CN107565371A - A kind of subpulse laser generation method based on double Q-regulating techniques - Google Patents
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Abstract
一种基于双调Q技术的子脉冲激光产生方法是指采用双调Q技术,在低重复频率调Q开关调制激光脉冲输出过程中,利用高重复频率调Q开关再次进行调制,进而获得多个子脉冲激光输出。本发明结构简单,易于操作,可应用于激光材料加工领域,多个子脉冲作用到工件上,变成激光子脉冲连续作用,减少或消除等离子体对激光加工过程中产生的干扰,大大提高了材料的加工精度。
A sub-pulse laser generation method based on double Q-switching technology refers to the use of double Q-switching technology. In the process of modulating laser pulse output by low repetition frequency Q-switching switch, high repetition frequency Q-switching switch is used to modulate again, and then multiple sub-pulse lasers are obtained. Pulse laser output. The invention is simple in structure and easy to operate, and can be applied to the field of laser material processing. Multiple sub-pulses are applied to the workpiece, which becomes the continuous action of laser sub-pulses, which reduces or eliminates the interference of plasma on the laser processing process, and greatly improves the material efficiency. machining accuracy.
Description
技术领域technical field
本发明属于激光技术领域,尤其涉及一种基于双调Q技术的子脉冲激光产生方法,采用的装置为固体激光器装置。The invention belongs to the field of laser technology, and in particular relates to a sub-pulse laser generation method based on double Q-switching technology, and the adopted device is a solid-state laser device.
背景技术Background technique
近几年激光加工技术取得了迅速的发展,激光加工具有非接触式的特点,同时还具有加工精度高、加工对象形变小、以及加工成本低等优势。而在激光加工过程中,高峰值功率激光导致的等离子体极大地影响着激光能量向工件的传输: (1)激光束能量在穿过等离子体时吸收消耗增加,传递到工件的有效能量相应减少。(2)等离子体的负透镜效应导致激光束穿过等离子体后产生偏折角,影响激光束在工件表面的聚焦状态。In recent years, laser processing technology has achieved rapid development. Laser processing has the characteristics of non-contact, and also has the advantages of high processing precision, small deformation of the processing object, and low processing cost. In the process of laser processing, the plasma caused by high peak power laser greatly affects the transmission of laser energy to the workpiece: (1) The absorption and consumption of laser beam energy increases when passing through the plasma, and the effective energy transmitted to the workpiece decreases accordingly . (2) The negative lens effect of the plasma causes the laser beam to produce a deflection angle after passing through the plasma, which affects the focusing state of the laser beam on the workpiece surface.
目前,光致等离子体的控制方法主要有激光摆动法、外加电磁场控制法、吹辅助气体法等(1)。激光摆动法能够获得更大深度比的焊缝,但这种方法在实际操作中不容易控制。外加电磁场控制法是指利用外加电磁场控制等离子体,方法简单,成本较低,但是在实际中应用较少,有待进一步的检验。吹辅助气体法虽然可以控制等离子体,然而该方法对侧吹气体的位置、角度、压力等都有严格的要求。At present, the control methods of photoinduced plasma mainly include laser swing method, external electromagnetic field control method, auxiliary gas blowing method, etc. (1) . The laser swing method can obtain welds with a larger depth ratio, but this method is not easy to control in actual operation. The external electromagnetic field control method refers to controlling the plasma by using an external electromagnetic field. The method is simple and the cost is low, but it is rarely used in practice and needs further inspection. Although the method of blowing auxiliary gas can control the plasma, this method has strict requirements on the position, angle and pressure of the side blowing gas.
发明内容Contents of the invention
本发明提供一种基于双调Q技术的子脉冲激光产生方法,本方法采用双调Q开关器件,对激光进行调Q,在低重复频率调Q开关调Q输出过程中,利用高重复频率的调Q开关再进行调制,将激光脉冲调制成多个子脉冲。The invention provides a sub-pulse laser generation method based on double Q-switching technology. The method uses a double Q-switching device to Q-switch the laser, and uses a high-repetition-frequency The Q-switching switch is then modulated to modulate the laser pulse into multiple sub-pulses.
当作用到工件时,变成激光子脉冲连续作用,可有效减少或消除一次巨脉冲激光作用工件时产生的等离子体现象。When it acts on the workpiece, it becomes a continuous action of laser sub-pulses, which can effectively reduce or eliminate the plasma phenomenon generated when a giant pulse laser acts on the workpiece.
本发明的目的是克服目前激光加工过程中,高峰值功率激光产生的等离子体,导致激光加工效率下降的缺点,将一个激光脉冲分解成多个子脉冲序列,可减少或消除光致等离子体对激光加工过程中的干扰。The purpose of the present invention is to overcome the shortcomings of the plasma generated by the high peak power laser in the current laser processing process, resulting in a decrease in laser processing efficiency, and decompose a laser pulse into multiple sub-pulse sequences, which can reduce or eliminate the impact of photoinduced plasma on the laser. Interference during processing.
采用的技术方案是:The technical solutions adopted are:
一种基于双调Q技术的子脉冲激光产生方法,包括以下步骤:A sub-pulse laser generation method based on double Q-switching technology, comprising the following steps:
首先通过低重复频率调Q产生脉宽较宽(20-50纳秒)的巨脉冲,其次再通过高重复频率调Q对产生的巨脉冲进行调制,最终将激光脉冲调制成多个子脉冲。Firstly, a giant pulse with a wide pulse width (20-50 nanoseconds) is generated by low repetition frequency Q-switching, and then the generated giant pulse is modulated by high-repetition frequency Q-switching, and finally the laser pulse is modulated into multiple sub-pulses.
低重复频率调Q开关的重复频率为100-1kHz,高重复频率调Q开关的重复频率为200MHz-500MHz。The repetition frequency of the low repetition frequency Q-switching switch is 100-1kHz, and the repetition frequency of the high repetition frequency Q-switching switch is 200MHz-500MHz.
其优点在于:Its advantages are:
采用两个调Q开关构成双调Q技术,双调Q技术对激光棒发出的激光进行双调制,从而获得多个子脉冲激光输出。本发明结构简单,制作成本较低,工业化实际应用中便于操作,可在激光加工领域中广泛应用,多个子脉冲作用到工件上,变成激光子脉冲连续作用,减少或消除等离子体对激光加工过程中产生的干扰,大大提高了材料的加工精度。Two Q-switching switches are used to form a double-Q-switching technology. The double-Q-switching technology double-modulates the laser light emitted by the laser rod, so as to obtain multiple sub-pulse laser outputs. The invention has simple structure, low manufacturing cost, easy operation in industrial application, and can be widely used in the field of laser processing. Multiple sub-pulses are applied to the workpiece, which becomes continuous action of laser sub-pulses, reducing or eliminating the effect of plasma on laser processing. The interference generated in the process greatly improves the processing accuracy of the material.
附图说明Description of drawings
图1是本发明实施例1的结构示意图。Fig. 1 is a schematic structural diagram of Embodiment 1 of the present invention.
图2是本发明实施例2的结构示意图。Fig. 2 is a schematic structural diagram of Embodiment 2 of the present invention.
图3是低重复频率调Q输出脉冲波形图。Figure 3 is a low repetition frequency Q-modulated output pulse waveform diagram.
图4是低重复频率和高重复频率双调Q输出脉冲波形图。Figure 4 is a low repetition frequency and high repetition frequency dual Q-modulated output pulse waveform diagram.
具体实施方式detailed description
激光调Q是指采用某种办法使谐振腔在泵浦开始时处于高损耗低Q值状态,这时激光振荡的阈值很高,粒子密度反转数即使积累到很高水平也不会产生振荡。当粒子密度反转数达到其峰值时,突然使腔的Q值增大,将导致激光介质的增益大大超过阈值,极其快速的产生振荡。这时存储在亚稳态上的粒子所具有的能量会很快转换为光子的能量,光子像雪崩一样以极高的速率增长,激光器便可输出一个峰值功率高、宽度窄的激光巨脉冲(2)。Laser Q-switching refers to the use of a certain method to make the resonator in a state of high loss and low Q value at the beginning of pumping. At this time, the threshold of laser oscillation is very high, and even if the number of particle density inversions accumulates to a high level, no oscillation will occur. . When the particle density inversion number reaches its peak value, the Q value of the cavity is suddenly increased, which will cause the gain of the laser medium to greatly exceed the threshold value, resulting in extremely rapid oscillation. At this time, the energy of the particles stored in the metastable state will be quickly converted into the energy of photons, and the photons will grow at a very high rate like an avalanche, and the laser can output a giant laser pulse with high peak power and narrow width ( 2) .
双调Q技术对激光脉冲进行双调制,在低重复频率调Q开关2调Q输出过程中,利用高重复频率调Q开关5进行二次调制,将低重复频率调Q开关2调制输出的激光脉冲进行细分,从而将激光脉冲调制成多个子脉冲。Double Q-switching technology double-modulates the laser pulse. During the Q-switching output process of the low-repetition-frequency Q-switch 2, the high-repetition-frequency Q-switch 5 is used for secondary modulation, and the low-repetition-frequency Q-switch 2 modulates the output laser The pulse is subdivided, thereby modulating the laser pulse into multiple sub-pulses.
(1)刘锟,刘金合,周畅等,等. 激光深熔焊接光致等离子体的控制(J). 热加工工艺,2007,36(23):86-88。(1) Liu Kun, Liu Jinhe, Zhou Chang, et al. Control of photoplasma in laser deep penetration welding (J). Thermal Processing Technology, 2007,36(23):86-88.
(2)周炳琨. 激光原理(M). 北京:国防工业出版社,2007。(2) Zhou Bingkun. Laser Principles (M). Beijing: National Defense Industry Press, 2007.
实施例1Example 1
如图1所示,一种基于双调Q技术的子脉冲激光产生方法,包括以下步骤:打开电源开关,在不打开双调Q开关驱动时缓慢增加泵浦电压,微调第一全反镜1以及输出镜6使输出光斑处于最佳状态。As shown in Figure 1, a sub-pulse laser generation method based on double Q-switching technology includes the following steps: turn on the power switch, slowly increase the pumping voltage when the double Q-switching switch is not turned on, and fine-tune the first total mirror 1 And the output mirror 6 makes the output spot in the best state.
接着,打开低重复频率调Q开关驱动7,驱动低重复频率调Q开关2,此时输出激光脉冲形状如图3所示。Next, turn on the low repetition frequency Q-switch drive 7 to drive the low repetition frequency Q-switch 2. At this time, the output laser pulse shape is shown in FIG. 3 .
若同时通过同步触发器3同步打开高重复频率调Q开关驱动8给出高重复频率驱动信号驱动高重复频率调Q开关5,此时输出激光脉冲形状如图4所示为多个输出激光子脉冲波形图。因此,通过低重复频率和高重复频率构成的双调Q技术,即低重复频率调Q开关2调Q激光脉冲输出过程中,高重复频率调Q开关5再次进行调制,可以将激光脉冲调制成多个子脉冲,从而获得多个子脉冲激光输出。If at the same time, the high repetition frequency Q-switching switch drive 8 is synchronously turned on by the synchronous trigger 3 to provide a high repetition frequency driving signal to drive the high repetition frequency Q-switching switch 5, the shape of the output laser pulse is as shown in Figure 4 as a plurality of output laser beams. Pulse waveform diagram. Therefore, through the double Q-switching technology composed of low repetition frequency and high repetition frequency, that is, during the Q-switching laser pulse output process of the low repetition frequency Q switch 2, the high repetition frequency Q switch 5 is modulated again, and the laser pulse can be modulated into multiple sub-pulses, thereby obtaining multiple sub-pulse laser outputs.
一种基于双调Q技术的子脉冲激光产生方法采用的基于双调Q技术的子脉冲激光器,包括第一全反镜1、低重复频率调Q开关2、高重复频率调Q开关5、激光棒4、输出镜6、低重复频率调Q开关驱动7、高重复频率调Q开关驱动8和同步触发器3,所述的这些器件均为已知器件。A sub-pulse laser generation method based on double Q-switching technology. A sub-pulse laser based on double Q-switching technology, including a first total reflection mirror 1, a low repetition rate Q-switch 2, a high repetition rate Q-switch 5, a laser Rod 4, output mirror 6, low repetition rate Q-switch drive 7, high repetition rate Q-switch drive 8 and synchronous flip-flop 3, all of these devices are known devices.
激光棒4可采用Nd:YAG激光棒。Laser rod 4 can adopt Nd:YAG laser rod.
低重复频率调Q和高重复频率调Q构成双调Q,第一全反镜1和输出镜6构成激光器谐振腔,波长为1064nm激光在谐振腔中振荡输出。Low repetition frequency Q-switching and high repetition frequency Q-switching constitute double Q-switching, the first total reflection mirror 1 and output mirror 6 constitute a laser resonator, and the laser with a wavelength of 1064nm oscillates and outputs in the resonator.
第一全反镜1为凹面反射镜。The first total reflection mirror 1 is a concave reflection mirror.
同步触发器3连接低重复频率调Q开关驱动7和高重复频率调Q开关驱动8,实现低重复频率驱动和高重复频率驱动的同步触发和延时控制。The synchronous trigger 3 is connected to the low repetition frequency Q-switch drive 7 and the high repetition frequency Q-switch drive 8 to realize synchronous triggering and delay control of the low repetition frequency drive and the high repetition frequency drive.
实施例2Example 2
实施例2与实施例1具体实施方式基本相同,其不同之处在于实施例2进一步采用腔倒空技术。打开低重复频率调Q开关驱动7,驱动低重复频率调Q开关2工作,使得低重复频率调Q开关2调制出巨脉冲激光。同时通过同步触发器3同步打开高重复频率调Q开关驱动8给出高重复频率驱动信号驱动高重复频率调Q开关5,高重复频率调Q开关5处于打开状态,将低重复频率调Q开关2调制的激光脉冲进行细分,从而将激光脉冲调制成多个子脉冲,由于高重复频率调Q开关5在高重复频率驱动信号下会使得调Q晶体具有布拉格衍射效应,所有运行功率基本上衍射到第一射级,获得的多个子脉冲激光的传播方向会发生改变入射到第三全反镜9,由第三全反镜9按入射光路反射到第四反射镜10上,这样就导致在第二全反镜11和第三全反镜9形成的谐振腔中所有的光能从谐振腔内迅速倒出腔外,最终得到多个子脉冲激光输出。Embodiment 2 is basically the same as embodiment 1 in terms of specific implementation, the difference is that embodiment 2 further adopts cavity emptying technology. Turn on the low repetition frequency Q-switch drive 7 to drive the low repetition-frequency Q-switch 2 to work, so that the low repetition-frequency Q-switch 2 modulates the giant pulse laser. Simultaneously open the high repetition frequency Q-switching switch drive 8 synchronously by synchronous trigger 3 and provide the high repetition frequency driving signal to drive the high repetition frequency Q-switching switch 5, the high repetition frequency Q-switching switch 5 is in open state, the low repetition frequency Q-switching switch 2 The modulated laser pulse is subdivided, so that the laser pulse is modulated into multiple sub-pulses. Since the high repetition frequency Q-switching switch 5 will make the Q-switching crystal have Bragg diffraction effect under the high repetition frequency driving signal, all operating power basically diffracts When the first shot level is reached, the propagation direction of the multiple sub-pulse lasers obtained will change and enter the third total reflection mirror 9, and then be reflected by the third total reflection mirror 9 to the fourth reflection mirror 10 according to the incident light path, thus resulting in All the light energy in the resonant cavity formed by the second total reflection mirror 11 and the third total reflection mirror 9 is quickly poured out of the cavity from the cavity, and finally multiple sub-pulse laser outputs are obtained.
一种基于双调Q技术的子脉冲激光产生方法采用的基于双调Q技术的子脉冲激光器,该激光器包括第二全反镜11、激光棒4、低重复频率调Q开关2、高重复频率调Q开关5、第三全反镜9、低重复频率调Q开关驱动7、高重复频率调Q开关驱动8、同步触发器3和第四全反镜10,此器件均为已知器件。A sub-pulse laser based on double Q-switching technology adopted by the sub-pulse laser generation method based on double Q-switching technology, the laser includes a second total reflection mirror 11, a laser rod 4, a low repetition rate Q-switching switch 2, a high repetition The Q-switch 5, the third total mirror 9, the low repetition frequency Q-switch driver 7, the high repetition frequency Q-switch driver 8, the synchronous trigger 3 and the fourth total mirror 10 are all known devices.
第三全反镜9为曲率半径为1米的凹面反射镜,第四反射镜10和第二反射镜11为平面反射镜。The third total reflection mirror 9 is a concave reflection mirror with a radius of curvature of 1 meter, and the fourth reflection mirror 10 and the second reflection mirror 11 are plane reflection mirrors.
高重复频率调Q开关5以布拉格衍射角度斜放置在激光器腔内,同步触发器3连接低重复频率调Q开关驱动7和高重复频率调Q开关驱动8,实现低重复频率驱动和高重复频率驱动的同步触发和延时控制。The high repetition frequency Q switch 5 is obliquely placed in the laser cavity at the Bragg diffraction angle, and the synchronous trigger 3 is connected to the low repetition frequency Q switch driver 7 and the high repetition frequency Q switch driver 8 to realize low repetition frequency drive and high repetition frequency Driven synchronous trigger and delay control.
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JP2022539447A (en) * | 2020-02-13 | 2022-09-09 | エルトラグローバル カンパニー リミテッド | Multiple laser pulse oscillation method and multiple laser pulse oscillation device using multiple Q-switch |
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CN111106529A (en) * | 2019-09-16 | 2020-05-05 | 领亚电子科技股份有限公司 | A U-shaped resonator laser with dual acousto-optic Q-switching |
JP2022539447A (en) * | 2020-02-13 | 2022-09-09 | エルトラグローバル カンパニー リミテッド | Multiple laser pulse oscillation method and multiple laser pulse oscillation device using multiple Q-switch |
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Application publication date: 20180109 |