CN202796898U - Disc-shaped object clamping device - Google Patents
Disc-shaped object clamping device Download PDFInfo
- Publication number
- CN202796898U CN202796898U CN 201220394803 CN201220394803U CN202796898U CN 202796898 U CN202796898 U CN 202796898U CN 201220394803 CN201220394803 CN 201220394803 CN 201220394803 U CN201220394803 U CN 201220394803U CN 202796898 U CN202796898 U CN 202796898U
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- China
- Prior art keywords
- clamping
- pan
- chuck
- disc
- shaped object
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Abstract
The utility model relates to a clamping device, and discloses a disc-shaped object clamping device. The clamping device comprises a chuck, on a surface of which is disposed a disc-shaped object. The surface of the chuck is provided with a plurality of mechanical type clamping elements in a peripheral direction. A driving mechanism is disposed in the chuck, and is connected with the plurality of clamping elements, and can be used to drive the clamping elements to carry out the autogiration movement, and then to pick up or put down the disc-shaped object. An effective clamping surface formed by the plurality of clamping elements is cooperated with the shape of the disc-shaped object. In the utility model, the driving mechanism can be used to drive the clamping elements to carry out the autogiration movement, and then to pick up or put down the disc-shaped object, in addition, the structure is simple, and the disc-shaped object cannot be polluted during the clamping of the disc-shaped object. Furthermore, an included angle between one side of each of clamping heads and the surface of the chuck is less than 90degrees, and the above mentioned sides can be used to clamp the disc-shaped object, therefore the disc-shaped object can be prevented from falling and being damaged during the clamping process. The other sides of the clamping heads can be used to pick up or put down the disc-shaped object, and the included angle between each of the above mentioned sides and the surface of the chuck is greater than or equal to 90degrees.
Description
Technical field
The utility model relates to a kind of clamping device, particularly relates to a kind of disk clamping device.
Background technology
The device of the pans such as present holding chip generally adopts pin chuck and bernoulli gripper.The existing bernoulli principle chuck that pan is fixing that utilizes.Utilize bernoulli principle between chuck and pan, to form one deck air cushion, utilize the air-cushion type clamping element to come holding plate-like article, realize radial location by the air-cushion type clamping element that is distributed in the pan circumference.This structure has well reduced contacting of pan and chuck, thereby reduced the damage to pan, but its complex structure is difficult for processing, and because gas passes through in the middle of axle, the particle that is easy to produce in the pipeline takes the pan surface to and pollutes pan.
The utility model content
The technical problem that (one) will solve
The technical problems to be solved in the utility model is how a kind of disk clamping device simple in structure, that can not pollute pan is provided.
(2) technical scheme
In order to solve the problems of the technologies described above, a kind of disk clamping device that the utility model provides, comprise chuck, place pan on the described chuck card, upwards be provided with a plurality of mechanical type clamping elements the week of described chuck card, described chuck inside is provided with driving mechanism, described driving mechanism is connected with a plurality of described clamping elements, be used for to drive clamping element and carry out spinning campaign and then clamping or pick and place pan, effective clamping face that a plurality of described clamping elements consist of and the shape of pan are complementary.
Wherein, each described clamping element comprises respectively clamping head and supports cylindrical shell, described clamping head is fixed on the upper end of described support cylindrical shell, and the lower end of described support cylindrical shell is installed on the described chuck card, and described clamping head and support cylindrical shell are driven by described driving mechanism and carry out together the spinning campaign.
Wherein, the angle between a side of described clamping head and the described chuck card is used for holding plate-like article less than 90 °; Angle between its opposite side and the described chuck card is used for picking and placeing pan more than or equal to 90 °.
Wherein, described clamping head and described chuck card are 10 ° ~ 80 ° less than 90 ° angular range.
Wherein, a plurality of described clamping elements are driven by described driving mechanism and carry out simultaneously the spinning campaign.
Wherein, described driving mechanism comprises gear unit and motor, and the output shaft of described motor is connected with a plurality of described clamping elements by gear unit, be used for to drive clamping element and carries out spinning campaign and then clamping or pick and place pan.
Wherein, described clamping element is at least three.
Wherein, described clamping element is four, five, six, seven or eight.
(3) beneficial effect
A kind of disk clamping device that technique scheme provides, adopt driving mechanism driving device formula clamping element to carry out the spinning campaign and pan is carried out clamping and picks and places, this is simple in structure, can not produce pan in the process of holding plate-like article and pollute; Further, adopt the clamping element with clamping head, increased the pan chucking power, be easy to holding plate-like article; Further, the angle of clamping head and chuck card is used for holding plate-like article less than a side of 90 °, avoids that pan drops and is damaged in clamping process, and itself and the angle of the chuck card opposite side more than or equal to 90 ° are for picking and placeing pan.
Description of drawings
Fig. 1 is the structural representation of a kind of disk clamping device of the utility model;
Fig. 2 is the axonometric drawing of clamping element of the present utility model;
Fig. 3 is the partial schematic diagram under the utility model open mode;
Fig. 4 is the partial schematic diagram under the utility model clamp position.
Wherein, 1, chuck; 2, clamping element; 21, clamping head; 22, support cylindrical shell; 3, pan.
Embodiment
Below in conjunction with drawings and Examples, embodiment of the present utility model is described in further detail.Following examples are used for explanation the utility model, but are not used for limiting scope of the present utility model.
As shown in Figure 1, a kind of disk clamping device of the present utility model, comprise chuck 1, place pan 3 on this chuck card, all kinds of disc shaped wafer of these pan 3 representatives, such as semiconductor wafer, CD or flat-panel monitor, upwards be provided with a plurality of mechanical type clamping elements 2 week of chuck card, chuck 1 inside is provided with driving mechanism, this driving mechanism is connected with a plurality of clamping elements 2, be used for to drive clamping element 2 and carry out spinning campaign and then clamping or pick and place pan 3, effective clamping face that a plurality of clamping elements 2 consist of and the shape of pan 3 are complementary.Adopt driving mechanism driving device formula clamping element 2 to carry out spinning campaign and pan 3 is carried out clamping and picks and places, this is simple in structure, can be to pan generation pollution in the process of holding plate-like article.Clamping element 2 is set at least three, to guarantee the firm of pan clamping, is preferably four, five, six, seven or eight.
Driving mechanism comprises gear unit and motor, and the output shaft of motor is connected with a plurality of clamping elements 2 by gear unit, be used for to drive clamping element 2 and carries out spinning campaign and then clamping or pick and place pan 3.Wherein, gear unit can be gear train component or cam drive sub-assembly or other those skilled in the art and need not bring into play and creative just can bring alternative transmission mechanism.
As shown in Figure 2, each clamping element 2 comprises respectively clamping head 21 and supports cylindrical shell 22, this clamping head 21 is fixed on the upper end of supporting cylindrical shell 22, driving mechanism is fixed by gear unit and the lower end of supporting cylindrical shell 22, and clamping head 21 and support cylindrical shell 22 move under the control of driving mechanism simultaneously; The lower end of supporting cylindrical shell 22 is installed on chuck 1 card, and clamping head 21 and support cylindrical shell 22 are driven by driving mechanism and carry out together the spinning campaign, and effective clamping face that the clamping head 21 of a plurality of clamping elements 2 consists of and the shape of pan 3 are complementary.Clamping head 21 is holding plate-like article 3 under the driving of driving mechanism, adopts the clamping element 4 with clamping head 21, has increased the pan chucking power, is easy to holding plate-like article 3.
Angle between one side of clamping head 21 and chuck 1 card is less than 90 °, be used for holding plate-like article 3, avoid that pan 3 drops and is damaged in clamping process, be preferably 10 ° ~ 80 °, difficult drop-off when this angle can be carried out clamping and can guarantee clamping the wider pan 3 of size range, for convenient processing, this angle the best is 30 °, 45 ° and 60 °; Angle between the opposite side of clamping head 21 and chuck 1 card is used for picking and placeing pan more than or equal to 90 °, is preferably more than 90 °, picks and places pan to guarantee non-resistance.
Under the driving of driving mechanism, a plurality of clamping elements 2 can carry out the spinning campaign simultaneously, when the angle between clamping head 21 and chuck 1 card contacts with pan 3 less than a side of 90 °, this moment a plurality of clamping elements the internal diameter of effective clamping face of consisting of of clamping head 21 and the diameter of pan 3 be complementary, clamping element 2 is in clamp position, such as Fig. 4, clamping head 21 is held the position of pan 3 and removable pan 3; When the angle between clamping head 21 and chuck 1 card contacts with pan 3 more than or equal to a side of 90 °, this moment a plurality of clamping elements the internal diameter of effective clamping face of consisting of of clamping head 21 greater than the diameter of pan 3, clamping element 2 is in open mode, such as Fig. 3, can pick and place pan to pan.
The main effect of a kind of disk clamping device that technique scheme provides is:
1, adopt driving mechanism driving device formula clamping element to carry out spinning campaign and pan is carried out clamping and picks and places, this is simple in structure, can not produce pollution to pan in the process of holding plate-like article;
2, adopt the clamping element with clamping head, increased the pan chucking power, be easy to holding plate-like article;
3, the angle of clamping head and chuck card is used for holding plate-like article less than a side of 90 °, avoids that pan drops and is damaged in clamping process, and itself and the angle of the chuck card opposite side more than or equal to 90 ° are for picking and placeing pan.
The above only is preferred implementation of the present utility model; should be understood that; for those skilled in the art; under the prerequisite that does not break away from the utility model know-why; can also make some improvement and replacement, these improvement and replacement also should be considered as protection range of the present utility model.
Claims (8)
1. disk clamping device, it is characterized in that, comprise chuck, place pan on the described chuck card, upwards be provided with a plurality of mechanical type clamping elements the week of described chuck card, described chuck inside is provided with driving mechanism, and described driving mechanism is connected with a plurality of described clamping elements, be used for driving described clamping element and carry out spinning campaign and then clamping or pick and place pan, effective clamping face that a plurality of described clamping elements consist of and the shape of pan are complementary.
2. disk clamping device as claimed in claim 1, it is characterized in that, each described clamping element comprises respectively clamping head and supports cylindrical shell, described clamping head is fixed on the upper end of described support cylindrical shell, the lower end of described support cylindrical shell is installed on the described chuck card, and described clamping head and support cylindrical shell are driven by described driving mechanism and carry out together the spinning campaign.
3. disk clamping device as claimed in claim 2 is characterized in that, the angle between a side of described clamping head and the described chuck card is used for holding plate-like article less than 90 °; Angle between its opposite side and the described chuck card is used for picking and placeing pan more than or equal to 90 °.
4. disk clamping device as claimed in claim 3 is characterized in that, described clamping head and described chuck card are 10 ° ~ 80 ° less than 90 ° angular range.
5. disk clamping device as claimed in claim 1 is characterized in that, a plurality of described clamping elements are driven by described driving mechanism and carry out simultaneously the spinning campaign.
6. disk clamping device as claimed in claim 1, it is characterized in that, described driving mechanism comprises gear unit and motor, and the output shaft of described motor is connected with a plurality of described clamping elements by gear unit, be used for to drive clamping element and carries out spinning campaign and then clamping or pick and place pan.
7. disk clamping device as claimed in claim 1 is characterized in that, described clamping element is at least three.
8. disk clamping device as claimed in claim 7 is characterized in that, described clamping element is four, five, six, seven or eight.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220394803 CN202796898U (en) | 2012-08-09 | 2012-08-09 | Disc-shaped object clamping device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220394803 CN202796898U (en) | 2012-08-09 | 2012-08-09 | Disc-shaped object clamping device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202796898U true CN202796898U (en) | 2013-03-13 |
Family
ID=47824102
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220394803 Expired - Lifetime CN202796898U (en) | 2012-08-09 | 2012-08-09 | Disc-shaped object clamping device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202796898U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102800619A (en) * | 2012-08-09 | 2012-11-28 | 北京七星华创电子股份有限公司 | Disk clamping device |
| CN105448785A (en) * | 2015-12-31 | 2016-03-30 | 北京七星华创电子股份有限公司 | Semi-conductor film forming equipment, automatic positioning and clamping structures of wafer and clamping method |
-
2012
- 2012-08-09 CN CN 201220394803 patent/CN202796898U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102800619A (en) * | 2012-08-09 | 2012-11-28 | 北京七星华创电子股份有限公司 | Disk clamping device |
| CN105448785A (en) * | 2015-12-31 | 2016-03-30 | 北京七星华创电子股份有限公司 | Semi-conductor film forming equipment, automatic positioning and clamping structures of wafer and clamping method |
| CN105448785B (en) * | 2015-12-31 | 2018-12-18 | 北京北方华创微电子装备有限公司 | Semiconductor film-forming apparatus, wafer automatic positioning clamping structure and method for chucking |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130313 |
|
| CX01 | Expiry of patent term |