CN202945379U - Sectional type tungsten filament net heater for sapphire single crystal furnace - Google Patents
Sectional type tungsten filament net heater for sapphire single crystal furnace Download PDFInfo
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- CN202945379U CN202945379U CN 201220493992 CN201220493992U CN202945379U CN 202945379 U CN202945379 U CN 202945379U CN 201220493992 CN201220493992 CN 201220493992 CN 201220493992 U CN201220493992 U CN 201220493992U CN 202945379 U CN202945379 U CN 202945379U
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- tungsten
- well heater
- heater
- silk screen
- sectional type
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Abstract
The utility model provides a sectional type tungsten filament net heater for a sapphire single crystal furnace. The sectional type tungsten filament net heater is characterized being formed by sequentially connecting an upper heater, an intermediate heater and a lower heater in series, wherein the upper heater, the intermediate heater and the lower heater have the same axle center; at least three tungsten electrode claws uniformly distributed are arranged on the upper part of the upper heater and the lower part of the intermediate heater; each tungsten electrode claw is connected with two weaving tungsten filament nets in a welding mode; the two weaving tungsten filament nets are spaced by using a tungsten filament spring; a tungsten ring is arranged at an intersection of the upper heater and the intermediate heater; three lower heater tungsten electrode claws uniformly distributed are arranged on the lower heater; the upper part of each tungsten electrode claw is provided with one end of one of the lower heater tungsten electrode claws in a welding mode; the other ends of the lower heater tungsten electrode claws are converged in the center of the lower heater and are connected with a tungsten plate in the welding mode; each heater tungsten electrode claw is wound and banded with tungsten filaments to form an anode; and the tungsten ring and the tungsten plate serve as zero electrodes.
Description
Technical field
The utility model relates to a kind of tungsten silk screen well heater, especially a kind of a kind of sectional type tungsten silk screen well heater that can satisfy the required gradient temperature field condition of Sapphire Crystal Growth for sapphire single-crystal furnace.
Background technology
Along with developing rapidly of global new forms of energy market, the LED industry becomes the energy industry new growth point gradually, has possessed the ability of catching up with and surpassing other Energy Saving Industries, worldwide presents the gesture of fast development.
Sapphire single-crystal furnace is crystal growth equipment important in the LED industrial chain, because sapphire monocrystal is slowly to grow to form under the condition of high temperature, need good thermograde to control to form the cold heart, need simultaneously uniform and stable temperature field realizing the stable growth of single crystal, so the controlled basis of the thermograde of well heater is most important.At present, sapphire single-crystal furnace generally adopts single birdcage shape tungsten bar well heater, can't form desirable gradient temperature field.Simultaneously, the limited amount of tungsten bar after being spaced will exert an influence to the homogeneity of thermal field.Therefore, adopt crystal that the sapphire single-crystal furnace of the tungsten bar well heater of birdcage shape grows mostly below 65 kilograms, and crystal often produces a large amount of crackles or bubble because thermal field is disorderly, the crystal yield rate is lower, has a strong impact on the long brilliant production efficiency of sapphire.
At present, adopt sectional type tungsten silk screen well heater in sapphire single-crystal furnace, and by regulating respectively the power stage of each section well heater, be not seen in report to form good gradient temperature field.
The utility model content
The purpose of this utility model is: for uncontrollability, the temperature field ununiformity of the single heating actuator temperature gradient that has the long brilliant stove of sapphire now, cause the series of problems such as the Sapphire Crystal Growth yield rate is low, size is little, of low quality, a kind of novel sectional type welding tungsten silk screen well heater that is used for reliably sapphire single-crystal furnace is provided.
The purpose of this utility model is achieved in that a kind of sapphire single-crystal furnace sectional type tungsten silk screen well heater, it is characterized in that: it is in series successively by the upper heater of concentric, middle well heater and lower well heater, wherein:
A) bottom of the top of upper heater and middle well heater all is provided with three equally distributed tungsten electrode pawls at least, each tungsten electrode pawl and two braiding tungsten silk screens are weldingly connected, between two braiding tungsten silk screens, with tungsten filament spring interval, the intersection of upper heater and middle well heater is provided with the tungsten ring;
B) lower well heater is provided with three equally distributed lower well heater tungsten electrode pawls, an end welding of well heater braiding tungsten silk screen under the top of well heater tungsten electrode pawl and a slice under each, the other end of lower well heater braiding tungsten silk screen comes together in lower well heater central authorities and the tungsten plate is weldingly connected;
C) upper, middle and lower well heater tungsten electrode pawl all is wound around and ties up tungsten filament, forms anode; Described tungsten ring and tungsten plate are negative electrode.
In the utility model: the top of described upper heater and the bottom of middle well heater are equipped with six equally distributed tungsten electrode pawls.
In the utility model: tungsten electrode pawl, tungsten ring and tungsten plate are the plate profile structure of rolling formation after tungsten powder metallurgy.
In the utility model: described braiding tungsten silk screen is formed by the tungsten aluminium wire weaving of same size.
The utility model has the advantage of: owing to adopting the intensive and uniform welded type tungsten silk screen well heater of braiding, be conducive to improve the even and stability in temperature field; Owing to adopting segmentation packet type well heater, by regulating respectively the working order of each group of each section, change the output of heater power, form good thermograde, energy-efficient, the crystal yield rate improves greatly; Owing to adopting segmentation packet type well heater, more help to realize automatization and the sequencing of Sapphire Crystal Growth.
Description of drawings
Fig. 1 is the one-piece construction schematic diagram that the utility model relates to embodiment;
Fig. 2 is the upper heater that relates to of the utility model or the structural representation of middle well heater embodiment;
Fig. 3 is the structural representation of the lower well heater that relates to of the utility model.
In figure: 1, upper heater, 2, middle well heater, 3, lower well heater, 4, the tungsten electrode pawl, 5, the braiding tungsten silk screen, 6, the tungsten filament spring, 7, the tungsten ring, 8, lower well heater tungsten electrode pawl, 9, lower well heater braiding tungsten silk screen; 10, tungsten plate, 11, tie up tungsten filament.
Embodiment
Accompanying drawing discloses the concrete structure of a kind of embodiment that the utility model relates to without limitation, below in conjunction with accompanying drawing, the utility model is done to describe further.
As seen from Figure 1, this sectional type tungsten silk screen well heater is to be in series successively by 3 three sections of the upper heater 1 of concentric, middle well heater 2 and lower well heaters, wherein: the bottom of the top of upper heater 1 and middle well heater 2 all is provided with three equally distributed tungsten electrode pawls 4 at least, each tungsten electrode pawl 4 and two braiding tungsten silk screens 5 are weldingly connected and form one group of well heater, between two braiding tungsten silk screens 5 in group, with tungsten filament spring 6 intervals, the intersection of upper heater 1 and middle well heater 2 is provided with tungsten ring 7; Lower well heater 3 is provided with three equally distributed lower well heater tungsten electrode pawls 8, an end welding of well heater braiding tungsten silk screen 9 under the top of well heater tungsten electrode pawl 8 and a slice under each, the other end of lower well heater braiding tungsten silk screen 9 comes together in lower well heater 3 central authorities and 10 welding of tungsten plate; Upper, middle and lower well heater tungsten electrode pawl all is wound around ties up tungsten filament 11, forms anode, and described tungsten ring 7 and tungsten plate 10 are negative electrode.
In the present embodiment, the bottom of the top of described upper heater 1 and middle well heater 2 is equipped with six equally distributed tungsten electrode pawls 4.Tungsten electrode pawl 4, lower well heater tungsten electrode pawl 8, tungsten ring 7 and tungsten plate 10 are the tungsten plate of rolling formation after powder metallurgy.Braiding tungsten silk screen 5, lower well heater braiding tungsten silk screen 9 form by the tungsten aluminium wire weaving of same size.
Claims (4)
1. sapphire single-crystal furnace sectional type tungsten silk screen well heater, it is characterized in that: it is in series successively by the upper heater of concentric, middle well heater and lower well heater, wherein:
A) bottom of the top of upper heater and middle well heater all is provided with three equally distributed tungsten electrode pawls at least, each tungsten electrode pawl and two braiding tungsten silk screens are weldingly connected, between two braiding tungsten silk screens, with tungsten filament spring interval, the intersection of upper heater and middle well heater is provided with the tungsten ring;
B) lower well heater is provided with three equally distributed lower well heater tungsten electrode pawls, an end welding of well heater braiding tungsten silk screen under the top of well heater tungsten electrode pawl and a slice under each, the other end of lower well heater braiding tungsten silk screen comes together in lower well heater central authorities and the tungsten plate is weldingly connected;
C) upper, middle and lower well heater tungsten electrode pawl all is wound around and ties up tungsten filament, forms anode; Described tungsten ring and tungsten plate are negative electrode.
2. sapphire single-crystal furnace sectional type tungsten silk screen well heater according to claim 1, it is characterized in that: the top of described upper heater and the bottom of middle well heater are equipped with six equally distributed tungsten electrode pawls.
3. sapphire single-crystal furnace sectional type tungsten silk screen well heater according to claim 1 and 2 is characterized in that: tungsten electrode pawl, tungsten ring and tungsten plate are the slab structure of rolling formation after tungsten powder metallurgy.
4. sapphire single-crystal furnace sectional type tungsten silk screen well heater according to claim 3 is characterized in that: upper, middle and lower well heater braiding tungsten silk screen forms by the tungsten aluminium wire weaving of same size.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220493992 CN202945379U (en) | 2012-09-26 | 2012-09-26 | Sectional type tungsten filament net heater for sapphire single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220493992 CN202945379U (en) | 2012-09-26 | 2012-09-26 | Sectional type tungsten filament net heater for sapphire single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202945379U true CN202945379U (en) | 2013-05-22 |
Family
ID=48421086
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220493992 Withdrawn - After Issue CN202945379U (en) | 2012-09-26 | 2012-09-26 | Sectional type tungsten filament net heater for sapphire single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202945379U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102851745A (en) * | 2012-09-26 | 2013-01-02 | 南京晶升能源设备有限公司 | Sectional wolfram wire mesh heater for sapphire single crystal furnace |
| CN103614773A (en) * | 2013-12-02 | 2014-03-05 | 株洲硬质合金集团有限公司 | Welded tungsten heating cage for sapphire single crystal furnace and welding method thereof |
| CN104178803A (en) * | 2014-09-04 | 2014-12-03 | 南京晶升能源设备有限公司 | Reducing tungsten rod heater for sapphire single crystal furnace |
| CN105113019A (en) * | 2015-09-29 | 2015-12-02 | 何康玉 | Heating electrode with heating tungsten bars |
| CN105401211A (en) * | 2014-08-08 | 2016-03-16 | 上海超硅半导体有限公司 | Crystal growing furnace and method for drawing C-axis sapphire single crystal |
| CN106637386A (en) * | 2015-10-30 | 2017-05-10 | 西安通鑫半导体辅料有限公司 | Single crystal straight-pulling heater capable of increasing crystal pulling rate, and single crystal straight-pulling method |
-
2012
- 2012-09-26 CN CN 201220493992 patent/CN202945379U/en not_active Withdrawn - After Issue
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102851745A (en) * | 2012-09-26 | 2013-01-02 | 南京晶升能源设备有限公司 | Sectional wolfram wire mesh heater for sapphire single crystal furnace |
| CN102851745B (en) * | 2012-09-26 | 2015-08-19 | 南京晶升能源设备有限公司 | Sectional wolfram wire mesh heater for sapphire single crystal furnace |
| CN103614773A (en) * | 2013-12-02 | 2014-03-05 | 株洲硬质合金集团有限公司 | Welded tungsten heating cage for sapphire single crystal furnace and welding method thereof |
| CN103614773B (en) * | 2013-12-02 | 2016-03-16 | 株洲硬质合金集团有限公司 | The sapphire single-crystal furnace welding process of welded type tungsten heating cage |
| CN105401211A (en) * | 2014-08-08 | 2016-03-16 | 上海超硅半导体有限公司 | Crystal growing furnace and method for drawing C-axis sapphire single crystal |
| CN105401211B (en) * | 2014-08-08 | 2017-12-26 | 上海超硅半导体有限公司 | Draw C axles sapphire single crystal growth furnace and method |
| CN104178803A (en) * | 2014-09-04 | 2014-12-03 | 南京晶升能源设备有限公司 | Reducing tungsten rod heater for sapphire single crystal furnace |
| CN105113019A (en) * | 2015-09-29 | 2015-12-02 | 何康玉 | Heating electrode with heating tungsten bars |
| CN106637386A (en) * | 2015-10-30 | 2017-05-10 | 西安通鑫半导体辅料有限公司 | Single crystal straight-pulling heater capable of increasing crystal pulling rate, and single crystal straight-pulling method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20130522 Effective date of abandoning: 20150819 |
|
| RGAV | Abandon patent right to avoid regrant |