CN202954087U - 一种用于mocvd设备的进料设备 - Google Patents
一种用于mocvd设备的进料设备 Download PDFInfo
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- CN202954087U CN202954087U CN 201220599293 CN201220599293U CN202954087U CN 202954087 U CN202954087 U CN 202954087U CN 201220599293 CN201220599293 CN 201220599293 CN 201220599293 U CN201220599293 U CN 201220599293U CN 202954087 U CN202954087 U CN 202954087U
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CN 201220599293 CN202954087U (zh) | 2012-11-14 | 2012-11-14 | 一种用于mocvd设备的进料设备 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108489761A (zh) * | 2018-03-20 | 2018-09-04 | 国电科学技术研究院有限公司 | 粉状物防外喷装置 |
CN108624862A (zh) * | 2018-03-27 | 2018-10-09 | 中山大学 | 一种应用于ZnO MOCVD设备的自动化工艺生产线 |
CN109750278A (zh) * | 2017-11-07 | 2019-05-14 | 山东浪潮华光光电子股份有限公司 | 一种提高金属有机物化学气相沉积设备生产效率的炉外装片方法 |
CN112086388A (zh) * | 2020-08-14 | 2020-12-15 | 北京智创芯源科技有限公司 | 一种晶片介质膜沉积装片装置 |
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- 2012-11-14 CN CN 201220599293 patent/CN202954087U/zh not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109750278A (zh) * | 2017-11-07 | 2019-05-14 | 山东浪潮华光光电子股份有限公司 | 一种提高金属有机物化学气相沉积设备生产效率的炉外装片方法 |
CN108489761A (zh) * | 2018-03-20 | 2018-09-04 | 国电科学技术研究院有限公司 | 粉状物防外喷装置 |
CN108624862A (zh) * | 2018-03-27 | 2018-10-09 | 中山大学 | 一种应用于ZnO MOCVD设备的自动化工艺生产线 |
CN112086388A (zh) * | 2020-08-14 | 2020-12-15 | 北京智创芯源科技有限公司 | 一种晶片介质膜沉积装片装置 |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
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Free format text: FORMER OWNER: FOSHAN GRADUATE SCHOOL OF SUN YAT-SEN UNIVERSITY Effective date: 20150824 |
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C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20150824 Address after: 518000, Guangdong province Shenzhen Longgang District Henggang Street Ping highway 89 digital Silicon Valley (Chung Xin Industrial Park) D building research and Development Office Patentee after: SHENZHEN HEADQUARTER: S.C NEW ENERGY TECHNOLOGY Corp. Address before: 518000, A6 building, hang Lin, four woods slope pit Industrial Park, Baoan District, Guangdong, Shenzhen Patentee before: SHENZHEN HEADQUARTER: S.C NEW ENERGY TECHNOLOGY Corp. Patentee before: FOSHAN RESEARCH INSTITUTE OF SUN YAT-SEN University |
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CX01 | Expiry of patent term |
Granted publication date: 20130529 |
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CX01 | Expiry of patent term |