CN202702036U - 研磨液供应臂定位辅助工具 - Google Patents
研磨液供应臂定位辅助工具 Download PDFInfo
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- CN202702036U CN202702036U CN 201220340916 CN201220340916U CN202702036U CN 202702036 U CN202702036 U CN 202702036U CN 201220340916 CN201220340916 CN 201220340916 CN 201220340916 U CN201220340916 U CN 201220340916U CN 202702036 U CN202702036 U CN 202702036U
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CN 201220340916 CN202702036U (zh) | 2012-07-13 | 2012-07-13 | 研磨液供应臂定位辅助工具 |
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CN 201220340916 CN202702036U (zh) | 2012-07-13 | 2012-07-13 | 研磨液供应臂定位辅助工具 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109940517A (zh) * | 2019-03-29 | 2019-06-28 | 长江存储科技有限责任公司 | 一种研磨液分配臂及化学机械平坦化装置 |
WO2022205496A1 (zh) * | 2021-04-02 | 2022-10-06 | 台湾积体电路制造股份有限公司 | 晶圆清洗设备及定位治具 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109940517A (zh) * | 2019-03-29 | 2019-06-28 | 长江存储科技有限责任公司 | 一种研磨液分配臂及化学机械平坦化装置 |
WO2022205496A1 (zh) * | 2021-04-02 | 2022-10-06 | 台湾积体电路制造股份有限公司 | 晶圆清洗设备及定位治具 |
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GR01 | Patent grant | ||
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Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION Effective date: 20130509 |
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Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING |
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Effective date of registration: 20130509 Address after: 100176 No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130130 Termination date: 20180713 |
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CF01 | Termination of patent right due to non-payment of annual fee |