CN202423249U - Cam type disk holding device - Google Patents
Cam type disk holding device Download PDFInfo
- Publication number
- CN202423249U CN202423249U CN 201220006966 CN201220006966U CN202423249U CN 202423249 U CN202423249 U CN 202423249U CN 201220006966 CN201220006966 CN 201220006966 CN 201220006966 U CN201220006966 U CN 201220006966U CN 202423249 U CN202423249 U CN 202423249U
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- CN
- China
- Prior art keywords
- cam
- extension rod
- spring
- chuck
- clamping device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
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Abstract
The utility model relates to the technical field of integrated circuits, particularly discloses a cam type disk holding device, and comprises a cam, a clamp disk and a holding mechanism. The center of the lower portion of the clamp disk is connected with the cam, the holding mechanism is arranged on the clamp disk, the holding mechanism comprises an L-shaped extending rod, one end of the extending rod stretches into the clamp disk to be contacted with the periphery of the cam, and the other end of the extending rod is upwards and provided with a holding piece for clamping dicks. The cam type disk holding device can rapidly clamping the dicks, is simple in structure, low in cost and easy to achieve.
Description
Technical field
The utility model relates to technical field of integrated circuits, particularly a kind of cam-type pan clamping device.
Background technology
In the production technology of integrated circuit, clamp pan, such as wafer, silicon chip, be the important step in each production phase.Traditional method mostly is to use complicated mechanical to connect and clamps and mobile holder.The most important three phases of geometrical clamp gripping member comprises: load pan, at this moment holder is in open mode; The rotation pan, at this moment holder is in the state that clamps pan; The unloading pan, at this moment holder is in open mode.The method of this more traditional holding plate-like article relies on many movable parts at the outside contact of chuck pan usually, but when chuck rotates, can produce many particles, when pan when holder takes off, particle can pollute pan.
Conventional method in some cases fixedly pan realize through electronic or pneumatic mode usually.These methods need complex mechanical construction to control and mobile holder in the suitable moment usually.In addition, the employing Pneumatic method need be near chuck, and this will need special and expensive axle interlock rotary system.The holder that many conventional methods are designed can receive the influence of the centrifugal force of high speed rotating generation, the overproof design of having to, or when changing, need the shorter time.
The utility model content
The technical problem that (one) will solve
The technical problem that the utility model will solve is how to make things convenient for, simply realize the clamping of pan, and does not need complicated structure and expensive component.
(2) technical scheme
In order to solve the problems of the technologies described above, the utility model embodiment provides a kind of cam-type pan clamping device, comprising:
Cam;
Chuck, its center, below is connected with said cam;
Fixture all is arranged on the said chuck, comprises L type extension rod, said extension rod one end stretch into in the chuck and with the cam circumferential contact, the other end is towards the top and the holder that is used for holding plate-like article is installed.
Further; Be arranged with first spring on the extension rod in the said chuck; Said first spring is connected with first packing ring away from an end of cam; Said first gasket sleeve be located on the extension rod and can with the extension rod relative motion, said first spring is connected with second packing ring that is fixedly connected with said extension rod near an end of cam.
Further, also comprise: be set in second spring on the said extension rod, said second spring is between second packing ring and cam, and said second spring also is connected with the 3rd packing ring near an end of cam, said the 3rd packing ring can with the extension rod relative motion.
Further, said first spring and second spring are the part compressive state when static state.
Further, also comprise: be arranged on the strutting piece on the said chuck.
Further, the number of said fixture is at least three, evenly is arranged on the said chuck.
Further, also comprise: the sleeve pipe that resistant material is made is set on the said extension rod.
Further, said holder has groove towards the chuck internal direction.
Further, said chuck is connected with drive unit.
Further, the end that contacts with cam of said extension rod is a hemisphere.
(3) beneficial effect
The cam-type pan clamping device that the utility model embodiment provides has following beneficial effect:
1, through the fixture of cam and band spring, holding plate-like article easily and efficiently are set; The power that two springs provide can realize the folding of fixture;
2, holder is connected with extension rod is detachable, makes things convenient for the replacing of holder;
3, extension rod adopts certain strength materials to make, and spring has toward the power of pulling back extension rod, can prevent effectively that fixture is out of shape to open under action of centrifugal force, avoids pan to fly out; Has stronger resistance to wear simultaneously;
4, parts such as spring are positioned at chuck inside, are played a very good protection by chuck, eliminate particle that its motion produces attached on the pan;
5, this apparatus structure simple, cheap, be easy to realize.
Description of drawings
Fig. 1 is the structural representation of the cam-type pan clamping device of the utility model embodiment;
Fig. 2 is the part-structure sketch map of the cam-type pan clamping device of the utility model embodiment;
Fig. 3 is the phantom of the cam-type pan clamping device of the utility model embodiment;
Fig. 4 is the sketch map of cam-type pan clamping device when cam descends of the utility model embodiment;
Fig. 5 is the sketch map of cam-type pan clamping device when cam rises of the utility model embodiment;
Fig. 6 is the part vertical view of the cam-type pan clamping device of the utility model embodiment.
Wherein, 1: pan; 2: chuck; 3: fixture; 4: cam; 5: holder; 6: groove; 7: strutting piece; 8: sleeve pipe; 9: extension rod; 11: the first springs; 13: the second springs; 12: the second packing rings; 14: the three packing rings; 15: the first packing rings.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the embodiment of the utility model is described in further detail.Following examples are used to explain the utility model, but are not used for limiting the scope of the utility model.
Like Fig. 1-shown in Figure 6, the structural representation of the cam-type pan clamping device that provides for the utility model embodiment, it comprises chuck 2, fixture 3 and cam 4.
Wherein chuck 2 is a circular discs, can under the driving of drive units such as motor, rotate, and its center, below is equipped with cam 4.
Because pan 1 needs the high-intensity power of holding that adds in rotary course, so extension rod 9 is made by high-strength material.
In the chuck 2 extension rod 9 around have groove (indicating) near the zone of cam 4; End away from cam 4 in the groove is provided with first packing ring 15, and extension rod 9 passes first packing ring, 15, the first packing rings 15 and can move relative to extension rod 9; First packing ring 15 is provided with first spring 11 near the direction of cam 4; One end of first spring 11 withstands first packing ring 15, and is set on the extension rod 9, and the other end of first spring 11 withstands second packing ring 12; Second packing ring 12 is fixed on the extension rod 9, can move with extension rod 9.Preferably, the other end that the other end of second packing ring 12 is provided with second spring, 13, the second springs 13 withstands the end near cam 4 of groove, extension rod 9 motions relatively of the 3rd packing ring 14 through the 3rd packing ring 14.The length of second spring 13 is shorter than the length of first spring 11.Under the static situation, first spring 11 and second spring 13 are in the part compressive state.
On chuck 2, also be provided with strutting piece 7, be used for outwards moving, support pan 1 when pan 1 breaks away from from groove 6, avoid pan 1 to drop when extension rod 9.
The operation principle of the cam-type pan clamping device that the utility model provides is summarized as follows:
When cam 4 moved upward, the circumference of the cam 4 that contacts with extension rod 9 increased, and promoted extension rod 9 and moved to the periphery direction, so that place pan 1.Second packing ring 12 moves with extension rod 9 outward in this process; First spring 11 is compressed; When first packing ring 15 was expressed to the edge of groove by first spring 11, first packing ring 15 can be given 11 1 fulcrums of first spring, because first spring 11 is by the part compression; Therefore make the spring 11 of winning produce the power of pointing to chuck 2 centers of circle, promptly toward the reaction force of pulling back.When in the groove 6 that pan 1 is stuck in holder 5, cam 4 moves downward, and the circumference of the cam 4 that contacts with extension rod 9 reduces, and extension rod 9 moves to the inside circumference direction, so that clamp pan 1.In this process, toward interior motion, 11 pairs of chucks of first spring 2 have the power that direction is drawn toward the center of circle with extension rod 9 to second packing ring 12, are beneficial to the withdrawal of extension rod 9 and the clamping of pan 1 with extension rod 9.After chuck 2 high speed rotating get up; Extension rod 9 has a centrifugal force that outwards gets rid of; First spring 11 is compressed and withstands 15 on first packing ring, 15, the first packing rings and give 11 1 reaction forces of first spring, makes the spring 11 of winning withstand second spring 13 through second packing ring 12; Second spring 13 produces the active force to the extension rod 9 of pulling back and cushions and offset centrifugal force, makes chuck 2 stablize rotation.Moving of first spring 11 assisted in being provided with of second spring 13, prevents that first spring 11 is excessive to the power in chuck 2 centers of circle, causes second packing ring, 12 diebacks in the groove of chuck 2.
Can find out that by above embodiment the cam-type pan clamping device that the utility model embodiment provides has following beneficial effect:
1, through the fixture of cam and band spring, holding plate-like article easily and efficiently are set;
2, holder is connected with extension rod is detachable, makes things convenient for the replacing of holder;
3, extension rod adopts certain strength materials to make, and spring has toward the power of pulling back extension rod, can prevent effectively that fixture is out of shape to open under action of centrifugal force, avoids pan to fly out; Has stronger resistance to wear simultaneously;
4, parts such as spring are positioned at chuck inside, are played a very good protection by chuck, eliminate particle that its motion produces attached on the pan.
The above only is the preferred implementation of the utility model; Should be understood that; For those skilled in the art; Under the prerequisite that does not break away from the utility model know-why, can also make some improvement and modification, these improvement and modification also should be regarded as the protection range of the utility model.
Claims (10)
1. a cam-type pan clamping device is characterized in that, comprising:
Cam;
Chuck, its center, below is connected with said cam;
Fixture all is arranged on the said chuck, comprises L type extension rod, said extension rod one end stretch into in the chuck and with the cam circumferential contact, the other end is towards the top and the holder that is used for holding plate-like article is installed.
2. cam-type pan clamping device as claimed in claim 1; It is characterized in that; Be arranged with first spring on the extension rod in the said chuck; Said first spring is connected with first packing ring away from an end of cam, said first gasket sleeve be located on the extension rod and can with the extension rod relative motion, said first spring is connected with second packing ring that is fixedly connected with said extension rod near an end of cam.
3. cam-type pan clamping device as claimed in claim 2; It is characterized in that; Also comprise: be set in second spring on the said extension rod; Said second spring is between second packing ring and cam, and said second spring also is connected with the 3rd packing ring near an end of cam, said the 3rd packing ring can with the extension rod relative motion.
4. cam-type pan clamping device as claimed in claim 3 is characterized in that, said first spring and second spring are the part compressive state when static state.
5. cam-type pan clamping device as claimed in claim 1 is characterized in that, also comprises: be arranged on the strutting piece on the said chuck.
6. cam-type pan clamping device as claimed in claim 1 is characterized in that the number of said fixture is at least three, evenly is arranged on the said chuck.
7. cam-type pan clamping device as claimed in claim 1 is characterized in that, also comprises: the sleeve pipe that resistant material is made is set on the said extension rod.
8. cam-type pan clamping device as claimed in claim 1 is characterized in that said holder has groove towards the chuck internal direction.
9. cam-type pan clamping device as claimed in claim 1 is characterized in that said chuck is connected with drive unit.
10. cam-type pan clamping device as claimed in claim 1 is characterized in that the end that said extension rod contacts with cam is a hemisphere.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220006966 CN202423249U (en) | 2012-01-09 | 2012-01-09 | Cam type disk holding device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220006966 CN202423249U (en) | 2012-01-09 | 2012-01-09 | Cam type disk holding device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202423249U true CN202423249U (en) | 2012-09-05 |
Family
ID=46747982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220006966 Withdrawn - After Issue CN202423249U (en) | 2012-01-09 | 2012-01-09 | Cam type disk holding device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202423249U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102593033A (en) * | 2012-01-09 | 2012-07-18 | 北京七星华创电子股份有限公司 | Cam-type disc clamping device |
| CN104339335A (en) * | 2014-07-09 | 2015-02-11 | 苏州博众精工科技有限公司 | Cam clamping mechanism |
| CN105448785A (en) * | 2015-12-31 | 2016-03-30 | 北京七星华创电子股份有限公司 | Semi-conductor film forming equipment, automatic positioning and clamping structures of wafer and clamping method |
-
2012
- 2012-01-09 CN CN 201220006966 patent/CN202423249U/en not_active Withdrawn - After Issue
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102593033A (en) * | 2012-01-09 | 2012-07-18 | 北京七星华创电子股份有限公司 | Cam-type disc clamping device |
| CN102593033B (en) * | 2012-01-09 | 2014-11-19 | 北京七星华创电子股份有限公司 | Cam-type disc clamping device |
| CN104339335A (en) * | 2014-07-09 | 2015-02-11 | 苏州博众精工科技有限公司 | Cam clamping mechanism |
| CN105448785A (en) * | 2015-12-31 | 2016-03-30 | 北京七星华创电子股份有限公司 | Semi-conductor film forming equipment, automatic positioning and clamping structures of wafer and clamping method |
| CN105448785B (en) * | 2015-12-31 | 2018-12-18 | 北京北方华创微电子装备有限公司 | Semiconductor film-forming apparatus, wafer automatic positioning clamping structure and method for chucking |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20120905 Effective date of abandoning: 20141119 |
|
| RGAV | Abandon patent right to avoid regrant |