CN202585497U - Equipment continuously producing CIGS thin-film solar cells - Google Patents
Equipment continuously producing CIGS thin-film solar cells Download PDFInfo
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- CN202585497U CN202585497U CN2012200747139U CN201220074713U CN202585497U CN 202585497 U CN202585497 U CN 202585497U CN 2012200747139 U CN2012200747139 U CN 2012200747139U CN 201220074713 U CN201220074713 U CN 201220074713U CN 202585497 U CN202585497 U CN 202585497U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
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Abstract
The utility model provides equipment continuously producing CIGS thin-film solar cells. The equipment comprises a primary cleaning device, a first group of film coating chambers, a primary grooving device, a secondary cleaning device, a second group of film coating chambers, a selenylation device, a secondary grooving device, a tertiary cleaning device, and a third group of film coating chambers, wherein the primary cleaning device, the first group of film coating chambers, the primary grooving device, the secondary cleaning device, the second group of film coating chambers, the selenylation device, the secondary grooving device, the tertiary cleaning device, and the third group of film coating chambers are arranged in order and are integrated to form the whole production equipment. A molybdenum metal layer is formed in the first group of film coating chambers, a copper layer, an indium layer and a gallium layer are successively formed in the second group of film coating chambers, the copper layer, the indium layer and the gallium layer are selenized in the selenylation device, a zinc oxide layer is formed in the third group of film coating chambers, and the selenylation device is positioned in the second group of film coating chambers and is integrated with the second group of coating chambers. Required CIGS thin-film solar cells can be directly formed through the equipment continuously producing CIGS thin-film solar cells. According to the equipment continuously producing CIGS thin-film solar cells of the utility model, the performance of CIGS thin-film solar cell production is improved, the production efficiency is also improved, and the production cost is reduced.
Description
Technical field
The utility model relates to technical field of solar batteries, particularly a kind of continuous production CIGS (CIGS) thin-film solar cells equipment.
Background technology
At present, academia and industrial circle generally believe that the development of solar cell has got into the third generation.First on behalf of monocrystaline silicon solar cell; Second on behalf of solar cells such as polysilicon, amorphous silicons; Third generation solar cell be exactly copper-indium-galliun-selenium film solar cell and film Si be solar cell, CIGS is CIGS (mixing Ga among a CIS) compound film solar cell.It is technological in the world at present most advanced, and cost is minimum, a kind of solar battery sheet that power generation performance is best.
Depositing of thin film generally need adopt magnetron sputtering method in the preparation process of CIGS solar cell; Magnetron sputtering method is under high vacuum condition, to charge into an amount of argon gas; Between negative electrode (Style Columu Talget or flat target) and anode (plated film locular wall), apply the direct voltage of hundreds of kilovolt; In coating chamber, produce magnet controlled abnormal glow discharge, make argon gas generation ionization.Argon ion is quickened by negative electrode and bombarding cathode target surface, the target material surface atom sputtering is come out to be deposited on form film on the substrate surface.Through the target of the changing unlike material sputtering time different, just can obtain the film of unlike material and different-thickness with control.Advantages such as the adhesion that magnetron sputtering method has coatings and base material is strong, coatings is fine and close, even.Method with magnetron sputtering method production CIGS thin film solar cell sheet mainly is that each production procedure is separately implemented in the market; Each flow process adopts independently production equipment; That is to say that substrate material is after one production process of completion on the production equipment; Re-use artificial method it is transported to next production procedure, the rest may be inferred for other flow processs.Shown in Figure 1 is the structural representation of the part producing equipment of CIGS thin-film solar cells in the prior art, as shown in Figure 1, in six coating chambers that connect successively of 1-6, between each coating chamber, needs a plurality of flange F and connects.
Switch room only designs two switch rooms in the prior art, and is as shown in Figure 2, is equipped with lobe pump and molecular pump respectively for No. 1 switch room and No. 2 switch rooms.When producing CIGS (TIGS) solar battery sheet, need open lobe pump and molecular pump simultaneously, the vacuum degree of No. 1 switch room is evacuated in 5 handkerchiefs, the vacuum degree of No. 2 switch rooms is evacuated in 0.1 handkerchief.When substrate material gets into No. 1 switch room, open No. 1 door, close door No. 2; When substrate material will get into No. 2 chamber, open door No. 2, close door No. 1; Again the substrate material semi-finished product are delivered to waiting room at last.Existing equipment is in producing CIGS thin-film solar cells process; Coating chamber and selenizing chamber are the equipment of independent operation separately; That is to say and after semi-finished product plate the CIG rete through secondary film coating, earlier these semi-finished product are temporarily deposited down to following section, after the semi-finished product of section reach some instantly; Adopt the mode of man-handling of materials that these semi-finished product are transported to the selenizing service area again, by manual work semi-finished product are sent into the selenizing chamber more at last and carry out selenizing.
In the CIGS thin-film solar cells production equipment and production process of prior art,, with the production that influences all links, cause the whole production flow process to be interrupted, thereby influence carrying out smoothly of producing in case the some links in the production equipment break down; And, use flange more in the equipment, the device fabrication cost is high, and operation is loaded down with trivial details, and the set-up time is long, and the artificial cost of participating in is big, and machinery compartment butt joint evenness is low, and leaking source is also many, and is bigger to the properties of product influence; Will be evacuated to switch room vacuum degree in 5 handkerchiefs in the existing equipment, will use several hours at least, will use the time at most, the production cycle is long, and production efficiency is low, and energy resource consumption is big, and production cost is higher.In the production process, independently cut off because of plated film and selenizing flow process, by man-handling of materials, intermediate link has taken a large amount of circulation times, has so not only prolonged the production cycle, makes to produce to have serious lag property, has also increased production cost simultaneously.
The utility model content
The utility model purpose is to provide a kind of and can produces continuously, especially under the situation that production equipment breaks down, can guarantee to produce production CIGS (CIGS) the manufacture of solar cells equipment of normal operation.The technical scheme that the utility model adopted specifically is achieved in that
The utility model provides a kind of continuous production CIGS thin-film solar cells equipment; It comprises and setting gradually and one is connected to form a cleaning device of production equipment, first group of coating chamber, graduating device, secondary cleaning device, second group of coating chamber, selenizing device, secondary graduating device, No. three cleaning devices, the 3rd group of coating chamber; In said first group of coating chamber, form the molybdenum layer; In second group of coating chamber, form copper indium gallium layer successively; In said selenizing device, the copper indium gallium layer that forms is carried out selenizing, in said the 3rd group of coating chamber, form zinc oxide film, said selenizing device is arranged in the one connection with it of said second group of coating chamber; Through behind the said continuous production CIGS thin-film solar cells equipment, can be formed directly in required CIGS thin-film solar cells.
Preferably, said first group of coating chamber, second group of coating chamber comprise 1-6 number six coating chambers that are connected successively respectively with the 3rd group of coating chamber.
Preferably, said first group of coating chamber, second group of coating chamber and the 3rd group of coating chamber all have two flanges, its lay respectively between No. 2 coating chambers and No. 3 coating chambers and No. 4 coating chambers and No. 5 coating chambers between.
Preferably, also comprise first switch room, second switch room, the 3rd switch room and the waiting room that connects successively.
Preferably, also comprise the sliding vane rotary pump that is connected with first switch room, the lobe pump that is connected with second switch room, the molecular pump that is connected with the 3rd switch room.
Adopt the continuous production CIGS thin-film solar cells equipment of the utility model, enhance productivity when improving the performance of producing the CIGS thin-film solar cells, reduce production costs.
Description of drawings
Shown in Figure 1 is the structural representation of the 1-6 coating chamber in the production equipment of CIGS thin-film solar cells in the prior art;
Fig. 2 is the switch room in the CIGS thin-film solar cells production equipment and the structural representation of waiting room in the prior art;
Fig. 3 is the structural representation of the continuous production CIGS thin-film solar cells equipment of the utility model specific embodiment;
Fig. 4 is second group of coating chamber and the structural representation of selenizing device one in the continuous production CIGS thin-film solar cells equipment of the utility model specific embodiment;
Fig. 5 is the structural representation of the 1-6 coating chamber in the continuous production CIGS thin-film solar cells equipment of the utility model specific embodiment;
Fig. 6 is switch room and the structural representation of waiting room in the continuous production CIGS thin-film solar cells equipment of the utility model specific embodiment;
Fig. 7 is the flow chart of the integrated CIGS thin-film solar cells production method of the utility model specific embodiment.
Embodiment
For above-mentioned purpose, the feature and advantage that make the utility model can be more obviously understandable, below in conjunction with accompanying drawing the embodiment of the utility model is done detailed explanation, it will be more clear making the above-mentioned of the utility model and other purpose, characteristic and advantage.Reference numeral identical in whole accompanying drawings is indicated identical part.Painstakingly do not draw accompanying drawing in proportion, focus on illustrating the purport of the utility model.
Thereby said integrated main finger is a kind of in the utility model the production procedure that the processing of various technological means realizes that each path combination in the production becomes continuous nothing to cut off is passed through in traditional independently each production procedure of cutting off, made the more smooth method of production process.Below in conjunction with Fig. 3 to Fig. 6 the specific embodiment of the continuous production CIGS thin-film solar cells equipment of the utility model is elaborated.
Fig. 3 is the structural representation of the continuous production CIGS thin-film solar cells equipment of the utility model specific embodiment; As shown in Figure 3; The continuous production CIGS thin-film solar cells equipment of the utility model, it comprises and setting gradually and one is connected to form the cleaning device 10 of production equipment, first group of coating chamber 20, graduating device 30, secondary cleaning device 40, second group of coating chamber 50, selenizing device 60, secondary graduating device 70, No. three cleaning devices 80, the 3rd group of coating chamber 90.
In the continuous production CIGS thin-film solar cells equipment of the utility model specific embodiment; In first group of coating chamber 20, form molybdenum (Mo) metal level; In second group of coating chamber 50, form copper indium gallium (CIG) layer successively; In selenizing device 60, the copper indium gallium layer that forms is carried out selenizing, in the 3rd group of coating chamber 90, form zinc oxide (ZnO) layer.
Fig. 4 is second group of coating chamber and the structural representation of selenizing device one in the continuous production CIGS thin-film solar cells equipment of the utility model specific embodiment; As shown in Figure 4; In the utility model specific embodiment; Preferably, selenizing device 60 is arranged in the one connection with it of second group of coating chamber 50.After substrate material is through second group of coating chamber, get into next flow process immediately, get into the flow process that the selenizing device carries out selenizing.
In the utility model specific embodiment, first group of coating chamber 20, second group of coating chamber 50 comprise 1-6 number six coating chambers that are connected successively respectively with the 3rd group of coating chamber 90.Fig. 5 is the structural representation of the 1-6 coating chamber in the continuous production CIGS thin-film solar cells equipment of the utility model specific embodiment; All only have two flanges in first group of coating chamber 20 of the utility model, second group of coating chamber 50 and the 3rd group of coating chamber 90, its lay respectively between No. 2 coating chambers and No. 3 coating chambers and No. 4 coating chambers and No. 5 coating chambers between.Reduce the flange usage quantity in the utility model coating chamber as far as possible, reduced the risk of gas leakage, increased the evenness between the equipment.During the continuous production CIGS thin-film solar cells equipment operate as normal of the utility model specific embodiment, the vacuum degree of 1-6 coating chamber is between 0.1～0.2Pa.
In the utility model specific embodiment, preferably, also comprise first switch room, second switch room, the 3rd switch room and the waiting room that connect successively.Fig. 6 is switch room and the structural representation of waiting room in the continuous production CIGS thin-film solar cells equipment of the utility model specific embodiment; Different with prior art, the utility model adopts three switch rooms, and first switch room conversion atmosphere is to 1000Pa vacuum degree; Second switch room conversion atmosphere to 1000～5Pa vacuum degree; The 3rd switch room conversion atmosphere to 5～0.5Pa vacuum degree, the utility model are employed in the quantity that increases switch room in the production procedure, and two switch rooms of available technology adopting are increased to three; Three coating chambers begin to bleed simultaneously when plated film; In first switch room is evacuated to kPa, second switch room is evacuated in 5 handkerchiefs, the 3rd switch room is evacuated in 0.1 handkerchief.When the substrate material access arrangement, the door of second switch room and the 3rd switch room is closed simultaneously, make second switch room and the 3rd switch room keep vacuum degree, substrate material to get into the door of closing first switch room behind first switch room; When substrate material gets into second switch room, the door of first switch room and the 3rd switch room is closed, after substrate material gets into second switch room, close the door of second switch room again; Follow-up substrate gets into the 3rd switch room and waiting room, and the rest may be inferred, repeats no more.The utility model is employed in the maximum flow process of the easy fault of most critical in the production procedure and the back maintenance difficulty that breaks down; Increase the active/standby devices of repetition; In process of production, the normal simultaneously operation of these two equipment is in case one of them equipment breaks down; Change substrate material over to another equipment immediately, can normally move to guarantee to produce.As shown in Figure 6, preferably, also comprise the sliding vane rotary pump that is connected with first switch room in the utility model specific embodiment, the lobe pump that is connected with second switch room, the molecular pump that is connected with the 3rd switch room is in order to respectively to its extracting vacuum.
Fig. 7 is the flow chart of the integrated CIGS thin-film solar cells production method of the utility model specific embodiment; As shown in Figure 7; The integrated CIGS thin-film solar cells production method of the utility model comprises the following steps of carrying out successively: step S1, once cleans; Step S2, a plated film; Step S3, a groove; Step S4, secondary cleaning; Step S5, secondary film coating; Step S6, selenizing; Step S7, the secondary groove; Step S8, three cleanings; Step S9, three plated films.Wherein, each step is connected to form the whole integrated production of production equipment by one, and each step forms the CIGS thin-film solar cells incessantly continuously.
In the integrated CIGS thin-film solar cells production method of the utility model specific embodiment, one time plated film step S2 forms the metal molybdenum layer, and secondary film coating step S5 forms copper indium gallium layer, and three times plated film step S9 forms zinc oxide film.Preferably, secondary film coating step S5 and selenizing step S6 are accomplished by the production line of the automation of linking into an integrated entity continuously.In the utility model, earlier substrate material is once cleaned in cleaning device, then substrate material is transported to and carries out one time plated film in first group of coating chamber, form metal molybdenum (Mo) layer; Then get into behind the plated film in a graduating device and carry out groove one time, adopt laser scoring usually; Again semi-finished product are then got into behind the groove and carry out secondary cleaning in the secondary cleaning device; Then again semi-finished product are transported in second group of coating chamber after the secondary cleaning and carry out secondary film coating, promptly form the CIG layer; Then again semi-finished product are transported to after the secondary film coating and carry out selenizing in the selenizing device; Again semi-finished product are transported to after the selenizing and carry out the secondary groove in the secondary graduating device; Again semi-finished product are transported in No. three cleaning devices behind the secondary groove and carry out three cleanings; Again semi-finished product are transported in the 3rd group of coating chamber after cleaning for three times and carry out plated film three times, promptly form the ZnO layer.Can work continuously between each flow process of the utility model, employing be real integrated production equipment, the effect that finally will reach is exactly: an end of slave unit with supreme platform on the substrate material substrate after, under sheet platform under the other end of equipment is exactly finished product.The utility model whole process is integrated, need not to pause midway, from the last process to the next procedure, carries out continuous productive process, and device such as three groups of coating chambers and other cleanings, line forms a continuous productive process platform.
In the integrated CIGS thin-film solar cells production method of the utility model specific embodiment,,, can not cause the whole production flow process to be interrupted and influence is produced carries out smoothly with the production that can not influence other links in case a link breaks down in the production equipment; Use the flange negligible amounts in the utility model, reduced the gas leakage risk of equipment, guaranteed that equipment can the serialization operation; The equipment set-up time significantly reduces simultaneously, and materials are few, and operation is simple; Practiced thrift cost of labor, equipment room butt joint evenness improves, and properties of product are more reliable; The utility model flow process weak point consuming time; Production efficiency improves; Reduced production cost, the utility model can let substrate material get into switch room and only need stop the extremely short time and just can get into waiting room, and the utility model makes up second group of coating chamber and fuses with the simplification of selenizing device simultaneously; Reduce the time of middle artificial conversion, also reduced cost of labor simultaneously; The utility model equipment occupation space is little, is convenient to management, because second group of coating chamber and selenizing device are interconnective integral body; Vessel flange quantity reduces simultaneously, and then has reduced the usage quantity of relevant device, has saved the space; Saved in addition and put raw material and half-finished space, this all will save the space in workshop greatly, also beautify the workshop integrated environment; Make things convenient for production management, reduced the production management difficulty; The utility model has reduced production cost, has practiced thrift the cost of labor of the conversion between each flow process when producing product.
Adopt the continuous production CIGS thin-film solar cells equipment and the production method of the utility model, enhance productivity when improving the performance of producing the CIGS thin-film solar cells, reduce production costs.The utility model is not limited to produce the production equipment of CIGS thin-film solar cells, is suitable for too for producing other thin-film materials.
In above description, a lot of details have been set forth so that make much of the utility model.But above description only is the preferred embodiment of the utility model, and the utility model can be implemented much to be different from alternate manner described here, so the utility model does not receive the restriction of top disclosed practical implementation.Any skilled personnel are not breaking away under the utility model technical scheme scope situation simultaneously; All the method for above-mentioned announcement capable of using and technology contents are made many possible changes and modification to the utility model technical scheme, or are revised as the equivalent embodiment of equivalent variations.Every content that does not break away from the utility model technical scheme, all still belongs in the scope of the utility model technical scheme protection any simple modification, equivalent variations and modification that above embodiment did according to the technical spirit of the utility model.
Claims (5)
1. produce CIGS thin-film solar cells equipment continuously for one kind; It is characterized in that; Comprise and setting gradually and one is connected to form a cleaning device of production equipment, first group of coating chamber, graduating device, secondary cleaning device, second group of coating chamber, selenizing device, secondary graduating device, No. three cleaning devices, the 3rd group of coating chamber; In said first group of coating chamber, form the molybdenum layer, in second group of coating chamber, form copper indium gallium layer successively, in said selenizing device, the copper indium gallium layer that forms is carried out selenizing; In said the 3rd group of coating chamber, form zinc oxide film; Said selenizing device is arranged in the one connection with it of said second group of coating chamber, through behind the said continuous production CIGS thin-film solar cells equipment, can be formed directly in required CIGS thin-film solar cells.
2. continuous production CIGS thin-film solar cells equipment as claimed in claim 1 is characterized in that, said first group of coating chamber, second group of coating chamber comprise 1-6 number six coating chambers that are connected successively respectively with the 3rd group of coating chamber.
3. continuous production CIGS thin-film solar cells equipment as claimed in claim 2; It is characterized in that; Said first group of coating chamber, second group of coating chamber and the 3rd group of coating chamber all have two flanges, its lay respectively between No. 2 coating chambers and No. 3 coating chambers and No. 4 coating chambers and No. 5 coating chambers between.
4. continuous production CIGS thin-film solar cells equipment as claimed in claim 1 is characterized in that, also comprises first switch room, second switch room, the 3rd switch room and the waiting room that connect successively.
5. continuous production CIGS thin-film solar cells equipment as claimed in claim 4 is characterized in that, also comprises the sliding vane rotary pump that is connected with first switch room, the lobe pump that is connected with second switch room, the molecular pump that is connected with the 3rd switch room.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200747139U CN202585497U (en) | 2012-03-02 | 2012-03-02 | Equipment continuously producing CIGS thin-film solar cells |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200747139U CN202585497U (en) | 2012-03-02 | 2012-03-02 | Equipment continuously producing CIGS thin-film solar cells |
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| Publication Number | Publication Date |
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| CN202585497U true CN202585497U (en) | 2012-12-05 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2012200747139U Expired - Fee Related CN202585497U (en) | 2012-03-02 | 2012-03-02 | Equipment continuously producing CIGS thin-film solar cells |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104233202A (en) * | 2013-06-06 | 2014-12-24 | 北大方正集团有限公司 | Production method of metal films and device for manufacturing metal films |
-
2012
- 2012-03-02 CN CN2012200747139U patent/CN202585497U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104233202A (en) * | 2013-06-06 | 2014-12-24 | 北大方正集团有限公司 | Production method of metal films and device for manufacturing metal films |
| CN104233202B (en) * | 2013-06-06 | 2016-07-13 | 北大方正集团有限公司 | The manufacture method of a kind of metallic film and device |
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| C14 | Grant of patent or utility model | ||
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121205 Termination date: 20200302 |
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| CF01 | Termination of patent right due to non-payment of annual fee |