CN202930363U - Anti-oxidation and blow-dry device for bonding copper wire after annealing - Google Patents

Anti-oxidation and blow-dry device for bonding copper wire after annealing Download PDF

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Publication number
CN202930363U
CN202930363U CN2012204918254U CN201220491825U CN202930363U CN 202930363 U CN202930363 U CN 202930363U CN 2012204918254 U CN2012204918254 U CN 2012204918254U CN 201220491825 U CN201220491825 U CN 201220491825U CN 202930363 U CN202930363 U CN 202930363U
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China
Prior art keywords
air inlet
annealing
oxidation
welded
inlet tube
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Expired - Lifetime
Application number
CN2012204918254U
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Chinese (zh)
Inventor
禹建敏
毛勇
吴予才
秦国义
王勤
刘文光
李双燕
杨正雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
YUNNAN COPPER INDUSTRY SCIENCE AND TECHNOLOGY DEVELOPMENT Co Ltd
Yunnan University YNU
Original Assignee
YUNNAN COPPER INDUSTRY SCIENCE AND TECHNOLOGY DEVELOPMENT Co Ltd
Yunnan University YNU
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Priority to CN2012204918254U priority Critical patent/CN202930363U/en
Application granted granted Critical
Publication of CN202930363U publication Critical patent/CN202930363U/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/741Apparatus for manufacturing means for bonding, e.g. connectors
    • H01L24/745Apparatus for manufacturing wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/43Manufacturing methods
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/43Manufacturing methods
    • H01L2224/438Post-treatment of the connector
    • H01L2224/43848Thermal treatments, e.g. annealing, controlled cooling
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/4501Shape
    • H01L2224/45012Cross-sectional shape
    • H01L2224/45015Cross-sectional shape being circular
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/45099Material
    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144Gold (Au) as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/45099Material
    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45147Copper (Cu) as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/00014Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Wire Bonding (AREA)

Abstract

The utility model relates to an anti-oxidation and blow-dry device for a bonding copper wire after annealing, belonging to the technical field of bonding materials. The device comprises a support (13) and a main air duct (12) mounted on the support (13), wherein the main air duct (12) is divided into three portions including a left air chamber (1), a middle air chamber (6) and a right air chamber (11) via separator plates (3, 10) welded in the air duct; a first air inlet tube nozzle (2) and a third air inlet tube nozzle (7) are welded in the upper end of the middle air chamber, a second air inlet tube nozzle (5) and a fourth air inlet tube nozzle (8) are welded in the lower end of the middle air chamber, the included angle between the main air duct and each air inlet tube nozzle is 30 DEG; and first bell mouths (4) are respectively welded between the first separator plate (3) and the first/second air inlet tube nozzle (2, 5), second bell mouths (9) are respectively welded between the second separator plate (10) and the third/fourth air inlet tube nozzle (7, 8), and the first and second bell mouths (4, 9) are coaxial wire through holes. The anti-oxidation and blow-dry device for the bonding copper wire after annealing has the advantages that structure is simple and cost is low, the temperature of the bonding copper wire after annealing can be effectively reduced, oxidation can be prevented, and anti-oxidant is blown dry.

Description

Anti-oxidation and dry up the device of copper wire after the annealing of a kind of bonding brass wire
Technical field:
The utility model relates to anti-oxidation after the annealing of a kind of bonding brass wire and dries up the device of copper wire, belongs to the bonding material technical field.
Background technology:
As the bonding material of semiconductor package lead, bonding gold wire is the product of comparative maturity for a long time, has the advantages such as stable chemical nature.But along with in recent years, sharp rising of gold cost of material, the manufacturing cost that makes domestic and international integrated circuit (IC), semiconductor lighting (LED) and semiconductor separation part encapsulate factory significantly improves, therefore these several years, people are by research and development and industrial test, progressively substitute bonding gold wire with bonding brass wire both at home and abroad, and obtained certain effect.
Bonding brass wire compare with bonding gold wire have good electricity, calorifics, mechanical performance and low intermetallic compound generate and increase.Adapted to the development that low cost, thin space, high exit encapsulate, and improved to a great extent packaged chip frequency and reliability, thereby bonding brass wire becomes the most competitive material that substitutes traditional bonding wire.
At present, domestic market or take the bonding brass wire of the manufacturer's brand of Germany, Korea S, Japan and other countries as main, the bonding brass wire of these brands has replaced the bonding gold wire of low and middle-end use substantially, has reached the level of commercial applications.But also there is some shortcoming in actual use in bonding brass wire, and wherein topmost is exactly copper easier oxidation with respect to gold, and particularly temperature is higher, and the oxidation of copper is stronger, has directly affected the ball bonding performance of its bond sequence; Cause extremely difficult welding in bond sequence, thereby make the bonding frequent operation interrupt, affect production efficiency.
Bonding brass wire preparation technology mainly comprises founding, wire drawing and annealing etc.Because bonding brass wire belongs to glass-coated microwire, its wire diameter is only tens microns to tens microns, and its surperficial a wee bit oxidation on its material property impact greatly.Therefore in order to overcome the major defect of existing bonding brass wire, the utility model patented technology to the final operation stage of finished product, proposes a kind of bonding brass wire annealing anti-oxidation and dry up the device of copper wire afterwards for wire drawing.
The utility model content:
The purpose of this utility model is to overcome the deficiency of prior art aspect, provides anti-oxidation after the annealing of a kind of bonding brass wire and dries up the device of copper wire.This device can reduce the rear soft attitude bonding brass wire of annealing oxidized possibility under the remaining temperature of annealing effectively, satisfies the bonding performance of final finished.
Anti-oxidation and dry up the device of copper wire after bonding brass wire of the present utility model annealing, this device comprises support (13) and is placed in main gas tube (12) on support (13); Wherein: main gas tube (12) is divided into left air chamber (1), middle air chamber (6) and right air chamber (11) three parts by the dividing plate (3,10) that is welded in pipe; The two ends up and down of middle air chamber (6) are welded with respectively the first air inlet ozzles (2), the second air inlet ozzle (5), the 3rd air inlet ozzle (7) that become 30 degree with main gas tube (12), and the 4th air inlet ozzle (8); Be welded with the first horn mouth (4) between the first dividing plate (3) and the first air inlet ozzle (2) and the second air inlet ozzle (5), be welded with the second horn mouth (9) between second partition (10) and the 3rd air inlet ozzle (7) and the 4th air inlet ozzle (8), the first horn mouth (4) and the second horn mouth (9) are coaxial through wires hole.
During use, adopt two cover the utility model devices, be placed in respectively between annealing pipe (14) and dip-coating antioxidant device (15) and between dip-coating antioxidant device (15) and spooler (16).The length of its main gas tube (12) is determined according to the distance of annealing pipe (14) and dip-coating antioxidant device (15) and the actual range between dip-coating antioxidant device (15) and spooler (16).The optimal material of main gas tube (12) and support (13) is stainless steel material.
The utlity model has simple in structure, cost is low, can effectively lower the temperature after bonding brass wire annealing, has anti-oxidation and dries up the effect of antioxidant, provides the facility guarantee for producing high-quality bonding brass wire material.
Description of drawings:
Fig. 1 is structural representation of the present utility model.
Fig. 2 is the schematic diagram that the utility model and the configuration of bonding brass wire annealing rear defence oxidation technology are used.
Embodiment:
As shown in Figure 1, anti-oxidation and dry up the device of copper wire after bonding brass wire of the present utility model annealing, comprise the outlet height that can make annealing pipe and the consistent support 13 of the coaxial through wires hole of this device and be placed in main gas tube 12 on support 13; Wherein: main gas tube 12 is divided into left air chamber 1, middle air chamber 6 and right air chamber 11 3 parts by the dividing plate 3 and 10 that is welded in pipe; The two ends up and down of middle air chamber 6 are welded with respectively the first air inlet ozzle 2, the second air inlet ozzle 5, the 3rd air inlet ozzle 7, reach the 4th air inlet ozzle 8,12 one-tenth 30 degree of each air inlet ozzle and main gas tube, the first dividing plate 3 and the first air inlet ozzle 2 and 5 of the second air inlet ozzles are welded with the first horn mouth 4, second partition 10 and the 3rd air inlet ozzle 7 and 8 of the 4th air inlet ozzles are welded with the second horn mouth 9, the first horn mouths 4 and two horn mouths 9 are coaxial through wires hole.
As shown in Figure 2, during use, adopt two cover devices of the present utility model, be placed in respectively between annealing pipe 14 and dip-coating antioxidant device 15, and between dip-coating antioxidant device 15 and spooler 16.The length of its main gas tube 12 is determined according to the distance of annealing pipe 14 and dip-coating antioxidant device 15 and the actual range between dip-coating antioxidant device 15 and spooler 16.Setting height(from bottom) is coaxial with one heart with the through wires hole in assurance and annealing pipe.The optimal material of main gas tube 12 and support 13 is stainless steel material.
With flexible pipe respectively with the first air inlet ozzle 2, the second air inlet ozzle 5, the 3rd air inlet ozzle 7, and the 4th air inlet ozzle 8 be connected, pass to aborning nitrogen or inert gas and can complete the effect that rear bonding brass wire is anti-oxidation and dry up to annealing.
Practical application shows, this device reaches designing requirement fully.And be suitable for other wire that needs the protection against oxidation operation or nonmetal wires.

Claims (1)

1. anti-oxidation after bonding brass wire annealing and dry up the device of copper wire, it is characterized in that this device comprises support (13) and is placed in main gas tube (12) on support (13); Wherein: main gas tube (12) is divided into left air chamber (1), middle air chamber (6) and right air chamber (11) three parts by the dividing plate (3,10) that is welded in pipe; The two ends up and down of middle air chamber (6) are welded with respectively the first air inlet ozzles (2), the second air inlet ozzle (5), the 3rd air inlet ozzle (7) that become 30 degree with main gas tube (12), and the 4th air inlet ozzle (8); Be welded with the first horn mouth (4) between the first dividing plate (3) and the first air inlet ozzle (2) and the second air inlet ozzle (5), be welded with the second horn mouth (9) between second partition (10) and the 3rd air inlet ozzle (7) and the 4th air inlet ozzle (8), the first horn mouth (4) and the second horn mouth (9) are coaxial through wires hole.
CN2012204918254U 2012-09-25 2012-09-25 Anti-oxidation and blow-dry device for bonding copper wire after annealing Expired - Lifetime CN202930363U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2012204918254U CN202930363U (en) 2012-09-25 2012-09-25 Anti-oxidation and blow-dry device for bonding copper wire after annealing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2012204918254U CN202930363U (en) 2012-09-25 2012-09-25 Anti-oxidation and blow-dry device for bonding copper wire after annealing

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109573341A (en) * 2018-10-31 2019-04-05 贵州固达电缆有限公司 A kind of copper wire coils anti-oxidation storage device, method and burning bucket

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109573341A (en) * 2018-10-31 2019-04-05 贵州固达电缆有限公司 A kind of copper wire coils anti-oxidation storage device, method and burning bucket
CN109573341B (en) * 2018-10-31 2019-10-11 贵州固达电缆有限公司 A kind of copper wire coils anti-oxidation storage device, method and burning bucket

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Granted publication date: 20130508

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