CN202763103U - 一种薄膜卡盘 - Google Patents
一种薄膜卡盘 Download PDFInfo
- Publication number
- CN202763103U CN202763103U CN2012204377639U CN201220437763U CN202763103U CN 202763103 U CN202763103 U CN 202763103U CN 2012204377639 U CN2012204377639 U CN 2012204377639U CN 201220437763 U CN201220437763 U CN 201220437763U CN 202763103 U CN202763103 U CN 202763103U
- Authority
- CN
- China
- Prior art keywords
- mount pad
- elastic card
- thin film
- card claw
- claw dish
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 17
- 210000000078 claw Anatomy 0.000 claims description 36
- 229910000639 Spring steel Inorganic materials 0.000 claims description 4
- 230000007306 turnover Effects 0.000 claims description 3
- 238000003754 machining Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract description 3
- 238000005520 cutting process Methods 0.000 abstract description 2
- 238000009434 installation Methods 0.000 abstract 6
- 238000005516 engineering process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Images
Landscapes
- Gripping On Spindles (AREA)
Abstract
Description
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2012204377639U CN202763103U (zh) | 2012-08-30 | 2012-08-30 | 一种薄膜卡盘 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2012204377639U CN202763103U (zh) | 2012-08-30 | 2012-08-30 | 一种薄膜卡盘 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN202763103U true CN202763103U (zh) | 2013-03-06 |
Family
ID=47769704
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2012204377639U Expired - Lifetime CN202763103U (zh) | 2012-08-30 | 2012-08-30 | 一种薄膜卡盘 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN202763103U (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102825281A (zh) * | 2012-08-30 | 2012-12-19 | 无锡易通精密机械股份有限公司 | 一种薄膜卡盘 |
-
2012
- 2012-08-30 CN CN2012204377639U patent/CN202763103U/zh not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102825281A (zh) * | 2012-08-30 | 2012-12-19 | 无锡易通精密机械股份有限公司 | 一种薄膜卡盘 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Thin film chuck Effective date of registration: 20130903 Granted publication date: 20130306 Pledgee: Agricultural Bank of China Limited by Share Ltd. Wuxi science and Technology Branch Pledgor: WUXI YITONG PRECISION MACHINERY CO.,LTD. Registration number: 2013990000645 |
|
PLDC | Enforcement, change and cancellation of contracts on pledge of patent right or utility model | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20161108 Granted publication date: 20130306 Pledgee: Agricultural Bank of China Limited by Share Ltd. Wuxi science and Technology Branch Pledgor: WUXI YITONG PRECISION MACHINERY CO.,LTD. Registration number: 2013990000645 |
|
PLDC | Enforcement, change and cancellation of contracts on pledge of patent right or utility model | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Thin film chuck Effective date of registration: 20161229 Granted publication date: 20130306 Pledgee: Agricultural Bank of China Limited by Share Ltd. Wuxi Huishan branch Pledgor: WUXI YITONG PRECISION MACHINERY CO.,LTD. Registration number: 2016990001187 |
|
PLDC | Enforcement, change and cancellation of contracts on pledge of patent right or utility model | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20190115 Granted publication date: 20130306 Pledgee: Agricultural Bank of China Limited by Share Ltd. Wuxi Huishan branch Pledgor: WUXI YITONG PRECISION MACHINERY CO.,LTD. Registration number: 2016990001187 |
|
PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Thin film chuck Effective date of registration: 20190115 Granted publication date: 20130306 Pledgee: Agricultural Bank of China Limited by Share Ltd. Wuxi Huishan branch Pledgor: WUXI YITONG PRECISION MACHINERY CO.,LTD. Registration number: 2019990000044 |
|
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
CX01 | Expiry of patent term |
Granted publication date: 20130306 |
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CX01 | Expiry of patent term |