CN114032500A

CN114032500A - Mask plate assembly

Info

Publication number: CN114032500A
Application number: CN202111399096.XA
Authority: CN
Inventors: 李伟丽; 李文星; 韩冰
Original assignee: Kunshan Govisionox Optoelectronics Co Ltd
Current assignee: Kunshan Govisionox Optoelectronics Co Ltd
Priority date: 2021-11-19
Filing date: 2021-11-19
Publication date: 2022-02-11

Abstract

The application discloses a mask plate assembly, which comprises a mask frame, a first mask plate and a second mask plate, wherein a bearing surface is formed on one side surface of the mask frame, and the mask frame comprises a groove with an opening positioned on the bearing surface; the first mask plate comprises a plurality of first open holes and first shielding areas distributed around the first open holes, a plurality of extending ends are formed in the circumferential direction of the first mask plate, the extending ends are clamped in the grooves, and the bearing surface is exposed out of the space between every two adjacent extending ends; the second mask plate comprises a plurality of second openings which are in one-to-one correspondence with the first openings, second shielding areas which are distributed around the second openings and edge areas which are used for being fixed with the bearing surface. In the mask plate subassembly that this application provided, first mask plate and second mask plate are all not overturn to improve the position accuracy of coating by vaporization, promote the coating by vaporization quality.

Description

Mask plate assembly

Technical Field

The application belongs to the technical field of display equipment, and particularly relates to a mask plate assembly.

Background

With the development of display technology, the current mobile phone screen has a trend of medium and large size development, in the manufacturing process of the display panel for the mobile phone screen, the glass substrate to be evaporated needs to be typeset again to meet the new medium and large size requirement, and meanwhile, the typesetting of the mask plate for evaporating the glass substrate to be evaporated needs to be changed in the same way, but after the typesetting is changed, the phenomenon that the mask plate is poorly adsorbed by the magnetic stripe in the evaporator occurs, so that the evaporation quality is influenced.

Disclosure of Invention

The embodiment of the application provides a mask plate assembly, and a first mask plate and a second mask plate in the mask plate assembly are not overturned, so that the position accuracy of evaporation and coating is improved, and the evaporation and coating quality is improved.

The embodiment of the application provides a mask plate assembly, including:

the mask frame, a bearing surface is formed on one side surface of the mask frame, and the mask frame comprises a groove with an opening positioned on the bearing surface;

the first mask plate comprises a plurality of first open holes and first shielding areas distributed around the first open holes, a plurality of extending ends are formed in the circumferential direction of the first mask plate, the extending ends are clamped in the grooves, and the bearing surface is exposed out of the space between every two adjacent extending ends;

the second mask plate comprises a plurality of second openings in one-to-one correspondence with the first openings, and second shielding areas surrounding the second openings and located at the edges of the second mask plate, and the second mask plate is in contact with the bearing surface and fixed through the edge areas.

According to the mask plate assembly provided by the application, the magnetism of the first mask plate is smaller than that of the second mask plate.

According to the mask plate assembly provided by the application, the first shielding area of the first mask plate is provided with a liquid outlet assembly used for guiding out liquid between the first mask plate and the second mask plate.

According to the mask plate assembly provided by the application, the liquid outlet assembly comprises a plurality of liquid outlet holes penetrating through the thickness direction of the first shielding area, and the liquid outlet holes are uniformly distributed among the first evaporation openings;

preferably, the cross-sectional shape of the liquid outlet hole is rectangular, polygonal or circular along a direction perpendicular to the thickness direction of the first mask plate.

According to the mask plate assembly provided by the application, the first mask plate comprises a first evaporation surface and a first glass surface, the first opening comprises a first opening located on the first evaporation surface and a second opening located on the first glass surface, and the first opening is gradually closed from the first evaporation surface to the first glass surface;

the second mask plate comprises a second evaporation surface and a second glass surface, the second opening comprises a third opening located on the second evaporation surface and a fourth opening located on the second glass surface, and the second opening is gradually closed by the second evaporation surface towards the second glass surface.

According to the mask plate assembly provided by the application, the orthographic projection of the first opening on the second glass surface covers the fourth opening, the first opening is positioned in the second shielding area of the second glass surface, and the width of the part, between the orthographic projection of the first opening on the second glass surface and the fourth opening, of the first opening is greater than 20 um;

and the orthographic projection of the second opening on the second evaporation surface is superposed with the third opening.

According to the mask plate component provided by the application, the extending end is far away from one end of the center of the first mask plate and the bottom wall of the groove deviates from the edge of one side of the opening and is flush or protruded.

According to the mask plate assembly provided by the application, the first openings are arranged along the row and column directions, and the extending ends are located between adjacent first opening rows along the column directions; or, along the row direction, the extending end is positioned between the adjacent first opening columns;

preferably, the cross section of the mask frame along the direction perpendicular to the thickness direction of the mask frame is a rectangular frame, the length of each protruding end between adjacent first opening rows along the row direction is greater than or equal to 1mm, and the width of the protruding end close to four corners of the mask frame along the column direction is greater than the width of the protruding end far away from the four corners of the mask frame along the column direction, among the protruding ends between adjacent first opening rows;

the length of each extending end between the adjacent first opening rows along the row direction is greater than or equal to 1mm, and the width of the extending end close to four corners of the mask frame along the row direction is greater than the width of the extending end far away from the four corners of the mask frame along the row direction in each extending end between the adjacent first opening rows.

According to the mask plate assembly provided by the application, the shape of the section of the extension end along the direction perpendicular to the extension direction of the extension end is rectangular or circular.

According to the mask plate subassembly that this application provided, first mask plate thickness is 40um-150um, second mask plate thickness is 40um-150 um.

Compared with the prior art, the mask plate subassembly that this application provided includes the mask frame, be fixed in the first mask plate and the second mask plate of mask frame, first mask plate can play the supported effect to the second mask plate, and can support the second of second mask plate and shelter from the part to the upset of first mask plate in the district, restrain each part in the second mask plate and surround the upset trend of magnetic stripe upset, make first mask plate and second mask plate in this mask plate subassembly all not overturn, thereby improve the position accuracy of coating by vaporization, promote the coating by vaporization quality.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments of the present application will be briefly described below, and it is obvious that the drawings described below are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.

Fig. 1 is a schematic structural diagram of a mask plate assembly according to an embodiment of the present disclosure;

FIG. 2 is a schematic structural diagram of a mask frame in a mask plate assembly according to an embodiment of the present disclosure;

fig. 3 is a schematic structural diagram of a first mask plate in a mask plate assembly according to an embodiment of the present disclosure;

fig. 4 is a schematic structural diagram of a mask plate assembly according to an embodiment of the present disclosure after a first mask plate is mounted on a mask frame;

fig. 5 is a schematic structural diagram of a second mask plate in the mask plate assembly provided in the embodiment of the present application;

fig. 6 is a schematic view of internal structures of a first mask and a second mask in a mask plate assembly provided in an embodiment of the present application.

In the drawings:

1-a mask frame; 11-a bearing surface; 12-a groove; 13-opening; 2-a first mask plate; 20-a first opening; 21-a first occlusion zone; 22-an extension end; 23-first vapor deposition surface; 231 — a first opening; 24-a first glass face; 241-a second opening; 25-liquid outlet holes; 3-a second mask plate; 31-a second opening; 32-a second occlusion region; 33-an edge zone; 34-second vapor plating surface; 341-third opening; 35-a second glass face; 351-fourth opening.

Detailed Description

Features and exemplary embodiments of various aspects of the present application will be described in detail below. In the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of the present application. It will be apparent, however, to one skilled in the art that the present application may be practiced without some of these specific details. The following description of the embodiments is merely intended to provide a better understanding of the present application by illustrating examples thereof.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.

The current mobile phone screen has a trend of developing towards medium and large sizes, the display panel for the mobile phone screen with market demand is mostly more than 6 inches, and in the current production line, a glass substrate to be evaporated which is suitable for a small-size display panel is also used, the glass substrate can be limited in normal typesetting of the medium and large-size display panel, so that the glass utilization ratio is low, at the moment, a new typesetting mode is needed to improve the utilization ratio of the glass substrate, namely, the conventional typesetting rotates by 90 degrees, the conventional typesetting is called as vertical typesetting, the new typesetting mode can be called as horizontal typesetting, after the horizontal typesetting is adopted, poor adsorption can be generated between a mask plate for evaporating the glass substrate and an evaporator, and the inventor finds out that the reason of the poor adsorption of the mask plate is that: the magnetic field of the center position of the magnetic strips is strongest, the partial magnetic field between the two magnetic strips is weakest, the mask plate is made of magnetic materials, so that in a shielding area positioned at the periphery of the opening in the mask plate, the closer to the center of the magnetic strips, the more the attraction force is, the farther from the center of the magnetic strips, the smaller the attraction force is, the more the position with the larger attraction force is, the more the position with the smaller attraction force is, the more the position with the larger attraction force is, the more the part with the parallel to the extending direction of the magnetic strips in the shielding area is, after the typesetting mode of the glass substrate is changed, the structure of the evaporator is not changed, and after the typesetting is changed, the number of entity areas (namely, positioned between the areas) in the magnetic strips in the vertical direction in the evaporation machine is increased in the mask plate, And the width of each open area in the mask plate along the direction perpendicular to the magnetic stripe in the coating machine is reduced, meanwhile, the number of the entity areas (namely the areas between the adjacent openings) in the mask plate along the direction parallel to the magnetic stripe in the coating machine is reduced, and the width of each open area in the mask plate along the direction parallel to the magnetic stripe in the coating machine is increased.

For a better understanding of the present application, a mask plate assembly according to an embodiment of the present application will be described in detail below with reference to fig. 1 to 6.

Referring to fig. 1 to 5, an embodiment of the present application provides a mask plate assembly, as shown in fig. 1, including a mask frame 1, a first mask plate 2, and a second mask plate 3, as shown in fig. 2, a bearing surface 11 is formed on a side surface of the mask frame 1, and the mask frame 1 includes a groove 12 having an opening 13 located on the bearing surface 11; as shown in fig. 3 and 4, the first mask 2 includes a plurality of first openings 20 and first shielding regions 21 distributed around each first opening 20, a plurality of protruding ends 22 are formed in the first mask 2 in the circumferential direction, the protruding ends 22 are clamped in the grooves 12 of the mask frame 1, and when the protruding ends 22 of the first mask are placed in the grooves of the mask frame 1, the bearing surface 11 is exposed between two adjacent protruding ends 22; as shown in fig. 5, the second mask 3 includes a plurality of second openings 31 corresponding to the first openings 20, second shielding regions 32 distributed around the second openings 31, and an edge region 33 located at an edge of the second mask 3, and the second mask 3 is fixed in contact with the supporting surface 11 through the edge region 33.

The application provides a mask plate subassembly includes mask frame 1, is fixed in first mask plate 2 and the second mask plate 3 of mask frame 1, and mask frame 1 has opening 13, and a side surface of mask frame 1 forms loading end 11, is formed with recess 12 on the loading end 11, and recess 12 is along running through to mask frame edge direction by the opening center be close to the one end of loading end in mask frame's the lateral wall, and mask frame 1 is used for bearing first mask plate 2 and second mask plate 3, specifically, first mask plate 2 includes a plurality of first trompils 20, first shelters from district 21 and a plurality of end 22 that stretches out, and first shelters from district 21 and distributes around each first trompil 20, and first mask plate 2 is fixed with recess 12 screens through a plurality of end 22 that stretch out. The second mask 3 includes a plurality of second trompils 31, the second shelters from district 32 and marginal zone 33, each second trompil 31 and each first trompil 20 one-to-one, so that evaporation material loops through opening 13 of mask frame 1, evaporation coating to assigned position behind first trompil 20 and the second trompil 31, the second shelters from district 32 and sets up around each second trompil 31, the edge and the loading end 11 contact of second mask 3, so that second mask 3 is fixed in mask frame 1, and be located the one side that first mask 2 deviates from mask frame 1, namely, first mask 2 and second mask 3 all are fixed with mask frame 1, fixed effect is more fastening, can avoid simultaneously influencing the mesh opening effect because first mask 2 and the different thermal expansion coefficient of second mask 3. The application provides an including first mask plate 2 and second mask plate 3 in the mask plate subassembly, first mask plate 2 can play the supporting effect to second mask plate 3, and can support the second of second mask plate 3 and shelter from the part to the upset of first mask plate 2 in the district 32, each part centers on the upset trend of magnetic stripe upset in the suppression second mask plate 3, make first mask plate 2 and second mask plate 3 in this mask plate subassembly all not overturn, thereby improve the position accuracy of coating by vaporization, promote the coating by vaporization quality. It should be noted that the mask plate provided by the application can solve the problem that the mask plate is easy to turn due to poor adsorption of the magnetic strips and the mask plate in the evaporation machine, and is not limited to the turning of the mask plate caused by the typesetting of the display panel.

In a feasible implementation mode, the magnetism of first mask plate 2 is less than the magnetism of second mask plate 3, first mask plate 2 receives the magnetic force effect of magnetic stripe in the coating by vaporization machine to be less than the magnetic force effect of magnetic stripe in the coating by vaporization machine of second mask plate 3 promptly, under the magnetic force effect of magnetic stripe, the upset trend of first mask plate 2 is less than the upset trend of second mask plate 3 greatly, thereby first mask plate 2 can provide good support for second mask plate 3, restrain the upset trend of second mask plate 3, thereby improve the position accuracy of coating by vaporization.

In the above embodiment, the first mask plate 2 and the second mask plate 3 are made of iron-nickel alloy, so that on one hand, the strength is ensured, on the other hand, the material is simple and easy to obtain, and the cost is low, and the magnetism of the first mask plate 2 and the magnetism of the second mask plate 3 are related to the material of the first mask plate and the second mask plate, so that the material of the first mask plate 2 is selected from a material with small magnetism, such as sus304 or sus430, and the material of the second mask plate 3 is selected from a material with high magnetism, such as invar36, and the like, and the application is not particularly limited.

In a possible embodiment, the first shielding region 21 of the first mask 2 is formed with a liquid outlet assembly for guiding out liquid between the first mask 2 and the second mask 3.

In the above embodiment, the first sheltering from district 21 of first mask plate 2 is formed with out the liquid subassembly to when wasing first mask plate 2 and second mask plate 3, avoid the remaining of the washing liquid medicine between first mask plate 2 and the second mask plate 3, thereby satisfy the cleanliness of coating by vaporization cavity, improve the coating by vaporization quality, thereby improve and produce the property ability.

In a feasible implementation manner, as shown in fig. 3, the liquid outlet assembly includes a plurality of liquid outlet holes 25 penetrating through the thickness direction of the first shielding region 21, so that on one hand, residual liquid medicine between the first mask plate 2 and the second mask plate 3 can be discharged, and on the other hand, the strength of the first mask plate 2 can be reduced, so that the tensile force on the mask frame is reduced when the mask frame is stretched, and the overall strength of the mask frame is further improved; a plurality of liquid holes 25 evenly arrange between first coating by vaporization opening 13 to can reduce the influence of liquid hole 25 to each partial stress homogeneity of first mask plate 2, and then reduce the influence to 2 net effects of first mask plate, prevent that bad phenomenon of a net such as fold from appearing in first mask plate 2, help guaranteeing the coating by vaporization quality.

In a possible embodiment, the cross-sectional shape of the liquid outlet 25 is rectangular in a direction perpendicular to the thickness direction of the first mask 2, as shown in fig. 3; or the cross-sectional shape of the liquid outlet hole 25 is polygonal or circular, and the present application is not particularly limited.

In a feasible implementation manner, each of the first openings 20 in the first mask plate 2 is arranged along a row and column direction, at least a part of the plurality of liquid outlet holes 25 are arranged along a row and are adjacent to each other, and the other part of the plurality of liquid outlet holes 25 are arranged along a column and are adjacent to each other, part of the plurality of liquid outlet holes 25 is located between adjacent first opening rows or adjacent first opening columns, and the other part of the plurality of liquid outlet holes 25 is arranged along the circumferential direction of the first mask plate 2, so that the plurality of liquid outlet holes 25 are uniformly distributed in the first mask plate 2.

In a possible embodiment, as shown in fig. 1 and 6, the first mask 2 includes a first evaporation surface 23 and a first glass surface 24, the first opening 20 includes a first opening 231 located on the first evaporation surface 23 and a second opening 241 located on the first glass surface 24, and the first opening 20 gradually converges from the first evaporation surface 23 to the first glass surface 24.

In the above embodiment, the first evaporation surface 23 is a surface of the mask plate assembly facing the evaporation source in the first mask plate 2 in the use process, the first glass surface 24 is a surface of the mask plate assembly facing the glass substrate in the use process in the first mask plate 2, and the first opening 20 is gradually closed from the first evaporation surface 23 to the first glass surface 24, so that on one hand, the side wall of the first opening 20 is smoother, evaporation materials are prevented from remaining, and evaporation materials are saved; on the other hand, the first opening 231 on the first evaporation surface 23 covers the second opening 241 on the first glass surface 24 in the orthographic projection of the first glass surface 24, so that the evaporation material can enter the first opening 20 from the larger first opening 231 and then enter the second opening 31 through the second opening 241.

In a possible embodiment, as shown in fig. 1 and 6, the second mask 3 includes a second evaporation surface 34 and a second glass surface 35, the second opening 31 includes a third opening 341 located on the second evaporation surface 34 and a fourth opening 351 located on the second glass surface 35, and the second opening 31 gradually converges from the second evaporation surface 34 to the second glass surface 35.

In the above embodiment, the second evaporation surface 34 is a surface of the mask plate assembly facing the evaporation source in the second mask plate 3 during use, the second glass surface 35 is a surface of the mask plate assembly facing the glass substrate in the second mask plate 3 during use, and the second opening 31 is gradually closed from the second evaporation surface 34 to the second glass surface 35, so that on one hand, the side wall of the second opening 31 is smoother, evaporation materials are prevented from remaining, and evaporation materials are saved; on the other hand, the orthographic projection of the third opening 341 on the second evaporation surface 34 on the second glass surface 35 covers the fourth opening 351 on the second glass surface 35, so that the evaporation material can enter the second opening 31 from the larger third opening 341 and then can be evaporated at a specified position through the fourth opening 351.

In one possible embodiment, as shown in fig. 6, an orthographic projection of the first opening 231 on the second glass surface 35 in the second mask 3 covers the fourth opening 351, and a width of a portion between the orthographic projection of the first opening 231 on the second glass surface 35 and the fourth opening 351 in the second shielding region 32 of the second glass surface 35 is greater than 20um, so as to facilitate the evaporation material to enter the second opening 31 through the first opening 20 and evaporate at a specific position.

In a possible embodiment, the orthographic projection of the second opening 241 on the second evaporation surface 34 coincides with the third opening 341, so that the deposition of the evaporation material between the first opening 20 and the second opening 31 is prevented from being difficult to clean, and the evaporation material is prevented from being wasted.

In a feasible implementation mode, one end of the extending end 22 far away from the center of the first mask plate 2 and one side edge of the bottom wall of the groove 12 far away from the opening 13 are flush or protruded, so that the first mask plate 2 is subjected to net stretching, the net stretching effect of the first mask plate 2 is better, and a better evaporation coating effect is realized.

In one possible embodiment, as shown in FIG. 3, the first apertures 20 are arranged in a row-column direction with the extended ends 22 located between adjacent first aperture rows in the column direction; alternatively, the protruding ends 22 are located between adjacent first columns of apertures in the row direction.

In the above embodiment, the protruding end 22 is opposite to the first shielding region 21 between the adjacent opening rows, or the protruding end 22 is opposite to the first shielding region 21 between the adjacent opening columns, so as to facilitate the transmission of stress along the first shielding region 21 between the adjacent opening rows and the adjacent opening columns, and to facilitate the improvement of the flatness of the expanded mesh, thereby improving the yield of evaporation.

In a possible embodiment, the mask frame 1 has a rectangular cross section perpendicular to the thickness direction thereof, the length of each of the extension ends 22 between the adjacent first opening rows in the row direction is greater than or equal to 1mm, and the width of the extension end 22 near the four corners of the mask frame 1 in the column direction is greater than the width of the extension end away from the four corners of the mask frame 1 in the column direction among the extension ends 22 between the adjacent first opening rows.

The length of each of the extension ends 22 between the adjacent first opening rows in the row direction is 1mm or more, and the width of the extension end 22 near the four corners of the mask frame 1 in the row direction is larger than the width of the extension end 22 far from the four corners of the mask frame 1 in the row direction among the extension ends 22 between the adjacent first opening rows.

In the above embodiment, the size of the extending end near the four corners of the mask frame 1 is increased, so that the stretching precision of the first mask plate 2 at the four corners can be improved, and the stretching effect of the first mask plate 2 is better.

In a possible embodiment, the shape of the cross section of the extended end 22 along the direction perpendicular to the extending direction of the extended end 22 is rectangular or circular, when the cross section of the extended end 22 is rectangular, the cross section of the mask frame 1 along the extending direction of the extended end 22 is preferably rectangular to be better matched with the extended end 22, when the cross section of the extended end 22 is rectangular, the cross section of the mask frame 1 along the extending direction of the extended end 22 is preferably circular to be better matched with the extended end 22, and the cross section of the extended end 22 can be other shapes, which is not particularly limited in the present application.

In a feasible implementation, the thickness of the first mask plate 2 is 40um-150um, specifically, 40um, 50um, 65um, 99um, 101um, 143um, 150um, etc., and this application does not limit specifically, and the thickness of the second mask plate 3 is 40um-150um, specifically, 40um, 60um, 65um, 98um, 122um, 133um, 150um, etc., and this application does not limit specifically, and the thickness of the first mask plate 2 and the thickness of the second mask plate 3 may be the same or different, and this application does not limit specifically.

As will be apparent to those skilled in the art, for convenience and brevity of description, the specific working processes of the systems, modules and units described above may refer to corresponding processes in the foregoing method embodiments, and are not described herein again. It should be understood that the scope of the present application is not limited thereto, and any person skilled in the art can easily conceive various equivalent modifications or substitutions within the technical scope of the present application, and these modifications or substitutions should be covered within the scope of the present application.

It should also be noted that the exemplary embodiments mentioned in this application describe some methods or systems based on a series of steps or devices. However, the present application is not limited to the order of the above-described steps, that is, the steps may be performed in the order mentioned in the embodiments, may be performed in an order different from the order in the embodiments, or may be performed simultaneously.

Claims

1. A mask plate assembly, comprising:

2. The mask plate assembly of claim 1, wherein the first mask plate has a magnetic property less than that of the second mask plate.

3. The mask plate assembly according to claim 1, wherein the first shielding region of the first mask plate is formed with a liquid outlet assembly for guiding out liquid between the first mask plate and the second mask plate.

4. The mask plate assembly of claim 3, wherein the liquid outlet assembly comprises a plurality of liquid outlet holes penetrating through the thickness direction of the first shielding region, and the liquid outlet holes are uniformly arranged among the first evaporation openings;

5. The mask plate assembly of claim 1, wherein the first mask plate comprises a first evaporation surface and a first glass surface, the first opening comprises a first opening located on the first evaporation surface and a second opening located on the first glass surface, and the first opening gradually converges from the first evaporation surface to the first glass surface;

6. The mask plate assembly of claim 5, wherein an orthographic projection of the first opening on the second glass face covers the fourth opening and is located in the second blocking region of the second glass face, and a width of a portion between the orthographic projection of the first opening on the second glass face and the fourth opening is greater than 20 um;

7. The mask plate assembly of claim 1, wherein an end of the protruding end away from the center of the first mask plate is flush with or protrudes from an edge of a bottom wall of the groove facing away from the opening.

8. The mask plate assembly of claim 1, wherein the first openings are arranged in a row-column direction, and the protruding ends are located between adjacent first opening rows in the column direction; or, along the row direction, the extending end is positioned between the adjacent first opening columns;

9. The mask plate assembly of claim 1, wherein a cross-section of the protruding end along a direction perpendicular to an extension direction of the protruding end is rectangular or circular in shape.

10. The mask plate assembly of claim 1, wherein the first mask plate has a thickness of 40um-150um and the second mask plate has a thickness of 40um-150 um.