CN105112991A - Draft tube for single crystal furnace - Google Patents
Draft tube for single crystal furnace Download PDFInfo
- Publication number
- CN105112991A CN105112991A CN201510658006.2A CN201510658006A CN105112991A CN 105112991 A CN105112991 A CN 105112991A CN 201510658006 A CN201510658006 A CN 201510658006A CN 105112991 A CN105112991 A CN 105112991A
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- China
- Prior art keywords
- cylindrical shell
- sleeve
- flow deflector
- flange
- tubaeform cylindrical
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Abstract
The invention relates to a draft tube for a single crystal furnace. The draft tube comprises a horn-shaped tube body, a feeding flange and a discharging flange, wherein the feeding flange and the discharging flange are connected to a narrow opening end and a wide opening end of the horn-shaped tube body respectively, a lengthening device is arranged between the narrow opening end of the horn-shaped tube body and the feeding flange, a baffle is arranged between the wide opening end of the horn-shaped tube body and the discharging flange, guide plates are arranged in the horn-shaped tube body, through holes are uniformly formed in the guide plates, filter plates are further arranged between the lower ends of the guide plates and the side wall of the horn-shaped tube body, an overhaul port is further formed in the side wall of the horn-shaped tube body, and the side wall, located on the outer side of the overhaul port, of the horn-shaped tube body is further movably connected with an observation window. By means of the design, the flowing area is increased through the guide plates, so that substances more uniformly and stably flow, and the utilization rate of the draft tube is increased.
Description
Technical field
The present invention relates to a kind of single crystal growing furnace parts, particularly a kind of guide shell for single crystal growing furnace.
Background technology
Guide shell is as a vitals of single crystal growing furnace, and play an important role in the production of silicon single crystal, the guide shell of single crystal growing furnace has a significant impact crystal growth.Use guide shell can reduce the argon gas flowing whirlpool born of the same parents of upper of furnace body, and then reduce the deposition of Si0 on single crystal growing furnace top, thus guarantee that pulled crystal silicon rod has very high quality.But the diameter of existing guide shell upper and lower end parts is different, successively decrease from upper end to bottom, like this because the circulating face of gas reduces, flow velocity during this cross section that gas passes through increases, the flow velocity of unexpected increase will cause the fluctuation of air-flow, argon gas stream air strength when entering single crystal growing furnace lower end can be strengthened, causing silicon single crystal rod to rock, liquid fluctuating, can cause falling time serious rod wait industrial accident.In addition, when existing guide shell carries out thermal radiation, be that heat is dispersed to furnace wall surrounding, which adds energy consumption.Therefore design a kind of single-crystal furnace guide shell that can increase flow area and just seem particularly important.
Summary of the invention
The technical issues that need to address of the present invention increase flow area by flow deflector, makes the more uniform and stable of material flows, improves the utilization ratio of guide shell; A kind of guide shell for single crystal growing furnace is provided.
For solving above-mentioned technical problem, structure of the present invention comprises tubaeform cylindrical shell, charging flange and discharging flange, on the slot end that described charging flange and discharging flange are connected to tubaeform cylindrical shell and wide mouth end, extending device is provided with between the slot end of described tubaeform cylindrical shell and charging flange, baffle plate is provided with between the wide mouth end of described tubaeform cylindrical shell and discharging flange, flow deflector is provided with in described tubaeform cylindrical shell, described flow deflector evenly to be arranged through hole, also filter plate is provided with between the lower end of described flow deflector and the sidewall of tubaeform cylindrical shell, the sidewall of described tubaeform cylindrical shell also offers access hole, the sidewall of the tubaeform cylindrical shell outside described access hole is also connected with viewing window.
Further: described extending device comprises the first sleeve and the second sleeve, the first described sleeve and the second sleeve are all cannulated sleeve, the outside surface of the first described sleeve is provided with external connection screw, the inner side of the second described sleeve be provided with external connection screw corresponding matching in connect screw thread, the first described sleeve is movably connected in the second sleeve by external connection screw with interior connecing coordinating of screw thread, the upper end of the first described sleeve is connected with charging flange, and the lower end of the second described sleeve is connected with the slot end of tubaeform cylindrical shell.
Further again: described flow deflector is the second flow deflector by two pieces of first tilting flow deflectors and one piece of horizontal positioned, the upper end of described two pieces tilting the first flow deflectors is connected to the both sides of the second flow deflector, the second described flow deflector is positioned at immediately below charging flange, the first described flow deflector and the second flow deflector evenly to be arranged through hole, be connected to one piece of filter plate between the lower end of two piece of first described flow deflector and the sidewall of tubaeform cylindrical shell, described filter plate is movably connected in tubaeform cylindrical shell.
Further again: the lower end of the first described flow deflector is provided with draw-in groove, one end of described filter plate is movably connected in draw-in groove through the sidewall of tubaeform cylindrical shell, the other end of described filter plate with push away handle and be connected.
After adopting said structure, the present invention increases flow area by flow deflector, makes the more uniform and stable of material flows, improves the utilization ratio of guide shell; And it also has the advantage that structure is simple, be easy to manufacture and practicality and high efficiency.
Accompanying drawing explanation
Below in conjunction with the drawings and specific embodiments, the present invention is further detailed explanation.
Fig. 1 is structural representation of the present invention.
Fig. 2 is the enlarged view of A in Fig. 1.
Embodiment
A kind of guide shell for single crystal growing furnace as depicted in figs. 1 and 2, comprise tubaeform cylindrical shell 4, charging flange 1 and discharging flange 5, on the slot end that described charging flange 1 and discharging flange 5 are connected to tubaeform cylindrical shell 4 and wide mouth end, extending device is provided with between the slot end of described tubaeform cylindrical shell 4 and charging flange 1, baffle plate 9 is provided with between the wide mouth end of described tubaeform cylindrical shell 4 and discharging flange 5, flow deflector is provided with in described tubaeform cylindrical shell 4, described flow deflector evenly to be arranged through hole 10, filter plate 12 is also provided with between the lower end of described flow deflector and the sidewall of tubaeform cylindrical shell 4, the sidewall of described tubaeform cylindrical shell 4 also offers access hole, the sidewall of the tubaeform cylindrical shell 4 outside described access hole is also connected with viewing window 6, sealing rubber ring is provided with between described viewing window 6 and tubaeform cylindrical shell 4.Before work, first extending device is utilized to regulate the length of guide shell according to actual working environment, then by charging flange 1 and discharging flange 5, guide shell is connected in single crystal growing furnace, argon gas and the silicon single crystal melted can flow in tubaeform cylindrical shell 4 from charging flange 1, argon gas and the silicon single crystal melted along flow deflector flowing, then can flow out from discharging flange 5 through the through hole 10 on flow deflector under the effect of flow deflector; The present invention increases flow area by flow deflector, makes the more uniform and stable of material flows, improves the utilization ratio of guide shell; And the design is provided with viewing window 6 on the sidewall of tubaeform cylindrical shell 4, observes argon gas and the mobility status of the silicon single crystal melted by viewing window 6, can overhaul it in time after breaking down, thus decrease unnecessary loss.
Flow deflector is as depicted in figs. 1 and 2 the second flow deflector 7 by two pieces of first tilting flow deflectors 8 and one piece of horizontal positioned, the upper end of described two pieces tilting the first flow deflectors 8 is connected to the both sides of the second flow deflector 7, the second described flow deflector 7 is positioned at immediately below charging flange 1, the first described flow deflector 8 and the second flow deflector 7 evenly to be arranged through hole 10, be connected to one piece of filter plate 12 between the lower end of two piece of first described flow deflector 8 and the sidewall of tubaeform cylindrical shell 4, described filter plate 12 is movably connected in tubaeform cylindrical shell 4.The lower end of the first described flow deflector 8 is provided with draw-in groove 11, and one end of described filter plate 12 is movably connected in draw-in groove 11 through the sidewall of tubaeform cylindrical shell 4, the other end of described filter plate 12 with push away handle 13 and be connected.The argon gas of a part can directly flow out from discharging flange 5 through the through hole 10 of the second flow deflector 7 with the silicon single crystal melted; Another part is along the first flow deflector 8 to dirty under the stop of the second flow deflector 7, and this part wherein can flow out from discharging flange 5 through the through hole 10 on the first flow deflector 8, remaining, can flow out from filter plate 12.The design has the advantage that structure is simple, be easy to manufacture and practicality and high efficiency; And the magazine in raw material then can stop dirty under the stop of filter plate 12, pull after production terminates and push away handle 13 filter plate 12 is pulled out from tubaeform cylindrical shell 4, then remove magazine and be convenient to produce next time.
Extending device as shown in Figure 1 comprises the first sleeve 2 and the second sleeve 3, the first described sleeve 2 and the second sleeve 3 are all cannulated sleeve, the outside surface of the first described sleeve 2 is provided with external connection screw, the inner side of the second described sleeve 3 be provided with external connection screw corresponding matching in connect screw thread, the first described sleeve 2 is movably connected in the second sleeve 3 by external connection screw with interior connecing coordinating of screw thread, the upper end of the first described sleeve 2 is connected with charging flange 1, and the lower end of the second described sleeve 3 is connected with the slot end of tubaeform cylindrical shell 4.According to real work situation, rotate the first sleeve 2 and regulate the first sleeve 2 to stretch into length in the second sleeve 3, thus complete the adjustment to guide shell connecting length, enable guide shell connect into the single crystal growing furnace of different model, add the Practical Performance of guide shell.
Claims (4)
1. the guide shell for single crystal growing furnace, it is characterized in that: comprise tubaeform cylindrical shell (4), charging flange (1) and discharging flange (5), on the slot end that described charging flange (1) and discharging flange (5) are connected to tubaeform cylindrical shell (4) and wide mouth end, extending device is provided with between the slot end of described tubaeform cylindrical shell (4) and charging flange (1), baffle plate (9) is provided with between the wide mouth end of described tubaeform cylindrical shell (4) and discharging flange (5), flow deflector is provided with in described tubaeform cylindrical shell (4), described flow deflector evenly to be arranged through hole (10), filter plate (12) is also provided with between the lower end of described flow deflector and the sidewall of tubaeform cylindrical shell (4), the sidewall of described tubaeform cylindrical shell (4) also offers access hole, the sidewall of the tubaeform cylindrical shell (4) outside described access hole is also connected with viewing window (6).
2. a kind of guide shell for single crystal growing furnace according to claim 1, it is characterized in that: described extending device comprises the first sleeve (2) and the second sleeve (3), described the first sleeve (2) and the second sleeve (3) are all cannulated sleeve, the outside surface of described the first sleeve (2) is provided with external connection screw, the inner side of described the second sleeve (3) be provided with external connection screw corresponding matching in connect screw thread, described the first sleeve (2) is movably connected in the second sleeve (3) by external connection screw with interior connecing coordinating of screw thread, the upper end of described the first sleeve (2) is connected with charging flange (1), the lower end of described the second sleeve (3) is connected with the slot end of tubaeform cylindrical shell (4).
3. a kind of guide shell for single crystal growing furnace according to claim 1, it is characterized in that: described flow deflector is the second flow deflector (7) by two pieces of tilting first flow deflectors (8) and one piece of horizontal positioned, the upper end of described two pieces tilting the first flow deflectors (8) is connected to the both sides of the second flow deflector (7), described the second flow deflector (7) is positioned at immediately below charging flange (1), described the first flow deflector (8) and the second flow deflector (7) evenly to be arranged through hole (10), one piece of filter plate (12) is connected between the lower end of two piece of first described flow deflector (8) and the sidewall of tubaeform cylindrical shell (4), described filter plate (12) is movably connected in tubaeform cylindrical shell (4).
4. a kind of guide shell for single crystal growing furnace according to claim 3, it is characterized in that: the lower end of described the first flow deflector (8) is provided with draw-in groove (11), one end of described filter plate (12) is movably connected in draw-in groove (11) through the sidewall of tubaeform cylindrical shell (4), the other end of described filter plate (12) with push away handle (13) and be connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510658006.2A CN105112991B (en) | 2015-10-13 | 2015-10-13 | A kind of guide shell for single crystal growing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510658006.2A CN105112991B (en) | 2015-10-13 | 2015-10-13 | A kind of guide shell for single crystal growing furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105112991A true CN105112991A (en) | 2015-12-02 |
| CN105112991B CN105112991B (en) | 2017-12-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510658006.2A Expired - Fee Related CN105112991B (en) | 2015-10-13 | 2015-10-13 | A kind of guide shell for single crystal growing furnace |
Country Status (1)
| Country | Link |
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| CN (1) | CN105112991B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106929910A (en) * | 2015-12-30 | 2017-07-07 | 西安隆基硅材料股份有限公司 | Guide shell and the single crystal growing furnace thermal field with the guide shell |
| CN107779944A (en) * | 2017-10-20 | 2018-03-09 | 南京泰祺瑞新材料科技有限公司 | A kind of material diversion cylinder |
| CN109355695A (en) * | 2018-10-15 | 2019-02-19 | 徐州振丰原喷灌设备有限公司 | A kind of guide shell for single crystal growing furnace |
Citations (9)
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|---|---|---|---|---|
| CN2068513U (en) * | 1990-01-15 | 1991-01-02 | 北京有色金属研究总院 | Crucible with filter for producing monocrystal |
| JPH11157993A (en) * | 1997-09-22 | 1999-06-15 | Mitsubishi Materials Silicon Corp | Silicon single crystal puller |
| CN201321506Y (en) * | 2008-12-30 | 2009-10-07 | 北京京仪世纪自动化设备有限公司 | Guide shell of solar silicon single crystal furnace thermal field |
| CN201381377Y (en) * | 2009-03-31 | 2010-01-13 | 常州天合光能有限公司 | Device utilizing silicon materials containing impurities for preparing high purity silicon single crystal rod |
| CN102242397A (en) * | 2011-07-15 | 2011-11-16 | 西安华晶电子技术股份有限公司 | Process for producing Czochralski silicon single crystal |
| CN202643886U (en) * | 2012-04-09 | 2013-01-02 | 镇江大成新能源有限公司 | Guide cylinder of single crystal furnace |
| CN202898592U (en) * | 2012-10-25 | 2013-04-24 | 宁晋晶兴电子材料有限公司 | Guide cylinder for single crystal furnaces |
| CN103451723A (en) * | 2013-09-11 | 2013-12-18 | 天津知顺科技有限公司 | Novel draft tube of single crystal furnace |
| CN104499049A (en) * | 2014-12-29 | 2015-04-08 | 江西赛维Ldk太阳能高科技有限公司 | Method for removing polysilicon hard inclusion in ingot casting process |
-
2015
- 2015-10-13 CN CN201510658006.2A patent/CN105112991B/en not_active Expired - Fee Related
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2068513U (en) * | 1990-01-15 | 1991-01-02 | 北京有色金属研究总院 | Crucible with filter for producing monocrystal |
| JPH11157993A (en) * | 1997-09-22 | 1999-06-15 | Mitsubishi Materials Silicon Corp | Silicon single crystal puller |
| CN201321506Y (en) * | 2008-12-30 | 2009-10-07 | 北京京仪世纪自动化设备有限公司 | Guide shell of solar silicon single crystal furnace thermal field |
| CN201381377Y (en) * | 2009-03-31 | 2010-01-13 | 常州天合光能有限公司 | Device utilizing silicon materials containing impurities for preparing high purity silicon single crystal rod |
| CN102242397A (en) * | 2011-07-15 | 2011-11-16 | 西安华晶电子技术股份有限公司 | Process for producing Czochralski silicon single crystal |
| CN202643886U (en) * | 2012-04-09 | 2013-01-02 | 镇江大成新能源有限公司 | Guide cylinder of single crystal furnace |
| CN202898592U (en) * | 2012-10-25 | 2013-04-24 | 宁晋晶兴电子材料有限公司 | Guide cylinder for single crystal furnaces |
| CN103451723A (en) * | 2013-09-11 | 2013-12-18 | 天津知顺科技有限公司 | Novel draft tube of single crystal furnace |
| CN104499049A (en) * | 2014-12-29 | 2015-04-08 | 江西赛维Ldk太阳能高科技有限公司 | Method for removing polysilicon hard inclusion in ingot casting process |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106929910A (en) * | 2015-12-30 | 2017-07-07 | 西安隆基硅材料股份有限公司 | Guide shell and the single crystal growing furnace thermal field with the guide shell |
| CN106929910B (en) * | 2015-12-30 | 2018-10-16 | 隆基绿能科技股份有限公司 | Guide shell and single crystal growing furnace thermal field with the guide shell |
| CN107779944A (en) * | 2017-10-20 | 2018-03-09 | 南京泰祺瑞新材料科技有限公司 | A kind of material diversion cylinder |
| CN109355695A (en) * | 2018-10-15 | 2019-02-19 | 徐州振丰原喷灌设备有限公司 | A kind of guide shell for single crystal growing furnace |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105112991B (en) | 2017-12-15 |
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