CN202862022U - Novel device capable of prolonging service life of polishing upper pad - Google Patents
Novel device capable of prolonging service life of polishing upper pad Download PDFInfo
- Publication number
- CN202862022U CN202862022U CN 201220206850 CN201220206850U CN202862022U CN 202862022 U CN202862022 U CN 202862022U CN 201220206850 CN201220206850 CN 201220206850 CN 201220206850 U CN201220206850 U CN 201220206850U CN 202862022 U CN202862022 U CN 202862022U
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- polishing
- pad
- upper pad
- stainless steel
- service life
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN 201220206850 CN202862022U (en) | 2012-05-09 | 2012-05-09 | Novel device capable of prolonging service life of polishing upper pad |
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CN 201220206850 CN202862022U (en) | 2012-05-09 | 2012-05-09 | Novel device capable of prolonging service life of polishing upper pad |
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CN202862022U true CN202862022U (en) | 2013-04-10 |
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CN 201220206850 Expired - Fee Related CN202862022U (en) | 2012-05-09 | 2012-05-09 | Novel device capable of prolonging service life of polishing upper pad |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106166701A (en) * | 2016-07-22 | 2016-11-30 | 成都贝瑞光电科技股份有限公司 | Dish process on a kind of ultraviolet excess thin slice |
CN109605137A (en) * | 2018-12-27 | 2019-04-12 | 衢州晶哲电子材料有限公司 | A kind of unpowered rotation of silicon wafer is without wax polishing template and its polishing method |
CN110265350A (en) * | 2019-06-27 | 2019-09-20 | 中国电子科技集团公司第四十四研究所 | A kind of limit for height shield jig and method for focal plane device attenuated polishing |
-
2012
- 2012-05-09 CN CN 201220206850 patent/CN202862022U/en not_active Expired - Fee Related
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106166701A (en) * | 2016-07-22 | 2016-11-30 | 成都贝瑞光电科技股份有限公司 | Dish process on a kind of ultraviolet excess thin slice |
CN109605137A (en) * | 2018-12-27 | 2019-04-12 | 衢州晶哲电子材料有限公司 | A kind of unpowered rotation of silicon wafer is without wax polishing template and its polishing method |
CN110265350A (en) * | 2019-06-27 | 2019-09-20 | 中国电子科技集团公司第四十四研究所 | A kind of limit for height shield jig and method for focal plane device attenuated polishing |
CN110265350B (en) * | 2019-06-27 | 2022-03-01 | 中国电子科技集团公司第四十四研究所 | Height limiting protection clamp and method for thinning and polishing focal plane device |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Nanchang zhengixng Photoelectric Technology Co. Ltd. Assignor: Shenzhen ZhengXing Optoelectronics Technology Co., Ltd. Contract record no.: 2014440020172 Denomination of utility model: Novel device capable of prolonging service life of polishing upper pad Granted publication date: 20130410 License type: Exclusive License Record date: 20140523 |
|
LICC | Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model | ||
DD01 | Delivery of document by public notice | ||
DD01 | Delivery of document by public notice |
Addressee: Shenzhen ZhengXing Optoelectronics Technology Co., Ltd. Document name: Notification to Pay the Fees |
|
DD01 | Delivery of document by public notice | ||
DD01 | Delivery of document by public notice |
Addressee: Shenzhen ZhengXing Optoelectronics Technology Co., Ltd. Document name: Notification of Termination of Patent Right |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130410 Termination date: 20190509 |