CN203021642U - OLED (Organic Light Emitting Diode) evaporating hood - Google Patents
OLED (Organic Light Emitting Diode) evaporating hood Download PDFInfo
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- CN203021642U CN203021642U CN 201220723315 CN201220723315U CN203021642U CN 203021642 U CN203021642 U CN 203021642U CN 201220723315 CN201220723315 CN 201220723315 CN 201220723315 U CN201220723315 U CN 201220723315U CN 203021642 U CN203021642 U CN 203021642U
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- Prior art keywords
- evaporation
- evaporating
- oled
- segment
- cover
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- 238000001704 evaporation Methods 0.000 title claims abstract description 109
- 230000008020 evaporation Effects 0.000 claims abstract description 97
- 239000000463 material Substances 0.000 claims abstract description 5
- 239000000956 alloy Substances 0.000 claims description 6
- 229910045601 alloy Inorganic materials 0.000 claims description 6
- QXZUUHYBWMWJHK-UHFFFAOYSA-N [Co].[Ni] Chemical compound [Co].[Ni] QXZUUHYBWMWJHK-UHFFFAOYSA-N 0.000 claims description 3
- 229910052738 indium Inorganic materials 0.000 claims description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 3
- -1 Rhometal Chemical compound 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 17
- 238000004519 manufacturing process Methods 0.000 abstract description 11
- 239000011521 glass Substances 0.000 abstract description 6
- 239000000758 substrate Substances 0.000 abstract description 6
- 239000002245 particle Substances 0.000 abstract description 5
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 abstract description 3
- 230000002708 enhancing effect Effects 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 16
- 239000011368 organic material Substances 0.000 description 7
- 230000003245 working effect Effects 0.000 description 5
- 229920006254 polymer film Polymers 0.000 description 4
- 230000003467 diminishing effect Effects 0.000 description 3
- 230000004304 visual acuity Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- MRNHPUHPBOKKQT-UHFFFAOYSA-N indium;tin;hydrate Chemical compound O.[In].[Sn] MRNHPUHPBOKKQT-UHFFFAOYSA-N 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Images
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- Electroluminescent Light Sources (AREA)
Abstract
The utility model relates to an OLED (Organic Light Emitting Diode) evaporating hood which comprises an evaporating plate. The evaporating plate comprises an ITO (Indium Tin Oxide) contact surface and an evaporating surface. The evaporating plate is provided with a plurality of evaporating holes in central symmetry. The evaporating holes penetrate through the ITO contact surface from the evaporating surface, and the section is gradually reduced. According to the utility model, a dead angle area in conventional process is overcome, so that when the hood is used for evaporation, organic light emitting particles can reach the predetermined position on a glass substrate to a larger extent, thereby improving the quality of an OLED display screen, enhancing the usage rate and the film forming rate of an organic light emitting material, lowering the manufacturing cost of the OLED display screen, and effectively prolonging the service life of the evaporating hood.
Description
Technical field
The utility model relates to OLED display screen manufacturing technology field, particularly a kind of OLED evaporation cover.
Background technology
Organic electroluminescence device has luminous, the reaction times is fast, the visual angle is wide, cost is low, manufacturing process is simple, resolving power is good and the multiple advantages such as high brightness, is considered to the emerging utilisation technology of follow-on flat-panel screens.At OLED(Organic Light-Emitting Diode, organic electroluminescent LED) in technology, mask plate technology in vacuum evaporation is an extremely important and crucial technology, and the grade of this technology directly affects quality and the manufacturing cost of OLED product.
when being applied to evaporation, the evaporation of traditional technology generally adopts positive and negative while etch process with mask plate, although can produce the opening with certain taper, but the reason due to lateral erosion, there is back draught in the indium tin oxide contact surface opening that makes mask plate be adjacent to the indium tin oxide contact surface of evaporation ITO glass substrate, the existence of this kind reversed cone angle, produce dead angle area, existence due to this dead angle area, can't reach the evaporation thickness requirement, cause the one-tenth film uniformity of deposition material to reduce, affect evaporating quality, extended the evaporation time, increase manufacturing cost.
General evaporation with the thickness of shadow mask (being mask plate) about 100 μ m, and the thickness of the organic material film of need evaporation is in the 100nm left and right, opening size minimum on shadow mask can be 10 μ m, blocks so the sidewall of zero draft opening will certainly produce in evaporate process.On the other hand, if the method for the thickness by the attenuate shadow mask reduces the coverage extent of shadow mask, can affect again the work-ing life of shadow mask, because shadow mask is excessively thin, yielding, the use of the shadow mask of impact reduces evaporating quality.
The utility model content
Main purpose of the present utility model is, for above-mentioned deficiency of the prior art, provides a kind of OLED evaporation cover, has rate of utilization and the yield polymer films that can improve luminous organic material, extends the work-ing life of evaporation cover and saves manufacture cost and other advantages.
For achieving the above object, the utility model by the following technical solutions.
The utility model provides a kind of OLED evaporation cover, comprise the evaporation plate, described evaporation plate comprises ITO contact surface and evaporation face, is provided with the evaporation hole of a plurality of shapes that are centrosymmetric on described evaporation plate, described evaporation hole is through to described ITO contact surface from described evaporation face, and the cross section is and dwindles gradually situation.
Preferably, described evaporation hole comprises coaxial first paragraph and second segment, and described first paragraph is horn-like, and second segment is horn-like or taper.
Preferably, the thickness of described evaporation plate is 18～190 μ m.
Preferably, described evaporation hole is 35 ~ 45 degree at the inclination angle of first paragraph.
Preferably, described second segment is taper, and cone angle is 4 ~ 10 degree.
Preferably, the vertical depth of described second segment is 8～20 μ m.
Preferably, the vertical depth of described second segment is not more than the vertical depth of first paragraph.
Preferably, the material of described evaporation plate is any one in nickel cobalt (alloy), Rhometal, indium watt alloy, and thickness is 18～45 μ m.
The utility model adopts first paragraph and the second segment that processes in the same direction the evaporation hole on the evaporation face, make the size in evaporation hole present diminishing situation on the evaporation plate, overcome the dead angle area that occurs in the traditional technology, make when being applied to evaporation, the organic light emission particle can arrive the predetermined position on glass substrate to large extent, thereby improved the quality of OLED display screen, rate of utilization and the yield polymer films of luminous organic material have been improved, reduce the manufacturing cost of OLED display screen, and can effectively extend the work-ing life of evaporation cover.
Description of drawings
Fig. 1 is the structural representation of OLED evaporation cover in the utility model embodiment.
Fig. 2 is the implementation result figure of OLED evaporation cover in the utility model embodiment.
The realization of the utility model purpose, functional characteristics and advantage are described further with reference to accompanying drawing in connection with embodiment.
Embodiment
Describe the technical solution of the utility model in detail below with reference to drawings and the specific embodiments, so as clearer, understand invention essence of the present utility model intuitively.
Fig. 1 is the structural representation of OLED evaporation cover in the utility model embodiment; Fig. 2 is the implementation result figure of OLED evaporation cover in the utility model embodiment.
Shown in seeing figures.1.and.2, the present embodiment provides a kind of OLED evaporation cover, it comprises evaporation plate 1, evaporation plate 1 comprises ITO contact surface 11 and evaporation face 12, be provided with the evaporation hole 2 of a plurality of shapes that are centrosymmetric on evaporation plate 1, evaporation hole 2 is through to ITO contact surface 11 from evaporation face 12, and the cross section is and dwindles gradually situation.
Particularly, evaporation hole 2 comprises first paragraph 21 and the second segment 22 of coaxial setting, and wherein, first paragraph 21 is horn-like, and is positioned at a side of evaporation face 12; Second segment 22 is horn-like or taper, is positioned at a side of ITO contact surface 11.
When evaporation, ITO contact surface 11 up, fit with the glass substrate that needs the evaporation luminous organic material, evaporation face 12 down, in the face of evaporation source 3, luminous organic material particle in evaporation source 3 enters evaporation hole 2 from various directions, and is built-up in the ITO(tin indium oxide of glass substrate through this evaporation hole 2) on layer, the formation vapor-deposited film.The shape of vapor-deposited film and thickness uniformity coefficient directly affect briliancy and the resolving power of OLED display screen, therefore, shape and the specification in evaporation hole 2 are had very strict requirement.The evaporation hole 2 of the present embodiment is designed to sectional dimension and is diminishing situation from evaporation face 12 to ITO contact surface 11, the global shape that makes evaporation hole 2 is up-narrow and down-wide horn-like, be conducive to receive the luminous organic material particle with wider angle, thereby the thickness uniformity coefficient of vapor-deposited film and shape can be met design requirement.
In addition, the thickness of the evaporation plate 1 of the present embodiment is 18～190 μ m, both can guarantee the intensity of evaporation cover, avoids work-ing life of causing 2 distortion of evaporation hole to shorten the evaporation cover because of excessively thin, can avoid again the yield polymer films that affects vapor-deposited film because of blocked up.
The evaporation hole 2 of the present embodiment is 35 ~ 45 degree at the inclination angle of first paragraph 21, and simultaneously, the evaporation cover is that any one material in nickel cobalt (alloy), Rhometal, indium watt alloy is made, and thickness is set to 18～45 μ m.For guaranteeing good article rate, improve working (machining) efficiency, cutting down finished cost, preferably the inclination angle of first paragraph 21 is set to 35 ~ 45 degree, and the cone angle of second segment 22 is set to 4 ~ 10 degree, in the situation that satisfy the actual production requirement, reduces production costs to greatest extent.
And the vertical depth of the second segment 22 of the present embodiment is 8～20 μ m, and the vertical depth of second segment 22 is not more than the vertical depth of first paragraph 21.Because first paragraph 21 is horn-like, second segment 22 is horn-like or cone-shaped, and the dimension precision requirement of second segment 22 on ITO contact surface 11 is very high, therefore, can adopt etch process processing first paragraph 21, and the recycling laser technology processes second segment 22.Because the working accuracy of laser technology is high, but the hole of laser technology processing, its inclination angle is less, therefore the vertical depth of second segment 22 is unsuitable excessive.Consider precision and the intensity of evaporation cover, the vertical depth of second segment 22 is unsuitable too small again, in order to avoid affect the shape and size of evaporation hole 2 on ITO contact surface 11.
The present embodiment can adopt following working method to come processing and manufacturing, and the method comprises the following steps:
1: adopt etch process to process the first paragraph in evaporation hole on the evaporation face;
2: adopt laser technology to process second segment at the first paragraph end to the ITO contact surface, and make the coaxial setting of first paragraph and second segment.
Because the concentration of etching solution constantly reduces, adopt etch process can corrode the larger perforated wall in inclination angle, make in the size in the evaporation hole of evaporation face one side greatlyr, and more past interior dimensions is just less, forms horn-like.And when adopting laser technology to scribe the evaporation hole, because the decay of laser energy intensity is less, can form the taperings of 4 ~ 10 degree, therefore, first paragraph adopts etch process processing, and second segment adopts laser technology to continue processing along the machine direction of first paragraph, and the vertical depth of second segment should be the smaller the better.But consider the requirement of strength of evaporation cover, the vertical depth of second segment is unsuitable too small, in order to avoid the evaporation hole that causes because second segment is excessively thin processing on the ITO contact surface deforms, is good therefore the vertical depth of second segment is 8～20 μ m.
The shape in the evaporation hole of adopting that above-mentioned technique processes is substantially close to desirable splayed or in the conical in shape of cone angle, thereby can go out quality vapor-deposited film preferably by evaporation, thereby produces the OLED display screen of better quality.
In sum, the utility model adopts first paragraph and the second segment that processes in the same direction the evaporation hole on the evaporation face, make the size in evaporation hole present diminishing situation on the evaporation plate, overcome the dead angle area that occurs in the traditional technology, make when being applied to evaporation, the organic light emission particle can arrive the predetermined position on glass substrate to large extent, thereby improved the quality of OLED display screen, rate of utilization and the yield polymer films of luminous organic material have been improved, reduce the manufacturing cost of OLED display screen, and can effectively extend the work-ing life of evaporation cover.
The above is only preferred embodiment of the present utility model; not thereby limit its scope of the claims; every equivalent structure transformation that utilizes the utility model specification sheets and accompanying drawing content to do; directly or indirectly be used in other relevant technical fields, all in like manner be included in scope of patent protection of the present utility model.
Claims (8)
1. OLED evaporation cover, comprise the evaporation plate, described evaporation plate comprises ITO contact surface and evaporation face, is provided with the evaporation hole of a plurality of shapes that are centrosymmetric on described evaporation plate, it is characterized in that: described evaporation hole is through to described ITO contact surface from described evaporation face, and the cross section is and dwindles gradually situation.
2. OLED evaporation cover as claimed in claim 1 is characterized in that: described evaporation hole comprises coaxial first paragraph and second segment, and described first paragraph is horn-like, and second segment is horn-like or taper.
3. OLED evaporation cover as claimed in claim 2, it is characterized in that: the thickness of described evaporation plate is 18～190 μ m.
4. OLED evaporation cover as claimed in claim 2 is characterized in that: described evaporation hole is 35 ~ 45 degree at the inclination angle of first paragraph.
5. OLED evaporation cover as claimed in claim 2, it is characterized in that: described second segment is taper, and cone angle is 4 ~ 10 degree.
6. OLED evaporation cover as claimed in claim 5, it is characterized in that: the vertical depth of described second segment is 8～20 μ m.
7. OLED evaporation cover as claimed in claim 6, it is characterized in that: the vertical depth of described second segment is not more than the vertical depth of first paragraph.
8. OLED evaporation cover as claimed in claim 2, it is characterized in that: the material of described evaporation plate is any one in nickel cobalt (alloy), Rhometal, indium watt alloy, and thickness is 18～45 μ m.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220723315 CN203021642U (en) | 2012-12-25 | 2012-12-25 | OLED (Organic Light Emitting Diode) evaporating hood |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220723315 CN203021642U (en) | 2012-12-25 | 2012-12-25 | OLED (Organic Light Emitting Diode) evaporating hood |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203021642U true CN203021642U (en) | 2013-06-26 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220723315 Expired - Fee Related CN203021642U (en) | 2012-12-25 | 2012-12-25 | OLED (Organic Light Emitting Diode) evaporating hood |
Country Status (1)
| Country | Link |
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| CN (1) | CN203021642U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102978568A (en) * | 2012-12-25 | 2013-03-20 | 唐军 | OLED (organic light-emitting diode) evaporation cover and processing method thereof |
| CN114032500A (en) * | 2021-11-19 | 2022-02-11 | 昆山国显光电有限公司 | Mask plate assembly |
-
2012
- 2012-12-25 CN CN 201220723315 patent/CN203021642U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102978568A (en) * | 2012-12-25 | 2013-03-20 | 唐军 | OLED (organic light-emitting diode) evaporation cover and processing method thereof |
| CN114032500A (en) * | 2021-11-19 | 2022-02-11 | 昆山国显光电有限公司 | Mask plate assembly |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: NANJING CHENGCHAO OPTOELECTRONIC TECHNOLOGY CO., L Free format text: FORMER OWNER: TANG JUN Effective date: 20140310 Free format text: FORMER OWNER: QIAN CHAO Effective date: 20140310 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 518000 SHENZHEN, GUANGDONG PROVINCE TO: 210000 NANJING, JIANGSU PROVINCE |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20140310 Address after: 429 room 210000, building C, No. 606, Ning six road, Nanjing chemical industry park, Jiangsu, China Patentee after: Nanjing ultra Photoelectric Technology Co., Ltd. Address before: 3, building A12, building 518000, an industrial zone, Ho Ho, Ho Ho Ho, Shenzhen, Guangdong Patentee before: Tang Jun Patentee before: Qian Chao |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130626 Termination date: 20151225 |
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| EXPY | Termination of patent right or utility model |