CN202888602U - Diode end-pumped all-solid-state ultraviolet laser device - Google Patents
Diode end-pumped all-solid-state ultraviolet laser device Download PDFInfo
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- CN202888602U CN202888602U CN201220509138.0U CN201220509138U CN202888602U CN 202888602 U CN202888602 U CN 202888602U CN 201220509138 U CN201220509138 U CN 201220509138U CN 202888602 U CN202888602 U CN 202888602U
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Abstract
The utility model relates to a diode end-pumped all-solid-state ultraviolet laser device, which comprises a laser pumping source, an optical coupling system, a V-shaped, L-shaped or Z-shaped folded resonant cavity, a laser crystal, a Q-switch, a turning mirror, a nonlinear frequency-doubling crystal, a sum frequency crystal, and a harmonic separation mirror. High-peak power quasi-continuous base frequency laser is generated by a Q-switching mode; then the base frequency laser generates frequency-doubling green light and the residual base frequency laser through the nonlinear frequency-doubling crystal arranged in the cavity; and the frequency-doubling green light and the residual base frequency laser generate ultraviolet laser through the nonlinear sum frequency crystal. The generated ultraviolet laser and the residual frequency-doubling green light are output through different paths to form the laser device with green light and ultraviolet double-wavelength output. The diode end-pumped all-solid-state ultraviolet laser device can meet the requirements in practical applications by fully using the two wavelengths; the diode end-pumped all-solid-state ultraviolet laser device is high in system efficiency, compact in structure, and convenient in utilization; and the diode end-pumped all-solid-state ultraviolet laser device can be widely applied to the fields of industrial processing, scientific research, medical treatment, military affair, and the like.
Description
Technical field
The utility model relates to a kind of laser, particularly relates to a kind of diode end-pumped all-solid-state ultraviolet laser.
Technical background
Ultraviolet laser is the technological difficulties in solid state laser field always, but because it has widely demand in a lot of practical applications, so ultraviolet laser has become the focus of people's research.Most end pumping ultraviolet laser all is in the chamber and the frequency mode in the market.This mode compact conformation, beam quality is better, and efficient is higher; Ultraviolet laser based on the end pumping technology adopts intracavity frequency doubling and mode frequently to realize mostly, can utilize the high power density in the chamber to obtain larger Ultra-Violet Laser output, but this mode still can not be converted into Ultra-Violet Laser fully with double-frequency laser, remaining double-frequency laser easily causes the damage of element in the chamber, affects the stability of laser.In order satisfying different materials optionally to be processed, usually to be needed the laser of different wave length.Especially need double-frequency laser and Ultra-Violet Laser alternately to add man-hour, have to use two lasers to be used alternatingly.System complexity is higher, has not only increased cost, has also increased operation.Utilize the mode of prismatic decomposition with double-frequency laser and the outer method of Ultra-Violet Laser output cavity, can obtain comparatively pure Ultra-Violet Laser and double-frequency laser, but because the dispersion angle of general material is not bery large, basic frequency laser, double-frequency laser and Ultra-Violet Laser to be separated necessary increase propagation distance, thereby increase the volume of system.The prism angle adjustment is relatively more responsive simultaneously, easily makes the resonant cavity imbalance, and mechanical fixed precision is had relatively high expectations.In addition, single prism can make the script circular laser beam become oval laser beam, therefore must use prism to aberration for compensation.
The utility model content
The purpose of this utility model is existing such as the problem such as less stable, utilization ratio deficiency and beam quality be relatively poor and a kind of diode end-pumped all-solid-state ultraviolet laser that provides in order to solve in the above-mentioned prior art just.This laser structure is simple flexibly, adopts two subharmonic isolation technics, and double-frequency laser and Ultra-Violet Laser are exported respectively.
The purpose of this utility model is achieved through the following technical solutions, its principle is: utilize the symmetrical fold chamber to reduce the impact of thermal lensing effect, utilize simultaneously coupled system to realize that the with a tight waist and position of pump beam in laser crystal and the basic mode size of vibration basic frequency laser are complementary, so that most of pump energy is converted to the basic mode vibration, thereby make output fundamental frequency light obtain preferably beam quality and higher power stability.Utilize the Q-switch of placing in the laserresonator, obtain the nearly basic mode basic frequency laser of high repetition frequency and short pulse width, basic frequency laser produces the green glow second harmonic by being placed on the frequency-doubling crystal in the chamber; Remaining basic frequency laser and green glow second harmonic again through being placed in the chamber in frequency crystal, generation triple-frequency harmonics Ultra-Violet Laser.Then, the harmonic wave separation mirror that is placed in the chamber is exported the reflection of triple-frequency harmonics Ultra-Violet Laser, and sees through basic frequency laser and double-frequency laser.Remaining double-frequency laser can form doubleway output with Ultra-Violet Laser by forming a chamber mirror output of resonant cavity.
Described a kind of diode end-pumped all-solid-state ultraviolet laser, it comprises laser pumping source, optical coupling system, laserresonator, laser crystal, Q-switch, frequency-doubling crystal and frequency crystal, harmonic wave separation mirror, deviation mirror, it is characterized in that, described laserresonator is " V " type or " L " type or " Z " type refrative cavity structure, take " V " type refrative cavity as example, its light path becomes " V " shape, and along basic frequency laser optical routing total reflective mirror, the chamber mirror separates mirror and consists of with first harmonic; Frequency-doubling crystal is with frequency crystal, laser crystal, second harmonic separates mirror and Q-switch is placed in the laserresonator; Described deviation mirror is placed on outside the laserresonator; The pump light that is produced by laser pumping source is by the collimation focusing of optical coupling system, and it is inner and fully absorbed by laser crystal that the chamber mirror that passes through again " V " type refrative cavity corner incides laser crystal; Then the oscillation threshold of laserresonator forms the basic frequency laser of pulse output by the Q-switch modulation that is placed in the resonant cavity; Basic frequency laser produces frequency doubling green light through frequency-doubling crystal, and remaining basic frequency laser and frequency doubling green light are again through producing Ultra-Violet Laser with the frequency crystal; Ultra-Violet Laser separates mirror through second harmonic and the first deviation mirror is adjusted outbound course; Remaining frequency doubling green light separates mirror, the second deviation mirror and the 3rd deviation mirror through first harmonic and adjusts outbound course.
A kind of diode end-pumped all-solid-state ultraviolet laser described in the utility model, its laserresonator are " V " type or " L " type or " Z " type refrative cavity structure, respectively such as Fig. 1, Fig. 5, shown in Figure 6.
It is 45 degree Ultra-Violet Laser total reflective mirrors that a kind of diode end-pumped all-solid-state ultraviolet laser described in the utility model, its second harmonic separate mirror, and sees through basic frequency laser and double-frequency laser; It is 0 degree basic frequency laser total reflective mirror that first harmonic separates mirror, and sees through double-frequency laser.
A kind of diode end-pumped all-solid-state ultraviolet laser described in the utility model, its laser pumping source is semiconductor laser diode, can be a single-ended pumping of pumping source---such as Fig. 1 and shown in Figure 5, also can be two pumping source both-end pumpings, as shown in Figure 6; Pumping source can be fiber coupling module---as shown in Figure 3, also can be Bar bar pump-coupling---as shown in Figure 4.
A kind of diode end-pumped all-solid-state ultraviolet laser described in the utility model, its refrative cavity can equivalence be linear straight cavity configuration, the part energy of laser crystal absorptive pumping light source will be converted into heat, form non-homogeneous Temperature Distribution through supercooling at crystals, its effect equivalence is a condenser lens, is called thermal lensing effect.
A kind of diode end-pumped all-solid-state ultraviolet laser described in the utility model, its Q-switch that is placed in the chamber are A-O Q-switch device or electric-optically Q-switched device or passive Q-adjusted device.
A kind of diode end-pumped all-solid-state ultraviolet laser described in the utility model, described remaining double-frequency laser can not exported, and only exports Ultra-Violet Laser.
Frequency-doubling crystal described in the utility model is potassium dihydrogen phosphate (KDP), three lithium borates (LBO), bismuth boracic acid (BIBO), KTP (KTP) or barium metaborate (BBO) nonlinear optical crystal.
Described in the utility model and frequency crystal is three lithium borates (LBO), cesium triborate (CBO), CLBO (CLBO) or barium metaborate (BBO) nonlinear optical crystal.
Laser crystal described in the utility model is Nd:YVO
4Crystal, Nd:YAG crystal, Nd:YLF crystal or Nd:Glass etc.
Second harmonic described in the utility model separates mirror one side plating close and frequently crystal Ultra-Violet Laser 45 degree high-reflecting films and basic frequency laser, frequency doubling green light 45 are spent anti-reflection films, another side plating basic frequency laser, frequency doubling green light 45 degree anti-reflection films.
First harmonic described in the utility model separates mirror near plating frequency doubling green light 0 degree anti-reflection film and basic frequency laser 0 degree high-reflecting film with the one side of frequency crystal, and another side plates frequency doubling green light 0 and spends anti-reflection film.
The utility model is suitable for the application in the fields such as laser marking, laser scoring, laser scribing, laser medicine scientific research and military affairs.
The beneficial effects of the utility model are: compact conformation, simple flexibly, and adopt two subharmonic isolation technics double-frequency laser and Ultra-Violet Laser can be exported respectively, system effectiveness is high.
(4) description of drawings
Fig. 1: a kind of diode end-pumped all-solid-state ultraviolet laser " V " cavity structure schematic diagram;
Fig. 2: non-linear frequency-doubling crystal, non-linear and frequency crystal operation principle schematic diagram;
Among Fig. 2,11 is non-linear frequency-doubling crystal, and 12 is non-linear and the frequency crystal.Only when satisfying the nonlinear optics phase-matching condition, non-linear frequency multiplication process could occur for the basic frequency laser 10 of linear polarization and double-frequency laser 18.According to the nonlinear optics principle, the refractive index of the laser of different wave length, different polarization direction and different incident directions when the nonlinear crystal internal communication is different.For the frequency multiplication process, to only have when basic frequency laser 10 and double-frequency laser 18 refractive index during at non-linear frequency-doubling crystal 11 internal communication equates, the frequency multiplication process could occur.Equally, only have when basic frequency laser, double-frequency laser and and the refractive index of frequency laser with frequency crystal 12 internal communication time the when satisfying following the relation, and the frequency process could occur:
N in the formula
ωBe wavelength X
ωBasic frequency laser with frequency crystal 12 in refractive index when propagating, n
2 ωBe wavelength X
2 ωDouble-frequency laser with frequency crystal 12 in refractive index when propagating, n
3 ωBe wavelength X
3 ωBasic frequency laser with frequency crystal 12 in refractive index when propagating.
Fig. 3: optical-fiber coupling semiconductor laser pumping source pump mode schematic diagram;
Among Fig. 3,19 semiconductor laser diode modules for coupling fiber output; 20 is energy-transmission optic fibre; Spherical lens 3 and 4 forms the coupling focusing system, and the pumping laser 2 that optical fiber is exported collimates, focuses on laser crystal 8 inside, and the anti-reflection film of pumping laser wavelength is all plated on the lens two sides.
Fig. 4: Bar bar diameter pump mode schematic diagram;
Among Fig. 4,21 is semiconductor laser diode Bar bar; Cylindrical lens 22 and spherical lens 23 form the coupling focusing system, and the pumping laser 2 that the Bar bar is sent collimates, focuses on laser crystal 8 inside, and the anti-reflection film of pumping laser wavelength is all plated on the lens two sides.
Fig. 5: a kind of diode end-pumped all-solid-state ultraviolet laser " L " cavity structure schematic diagram;
It comprises laser pumping source 1, optical coupling system, laserresonator, laser crystal 8, Q-switch 9, frequency-doubling crystal 11 and frequency crystal 12, harmonic wave separation mirror, the second deviation mirror 16; Its resonant cavity light path is separated mirror 6 by total reflective mirror 7, chamber mirror 5 and is consisted of " L " type along basic frequency laser 10 with first harmonic; Frequency-doubling crystal 11 is with frequency crystal 12, laser crystal 8, second harmonic separates mirror 13 and Q-switch 9 is placed in the resonant cavity; The second deviation mirror 16 is placed on outside the resonant cavity; The pump light 2 that is produced by laser pumping source 1 is by the collimation focusing of optical coupling system, and it is inner and fully absorbed by laser crystal 8 that the chamber mirror 5 that passes through again " L " type refrative cavity corner incides laser crystal 8; Then the oscillation threshold of resonant cavity forms the basic frequency laser 10 of pulse output by Q-switch 9 modulation that are placed in the resonant cavity; Basic frequency laser 10 produces frequency doubling green light 18 through frequency-doubling crystal 11, and remaining basic frequency laser 10 and frequency doubling green light 18 are again through producing Ultra-Violet Laser 15 with frequency crystal 12; Ultra-Violet Laser 15 separates mirror 13 outputs through second harmonic; Remaining frequency doubling green light 18 separates mirror 6 through first harmonic and the second deviation mirror 16 is adjusted outbound course.
Fig. 6: a kind of diode end-pumped all-solid-state ultraviolet laser " Z " cavity structure schematic diagram;
It comprises laser pumping source 1, optical coupling system, laserresonator, laser crystal 8, Q-switch 9, frequency-doubling crystal 11 and frequency crystal 12, harmonic wave separation mirror, deviation mirror; Its resonant cavity light path is along basic frequency laser 10, and optical routing total reflective mirror 7, chamber mirror 5 separate mirror 6 and consist of " Z " type with first harmonic; Frequency-doubling crystal 11 is with frequency crystal 12, laser crystal 8, second harmonic separates mirror 13 and Q-switch 9 is placed in the resonant cavity; The first deviation mirror 14 is placed on outside the resonant cavity; The pump light 2 that is produced by laser pumping source 1 is by the collimation focusing of optical coupling system, and it is inner and fully absorbed by laser crystal 8 that the chamber mirror 5 that passes through again " Z " type refrative cavity corner incides laser crystal 8; Pumping source can be two, forms double-end pumping; Then the oscillation threshold of resonant cavity forms the basic frequency laser 10 of pulse output by Q-switch 9 modulation that are placed in the resonant cavity; Basic frequency laser 10 produces frequency doubling green light through frequency-doubling crystal 11, and remaining basic frequency laser 10 and frequency doubling green light 18 are again through producing Ultra-Violet Laser 15 with frequency crystal 12; Ultra-Violet Laser 15 separates mirror 13 through second harmonic and the first deviation mirror 14 is adjusted outbound course; Remaining frequency doubling green light 18 separates mirror 6 outputs through first harmonic.
Embodiment
A kind of diode end-pumped all-solid-state ultraviolet laser that the utility model is related, its technical scheme by reference to the accompanying drawings 1,2 and 3 be described in detail as follows:
Nd:YVO is got by resonant cavity, laser crystal 8(in basic frequency laser of the present utility model source
4As laser crystal 8) and the pump unit formation.The resonant cavity of laser is " V " type refrative cavity structure, and its light path becomes " V " font, separates mirror 6 with first harmonic along basic frequency laser 10 optical routing total reflective mirrors 7, chamber mirror 5 and consists of; Speculum 7 is level crossing, its inboard plating fundamental frequency light (1064nm) high-reflecting film, chamber mirror 5 is plane mirror, its one side plating pump light (808nm) anti-reflection film, another side plates pump light anti-reflection film and fundamental frequency light high-reflecting film simultaneously, first harmonic separates mirror 6 one sides and plates fundamental frequency light highly reflecting films and double-frequency laser anti-reflection film, another side plating double-frequency laser anti-reflection film; It is the structure centre of equivalent cavity that laser crystal 8 is positioned on the optical axis near chamber mirror 5, and crystal two logical light faces plate pump light and fundamental frequency light anti-reflection film simultaneously; Adopt pump light source 1(808nm) as pumping source; Pump unit is made of energy-transmission optic fibre 20 and coupled system; Coupled system is comprised of two-piece type lens 3,4, and two lens all plate the pump light anti-reflection film, and the pump light 2 of 3 pairs of optical fiber outputs of first lens collimates, and 4 pairs of pump lights of second lens 2 focus on, and the distance between two lens 3,4 is adjustable; Pump light is by optical fiber and coupled system, and passing through chamber, " V " type refrative cavity turning mirror 5, to incide laser crystal 8 inner and fully absorbed by laser crystal 8 again; The oscillation threshold of resonant cavity is got acousto-optic Q modulation switch 9, two-sided coating basic frequency light anti-reflection film by the active Q-switch 9(that is placed in the chamber) modulation, then form the basic frequency laser 10 that pulse is exported; The basic frequency laser 10 of pulse output all plates basic frequency laser and double-frequency laser anti-reflection film through frequency-doubling crystal 11(two sides) produce frequency doubling green light 18, and remaining basic frequency laser 10 is arranged; Frequency doubling green light 18 and remaining basic frequency laser 10 are again through all plating basic frequency laser, double-frequency laser and and frequency laser three-wavelength anti-reflection film with frequency crystal 12(two sides) generation Ultra-Violet Laser 15; Ultra-Violet Laser 15 separates mirror 13 reflection outputs by the second harmonic that 45 degree are placed in the resonant cavity, and adjusts outbound course by the first deviation mirror 14; Remaining double-frequency laser 18 can separate mirror 13 by second harmonic with basic frequency laser 10, then remaining frequency doubling green light 18 sees through first harmonic separation mirror 6(and simultaneously plates basic frequency laser high-reflecting film and double-frequency laser anti-reflection film, another side plating double-frequency laser anti-reflection film) output, and by the second deviation mirror 16 and the 3rd deviation mirror 17 adjustment outbound courses; Remaining basic frequency laser 10 is kept vibration in the chamber.
The specific design example is as follows: place laser each several part device according to Fig. 1 in light path, comprise that total reflective mirror 7, chamber mirror 5, first harmonic separate mirror 6, laser crystal 8, acousto-optic Q modulation switch 9, coupled system 3 and 4; The focal length of the lens 3 of coupled system is 15mm, and the focal length of lens 4 is 30mm; Total reflective mirror 7 is 150mm to the distance at laser crystal 8 centers, chamber mirror 5 is 20mm to the distance at laser crystal center, harmonic wave separation mirror 6 is 130mm to the distance at chamber mirror 5 centers, the angle angle of " V " die cavity two arms is 18 degree, coupled system light output end (center, rear surface of eyeglass 4) is 30mm apart from the distance at laser crystal 8 centers, and pump light 2 is 0.8mm through the averaged focus spot diameter of coupled system in laser crystal 8.Theoretical according to thermal lens, when the pump power of laser crystal absorption was 22W, its equivalent heat focal length of lens was about about 170mm; Utilize the beam transformation matrix law, can calculate when equivalent cavity is long and be 300mm, when the thermal lens that laser crystal 8 produces was positioned at the center of equivalent cavity, the average basic mode diameter of vibration basic frequency laser 10 in crystal 8 was 0.73mm, approached with the average diameter of pump light 2 in crystal 8.Then place acousto-optic Q modulation switch 9, the oscillation threshold in modulating resonance chamber in the position near total reflective mirror 7.Pulsed base frequency laser 10 produces frequency doubling green light 18 through the frequency-doubling crystal 11 that is placed in the chamber, and the length of frequency-doubling crystal 11 is 10mm; Frequency doubling green light 18 and remaining basic frequency laser 10 processes and frequency crystal 12 produce Ultra-Violet Lasers 15, and the length of crystal 12 is 10mm frequently; Ultra-Violet Laser 15 separates mirror 13 reflection outputs by the second harmonic that 45 degree are placed in the chamber, and the first deviation mirror 14 plays the effect that changes transmission path; Frequency doubling green light 18 separates mirror 6 outputs by the first harmonic as resonator mirror, and the second deviation mirror 16 and the 3rd deviation mirror 17 play the effect that changes transmission path.
Claims (6)
1. diode end-pumped all-solid-state ultraviolet laser, comprise laser pumping source (1), optical coupling system, laserresonator, laser crystal (8), Q-switch (9), frequency-doubling crystal (11) and frequency crystal (12), harmonic wave separation mirror, deviation mirror, it is characterized in that, described laserresonator is " V " type or " L " type or " Z " type refrative cavity structure, " V " type refrative cavity, its light path becomes " V " shape, along basic frequency laser (10) optical routing total reflective mirror (7), chamber mirror (5) separates mirror (6) and consists of with first harmonic; Frequency-doubling crystal (11) is with frequency crystal (12), laser crystal (8), second harmonic separates mirror (13) and Q-switch (9) is placed in the laserresonator; Described deviation mirror is placed on outside the laserresonator; The pump light (2) that is produced by laser pumping source (1) is by the collimation focusing of optical coupling system, and it is inner and fully absorbed by laser crystal (8) that the chamber mirror (5) that passes through again " V " type refrative cavity corner incides laser crystal (8); The oscillation threshold of laserresonator forms the basic frequency laser (10) of pulse output by Q-switch (9) modulation that is placed in the laserresonator; Basic frequency laser (10) produces frequency doubling green light (18) through frequency-doubling crystal (11), and remaining basic frequency laser (10) and frequency doubling green light (18) pass through and frequently crystal (12) generation Ultra-Violet Laser (15) again; Ultra-Violet Laser (15) separates mirror (13) through second harmonic and the first deviation mirror (14) is adjusted outbound course; Remaining frequency doubling green light (18) separates mirror (6), the second deviation mirror (16) and the 3rd deviation mirror (17) through first harmonic and adjusts outbound course.
2. a kind of diode end-pumped all-solid-state ultraviolet laser according to claim 1 is characterized in that, described laser pumping source (1) is semiconductor laser diode, can be a single-ended pumping of pumping source, or two pumping source both-end pumpings; Pumping source can be fiber coupling module, or Bar bar pump-coupling.
3. a kind of diode end-pumped all-solid-state ultraviolet laser according to claim 1 is characterized in that, described frequency-doubling crystal (11) is potassium dihydrogen phosphate or three lithium borates or bismuth boracic acid or KTP or barium metaborate nonlinear optical crystal.
4. a kind of diode end-pumped all-solid-state ultraviolet laser according to claim 1 is characterized in that, and crystal (12) is three lithium borates or cesium triborate or CLBO or barium metaborate nonlinear optical crystal frequently.
5. a kind of diode end-pumped all-solid-state ultraviolet laser according to claim 1 is characterized in that, described laser crystal (8) is Nd:YVO
4, or Nd:YAG crystal or Nd:YLF crystal or Nd:Glass.
6. a kind of diode end-pumped all-solid-state ultraviolet laser according to claim 1 is characterized in that, described Q-switch (9) is A-O Q-switch device or electric-optically Q-switched device or passive Q-adjusted device.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201220509138.0U CN202888602U (en) | 2012-09-29 | 2012-09-29 | Diode end-pumped all-solid-state ultraviolet laser device |
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| CN201220509138.0U CN202888602U (en) | 2012-09-29 | 2012-09-29 | Diode end-pumped all-solid-state ultraviolet laser device |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104269728A (en) * | 2014-10-24 | 2015-01-07 | 许昌学院 | Semiconductor laser of solid-state ultraviolet laser |
| CN104409962A (en) * | 2014-11-28 | 2015-03-11 | 江苏天元激光科技有限公司 | Diode end face pumping all-solid-state ultraviolet laser |
| CN107946891A (en) * | 2017-12-14 | 2018-04-20 | 湖北工业大学 | A kind of high-power ultraviolet solid-state laser |
| CN108767640A (en) * | 2018-05-25 | 2018-11-06 | 国科世纪激光技术（天津）有限公司 | A kind of novel low ultraviolet solid state laser with high green light |
-
2012
- 2012-09-29 CN CN201220509138.0U patent/CN202888602U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104269728A (en) * | 2014-10-24 | 2015-01-07 | 许昌学院 | Semiconductor laser of solid-state ultraviolet laser |
| CN104409962A (en) * | 2014-11-28 | 2015-03-11 | 江苏天元激光科技有限公司 | Diode end face pumping all-solid-state ultraviolet laser |
| CN107946891A (en) * | 2017-12-14 | 2018-04-20 | 湖北工业大学 | A kind of high-power ultraviolet solid-state laser |
| CN108767640A (en) * | 2018-05-25 | 2018-11-06 | 国科世纪激光技术（天津）有限公司 | A kind of novel low ultraviolet solid state laser with high green light |
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