CN202701931U - Periphery processing device of hard brittle plate - Google Patents

Periphery processing device of hard brittle plate Download PDF

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Publication number
CN202701931U
CN202701931U CN2012203811584U CN201220381158U CN202701931U CN 202701931 U CN202701931 U CN 202701931U CN 2012203811584 U CN2012203811584 U CN 2012203811584U CN 201220381158 U CN201220381158 U CN 201220381158U CN 202701931 U CN202701931 U CN 202701931U
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China
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workpiece
image
bight
camera
workbench
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Chinese (zh)
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酒井友基
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Nakamura Tome Precision Industry Co Ltd
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Nakamura Tome Precision Industry Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/12Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/02Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
    • B24B49/04Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent involving measurement of the workpiece at the place of grinding during grinding operation
    • B24B49/045Specially adapted gauging instruments
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass

Abstract

The utility model provides a periphery processing device of a hard brittle plate. The periphery processing device is small, simple in structure and small in part quantity. The periphery processing device comprises a correcting unit, a work platform, a tool, a tool feeding device and a camera, wherein the correcting unit is used for correcting errors of the position and the angle of a plate-shaped workpiece which is carried, the work platform rotates around a vertical shaft, the tool is used for processing the edge of the workpiece, and the camera is used for obtaining angle images of the workpiece. When the workpiece is carried to the work platform, images of a first angle portion and a second angle portion of the workpiece can be obtained through the camera, the second angle portion has 180 degrees relative to the first angle portion, the errors of the angle portions relative to a right position in the two-dimension plane direction are detected, position displacement and angle displacement of the center of the workpiece relative to the center of the work platform can be calculated according to the errors.

Description

The periphery processing unit (plant) of hard brittle plate
Technical field
The utility model relates to for the glass substrate of the display floater of TV, notebook computer, mobile phone etc. or the periphery processing unit (plant) of other hard brittle plate, particularly relate to the described device with amending unit, the skew (error of position and angle) of the workpiece on the workbench of processing unit (plant) is moved in described amending unit correction.
Background technology
In order correctly to carry out the processing of the periphery of workpiece, as its precondition, be necessary workpiece correctly is positioned on the workbench and be fixed.But, in the device that the whole periphery of flat workpiece is processed, can not be provided for determining the position of periphery or the guide of direction etc., have to by planar surface is adsorbed or up and down clamping fix, therefore be difficult to make the center of workpiece correctly consistent with the center of workbench, perhaps be difficult to the direction setting of workpiece is predetermined direction.Therefore, center or the direction of being moved into the workpiece on the workbench can produce error.
When workpiece is smaller as the panel that mobile phone is used, before controlling the workpiece periphery and workpiece being moved into workbench or move into processing unit (plant), workpiece temporarily is placed on the centering unit at the center of coming positioning workpieces take periphery as benchmark, again it is moved into processing unit (plant), can make thus skew be in the scope that do not have problems in actual applications (side-play amount is in the scope of allowance that periphery adds man-hour).But when workpiece was larger, the workpiece when workpiece is moved into and the side-play amount between the workbench also became greatly, therefore were necessary to revise side-play amount and processed.
Figure 10 is the figure that the periphery processing unit (plant) of large-scale rectangle glass schematically is shown, while described periphery processing unit (plant) is to make the glass substrate w that is fixed on the workbench 12 move, utilize the grinding tool 3,3 of the both sides that are configured in workbench 12 to carry out the device of processing of dual-side e, e of the Y-direction of workpiece along Y-direction among the figure.In this periphery processing unit (plant), read the bight of workpiece or be located at mark m1, m2 near the bight by being located at 2 cameras 5,5 on the device, thereby obtain the skew with the directions X of Y-direction quadrature, workbench 12 is moved along Y-direction, utilize a camera 5 to read angle or the mark m3 of opposition side of the Y-direction of workpiece, according to both amount of movements of the difference of position of directions X and the Y-direction of workbench, obtain the angular deflection (gradient) of workpiece.Then, revise the angular deflection of detected workpiece by workbench 12 around the rotation of vertical axes, the position command of the directions X of the instrument 3 that gives by the Correction and Control device and the position of setting means and the skew of modified chi direction.And, when processing another to dual-side e, e, workbench is rotated 90 degree, utilize 2 cameras 5,5 angles of reading mark m1, m3(or this part), detect thus the skew of the Y-direction of workpiece.
Be processed in the periphery processing unit (plant) of the free shape that comprises circular arc or recess at the workpiece (workpiece before the processing generally is rectangle) that will be moved on the workbench, in the past, process with the method identical with the workpiece processing that utilizes machining center to realize, described machining center is provided with and makes instrument (being generally rotating grinding tool) at the feeding platform of 2 directions (X-Y direction) upper feeding of quadrature, makes instrument mobile at two dimensional surface according to processed peripheral shape.To this, the application's applicant has proposed following device: this device carries out related control to the movement of rotation angle θ and instrument 3, as shown in Figure 3 workpiece w is carried out thus the periphery processing (hereinafter referred to as " profiling mode ") of free shape, described rotation angle θ be the workbench that is fixed with workpiece w around the anglec of rotation of vertical axes P rotation, the movement of described instrument 3 is movements that instrument 3 approaches and leaves with respect to the workbench center P on the directions X in the drawings.The periphery processing unit (plant) of profiling mode has following characteristics: compare the area that arranges that can reduce significantly device with the periphery processing unit (plant) of in the past machining center mode.
Patent document 1: TOHKEMY 2011-116118 communique
As mentioned above, have such trend: processing work is more large-scale, side-play amount when workpiece is moved into processing unit (plant) is just larger, therefore, even in the periphery processing unit (plant) of profiling mode, in the processing of the medium-sized or above substrate that carries out the sizes such as A4 or B5, it also is indispensable detecting the skew of the center of moving into the workpiece (being generally rectangle) on the workbench and the skew (skew of angle) of direction.In this case, if utilize method as shown in figure 10 to detect the center of workpiece and the skew of direction, two cameras then must be arranged, and have to make the suitable distance of the length of side of workbench or camera movement and workpiece, workpiece is more large-scale, this displacement is just longer, and therefore the action area of device becomes large, has hindered the miniaturization of device.
In the method that the centering that utilized first centering unit to carry out workpiece before workpiece is moved into processing unit (plant) is moved into workpiece again, workpiece is more large-scale, the area of centering unit is just larger, therefore can not avoid device to become large, thereby and workpiece to move into spended time productivity ratio low.
The utility model content
The utility model is to finish for the problems referred to above that the maximization that solves along with processing work produces, its problem be to provide a kind of small-sized, apparatus structure simple and also few periphery processing unit (plant) of number of spare parts, this periphery processing unit (plant) can correctly carry out the processing of workpiece by detecting and revising the side-play amount of moving into the workpiece on the workbench.
First aspect of the present utility model provides a kind of periphery processing unit (plant) of hard brittle plate, and the periphery processing unit (plant) of described hard brittle plate has: rotary table, described rotary table flatly keep tabular workpiece and rotate around vertical axes; Instrument, described instrument is used for processing the periphery of described workpiece; Feed arrangement, described feed arrangement are controlled the position of described instrument based on the command value of coming self-controller; A camera, described camera are used for the image in the bight of shooting workpiece; Image is obtained unit and image analysis unit; And tool location amending unit, image obtain the unit with described camera settings in the position that the bight of predetermined workpiece is taken, when being moved into rotary table, workpiece utilize described camera to obtain the 1st image, then rotary table is rotated 180 degree, utilize described camera to obtain the 2nd image, the image analysis unit go out for the 1st image and the 2nd image detection the position in bight of captured workpiece and this bight originally should the position between deviation, the position that is calculated the workpiece on the workbench by these detected values is offset and angular deflection, and the tool location amending unit gives the command value of described feed arrangement based on the skew of detected position and angular deflection correction.
Second aspect of the present utility model provides a kind of periphery processing unit (plant) of hard brittle plate, and the periphery processing unit (plant) of described hard brittle plate has: rotary table, described rotary table flatly keep tabular workpiece and rotate around vertical axes; Device for revolving and driving, described device for revolving and driving are controlled rotation and the anglec of rotation of described rotary table based on the command value of coming self-controller; Instrument, described instrument is used for processing the periphery of described workpiece; Feed arrangement, described feed arrangement are controlled in movement and the position of the direction that approaches and leave with respect to described vertical axes described instrument based on the command value from described controller; A camera, described camera are used for the image in the bight of shooting workpiece; Image is obtained unit and image analysis unit; And tool location amending unit, image obtain the unit with described camera settings in the position that the bight of predetermined workpiece is taken, when being moved into rotary table, workpiece utilize described camera to obtain the 1st image, then rotary table is rotated 180 degree, utilize described camera to obtain the 2nd image, the image analysis unit go out for the 1st image and the 2nd image detection the position in bight of captured workpiece and this bight originally should the position between deviation, the position that is calculated the workpiece on the workbench by these detected values is offset and angular deflection, and the tool location amending unit gives the command value of described feed arrangement and device for revolving and driving based on the skew of detected position and angular deflection correction.
The third aspect of the present utility model is the periphery processing unit (plant) of the described hard brittle plate of second aspect, wherein, to the anglec of rotation of rotating around vertical axes of adsorbing the workbench of having fixed glass substrate by negative pressure and pivot with respect to described workbench approach with the rotating grinding tool that leaves one-dimensional square to movement carry out related control, the periphery that thus described glass substrate is carried out free shape is processed.
Fourth aspect of the present utility model is the periphery processing unit (plant) of the described hard brittle plate of the third aspect, wherein, described workbench is the workbench with certain planar dimension, this planar dimension so that the glass substrate of A4 to B5 size with its all periphery states of all having exceeded described work edge of table be held.
Periphery processing unit (plant) of the present utility model has: workbench 12, and it flatly keeps the tabular workpiece w such as display floater and around the vertical axes rotation; Instrument 3, it is used for the periphery of processing work w; Controller 4; Feed arrangement 23, it is based on the position of coming control tool 3 from the command value of described controller 4; And a camera 5, it is used for obtaining the bight A of workpiece w, the image of B, and controller 4 has: utilize the image of camera 5 to obtain unit and image analysis unit; The amending unit of tool location; And the amending unit at worktable rotary angle.
When workpiece w was moved into workbench 12, image was obtained the 1st bight A of this workpiece is obtained in the unit by camera 5 image (a), then, workbench 12 was rotated 180 degree, obtained the image (b) of the 2nd bight B by same camera 5.The image analysis unit for two images obtaining detect respectively the 1st bight A of workpiece w and the 2nd bight B with respect to should be in the position deviation δ xa on two dimensional surface, δ ya, δ xb, δ yb, controller 4 is calculated the center Q of workpiece w with respect to position shifted by delta x, Δ y and the angular deflection Δ θ of the center P of workbench according to these drift gages.
For the workpiece that is provided with mark Ma, Mb in the bight, by these marks Ma, Mb with respect to the position deviation δ x of the 1st bight A on the image that should detect in the deviation of position Mo camera and the 2nd bight B, the situation of δ y(rectangular coordinate system) or δ r, δ θ (situation of polar coordinate system).For the workpiece that such mark is not set, detect boundary line a1, a2, b1, the b2 of both sides at the angle of workpiece by methods such as hough conversion, thereby detect its intersection point Ca, Cb with respect to should be in the deviation of position Co.In addition, for the workpiece that is provided with large fillet in the bight, utilize methods such as carrying out the hough conversion for circular arc, obtain center O a, the Ob of circular arc at the angle of workpiece, thereby detect this center O a, Ob with respect to should be in the deviation of position Oo.
The amending unit at worktable rotary angle is revised the command value of the anglec of rotation of workbench 12 based on the angular deflection Δ θ that obtains.In addition, the tool location amending unit is revised the command value of the tool location of the machining shape that is used for the appointment of realization procedure based on position shifted by delta x, Δ y or Δ r, the Δ θ of workpiece w.
The utility model is specially adapted to process the processing unit (plant) of periphery of the medium-sized liquid crystal panel of the sizes such as A4 or B5.For medium-sized liquid crystal panel, when coming the skew of the workpiece w on the testing platform 12 by mode in the past as shown in figure 10, workpiece undersized, in addition, just add man-hour to the error of moving on the workbench 12 not revising each workpiece w, workpiece size is excessive, thereby increases because moving into the processing defective work that error produces.
According to the utility model, utilize a camera and the only action of need by worktable rotary 180 is spent, just can detect position skew and the angular deflection both sides of each workpiece of moving on the workbench, can revise respectively the command value of exporting from controller for each workpiece and process based on this detected value.And, need not travelling table or camera for the position probing of workpiece, therefore can not make device area is set and operating space increases.
In the utility model, can utilize a camera to detect the position of workpiece and the skew of angle, so apparatus structure is simple, and low-cost device can be provided in addition.Particularly in the periphery processing unit (plant) of the periphery of processing medium-sized or above display floater in the profiling mode, by adopting the utility model, has following effect: can access a kind of periphery processing unit (plant), the error of moving into that it is saved the space and can detect rapidly each workpiece, can process efficiently, it is little with the action area that area is set, and simple in structure and number of spare parts is also lacked.
Description of drawings
Fig. 1 is the diagrammatic side view of periphery processing unit (plant).
Fig. 2 is the top view that the capital equipment configuration of the device among Fig. 1 is shown.
Fig. 3 is the key diagram that the processing of profiling mode is shown.
The (a) and (b) of Fig. 4 are figure that the image of the camera in the configuration example of Fig. 2 schematically is shown.
The (a) and (b) of Fig. 5 are at the figure identical with (a) and (b) Fig. 4 the workpiece of bight attach mark.
The (a) and (b) of Fig. 6 are that the angle is workpiece identical with (a) and (b) Fig. 4 the figure of circular arc.
Fig. 7 is the top view that the second example of equipment configuration is shown.
Fig. 8 is the figure that the image of the camera in the configuration example of Fig. 7 schematically is shown.
Fig. 9 is the flow chart that the detection order of the location of workpiece is shown.
Figure 10 is the schematic isometric that the workpiece offset detection in the past in the periphery processing unit (plant) of large-scale workpiece is shown.
Label declaration
1 workpiece spindle
3 grinding tools
4 controllers
5 cameras
12 workbench
15 spindle motors
21 traverse feed platforms
23 feed arrangements (traverse feed motor)
The bight of A, B workpiece
The boundary line of a1, a2, b1, b2 workpiece
The intersection point of Ca, Cb boundary line
Ma, Mb telltale mark
The center of arc at Oa, Ob angle
The center of P workbench
The center of Q workpiece
The w workpiece
The specific embodiment
Below, describe with reference to the embodiment of accompanying drawing to periphery processing unit (plant) of the present utility model.Fig. 1 is the diagrammatic side view of periphery processing unit (plant), and Fig. 2 is the top view that the equipment configuration is shown.
Among the figure, workpiece spindle 1 is the hollow shaft of vertical direction, and is supported on frame in the mode that can rotate freely by axle by bearing 11.Be fixed with workbench 12 in the upper end of workpiece spindle 1, the upper surface of described workbench is that the workpiece of level keeps face 13.Keep face 13 that negative pressure is provided via the hollow hole of workpiece spindle 1 to workpiece, for loading the workpiece w that keeps face 13 in workpiece, because lower surface is by vacuum attraction thereby be fixed in workbench 12.Be connected with spindle motor (servomotor) 15 in the lower end of workpiece spindle 1.Spindle motor 15 is connected with controller 4 via servo amplifier 41, controls the anglec of rotation of workpiece spindle 1 according to the instruction of controller 4.
Above workpiece spindle 1, be provided with traverse feed platform 21.Traverse feed platform 21 in the mode that can move freely by the transverse guide guiding that is located at the horizontal direction on the not shown frame, and traverse feed platform 21 and traverse feed leading screw 24 threaded engagement by traverse feed motor (servomotor) 23 rotary actuations.Traverse feed motor 23 is connected with controller 4 via servo amplifier 42, and the shift position of traverse feed platform 21 is by controller 4 controls.
Be provided with length feed platform 25 at traverse feed platform 21.Length feed platform 25 is installed on vertical direction, i.e. the longitudinally guiding spare (not shown) of the direction parallel with workpiece spindle 1 in the mode that can move freely, this longitudinally guiding spare is fixed in traverse feed platform 21, and length feed platform 25 and length feed leading screw 27 threaded engagement by length feed motor 26 rotary actuations.
Grinding tool axle 31 axles are supported on length feed platform 25, and grinding tool 3 is installed in the lower end of described grinding tool axle.Grinding tool axle 31 is supported by bearing 32 axles of vertical direction in the mode parallel with workpiece spindle 1.The upper end of grinding tool axle 31 is connected with grinding tool drive motors 34 via cog belt 33.
The axle center of the axle center of workpiece spindle 1 and grinding tool axle 31 is positioned on the same vertical plane s parallel with the moving direction of traverse feed platform 21.Fig. 3 is the figure that the periphery processing of the workpiece w that carries out according to the profiling mode schematically is shown, and utilizes the amount of movement x of 4 pairs of traverse feed platforms 21 of controller and the rotation angle θ of workpiece spindle 1 to carry out related control, carries out thus the periphery processing of desirable flat shape.In addition, although not shown, in the device that workpiece is carried out the processing of through hole or internal diameter, be provided with at length feed platform 25 and can carry out with respect to grinding tool 3 grinding tool of the path of relative lifting, thereby carry out the processing of through hole or internal diameter.
At traverse feed platform 21 camera 5 be used to the image of the bight A, the B that obtain the workpiece on the workbench 12 is installed.In Fig. 1,2 example, camera 5 is installed on traverse feed platform 21 via travelling carriage 51, described travelling carriage 51 with respect to traverse feed platform 21 along Y-direction (the paper vertical direction of Fig. 1) mobile and location.Travelling carriage 51 and feed screw 53 threaded engagement that driven by mobile motor 52, mobile motor 52 is connected with controller 4 via servo amplifier 43.
Owing to know size or additional thereon the position of mark of the workpiece moved into, thus can by calculating obtain the angle of being moved into the workpiece w on the workbench 12 or mark should be in the position.By controller 4 control traverse feed motor 23 and mobile motors 52, the original point position of the image that can correctly camera 5 be obtained thus should be at detection position Mo, Co, Oo the bight of workpiece w A, B's.In addition, camera 5 has for example shooting area about 20mm * 25mm, and the side-play amount that is fixed on the workpiece on the workbench 12 is compared very little with the shooting area of described camera.Therefore, under shift state, be fixed in the bight A of the workpiece on the workbench, the shooting area that B enters described camera.
Fig. 4 is the figure that the example of the image that camera obtains is shown, and is intersection point according to the boundary line of the workpiece on the image figure when detecting the bight of workpiece.After workpiece w is fixed on the workbench 12, utilize the image that should obtain at the camera 5 that corner positions has been located initial point Co the 1st bight A of workpiece at this workpiece.The image of obtaining is for example shown in (a) of Fig. 4.
Then, under the state of the position of fixed camera 5, with workbench 12 Rotate 180 degree, obtain the image of the 2nd bight B of workpiece w.This image is for example shown in (b) of Fig. 4.By two line segment a1, a2 of image (a) and (b) quadrature separately, any two points on b1, the b2 are carried out method of hough conversion etc., can obtain line segment a1, a2, b1, b2 and intersection point Ca, the Cb coordinate on image thereof.And, intersection point Ca when correctly being placed on workpiece on the workbench according to intersection point Ca, Cb with respect to initial point Co(, the position of Cb) at coordinate (skew) δ of directions X and Y-direction xa, δ ya, δ xb, δ yb, can detect the center P of workbench 12 and the directions X of center Q on image and the side-play amount of Y-direction of workpiece w.
The ratio of the side-play amount on the image and the side-play amount of reality can detect to set by for example utilizing some Ca on the image of NC device when making traverse feed platform 21 move 1mm or the amount of movement of Cb.Therefore, according to detected value δ xa, δ ya, δ xb, the δ yb of these 4 side-play amounts, utilize the formula of being derived by geometric principle, can obtain position offset Δ x, Δ y and the angular deflection amount Δ θ of the workpiece w on the workbench 12.
Fig. 4 is according to bight A, the intersection point Ca of two straight lines of B, Cb detect each bight with respect to should be at the example of the deviation of position Co, but, for example when the attach mark M of the bight of workpiece, as long as detect the image M a of this mark, Mb and these marks originally should the deviation between the Mo of position get final product (Fig. 5), in addition, when the bight of workpiece has larger fillet, obtain its center Oa according to the formula that circular arc is carried out this circular arc that hough conversion etc. obtains, Ob, and detect this center O a, Ob is with respect to should be in the deviation (Fig. 6) of position Oo, by same order, can calculate position deviation and the angular deviation of each workpiece w that moves on the workbench 12.
In above example, make workbench 12 be positioned at the initial point angle and camera 5 is moved along directions X and Y-direction, thus, make camera movement to the position in the bight that the size according to workpiece changes, and obtain the image in this bight, but also camera can be fixed on the fixed position of traverse feed platform 21, obtain the image in the bight of the workpiece that varies in size.
Fig. 7 and Fig. 8 are the figure that this example is shown, and among the figure, camera 5 is arranged on the fixed position (in legend, being the position that comprises on the plane s in axle center of the axle center of grinding tool axle 31 and workpiece spindle 1) of traverse feed platform 21 regularly.In the situation of this structure, to be moved at workpiece w under the state of workbench 12, the bight of workpiece does not enter the shooting area of camera 5.Therefore, after workpiece being fixed on the workbench 12, mobile traverse feed platform 21 is so that the position that camera 5 arrives apart from the center P certain size of workbench, this be of a size of the workpiece of learning in advance Diagonal Dimension L 1/2, and workbench 12 is rotated to an angle, this angle be described diagonal with respect to the angle [alpha] of X-axis, thereby the 1st bight A enters the shooting area of camera 5.Then, obtain the image of the 1st bight A by camera 5, then workbench 12 is rotated 180 degree, thereby the 2nd bight B of workpiece enters the shooting area of camera 5, obtains thus the image of the 2nd bight B.
According to the image of obtaining at this, obtain in the same manner the center of arc at intersection point or angle with the situation of Fig. 4, thereby obtaining that these points depart from should be at the deviation of position (under the state of workpiece tilt alpha) δ xa, δ ya, δ xb, δ yb.According to these value and the angle [alpha] of workbench, can obtain the position deviation of workbench 12 and workpiece w and angular deviation Δ x, Δ y, Δ θ.
When workpiece w being moved into workbench 12, carry out offset Δ x, the Δ y to above-mentioned workpiece, the detection of Δ θ at every turn, utilize the correction value that obtains corresponding to each workpiece to carry out the processing of workpiece.Fig. 9 is the figure that its detection order is shown.
As shown in the figure, after workpiece w is moved on the workbench 12, movement (situation of the structure of Fig. 2) or the movement of feeding platform 21 and the rotation (situation of Fig. 7) of workbench 12 by feeding platform 21 and travelling carriage 51 move to the instrumentation point with camera 5, obtain the image of the 1st bight A.Then with workpiece spindle 1 Rotate 180 degree, obtain the image of the 2nd bight B.Then, in step 71, according to two images obtaining, calculate the correction value of command value of the device for revolving and driving 15 of the feed arrangement 23 of the instrument of giving and workpiece spindle.Then, in step 72, judge result of calculation, be whether the correction of command value is in advance in controller in the prescribed limit of typing, if in prescribed limit, then with correction value typing controller and end, move to the manufacturing procedure that ensuing operation is workpiece.
If the result of calculation of step 72 breaks away from from prescribed limit, then further in step 73 investigation whether meet the retry condition of predefined measurement in controller, such as the retry condition about the number of times of retry and the scope of result of calculation etc., if meet then the trace routine again carrying out obtaining since the image in the 1st bight.In this situation, can be when making primary result of calculation break away from prescribed limit etc. such as the periphery of workpiece is jagged, the retry by this measurement obtains correct correction value.Surpass the number of retries of setting in the retry condition of measuring, for example number of retries, perhaps the result of calculation during retry still breaks away from the situation of prescribed limit, makes the fail flag of the correcting process of processing based on image connect (ON) and detection of end program.In this situation, usually do not carry out the processing of ensuing operation, but the workpiece that will be moved into is discharged from device in unprocessed situation.

Claims (4)

1. the periphery processing unit (plant) of a hard brittle plate is characterized in that,
The periphery processing unit (plant) of described hard brittle plate has:
Rotary table, described rotary table flatly keep tabular workpiece and rotate around vertical axes;
Instrument, described instrument is used for processing the periphery of described workpiece;
Feed arrangement, described feed arrangement are controlled the position of described instrument based on the command value of coming self-controller;
A camera, described camera are used for the image in the bight of shooting workpiece;
Image is obtained unit and image analysis unit; And
The tool location amending unit,
Image obtain the unit with described camera settings in the position that the bight of predetermined workpiece is taken, when being moved into rotary table, workpiece utilize described camera to obtain the 1st image, then rotary table is rotated 180 degree, utilize described camera to obtain the 2nd image
The image analysis unit go out for the 1st image and the 2nd image detection the position in bight of captured workpiece and this bight originally should the position between deviation, calculate position skew and the angular deflection of the workpiece on the workbench by these detected values,
The tool location amending unit gives the command value of described feed arrangement based on the skew of detected position and angular deflection correction.
2. the periphery processing unit (plant) of a hard brittle plate is characterized in that,
The periphery processing unit (plant) of described hard brittle plate has:
Rotary table, described rotary table flatly keep tabular workpiece and rotate around vertical axes;
Device for revolving and driving, described device for revolving and driving are controlled rotation and the anglec of rotation of described rotary table based on the command value of coming self-controller;
Instrument, described instrument is used for processing the periphery of described workpiece;
Feed arrangement, described feed arrangement are controlled in movement and the position of the direction that approaches and leave with respect to described vertical axes described instrument based on the command value from described controller;
A camera, described camera are used for the image in the bight of shooting workpiece;
Image is obtained unit and image analysis unit; And
The tool location amending unit,
Image obtain the unit with described camera settings in the position that the bight of predetermined workpiece is taken, when being moved into rotary table, workpiece utilize described camera to obtain the 1st image, then rotary table is rotated 180 degree, utilize described camera to obtain the 2nd image
The image analysis unit go out for the 1st image and the 2nd image detection the position in bight of captured workpiece and this bight originally should the position between deviation, calculate position skew and the angular deflection of the workpiece on the workbench by these detected values,
The tool location amending unit gives the command value of described feed arrangement and device for revolving and driving based on the skew of detected position and angular deflection correction.
3. the periphery processing unit (plant) of hard brittle plate according to claim 2 is characterized in that,
To the anglec of rotation of rotating around vertical axes of adsorbing the workbench of having fixed glass substrate by negative pressure and pivot with respect to described workbench approach with the rotating grinding tool that leaves one-dimensional square to movement carry out related control, the periphery that thus described glass substrate is carried out free shape is processed.
4. the periphery processing unit (plant) of hard brittle plate according to claim 3 is characterized in that,
Described workbench is the workbench with certain planar dimension, this planar dimension so that the glass substrate of A4 to B5 size with its all periphery states of all having exceeded described work edge of table be held.
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KR20130001061U (en) 2013-02-14

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