CN105780106A - Improved semi-cone seed crystal chuck - Google Patents
Improved semi-cone seed crystal chuck Download PDFInfo
- Publication number
- CN105780106A CN105780106A CN201410811527.2A CN201410811527A CN105780106A CN 105780106 A CN105780106 A CN 105780106A CN 201410811527 A CN201410811527 A CN 201410811527A CN 105780106 A CN105780106 A CN 105780106A
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- chuck
- seed crystal
- hole
- gripper body
- holes
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Abstract
The invention relates to an improved semi-cone seed crystal chuck, comprising a chuck body, wherein an air flow guide slant is arranged on the upper portion of the chuck body; a crystal pulling observation slant is arranged on the lower portion of the chuck body; chuck connecting belt mounting holes are arranged in the middle of the chuck body from top to bottom; seed crystal positioning holes are arranged below the chuck connecting belt mounting holes; the seed crystal positioning holes and the chuck connecting belt mounting holes form installation positioning channels; breathable channels are arranged at joints of the chuck connecting belt mounting holes and the seed crystal positioning holes; the chuck connecting belt mounting holes and the seed crystal positioning holes are communicated with each other to run through the chuck body; the seed crystal positioning holes consist of upper and lower through holes, the diameter of the upper through hole is 17.5 mm, and the diameter of the lower through holes is 12 mm; and the top surface and the bottom surface of the chuck body are planes. The improved semi-cone seed crystal chuck is high in stability, excellent in breathability and small in overall expansion coefficient.
Description
Technical field
The present invention relates to a kind of single crystal growing furnace parts, be specifically related to a kind of seed crystal clamping head for single crystal furnace parts.
Background technology
Currently used seed crystal clamping head for single crystal furnace is molybdenum chuck, and the type according to seed crystal is different, and the structure type of molybdenum chuck is also different.Half cone seedholder is mainly made up of seed crystal passage and hole, location, and seed crystal is arranged in cylindrical channel, is fixed by alignment pin, and owing to Gripper body adopts molybdenum materials matter, there is the phenomenon that easily drops in this connected mode, thus affecting work efficiency, the waste resources of production, do not meet actual operation requirements.
Summary of the invention
Goal of the invention: the invention aims to overcome deficiency of the prior art, it is provided that a kind of stability is high, good permeability, the half cone seedholder of the improvement that bulk expansion coefficient is less.
Technical scheme: in order to solve above-mentioned technical problem, the half cone seedholder of a kind of improvement of the present invention, it includes Gripper body, it is provided with air-flow guiding surface on described Gripper body top, it is provided with crystal pulling in described Gripper body bottom and observes inclined-plane, in the middle part of described Gripper body, it is provided with chuck from top to bottom connects band installing hole, connect band installing hole at described chuck and be connected with hole, seed crystal location, they compositions install placed channel, connect band installing hole at described chuck and be provided with gas-permeable channels with junction, hole, seed crystal location, described chuck connects band installing hole and hole, seed crystal location interconnects and runs through described Gripper body, hole, described seed crystal location is made up of upper through hole and lower through-hole, the diameter of described upper through hole is 17.5mm, the diameter of described lower through-hole is 12mm, the end face of described Gripper body and bottom surface are all planes.
Described Gripper body is graphite chuck body.
Described gas-permeable channels sets one altogether, and it is located on Gripper body sidewall.
Described gas-permeable channels is vertically arranged with installing placed channel.
Beneficial effect: the present invention is compared with prior art, it has the remarkable advantages that: present configuration is reasonable in design, adopt the hole, seed crystal location of the upper through hole of 17.5mm and the lower through-hole composition of 12mm, ensure that seed crystal accurate positioning is not dropped, it is greatly improved production efficiency, adopt gas-permeable channels, ensure good breathability, make half cone seed crystal be in good temperature environment, adopt graphite chuck body, its coefficient of expansion is less, adopt air-flow guiding surface, play accurate guide effect, adopt crystal pulling to observe inclined-plane, it is easier to observe crystal pulling region, meets actual operation requirements.
Accompanying drawing explanation
Fig. 1 is the planar structure schematic diagram of the present invention；
Fig. 2 is the perspective view of the present invention；
Fig. 3 is chuck structure schematic diagram of the prior art.
Detailed description of the invention
Below in conjunction with drawings and Examples, the present invention is further illustrated.
nullAs depicted in figs. 1 and 2，The half cone seedholder of a kind of improvement of the present invention，It includes Gripper body 1，It is provided with air-flow guiding surface 2 on described Gripper body 1 top，It is provided with crystal pulling in described Gripper body 1 bottom and observes inclined-plane 3，In the middle part of described Gripper body 1, it is provided with chuck from top to bottom connects band installing hole 4，Connect band installing hole 4 at described chuck and be connected with hole 5, seed crystal location，They compositions install placed channel 6，Connect band installing hole 4 at described chuck and be provided with gas-permeable channels 7 with junction, hole 5, seed crystal location，Described chuck connects band installing hole 4 and hole 5, seed crystal location interconnects and runs through described Gripper body 1，Hole 5, described seed crystal location is made up of upper through hole 8 and lower through-hole 9，The diameter of described upper through hole 8 is 17.5mm，The diameter of described lower through-hole 9 is 12mm，The end face of described Gripper body 1 and bottom surface are all planes；Described Gripper body 1 is graphite chuck body；Described gas-permeable channels 7 sets one altogether, and it is located on Gripper body 1 sidewall；Described gas-permeable channels 7 is vertically arranged with installing placed channel 6.Present configuration is reasonable in design, adopts the hole, seed crystal location of the upper through hole of 17.5mm and the lower through-hole composition of 12mm, it is ensured that seed crystal accurate positioning is not dropped, it is greatly improved production efficiency, adopts gas-permeable channels, it is ensured that good breathability, half cone seed crystal is made to be in good temperature environment, adopting graphite chuck body, its coefficient of expansion is less, adopts air-flow guiding surface, play accurate guide effect, adopt crystal pulling to observe inclined-plane, be easier to observe crystal pulling region, meet actual operation requirements.
The invention provides a kind of thinking and method; the method and the approach that implement this technical scheme are a lot; the above is only the preferred embodiment of the present invention; should be understood that; for those skilled in the art, under the premise without departing from the principles of the invention, it is also possible to make some improvements and modifications; these improvements and modifications also should be regarded as protection scope of the present invention, and all available prior art of each ingredient not clear and definite in the present embodiment is realized.
Claims (4)
- null1. the half cone seedholder improved，It is characterized in that: it includes Gripper body (1)，It is provided with air-flow guiding surface (2) on described Gripper body (1) top，It is provided with crystal pulling in described Gripper body (1) bottom and observes inclined-plane (3)，It is provided with chuck from top to bottom at described Gripper body (1) middle part and connects band installing hole (4)，Connect band installing hole (4) at described chuck and be connected with seed crystal hole, location (5)，They compositions install placed channel (6)，Connect band installing hole (4) at described chuck and be provided with gas-permeable channels (7) with hole (5) junction, seed crystal location，Described chuck connects band installing hole (4) and seed crystal hole, location (5) interconnects and runs through described Gripper body (1)，Described seed crystal hole, location (5) is made up of upper through hole (8) and lower through-hole (9)，The diameter of described upper through hole (8) is 17.5mm，The diameter of described lower through-hole (9) is 12mm，The end face of described Gripper body (1) and bottom surface are all planes.
- 2. the half cone seedholder of improvement according to claim 1, it is characterised in that: described Gripper body (1) is graphite chuck body.
- 3. the half cone seedholder of improvement according to claim 1, it is characterised in that: described gas-permeable channels (7) sets one altogether, and it is located on Gripper body (1) sidewall.
- 4. the half cone seedholder of improvement according to claim 1, it is characterised in that: described gas-permeable channels (7) is vertically arranged with installing placed channel (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410811527.2A CN105780106A (en) | 2014-12-23 | 2014-12-23 | Improved semi-cone seed crystal chuck |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410811527.2A CN105780106A (en) | 2014-12-23 | 2014-12-23 | Improved semi-cone seed crystal chuck |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105780106A true CN105780106A (en) | 2016-07-20 |
Family
ID=56376839
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410811527.2A Pending CN105780106A (en) | 2014-12-23 | 2014-12-23 | Improved semi-cone seed crystal chuck |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105780106A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108203842A (en) * | 2016-12-20 | 2018-06-26 | 深圳市晶格材料科技有限公司 | A kind of crystal growth inexpensive seedholder of easily assembling |
| CN108342770A (en) * | 2017-01-25 | 2018-07-31 | 上海新昇半导体科技有限公司 | Seedholder and single crystal pulling stove |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101724892A (en) * | 2008-10-22 | 2010-06-09 | Omt集团有限公司 | Seed crystal clamping device |
| CN201762481U (en) * | 2010-08-30 | 2011-03-16 | 宁夏日晶电子科技有限公司 | Single crystal furnace seed crystal chuck mechanism |
| CN202482486U (en) * | 2011-12-23 | 2012-10-10 | 东方电气集团峨嵋半导体材料有限公司 | Silicon seed crystal clamping device for growing mono-crystalline silicon with Czochralski method |
| CN203307479U (en) * | 2013-05-10 | 2013-11-27 | 河南协鑫光伏科技有限公司 | Seed crystal chuck of single crystal furnace |
| CN204356438U (en) * | 2014-12-23 | 2015-05-27 | 江苏拜尔特光电设备有限公司 | A kind of half cone seed chuck of improvement |
-
2014
- 2014-12-23 CN CN201410811527.2A patent/CN105780106A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101724892A (en) * | 2008-10-22 | 2010-06-09 | Omt集团有限公司 | Seed crystal clamping device |
| CN201762481U (en) * | 2010-08-30 | 2011-03-16 | 宁夏日晶电子科技有限公司 | Single crystal furnace seed crystal chuck mechanism |
| CN202482486U (en) * | 2011-12-23 | 2012-10-10 | 东方电气集团峨嵋半导体材料有限公司 | Silicon seed crystal clamping device for growing mono-crystalline silicon with Czochralski method |
| CN203307479U (en) * | 2013-05-10 | 2013-11-27 | 河南协鑫光伏科技有限公司 | Seed crystal chuck of single crystal furnace |
| CN204356438U (en) * | 2014-12-23 | 2015-05-27 | 江苏拜尔特光电设备有限公司 | A kind of half cone seed chuck of improvement |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108203842A (en) * | 2016-12-20 | 2018-06-26 | 深圳市晶格材料科技有限公司 | A kind of crystal growth inexpensive seedholder of easily assembling |
| CN108342770A (en) * | 2017-01-25 | 2018-07-31 | 上海新昇半导体科技有限公司 | Seedholder and single crystal pulling stove |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20160720 |
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| RJ01 | Rejection of invention patent application after publication |