid state ultraviolet laser capable of being used for material elaborate machining comprises a laser resonant cavity, double acousto-optic Q switches, two LD side-surface pumping modules, a 90-degree optically active crystal, a frequency doubling crystal, a convex lens group, a frequency-quadrupling crystal, a dichroscope, a cylindrical lens and a control system. When frequency doubling is performed inside the cavity under pumping, the laser can generate high-power and high-repetition frequency 532 nm-green laser operation, and the can further generate 266 nm quasi-continuous ultraviolet laser output through frequency quadrupling outside the cavity. The 266nm all-solid state ultraviolet laser capable of being used for material elaborate machining provided by the utility model can better meet the needs of practical application.
Description
Technical field
The utility model relates to the laser technique field, particularly relates to a kind of 266nm all-solid-state ultraviolet laser that can be used for the material retrofit.
Background technology
Laser processing is the important application of laser industry, compares with the machining of routine, and laser processing is more accurate, more accurate, rapider.This technology is to utilize the characteristic of laser beam and matter interaction to process comprising metal and nonmetallic various material, has related to multiple processing technologys such as welding, cutting, mark, punching, heat treatment, shaping.The unique characteristic of laser makes it to become the ideal tools of material retrofit, is widely used in microelectronics, micromechanics and micro-optic processing three big fields at present.
In recent years, growing along with small-sized electronic product and microelectronic component demand, handling for the precision of rapidoprint day by day becomes laser one of field with fastest developing speed in commercial Application.
The pulsed ultraviolet laser device is mainly used in: ultra-violet curing, laser scribing, laser marking, Laser Micro-Machining, wafer detection, spectrum, oxide removal, laser wire stripping.
The long laser of 266nm Ultra-Violet Laser and wavelength compares, and aspect little processing, the 266nm Ultra-Violet Laser has exclusive advantage.Infrared and laser processing of materials process visible light wave range is " heat " course of processing substantially, namely makes concentration of energy material part to be processed heat to melt by focusing or evaporation of materials carries out little processing.This mode heat cause around the serious damage of thermal response part, this can badly influence effect and the quality of processing.Ultra-Violet Laser processing is to belong to " cold " processing, namely can directly destroy the chemical bond of material atom, and separating substances is become the process of atom, to around regional destructiveness very little.Ultra-Violet Laser " cold " processing characteristics makes the 266nm ultraviolet laser become the weak material first-selections that are highly brittle such as processing TR thin rubber and plastics.Because diffraction phenomena, Wavelength of Laser is directly proportional with the minimum diameter of focused light spot, and 266nm optical maser wavelength is shorter, means that spatial resolution is more high, can obtain littler focal beam spot, and this makes 266nm laser can process extremely small parts.Moreover, because many glass and nonlinear crystalline material are all very strong for Ultra-Violet Laser (300nm is following) absorption, but this assimilation effect is that the laser of near-infrared and visible light wave range is inaccessible, and this makes ultraviolet laser can use extensivelyr.In little processing of some requirement on machining accuracy strictnesses, integrated electronic circuit-board drilling micropore for example, micro-pore diameter reaches micron dimension less than 100 μ m precision prescribeies, and this processes with regard to the ultraviolet laser that needs the retrofit ability.Little manufacture field of 266nm ultraviolet laser extensive use also have produce minim channel in film and the sheeting, carry out accurate cutting and butt joint, the aspects such as little processing of tellite.
Ultraviolet laser is because its wavelength is shorter, energy is more concentrated, resolution advantages of higher and have the irreplaceable advantage of long wavelength laser in a lot of fields more.In special material processing, Ultra-Violet Laser is with respect to infrared laser, and the processing edge is more smooth, efficient is higher.For the infrared device with the higher materials processing of infrared transmittivity, the Ultra-Violet Laser work in-process also has remarkable advantages.For example at industrial circle, the heavy damage of infrared laser has effectively been avoided in the mint-mark of 266nm Ultra-Violet Laser, makes the processing object keep perfect, and can process visible light and more weak some crystal and the glass of infrared laser assimilation effect.Power can be applicable to fields such as stereolithography, silicon chip mark, silicon chip cutting in 0.2～10W, repetition rate at the 266nm of 15～100kHz Q-switched laser; Power can be applicable to fields such as probing, mark, detection, wafer process in 0.5～2W, repetition rate at the 266nm of 15～100kHz Q-switched laser; And power is widely used etc. in fields such as the generation of printed circuit board (PCB) (PCB) direct engraving, printing, FBG, paper tinsel cuttings at the 266nm of 0.2～4W Q-switched laser.
Therefore, need a urgent technical problem that solves to be exactly instantly: a kind of effective measures of proposition how can innovate, to satisfy the demand of practical application.
The utility model content
Technical problem to be solved in the utility model provides a kind of 266nm all-solid-state ultraviolet laser that can be used for the material retrofit, better meets the demand of practical application.
In order to address the above problem, the utility model discloses a kind of 266nm all-solid-state ultraviolet laser that can be used for the material retrofit, comprise: laserresonator (1), first acoustooptic Q-switching (2a), second acoustooptic Q-switching (2b), the one LD side pumping module (3a), the 2nd LD side pumping module (3b), 90 ° of gyrotropi crystals (4), two frequency-doubling crystals (5), convex lens group (6), quadruple frequency crystal (7), dichroscope group (8), cylindrical mirror (9) and control system (10), wherein, described first acoustooptic Q-switching (2a) and second acoustooptic Q-switching (2b) are placed at a LD side pumping module (3a) and the 2nd LD side pumping module (3b) both sides quadrature respectively, first acoustooptic Q-switching (2a), second acoustooptic Q-switching (2b), the one LD side pumping module (3a), the 2nd LD side pumping module (3b) and 90 ° of gyrotropi crystals (4) are positioned at described laserresonator (1), and symmetry is placed, two frequency-doubling crystals (5) are positioned at laserresonator (1) next-door neighbour output end mirror and place, described convex lens group (6), quadruple frequency crystal (7), dichroscope group (8) and cylindrical mirror (9) are placed according to light path outbound course conllinear outside laserresonator (1) successively, described control system (10) and described first acoustooptic Q-switching (2a), second acoustooptic Q-switching (2b), the one LD side pumping module (3a) is connected with the 2nd LD side pumping module (3b), when carrying out in the chamber two frequencys multiplication under pumping, laser produces high power, the green laser operation of the 532nm of high repetition, and then outside the chamber quadruple method, the quasi-continuous Ultra-Violet Laser output that can produce 266nm.
Further, a described LD side pumping module (3a), the 2nd LD side pumping module (3b) and two identical 808nmLD side pumping modules of employing, two identical Nd:YAG crystal bars are as gain medium, and connecting the realization corresponding wavelength by the serial connection mode is the fundamental frequency light generation of 1064nm.
Further, that adopts is placed between a LD side pumping module and the 2nd LD side pumping module between two parties, realize 90 ° of gyrotropi crystals (4) of thermally induced birefringence compensation, 4f system and 90 ° of gyrotropi crystals of adopting two positive lenss to form carry out the thermal birefringence effect compensation jointly.
Further, described two frequency-doubling crystals (5) refer to carry out the nonlinear optical crystal that the wavelength frequency multiplication is used for 1064nm fundamental frequency light, comprise the nonlinear optical crystal of KTP and LBO.
Further, described convex lens group (6) is formed telescope configuration by first convex lens (6a) and second convex lens (6b).
Further, described quadruple frequency crystal (7) is to carry out the nonlinear optical crystal that the wavelength frequency multiplication is used for 532nm fundamental frequency light, comprises the nonlinear optical crystal of BBO and CLBO.
Further, described dichroscope group (8) comprises first dichroscope (8a) and second dichroscope (8b), all with 45 ° of placements.
Further, described control system (10) comprises two Q switching Synchronization Control devices and two pump module control devices.
Further, described resonant cavity adopts flat-straight cavity configuration.
Description of drawings
Fig. 1 a kind of structural representation that can be used for the 266nm all-solid-state ultraviolet laser of material retrofit of the present utility model.
Embodiment
For above-mentioned purpose of the present utility model, feature and advantage can be become apparent more, below in conjunction with the drawings and specific embodiments the utility model is described in further detail.
Referring to Fig. 1, the utility model provides a kind of 266nm all-solid-state ultraviolet laser that can be used for the material retrofit, comprise: laserresonator (1), first acoustooptic Q-switching (2a), second acoustooptic Q-switching (2b), the one LD side pumping module (3a), the 2nd LD side pumping module (3b), 90 ° of gyrotropi crystals (4), two frequency-doubling crystals (5), convex lens group (6), quadruple frequency crystal (7), dichroscope group (8), cylindrical mirror (9) and control system (10), wherein, described first acoustooptic Q-switching (2a) and second acoustooptic Q-switching (2b) are placed at a LD side pumping module (3a) and the 2nd LD side pumping module (3b) both sides quadrature respectively, first acoustooptic Q-switching (2a), second acoustooptic Q-switching (2b), the one LD side pumping module (3a), the 2nd LD side pumping module (3b) and 90 ° of gyrotropi crystals (4) are positioned at described laserresonator (1), and symmetry is placed, two frequency-doubling crystals (5) are positioned at laserresonator (1) next-door neighbour output end mirror and place, described convex lens group (6), quadruple frequency crystal (7), dichroscope group (8) and cylindrical mirror (9) are placed according to light path outbound course conllinear outside laserresonator (1) successively, described control system (10) and described first acoustooptic Q-switching (2a), second acoustooptic Q-switching (2b), the one LD side pumping module (3a) is connected with the 2nd LD side pumping module (3b), when carrying out in the chamber two frequencys multiplication under pumping, laser produces high power, the green laser operation of the 532nm of high repetition, and then outside the chamber quadruple method, the quasi-continuous Ultra-Violet Laser output that can produce 266nm.
Wherein, a described LD side pumping module (3a), the 2nd LD side pumping module (3b) and two identical 808nmLD side pumping modules of employing, two identical Nd:YAG crystal bars are as gain medium, and connecting the realization corresponding wavelength by the serial connection mode is the fundamental frequency light generation of 1064nm.
That adopts is placed between a LD side pumping module and the 2nd LD side pumping module between two parties, realize 90 ° of gyrotropi crystals (4) of thermally induced birefringence compensation, 4f system and 90 ° of gyrotropi crystals of adopting two positive lenss to form carry out the thermal birefringence effect compensation jointly.
Described two frequency-doubling crystals (5) refer to carry out the nonlinear optical crystal that the wavelength frequency multiplication is used for 1064nm fundamental frequency light, the nonlinear optical crystal that comprises KTP and LBO, can angle tuning or thermal tuning, thus realize output from fundamental frequency light to the 532nm double-frequency laser.Two frequency-doubling crystals are placed in the resonant cavity.
Described convex lens group (6) is formed telescope configuration by first convex lens (6a) and second convex lens (6b), by the waist that obtains less waist radius and grow in quadruple frequency crystal inside, thereby obtains higher shg efficiency.
Described quadruple frequency crystal (7) is to carry out the nonlinear optical crystal that the wavelength frequency multiplication is used for 532nm fundamental frequency light, the nonlinear optical crystal that comprises BBO and CLBO, by angle tuning, thus the output of realization from 532nm two double-frequency lasers to 266nm quadruple Ultra-Violet Laser.Also can adopt other 1064nm quadruple nonlinear optical crystals.
Described dichroscope group (8) comprises first dichroscope (8a) and second dichroscope (8b), and all with 45 ° of placements, two secondary reflections filter 532nm laser, thereby obtains purer 266nm laser output.Also can adopt the prismatic decomposition method to obtain pure 266nm laser output in addition.
Cylindrical mirror (9) carries out beam shaping by compressing the ultraviolet hot spot in one direction, makes oval originally ultraviolet hot spot finally be output as sub-circular to reach the instructions for use of material retrofit.
Described control system (10) comprises two Q switching Synchronization Control devices and two pump module control devices.
Described resonant cavity adopts flat-straight cavity configuration.
Select and setting by the repetition rate realization of two acoustooptic Q-switchings of modulation according to machining kinds and demand, modulating frequency is adjustable continuously at 1～25KHz; Then realize adjustment and the setting of the quasi-continuous Ultra-Violet Laser output of 266nm average power by the operating current of two pump modules of Synchronization Control, average power is adjustable between 0～3.74W.
266nm all-solid-state ultraviolet laser of the present utility model is to adopt flat-straight cavity configuration and two Nd:YAG crystal bar serial connection to add the method for 90 ° of gyrotropi crystal compensation thermally induced birefringences, two acousto-optic Q modulation modes, carry out realizing under the situation of two frequencys multiplication in the chamber the green laser operation of 532nm of high power, high repetition by KTP, lbo crystal, and and then by using BBO, clbo crystal to carry out the quadruple method chamber outside, the output of realization from the green laser of 532nm to the quasi-continuous Ultra-Violet Laser of 266nm.When LD pumping gross power was 480W, 266nm ultraviolet light output average power reached 3.74W.Repetition rate is 10kHz, and the respective pulses width is 120ns.Conversion efficiency from the green glow to the ultraviolet is 6.4%, and the light light conversion efficiency is 0.78%.
The gain medium of the green (light) laser of the 532nm of high power of the present utility model, high repetition is the Nd:YAG crystal.Adopt two identical 808nmLD side pumping modules, two identical Nd:YAG crystal bars are as gain medium, and corresponding output wavelength is 1064nm, and the frequency doubled light output wavelength corresponds to 532nm.
When the green (light) laser of the 532nm of high power of the present utility model, high repetition is realized frequency doubled light output, formed by laserresonator total reflective mirror, acoustooptic Q-switching 1, LD side pumping module 1,90 ° of gyrotropi crystals, LD side pumping module 2, acoustooptic Q-switching 2, two frequency-doubling crystals, laserresonator output end mirrors.The film cording of laserresonator has appropriate design, makes laser realize 1064nm fundamental frequency optical resonance and the output of 532nm frequency doubled light simultaneously under the pump module pumping.Alliteration light Q switching is placed at two pump module both sides quadratures respectively, realizes the laser operation of high power, high repetition by the acousto-optic Q modulation mode.90 ° of gyrotropi crystals are placed between two LD side pumping modules between two parties, realize the compensation of thermally induced birefringence.Two frequency-doubling crystals refer to carry out the optical crystal that the wavelength frequency multiplication is used for 1064nm fundamental frequency light, comprise the nonlinear optical crystal of KTP, LBO, can angle tuning or thermal tuning, thus realize output from fundamental frequency light to the 532nm double-frequency laser.Two frequency-doubling crystals are placed in the resonant cavity.
The quasi-continuous Ultra-Violet Laser output of 266nm of the present utility model is carried out quadruple method outside the chamber by using BBO, clbo crystal, realizes the output from the green laser of 532nm to the quasi-continuous Ultra-Violet Laser of 266nm.Comprise convex lens 1, convex lens 2, quadruple frequency crystal, dichroscope 1, dichroscope 2, cylindrical mirror.Convex lens 1 and convex lens 2 are formed telescope configurations, by obtaining less waist radius and long waist in that quadruple frequency crystal is inner, thereby obtain higher shg efficiency.Quadruple frequency crystal refers to carry out the optical crystal that the wavelength frequency multiplication is used for 532nm fundamental frequency light, comprises the nonlinear optical crystal of BBO, CLBO, by angle tuning, thus the output of realization from 532nm two double-frequency lasers to 266nm quadruple Ultra-Violet Laser.All with 45 ° of placements, two secondary reflections filter 532nm laser for dichroscope 1 and dichroscope 2, thereby obtain purer 266nm laser output.Cylindrical mirror carries out beam shaping by compressing the ultraviolet hot spot in one direction, makes oval originally ultraviolet hot spot finally be output as sub-circular to reach the instructions for use of material retrofit.
Adopt two identical 808nmLD side pumping modules, two identical Nd:YAG crystal bars realize that as gain medium corresponding wavelength is the fundamental frequency light generation of 1064nm; By using KTP, lbo crystal to carry out two frequency multiplication modes in the chamber, realize the green laser output of 532nm of high power, high repetition; And then by using BBO, clbo crystal to carry out quadruple mode outside the chamber, realize the quasi-continuous Ultra-Violet Laser output from the green laser of 532nm to 266nm; Realize laser beam shaping by using cylindrical mirror; By system modulation control, can make this system realize the material retrofit.
Particular content is as follows:
1) be connected in series the method that adds 90 ° of gyrotropi crystal compensation thermally induced birefringences with flat-straight cavity configuration and two Nd:YAG crystal bar, two acousto-optic Q modulation modes realize that corresponding wavelength is the quasi-continuous fundamental frequency light output of 1064nm.Each pump module maximum operating currenbt is 25A, and maximum pump Pu power is 240W; The Nd:YAG crystal bar is of a size of Φ 3mm * 65mm, and Nd ion doping concentration is 0.6at.%; Two acoustooptic Q-switching quadratures are placed on two pumping module both sides, and modulating frequency is that 1～25KHz is adjustable continuously.
2) two frequency-doubling crystals are pressed close to the outgoing mirror placement, and by phase matched, fundamental frequency light carries out the green laser output of 532nm of two frequencys multiplication realization high power, high repetition in the chamber by KTP, lbo crystal.
3) convex lens 1 and convex lens 2 are formed telescope configuration, and the green laser of 532nm can obtain less waist radius and long waist in quadruple frequency crystal inside, thereby obtain higher shg efficiency through this structure; Comprise the nonlinear optical crystal of BBO, CLBO by the angle tuning quadruple frequency crystal, thereby realize the quasi-continuous Ultra-Violet Laser output from 532nm two double-frequency lasers to 266nm; All with 45 ° of placements, two secondary reflections filter 532nm laser for dichroscope 1 and dichroscope 2, thereby obtain purer 266nm laser output.
4) by using the cylindrical mirror of placing at 266nm Ultra-Violet Laser rear, can be implemented in that compression ultraviolet hot spot carries out beam shaping on the direction, make oval originally ultraviolet hot spot finally be output as sub-circular to reach the instructions for use of material retrofit.
5) select and setting by the repetition rate realization of two acoustooptic Q-switchings of modulation according to machining kinds and demand, modulating frequency is adjustable continuously at 1～25KHz; Then realize adjustment and the setting of the quasi-continuous Ultra-Violet Laser output of 266nm average power by the operating current of two pump modules of Synchronization Control, average power is adjustable between 0～3.74W.
More than the 266nm all-solid-state ultraviolet laser that can be used for the material retrofit provided by the utility model is described in detail, used specific case herein principle of the present utility model and execution mode are set forth, the explanation of above embodiment just is used for helping to understand method of the present utility model and core concept thereof; Simultaneously, for one of ordinary skill in the art, according to thought of the present utility model, the part that all can change in specific embodiments and applications, in sum, this description should not be construed as restriction of the present utility model.
Claims (9)
1. 266nm all-solid-state ultraviolet laser that can be used for the material retrofit, comprise: laserresonator (1), first acoustooptic Q-switching (2a), second acoustooptic Q-switching (2b), the one LD side pumping module (3a), the 2nd LD side pumping module (3b), 90 ° of gyrotropi crystals (4), two frequency-doubling crystals (5), convex lens group (6), quadruple frequency crystal (7), dichroscope group (8), cylindrical mirror (9) and control system (10), wherein, described first acoustooptic Q-switching (2a) and second acoustooptic Q-switching (2b) are placed at a LD side pumping module (3a) and the 2nd LD side pumping module (3b) both sides quadrature respectively, first acoustooptic Q-switching (2a), second acoustooptic Q-switching (2b), the one LD side pumping module (3a), the 2nd LD side pumping module (3b) and 90 ° of gyrotropi crystals (4) are positioned at described laserresonator (1), and symmetry is placed, two frequency-doubling crystals (5) are positioned at laserresonator (1) next-door neighbour output end mirror and place, described convex lens group (6), quadruple frequency crystal (7), dichroscope group (8) and cylindrical mirror (9) are placed according to light path outbound course conllinear outside laserresonator (1) successively, described control system (10) and described first acoustooptic Q-switching (2a), second acoustooptic Q-switching (2b), the one LD side pumping module (3a) is connected with the 2nd LD side pumping module (3b).
2. laser as claimed in claim 1, it is characterized in that, a described LD side pumping module (3a), the 2nd LD side pumping module (3b) and two identical 808nmLD side pumping modules of employing, two identical Nd:YAG crystal bars are as gain medium, and connecting the realization corresponding wavelength by the serial connection mode is the fundamental frequency light generation of 1064nm.
3. laser as claimed in claim 1, it is characterized in that, that adopts is placed between a LD side pumping module and the 2nd LD side pumping module between two parties, realize 90 ° of gyrotropi crystals (4) of thermally induced birefringence compensation, 4f system and 90 ° of gyrotropi crystals of adopting two positive lenss to form carry out the thermal birefringence effect compensation jointly.
4. laser as claimed in claim 1 is characterized in that, described two frequency-doubling crystals (5) refer to carry out the nonlinear optical crystal that the wavelength frequency multiplication is used for 1064nm fundamental frequency light, comprise the nonlinear optical crystal of KTP and LBO.
5. laser as claimed in claim 1 is characterized in that, described convex lens group (6) is formed telescope configuration by first convex lens (6a) and second convex lens (6b).
6. laser as claimed in claim 1 is characterized in that, described quadruple frequency crystal (7) is to carry out the nonlinear optical crystal that the wavelength frequency multiplication is used for 532nm fundamental frequency light, comprises the nonlinear optical crystal of BBO and CLBO.
7. laser as claimed in claim 1 is characterized in that, described dichroscope group (8) comprises first dichroscope (8a) and second dichroscope (8b), all with 45 ° of placements.
8. laser as claimed in claim 1 is characterized in that, described control system (10) comprises alliteration light Q switching Synchronization Control device and two pump module control devices.
9. laser as claimed in claim 1 is characterized in that, described resonant cavity adopts flat-straight cavity configuration.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN 201320055897 CN203150895U (en) | 2013-01-31 | 2013-01-31 | 266nm all-solid state ultraviolet laser capable of being used for material elaborate machining |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201320055897 CN203150895U (en) | 2013-01-31 | 2013-01-31 | 266nm all-solid state ultraviolet laser capable of being used for material elaborate machining |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103107480A (en) * | 2013-01-31 | 2013-05-15 | 北京工业大学 | 266 nm full solid state ultraviolet laser for material elaborate processing |
| CN107565371A (en) * | 2017-09-19 | 2018-01-09 | 沈阳理工大学 | A kind of subpulse laser generation method based on double Q-regulating techniques |
-
2013
- 2013-01-31 CN CN 201320055897 patent/CN203150895U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103107480A (en) * | 2013-01-31 | 2013-05-15 | 北京工业大学 | 266 nm full solid state ultraviolet laser for material elaborate processing |
| CN107565371A (en) * | 2017-09-19 | 2018-01-09 | 沈阳理工大学 | A kind of subpulse laser generation method based on double Q-regulating techniques |
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