CN202643839U

CN202643839U - Plasma chemical vapor deposition (CVD) system for heterojunction solar cells

Info

Publication number: CN202643839U
Application number: CN2012202967557U
Authority: CN
Inventors: 周文彬; 刘幼海; 刘吉人
Original assignee: Jifu New Energy Technology Shanghai Co Ltd
Current assignee: Jifu New Energy Technology Shanghai Co Ltd
Priority date: 2012-06-25
Filing date: 2012-06-25
Publication date: 2013-01-02
Anticipated expiration: 2022-06-25

Abstract

The utility model aims to provide a plasma chemical vapor deposition (CVD) system for heterojunction solar cells. The plasma CVD system is respectively arranged at two different areas, namely a first area and a second area, wherein the cleanliness requirement of the first area is higher than that of the second area. The plasma CVD system for heterojunction solar cells sequentially comprises a loading area, an automatic exchange area, a first load bearing chamber, a first unloading chamber, a second load bearing chamber, a second unloading chamber, a plurality of film plating reaction chambers and an unloading area. As the plasma CVD system is arranged into a half H as a whole, the floor area is effectively reduced, a pass-back mechanism with higher cleanliness requirements is not required for being arranged, and meanwhile, the pollution to a loading tray caused by the environment is effectively reduced.

Description

A kind of for heterojunction solar battery PCVD system

Affiliated technical field

The utility model relates to a kind of for heterojunction solar battery PCVD system, this kind equipment can be widely used in the processing procedure that any processing procedure that need to process and processing need certain hour under vacuum, for example solar silicon wafers plated film processing.

Background technology

Traditional vacuum coating film equipment, because processing procedure, all adopt the orthoscopic vacuum coating film equipment, when operation, all be performed until last removal chamber by the compartment of forefront, for volume production, this kind system arrangement speed is fast, and the equipment investment cost is low, but this kind system length is the longest comparatively speaking, if mix the then again more increasing of banner floor space of passback mechanism, so this kind of the producer arranged and uneconomical, and if when meeting a certain chamber fault, need whole line to stop production and carry out maintaining.For the mode of heterojunction solar battery intermittent type plated film, the orthoscopic system configuration can increase floor space, if then floor space is larger for the collocation return system, therefore is necessary to develop the input that reaches reduction cost reduction floor space from collection formula coating system.

Summary of the invention

The utility model main purpose system provides a kind of for heterojunction solar battery PCVD system, improves the existing problem that orthoscopic vacuum coating film equipment floor space is large, manufacturing cost is high.

In order to reach above-mentioned utility model purpose, the technical solution of the utility model provides a kind ofly crosses over respectively first area and the second area of two kinds of different clean areas for heterojunction solar battery PCVD system, and wherein the environment cleanliness of first area is higher than second area; This heterojunction solar battery PCVD system sequentially comprises loading zone, dial exchange, the first compartment, the first relief chamber, the second compartment, the second relief chamber and a plurality of plated film reaction chamber and unload zone, and wherein characteristics are:

Described PCVD system is the H type setting of half, and wherein loading bench, dial exchange and relieving platform are arranged on the first area that cleanliness factor is had relatively high expectations;

Described PCVD system the first compartment, a plurality of plated film reaction chamber and the first relief chamber are arranged on the lower second area of cleanliness factor requirement, consist of left wing's part of half H type;

Described PCVD system the second compartment, a plurality of plated film reaction chamber and the second relief chamber are arranged on the lower second area of cleanliness factor requirement, consist of the right flank part of half H type;

The maintenance area of described PCVD system is arranged in the left wing and right flank of half H type;

Be made to half H type in above-mentioned heterojunction solar battery PCVD entire system, loading bench, dial exchange and relieving platform are arranged on the first area that cleanliness factor is had relatively high expectations, need not to arrange separately the higher passback mechanism of cleanliness factor with the heterojunction solar battery passback of deposition, the inside transmission that sees through chamber own is back to both actions of commutative and unloading of first area with heterojunction solar battery, effectively reduce production costs, simultaneously can guarantee that heterojunction solar battery is not subjected to environmental pollution, integral body is held half H type the described heterojunction solar battery of effective reduction system floor space is set simultaneously, utilize simultaneously the region division maintenance area in half H type left wing and the right flank, floor space can further reduced, need not to arrange again in addition maintenance area, accomplish that more effective saving production floor space reaches from the requirement of collection formula.

Description of drawings

Fig. 1 is the utility model synoptic diagram.

The primary clustering nomenclature.

101... first area.

102... second area.

103... loading zone.

104... dial exchange.

105... unload zone.

106... the first compartment.

107... the first reaction chamber.

108... the second reaction chamber.

109... the second compartment.

110... the 3rd reaction chamber.

111... the 4th reaction chamber.

112... maintenance area.

113... separation valve door.

Embodiment

By other features of making convenient simple and direct understanding the present invention and advantage and the effect reached thereof can more manifest, hereby the utility model is cooperated accompanying drawing Xiang Xi Said bright as follows: please read Fig. 1 by Ginseng, the main purpose of the utility model is a kind of for heterojunction solar battery PCVD system, this PCVD system is half H type setting, comprises that the first part of the loading zone 103, dial exchange 104 and unload zone 105 formations that sequentially connect is the transversary that half H type arranges; It is left wing's part that half H type arranges that the first wherein said compartment 106, the first reaction chamber 107, the second reaction chamber 108 consist of second section; It is the right flank part that half H type arranges that the second wherein said compartment 109, the 3rd reaction chamber 110, the 4th reaction chamber 111 consist of third part.

Simultaneously, first area 101 and the second area 102 of two kinds of different clean areas crossed over respectively by described PCVD system, wherein the environment cleanliness of first area is higher than second area, therefore loading zone 103, dial exchange 104 and unload zone 105 are arranged in the demanding first area 101 of cleanliness factor, and the left wing of half H type setting and right wing part divide and are arranged on clean area and require in the lower second area 102, and its left-wing partly sees through separation valve door 113 and is connected with first area 101; Right flank partly sees through separation valve door 113 and is connected with first area 101; The described second area 102 interior maintenance area 112 that arrange, this maintenance area 112 is arranged in half H type left wing and the right flank.

In heterojunction solar battery PCVD system deposition process, carrier at first is sent to dial exchange 104 by loading zone 103, enter the first compartment 106 through separation valve door 113 again and carry out pre-treatment, comprise the action that carrier is vacuumized and heats; Enter the first reaction chamber 107 by separation valve door 113 again and carry out vacuum reaction; Enter the second reaction chamber 108 by separation valve door 113 again and carry out vacuum reaction, described vacuum reaction namely under vacuum one level pressure chamber by the dissociate reactant gases that entered by shower nozzle and produce plasma body and carry out thin film deposition of high frequency electric source, after finishing, carrier enters the first reaction chamber 107 through separation valve door 113 again and the first compartment 106 is back to dial exchange 104; Be sent to the second compartment 109 by dial exchange 104 through separation valve door 113 again and carry out pre-treatment, comprise the action that carrier is vacuumized and heats; Enter the 3rd reaction chamber 110 by separation valve door 113 again and carry out vacuum reaction; Enter the 4th reaction chamber 112 by separation valve door 113 again and carry out vacuum reaction, after deposition was finished, carrier enters the 3rd reaction chamber 110 through separation valve door 113 again and the second compartment 109 is back to dial exchange 104; Be sent to afterwards unload zone 105 and carry out the carrier unloading.

In above-mentioned heterojunction solar battery PCVD system, because this entire system setting is half H type, therefore loading zone 103 and unload zone 105 are arranged on the first area 101 that cleanliness factor is had relatively high expectations, see through built-in transmission system and sending carrier back to first area 101, need not to arrange separately again the passback structure and send carrier back to, effective reduction equipment setup cost, simultaneously, half H type setting also effectively reduces the pollution in floor space and the process.

In sum, the utility model is being broken through under the previous technical pattern, really reached the effect of institute's wish enhancement, and also non-be familiar with this skill person institute easily full of beard and, the progressive of its tool, practicality, the aobvious application important document that has met utility model, only the bright system of above-listed Xiang Xi Said is bright for the Ju Ti Said of one of the utility model possible embodiments, this embodiment is not the claim that limits the utility model, and all do not take off From the utility model skill spirit institute for it equivalence implement or change, all should be contained in the claim of this case.

Claims

1. one kind is used for first area and the second area that two kinds of different clean areas are crossed over respectively by heterojunction solar battery PCVD system, and wherein the environment cleanliness of first area is higher than second area; This heterojunction solar battery PCVD system sequentially comprises loading zone, dial exchange, the first compartment, the first relief chamber, the second compartment, the second relief chamber and a plurality of plated film reaction chamber and unload zone.

2. described a kind of for heterojunction solar battery PCVD system according to claim 1, wherein this loading zone, dial exchange and unload zone are arranged in the first area.

According to 1 of claim the narrated a kind of for heterojunction solar battery PCVD system, wherein this first compartment, the first relief chamber, the second compartment, the second relief chamber and a plurality of plated film reaction chamber are arranged in the second area.