CN202643886U - Guide cylinder of single crystal furnace - Google Patents
Guide cylinder of single crystal furnace Download PDFInfo
- Publication number
- CN202643886U CN202643886U CN 201220149724 CN201220149724U CN202643886U CN 202643886 U CN202643886 U CN 202643886U CN 201220149724 CN201220149724 CN 201220149724 CN 201220149724 U CN201220149724 U CN 201220149724U CN 202643886 U CN202643886 U CN 202643886U
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- Prior art keywords
- guide cylinder
- single crystal
- opening
- utility
- model
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Abstract
The utility model discloses a guide cylinder of a single crystal furnace. The guide cylinder comprises a cylinder body with an upper opening and a lower opening, wherein the diameter of the opening at the upper end part of the cylinder body is smaller than that of the opening at the lower end part of the cylinder body. The guide cylinder disclosed by the utility model has the advantages that the improved structure of the guide cylinder of the single crystal furnace can weaken the strength of gas flow when argon gas flow flows in the guide cylinder from top to bottom, further reduce the probability of producing turbulent flow by the gas flow, reduce the phenomena of rocking of a silicon single crystal rod, flotation of liquid level and the like, improve the quality of the silicon single crystal rod and ensure the stable production; and when the silicon rod penetrates through the guide cylinder, baking can be performed to a certain degree, and the guide cylinder has a promoting effect for eliminating vacancy, dislocation and other defects.
Description
Technical field
The utility model relates to a kind of equipment of manufacture order crystal silicon, particularly a kind of single-crystal furnace guide shell.
Background technology
In the standby production of silicon single crystal of CZ legal system, growth has a significant impact the guide shell of single crystal growing furnace to crystal.Use guide shell can reduce the mobile whirlpool born of the same parents of argon gas of upper of furnace body, and then reduce SiO in the deposition on single crystal growing furnace top, thereby guarantee that the pulled crystal silicon rod has very high quality.But the diameter of existing guide shell upper and lower end parts is different, successively decreases from the upper end to the bottom, and argon gas stream air strength when entering the single crystal growing furnace lower end can be strengthened like this, causes that silicon single crystal rod rocks, liquid fluctuating, can cause falling rod to wait industrial accident when serious.In addition, when existing guide shell carries out thermal radiation, be that heat is dispersed all around to the furnace wall, so just increased energy consumption.
The utility model content
The utility model purpose: for the problems referred to above, the purpose of this utility model provides a kind of single-crystal furnace guide shell, and air strength was strengthened the impact on crystal pulling production when the minimizing argon gas stream flowed therein from top to bottom.
Technical scheme: a kind of single-crystal furnace guide shell, comprise the cylindrical shell of upper and lower opening, the upper end opening diameter of described cylindrical shell is less than the underpart opening diameter.
Beneficial effect: compared with prior art, the utility model has the advantages that the structure of improving single-crystal furnace guide shell, so that argon gas stream when in guide shell, flowing from top to bottom air strength weaken, thereby reduced the probability of air-flow turbulization, reduce that silicon single crystal rod rocks and the phenomenon such as liquid fluctuating, improve the silicon single crystal rod quality, guarantee stable the carrying out that produces; Silicon rod can carry out baking to a certain degree when passing guide shell, to eliminating the defectives such as room, dislocation promoter action is arranged.
Description of drawings
Fig. 1 is that the utility model partly cuts open structural representation;
Fig. 2 is that the utility model is from the vertical view of upper end.
Embodiment
Below in conjunction with the drawings and specific embodiments, further illustrate the utility model, should understand these embodiment only is used for explanation the utility model and is not used in restriction scope of the present utility model, after having read the utility model, those skilled in the art all fall within the application's claims limited range to the modification of the various equivalent form of values of the present utility model.
Shown in accompanying drawing 1,2, a kind of single-crystal furnace guide shell, cylindrical shell (1) upper and lower opening, upper end 2 opening diameters are less than bottom 3 opening diameters.
Claims (1)
1. single-crystal furnace guide shell comprises the cylindrical shell (1) of upper and lower opening, and it is characterized in that: upper end (2) opening diameter of described cylindrical shell (1) is less than bottom (3) opening diameter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220149724 CN202643886U (en) | 2012-04-09 | 2012-04-09 | Guide cylinder of single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220149724 CN202643886U (en) | 2012-04-09 | 2012-04-09 | Guide cylinder of single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202643886U true CN202643886U (en) | 2013-01-02 |
Family
ID=47413020
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220149724 Expired - Fee Related CN202643886U (en) | 2012-04-09 | 2012-04-09 | Guide cylinder of single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202643886U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105112991A (en) * | 2015-10-13 | 2015-12-02 | 江苏华盛天龙光电设备股份有限公司 | Draft tube for single crystal furnace |
-
2012
- 2012-04-09 CN CN 201220149724 patent/CN202643886U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105112991A (en) * | 2015-10-13 | 2015-12-02 | 江苏华盛天龙光电设备股份有限公司 | Draft tube for single crystal furnace |
| CN105112991B (en) * | 2015-10-13 | 2017-12-15 | 江苏华盛天龙光电设备股份有限公司 | A kind of guide shell for single crystal growing furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130102 Termination date: 20150409 |
|
| EXPY | Termination of patent right or utility model |